CN101982744B - Composite tactile sensor and sensor array - Google Patents
Composite tactile sensor and sensor array Download PDFInfo
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Abstract
The invention discloses a composite tactile sensor and a sensor array capable of simultaneously detecting pressure and temperature. A bridge-type elastic beam (1), a first fiber Bragg grating (2), a second fiber Bragg grating (3), a first single mode fiber (4) and a second single mode fiber (5) of a metal structure of the composite tactile sensor form a composite tactile sensing unit (17); the first fiber Bragg grating (2) and the second fiber Bragg grating (3) are arranged across in the middle of the bridge-type elastic beam (1); the first fiber Bragg grating (2) is connected with a first fiber coupler (6) through the first single mode fiber (4); the second fiber Bragg grating (3) is connected with a third fiber coupler (8) through the second single mode fiber (5); and the first fiber coupler (6) and the third fiber coupler (8) are coupled to a second fiber coupler (7) through a fiber. The composite tactile sensor has the advantages of high resolution, good repeatability and short response time, and can work in moist, flammable and explosive environments and severe environments of strong electromagnetic interference and the like.
Description
Technical field
The present invention relates to a kind of compound touch sensor and sensor array that is applicable to virtual reality technology and Robotics field, be used for distributed measurement and act on sensor or the pressure on sensor array surface and the temperature of sensor surface.The present invention is specially adapted to detect the tactile sensing information under the rugged surroundings such as inflammable, explosive and strong electromagnetic.
Background technology
In recent years, the develop rapidly of virtual reality technology and Robotics, as a kind of important man-machine interface mode, the tactile sensing technology becomes the focus of domestic and international research.In virtual reality technology, sense of touch is that the object in user and designer and the virtual environment is mutual, one of the most important means of perception dummy object character of surface; The robot field, the information such as holding force, slippage and surface temperature the when shape through touch sensor perception contactant, surfaceness, shake, extracting object.Sense of touch mainly comprises power sense of touch and temperature sense of touch, and the touch sensor of superior performance is the key of tactilely-perceptible technology.
The researchist makes firmly sensitive membrane, monocrystalline silicon, taste with discrimination materials such as silicon, conductive rubber and optical fiber more has designed multiple touch sensor [Guo Tiantai such as pressure resistance type, piezoelectric type, condenser type, photo-electric, mechanical type, ultrasonic type, thermoelectric (al) type and magnetoelasticity formula; Qin Haixia, numb Cheng Jian, Lin Yani. be applied to the tactile sensing technology of virtual reality and robot; Lathe and hydraulic pressure; 2008,36 (11), 30-32.].
On March 25th, 2002; People such as U.S. SC Shu Erci have applied for flexible capacitance type touch sensor (number of patent application: 02808165.X) in China; The method that a kind of flexibility, capacitance type touch sensor is provided and has made numerous this touch sensors; Acting force that can the detecting sensor surface of contact, major advantage are to possess characteristics such as low, the light and pliability of cost.On Dec 10th, 2003; People such as Denmark P Gravesen have applied for tactile sensor element and the sensor array (number of applying for a patent: 200380105850.8) in China; Constitute capacitor by elastomeric two elastic surfaces and electrode; Variation through detecting electric capacity comes detecting sensor or the suffered acting force of array surface, possess highly sensitive, volume is little and low cost and other advantages.Southeast China University has designed pressure resistance type 16 * 16 tactile sensing arrays; University Of Chongqing carried out the tactile sensing array of backbone conductive rubber research [Wang Dongsheng. the tactile sensing array of backbone conductive rubber and the research of calibration experiment thereof; Master thesis; Photoelectric project institute of University Of Chongqing, 2009.].Above touch sensor all is the sensor of condenser type or pressure resistance type, under the rugged surroundings such as inflammable, explosive and strong electromagnetic of can not be stable be operated in, and can only detect the acting force of surface of contact, can not detect the temperature of contactant.
On Dec 13rd, 2006; The impartial people in Korea S Korea Spro east has applied for relating to a kind of touch sensor (number of patent application: 200610166959.8) of back lighting device in China; Form by light source, LGP and electrode etc.; Through detecting position, size and the shape that electrode pattern that touch sensor forms on the upper and lower surface of LGP detects contactant, can not detect the acting force and the temperature of contactant.March 3, 2005, the Japanese Pavilion sunrise and others in China applied for optical tactile sensor (patent number: 200580000909.6), the ideal is involved in a relatively large area so the force used in the method of applying tactile sensors, sensors with Ministry tactile and photographic equipment, objects to contact the surface of the elastomer tactile photographic equipment through the action of the colored flags and made signs for photographic images, the use of images obtained from the flag on the flag to seek additional information on the operation of the touch surface the force, the detection means complicated.On May 30th, 2008; Japan's hole originally opens first-class people and has applied for the optical sensor (number of applying for a patent: 200810098389.2) in China; Sensor has light source, detecting means and reflecting surface; Relative distance between reflecting surface and the fiber end face changes with the variation of physical quantitys such as pressure or temperature, and the variation through measured light intensity comes physical quantitys such as detected pressures or temperature.More than three kinds of optical profile type sensing touch sensors; All can be operated in the environment of inflammable, explosive and strong electromagnetic; But all light source there is very high requirement; Particularly require stabilized intensity, the fluctuation of the intensity of light source has very big influence to the detection of physical signallings such as power or temperature, and can not set up large-scale distributed Measurement Network flexibly.
So; Be necessary to design NEW TYPE OF COMPOSITE touch sensor and the sensor array of ability long-term work under rugged surroundings; Fields such as that requirement can be operated in is inflammable, explosive, strong electromagnetic, and be prone to make up the distributed measurement network, can realize the temperature and the synchronous sensing of pressure of contactant.
Fiber Bragg Grating FBG have volume little, in light weight, anticorrosive, can integrated, anti-electromagnetic interference (EMI), and, can be operated in inflammable, explosive field through the optical wavelength signal sensing.A plurality of gratings can all be written on the optical fiber, and Fiber Bragg Grating FBG can be realized the heat transfer agent Wavelength-encoding, and multiplexing technique capable of using makes the FBG sensor possess the ability that distributed sensing is measured to the grating addressing.FBG is responsive simultaneously to temperature and strain, and when the temperature variation (no strain) of FBG, Prague centre wavelength and the variation of temperature of FBG reflection have good linear relationship; When having only effects of strain (temperature constant), Prague centre wavelength and the strain of FBG reflection have good linear relationship.So; FBG is the preferred sensitive element of design NEW TYPE OF COMPOSITE touch sensor and sensor array; This sensor and sensor array can long-term work under rugged surroundings such as inflammable, explosive, humidity and strong electromagnetic; And be prone to make up the distributed sensing network, can realize the temperature and the synchronous sensing of pressure of contactant.
Summary of the invention
Technical matters: the deficiency that The present invention be directed to prior art; Based on Fiber Bragg Grating FBG (FBG; Fiber Bragg Grating), design can long-term stable operation under rugged surroundings, be prone to make up the NEW TYPE OF COMPOSITE touch sensor and the sensor array of distributed sensing network.
Technical scheme: the compound touch sensor of a kind of detected pressures simultaneously of the present invention and temperature comprises bridge-type elastic beam, first Fiber Bragg Grating FBG, second Fiber Bragg Grating FBG, first single-mode fiber, second single-mode fiber, first fiber coupler, second fiber coupler and the 3rd fiber coupler of metal construction; Wherein, The bridge-type elastic beam of metal construction, first Fiber Bragg Grating FBG, second Fiber Bragg Grating FBG, first single-mode fiber and second single-mode fiber are formed compound tactile sensing unit; First Fiber Bragg Grating FBG, second Fiber Bragg Grating FBG centre at the bridge-type elastic beam arranged in a crossed manner; First Fiber Bragg Grating FBG connects first fiber coupler through first single-mode fiber; Second Fiber Bragg Grating FBG connects the 3rd fiber coupler through second single-mode fiber, and first fiber coupler, the 3rd fiber coupler are coupled to second fiber coupler through optical fiber.
The material of the bridge-type elastic beam of described metal construction is the Thin Elastic steel disc; The beam face thickness is less than 0.5mm; The horizontal smooth stria that a dark 0.15mm is arranged at the lower surface lateral symmetry axle place of beam has the vertical smooth stria of a dark 0.3mm at the vertical axis of symmetry of the lower surface of beam place.
Described first Fiber Bragg Grating FBG and second Fiber Bragg Grating FBG are complete same gratings; Under the same external condition; The effective refractive index of the centre wavelength of two Bragg grating spectrum of reflected light, the cycle of grating and fibre core is identical, and the bragg wavelength of two Fiber Bragg Grating FBGs is distributed in 1310nm or 1550nm operation window.
Described first Fiber Bragg Grating FBG clings closely connected in horizontal smooth stria with epoxy resin, paste no bubble in the epoxy resin of back, and first Fiber Bragg Grating FBG is in little extended state; Second Fiber Bragg Grating FBG clings closely connected in vertical smooth stria with epoxy resin, paste no bubble in the epoxy resin of back, and second Fiber Bragg Grating FBG is in little extended state.
In described first fiber coupler and second fiber coupler; First fiber coupler, first port and second fiber coupler, first port weld together; In described the 3rd fiber coupler and second fiber coupler, the 3rd fiber coupler first port and second fiber coupler, second port weld together.
In described first fiber coupler and second fiber coupler, first fiber coupler, second port and single-mode fiber weld together, and the 3rd fiber coupler the 4th port and single-mode fiber are connected together.
The compound tactile sensor array of ability while detected pressures and temperature is formed in compound tactile sensing unit, and sensing unit is formed two kinds of compound tactile sensor arrays according to different topological structures, and the number of sensing unit is expanded according to different demands; All Fiber Bragg Grating FBGs that are pasted in the horizontal stria of elastic beam lower surface are distributed on the single-mode fiber; All Fiber Bragg Grating FBGs that are pasted in the vertical stria of elastic beam lower surface are distributed on another root single-mode fiber; Be distributed in same optical fiber Bragg grating sensing centre wavelength on the optical fiber and have nothing in common with each other, the narrow-band spectrum non-overlapping copies of Fiber Bragg Grating FBG reflection in the course of work.
Prague centre wavelength that sticks on the Fiber Bragg Grating FBG that sensor array lists is distributed in the operation window of 1310nm or 1550nm simultaneously; And trend according to optical fiber; Prague centre wavelength of the grating on same optical fiber is increasing or decreasing successively, and the narrow-band spectrum of each optical grating reflection can not be overlapping in the course of the work.
Beneficial effect: the present invention and prior art contrast have following advantage:
1. the present invention can be to temperature sense of touch and the synchronous sensing of power sense of touch; Be compound touch sensor of a kind of power/temperature or sensor array; And based on two parameter matrix operation methods; Can eliminate the influence of FBG, realize the synchro measure of sensor sheet surface contact pressure and temperature temperature and strain cross sensitivity.
The present invention can long-term work in the rugged surroundings of moist, inflammable, explosive and strong electromagnetic, and have the measuring accuracy height, the response time lacks and advantages such as good stability.
3. the present invention is prone to make up distributed compound tactile sensing network.
Description of drawings
The compound touch sensor structural drawing of Fig. 1,
The compound tactile sensing cellular construction of Fig. 2 figure,
The compound tactile sensing cell schematics of Fig. 3,
The compound tactile sensor array synoptic diagram of Fig. 4 one dimension,
Fig. 54 * 4 compound tactile sensor array synoptic diagram,
The application scheme block diagram of Fig. 64 * 4 compound tactile sensor arrays.
Have among the figure: the bridge-type elastic beam of 1-metal construction; 2-first Fiber Bragg Grating FBG; 3-second Fiber Bragg Grating FBG; 4-first single-mode fiber; 5-second single-mode fiber; 6-first fiber coupler; 7-second fiber coupler; 8-the 3rd fiber coupler; The smooth stria of the dark 0.15mm of 9-; The smooth stria of the dark 0.3mm of 10-; 11-first fiber coupler first port; 12-first fiber coupler second port; 13-second fiber coupler first port; 14-the 3rd fiber coupler first port; 15-second fiber coupler second port; 16-the 3rd fiber coupler the 4th port; The compound tactile sensing of 17-unit; The 18-fixed orifice; The 19-fixed orifice; 20 other ports to the 23-fiber coupler; 24 to the compound tactile sensing of 28-unit; 29-4 * 4 a compound tactile sensing cell array.
Embodiment
A kind of compound touch sensor; Sensor comprises the bridge-type elastic beam of metal construction, 2 Fiber Bragg Grating FBGs, single-mode fiber and 32 * 2 fiber couplers compositions, and wherein bridge-type elastic beam and 2 Fiber Bragg Grating FBGs are formed a compound tactile sensing unit.Described FBG is complete same grating; Under the same external condition; The effective refractive index of the centre wavelength of two Bragg grating spectrum of reflected light, the cycle of grating and fibre core is identical, and the bragg wavelength of two Fiber Bragg Grating FBGs is distributed in 1310nm or 1550nm operation window; One of them FBG is pasted in the horizontal smooth stria of elastic beam lower surface with epoxy resin; Another FBG is pasted in the vertical smooth stria of elastic beam lower surface with epoxy resin.Act on the sensor surface as acting force, the FBG that is pasted in the horizontal smooth stria of elastic beam lower surface produces a transverse strain, and this FBG is to temperature and strain sensitivity simultaneously; The FBG that is pasted in the vertical smooth stria of elastic beam lower surface does not produce strain, and this FBG is only to responsive to temperature; Based on two parameter matrix operation methods, eliminate the influence of FBG to the cross sensitivity of temperature and strain, realize the synchro measure of sensor sheet surface contact pressure and temperature.
A kind of compound tactile sensor array, the compound tactile sensing array of one dimension that this sensor array is made up of above-mentioned composite sensing unit, the number of sensing unit can decide according to different needs; All FBG that are pasted in the horizontal stria of elastic beam lower surface are distributed on the single-mode fiber; All FBG that are pasted in the vertical stria of elastic beam lower surface are distributed on another root single-mode fiber; Prague centre wavelength that sticks on the FBG that sensor array lists is distributed in the operation window of 1310nm or 1550nm simultaneously; And trend according to optical fiber; Prague centre wavelength of FBG on same optical fiber is increasing or decreasing successively, and the narrow-band spectrum of each optical grating reflection can not be overlapping in the course of the work.
Another kind of compound tactile sensor array; This sensor array is made up of 4 * 4 compound tactile sensing array above-mentioned composite sensing unit; But the number of sensing unit is not limited to 4 * 4; Can decide according to different needs, all FBG that are pasted in the horizontal stria of elastic beam lower surface are distributed on the single-mode fiber; All FBG that are pasted in the vertical stria of elastic beam lower surface are distributed on another root single-mode fiber; Prague centre wavelength that sticks on the FBG that sensor array lists is distributed in the operation window of 1310nm or 1550nm simultaneously; And trend according to optical fiber; Prague centre wavelength of FBG on same optical fiber is increasing or decreasing successively, and the narrow-band spectrum of each optical grating reflection can not be overlapping in the course of the work.
A kind of compound touch sensor structure that the present invention relates to is as shown in Figure 1, and sensor is made up of bridge-type elastic beam 1, Fiber Bragg Grating FBG 2, Fiber Bragg Grating FBG 3, single-mode fiber 4, single- mode fiber 5,2 * 2 fiber couplers, 6,2 * 2 fiber couplers 7 and 2 * 2 fiber couplers 8 of metal construction.The bridge-type elastic beam 1 of metal construction, Fiber Bragg Grating FBG 2, Fiber Bragg Grating FBG 3, single-mode fiber 4 and single-mode fiber 5 are formed a compound tactile sensing unit; Compound tactile sensing unit 17 structural drawing are as shown in Figure 2, and compound tactile sensing cell schematics is as shown in Figure 3.Described FBG is complete same grating; Under the same external condition; The corresponding parameters such as effective refractive index of the centre wavelength of two FBG reflectance spectrums, the cycle of grating and fibre core are identical, and the bragg wavelength of two FBG is distributed in 1310nm or 1550nm operation window; One of them Fiber Bragg Grating FBG 2 usefulness epoxy resin is pasted in the horizontal smooth stria 9 of elastic beam lower surface; Another Fiber Bragg Grating FBG is pasted in the vertical smooth stria 10 of elastic beam lower surface with epoxy resin; The port one 3 of fiber coupler 6 welds together through the optical fiber bonding machine with the port one 1 of fiber coupler 7, and the port one 4 of fiber coupler 8 welds together through the optical fiber bonding machine with the port one 5 of fiber coupler 7; The port one 2 and the single-mode fiber 4 of fiber coupler 6 weld together through the optical fiber bonding machine, and the port one 6 and the single-mode fiber 5 of fiber coupler 8 weld together through the optical fiber bonding machine.Act on the sensor surface as acting force, Fiber Bragg Grating FBG 2 produces a transverse strain, and this Fiber Bragg Grating FBG is responsive simultaneously to temperature and strain; Fiber Bragg Grating FBG 3 does not produce strain, and this FBG is only to responsive to temperature; Based on two parameter matrix operation methods, eliminate the influence of FBG to temperature and strain cross sensitivity, realize the synchro measure of sensor sheet surface contact pressure and temperature.
The compound tactile sensor array of the one dimension that the present invention relates to is as shown in Figure 4, the compound tactile sensor array of one dimension that this sensor array is made up of above-mentioned compound tactile sensing unit, and the number of compound tactile sensing unit can decide according to different needs; All FBG that are pasted in the horizontal stria of elastic beam lower surface are distributed on the single-mode fiber; All FBG that are pasted in the vertical stria of elastic beam lower surface are distributed on another root single-mode fiber; Prague centre wavelength that sticks on the FBG that sensor array lists is distributed in the operation window of 1310nm or 1550nm simultaneously; And trend according to optical fiber; Prague centre wavelength of FBG on same optical fiber is increasing or decreasing successively, and the narrow-band spectrum of FBG reflection can not be overlapping in the course of the work; Different sensing units can be encoded according to the bragg wavelength of FBG.
4 * 4 the compound tactile sensor array that the present invention relates to is as shown in Figure 5; This sensor array is formed 4 * 4 compound tactile sensor array by above-mentioned compound tactile sensing unit; But the number of sensing unit is not limited to 4 * 4; Can decide according to different needs, all FBG that are pasted in the horizontal stria of elastic beam lower surface are distributed on the single-mode fiber; All FBG that are pasted in the vertical stria of elastic beam lower surface are distributed on another root single-mode fiber; Prague centre wavelength that sticks on the FBG that sensor array lists is distributed in the operation window of 1310nm or 1550nm simultaneously; And trend according to optical fiber; Prague centre wavelength of FBG on same optical fiber is increasing or decreasing successively, and the narrow-band spectrum of FBG reflection can not be overlapping in the course of the work; Different sensing units can be encoded according to the bragg wavelength of FBG.
Compound touch sensor that the present invention relates to or compound tactile sensor array, the detection scheme in practical application can be with reference to the detection schemes of 4 * 4 compound tactile sensor array, and be as shown in Figure 6.Centre wavelength is the port 20 that the wideband light source (bandwidth is 50nm) of 1310nm or 1550nm connects fiber coupler 7; All Bragg gratings in the broadband light incident sensor array; The reflected light of all Bragg gratings is from port 23 outgoing of the port 22 and the fiber coupler 8 of fiber coupler 6; The multi-channel wavelength detuner receives the reflected light of Bragg grating, and wavelengt demodulator demodulates the wavelength that sticks on all Fiber Bragg Grating FBGs on the compound tactile sensor array in real time, based on two parameter matrix operation methods; Eliminate the influence of FBG, realize the synchro measure of sensor array surface contact pressure and temperature temperature and strain cross sensitivity.
Claims (6)
1. a compound touch sensor is characterized in that this compound touch sensor comprises bridge-type elastic beam (1), first Fiber Bragg Grating FBG (2), second Fiber Bragg Grating FBG (3), first single-mode fiber (4), second single-mode fiber (5), first fiber coupler (6), second fiber coupler (7) and the 3rd fiber coupler (8) of metal construction; Wherein, The bridge-type elastic beam (1) of metal construction, first Fiber Bragg Grating FBG (2), second Fiber Bragg Grating FBG (3), first single-mode fiber (4) and second single-mode fiber (5) are formed compound tactile sensing unit (17); First Fiber Bragg Grating FBG (2), second Fiber Bragg Grating FBG (3) centre in bridge-type elastic beam (1) arranged in a crossed manner; First Fiber Bragg Grating FBG (2) connects first fiber coupler (6) through first single-mode fiber (4); Second Fiber Bragg Grating FBG (3) connects the 3rd fiber coupler (8) through second single-mode fiber (5), and first fiber coupler (6), the 3rd fiber coupler (8) are coupled to second fiber coupler (7) through optical fiber;
The material of the bridge-type elastic beam (1) of described metal construction is the Thin Elastic steel disc; The beam face thickness is less than 0.5mm; The horizontal smooth stria (9) that a dark 0.15mm is arranged at the lower surface lateral symmetry axle place of beam has the vertical smooth stria (10) of a dark 0.3mm at the vertical axis of symmetry of the lower surface of beam place;
Described first Fiber Bragg Grating FBG (2) and second Fiber Bragg Grating FBG (3) are complete same gratings; Under the same external condition; The effective refractive index of the centre wavelength of two Bragg grating spectrum of reflected light, the cycle of grating and fibre core is identical, and the bragg wavelength of two Fiber Bragg Grating FBGs is distributed in 1310nm or 1550nm operation window.
2. compound touch sensor according to claim 1; It is closely connected in horizontal smooth stria (9) to it is characterized in that described first Fiber Bragg Grating FBG (2) clings with epoxy resin; Paste no bubble in the epoxy resin of back, first Fiber Bragg Grating FBG (2) is in little extended state; Second Fiber Bragg Grating FBG (3) clings closely connected in vertical smooth stria (10) with epoxy resin, paste no bubble in the epoxy resin of back, and second Fiber Bragg Grating FBG (3) is in little extended state.
3. compound touch sensor according to claim 1; It is characterized in that in described first fiber coupler (6) and second fiber coupler (7); First fiber coupler, first port (13) welds together with second fiber coupler, first port (11); In described the 3rd fiber coupler (8) and second fiber coupler (7), the 3rd fiber coupler first port (14) welds together with second fiber coupler, second port (15).
4. compound touch sensor according to claim 1; It is characterized in that in described first fiber coupler (6) and second fiber coupler (7); First fiber coupler, second port (12) welds together with single-mode fiber (4); In described the 3rd fiber coupler (8) and second fiber coupler (7), the 3rd fiber coupler the 4th port (16) is connected together with single-mode fiber (5).
5. sensor array that compound touch sensor as claimed in claim 1 is formed; The compound tactile sensor array that it is characterized in that compound tactile sensing unit (17) composition ability while detected pressures and temperature; Sensing unit is formed two kinds of compound tactile sensor arrays according to different topological structures, and the number of sensing unit is expanded according to different demands; All Fiber Bragg Grating FBGs that are pasted in the horizontal stria of elastic beam lower surface are distributed on the single-mode fiber; All Fiber Bragg Grating FBGs that are pasted in the vertical stria of elastic beam lower surface are distributed on another root single-mode fiber; Be distributed in same optical fiber Bragg grating sensing centre wavelength on the optical fiber and have nothing in common with each other, the narrow-band spectrum non-overlapping copies of Fiber Bragg Grating FBG reflection in the course of work.
6. the sensor array of compound touch sensor according to claim 5; Prague centre wavelength that it is characterized in that sticking on the Fiber Bragg Grating FBG that sensor array lists is distributed in the operation window of 1310nm or 1550nm simultaneously; And trend according to optical fiber; Prague centre wavelength of the grating on same optical fiber is increasing or decreasing successively, and the narrow-band spectrum of each optical grating reflection can not be overlapping in the course of the work.
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN102998023B (en) * | 2012-11-14 | 2014-07-16 | 东南大学 | Sliding temperature tactile sensor |
| CN105157892B (en) * | 2015-04-30 | 2018-05-04 | 武汉理工大学 | A kind of flexibility distributed force measurement pad and preparation method thereof |
| CN108161994B (en) * | 2017-12-20 | 2020-07-10 | 清华大学 | Multi-modal touch sensing device |
| CN108195307A (en) * | 2017-12-27 | 2018-06-22 | 北京信息科技大学 | A kind of polynary bionical feeler of fiber bragg grating array |
| CN108871388B (en) * | 2018-05-10 | 2021-04-09 | 刘正勇 | Optical fiber touch sensor and sensing array |
| TWI699511B (en) * | 2018-11-12 | 2020-07-21 | 國立中央大學 | Tactile sensor applied to a humanoid robots |
| CN110779639A (en) * | 2019-11-19 | 2020-02-11 | 重庆交通大学 | A Fiber Bragg Grating-Based Tactile Sliding Sensor for Manipulators |
| CN111812290B (en) * | 2020-07-17 | 2023-04-07 | 山东建筑大学 | Water pollution monitoring biosensor, monitoring system and monitoring method |
| CN112014022B (en) * | 2020-08-21 | 2022-07-29 | 之江实验室 | An optoelectronic fusion tactile sensor based on micro-nano optical fiber |
| CN112683429A (en) * | 2020-12-14 | 2021-04-20 | 重庆交通大学 | Bionic electronic skin of fiber bragg grating |
| CN113218427B (en) * | 2021-04-30 | 2025-01-10 | 浙江大学 | Single cell temperature, pressure and gas composite sensing optical fiber probe and system and application |
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| US6819316B2 (en) * | 2001-04-17 | 2004-11-16 | 3M Innovative Properties Company | Flexible capacitive touch sensor |
| US7295724B2 (en) * | 2004-03-01 | 2007-11-13 | University Of Washington | Polymer based distributive waveguide sensor for pressure and shear measurement |
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| CN1067503A (en) * | 1991-06-05 | 1992-12-30 | 北京理工大学 | Flexible optical fibre array tactile sensor |
| GB2459975A (en) * | 2008-05-13 | 2009-11-18 | Honda Motor Co Ltd | Optical fibre sensor |
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