[go: up one dir, main page]

CN101982744A - Composite tactile sensor and sensor array - Google Patents

Composite tactile sensor and sensor array Download PDF

Info

Publication number
CN101982744A
CN101982744A CN201010290314.1A CN201010290314A CN101982744A CN 101982744 A CN101982744 A CN 101982744A CN 201010290314 A CN201010290314 A CN 201010290314A CN 101982744 A CN101982744 A CN 101982744A
Authority
CN
China
Prior art keywords
fiber
bragg grating
coupler
fiber coupler
fiber bragg
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
CN201010290314.1A
Other languages
Chinese (zh)
Other versions
CN101982744B (en
Inventor
李建清
柏俊杰
吴剑锋
陈从颜
王丰华
周连杰
吴剑进
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Chongqing University of Science and Technology
Southeast University
Original Assignee
Chongqing University of Science and Technology
Southeast University
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Chongqing University of Science and Technology, Southeast University filed Critical Chongqing University of Science and Technology
Priority to CN201010290314.1A priority Critical patent/CN101982744B/en
Publication of CN101982744A publication Critical patent/CN101982744A/en
Application granted granted Critical
Publication of CN101982744B publication Critical patent/CN101982744B/en
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Landscapes

  • Force Measurement Appropriate To Specific Purposes (AREA)

Abstract

本发明公开一种能同时检测压力与温度的复合触觉传感器和传感器阵列,该复合触觉传感器的金属结构的桥式弹性梁(1)、第一光纤布拉格光栅(2)、第二光纤布拉格光栅(3)、第一单模光纤(4)和第二单模光纤(5)组成复合触觉传感单元(17),第一光纤布拉格光栅(2)、第二光纤布拉格光栅(3)交叉设置在桥式弹性梁(1)的中间,第一光纤布拉格光栅(2)通过第一单模光纤(4)接第一光纤耦合器(6),第二光纤布拉格光栅(3)通过第二单模光纤(5)接第三光纤耦合器(8),第一光纤耦合器(6)、第三光纤耦合器(8)通过光纤耦合到第二光纤耦合器(7)。本发明分辨率高、重复性好、响应时间短,可以工作在潮湿、易燃、易爆和强电磁干扰等恶劣环境。

Figure 201010290314

The invention discloses a composite tactile sensor and a sensor array capable of simultaneously detecting pressure and temperature. The composite tactile sensor comprises a bridge-type elastic beam (1), a first fiber Bragg grating (2), and a second fiber Bragg grating ( 3), the first single-mode optical fiber (4) and the second single-mode optical fiber (5) form a compound tactile sensing unit (17), and the first Fiber Bragg Grating (2) and the second Fiber Bragg Grating (3) are arranged crosswise In the middle of the bridge elastic beam (1), the first fiber Bragg grating (2) is connected to the first fiber coupler (6) through the first single-mode fiber (4), and the second fiber Bragg grating (3) is connected through the second single-mode fiber The optical fiber (5) is connected to the third optical fiber coupler (8), and the first optical fiber coupler (6) and the third optical fiber coupler (8) are coupled to the second optical fiber coupler (7) through optical fibers. The invention has high resolution, good repeatability and short response time, and can work in harsh environments such as damp, flammable, explosive and strong electromagnetic interference.

Figure 201010290314

Description

Compound touch sensor and sensor array
Technical field
The present invention relates to a kind of compound touch sensor and sensor array that is applicable to virtual reality technology and Robotics field, be used for distributed measurement and act on the pressure on sensor or sensor array surface and the temperature of sensor surface.The present invention is specially adapted to detect the tactile sensing information under the rugged surroundings such as inflammable, explosive and strong electromagnetic.
Background technology
In recent years, the develop rapidly of virtual reality technology and Robotics, as a kind of important man-machine interface mode, the tactile sensing technology becomes the focus of domestic and international research.In virtual reality technology, sense of touch is that the object in user and designer and the virtual environment is mutual, one of the most important means of perception dummy object character of surface; The robot field, the information such as holding force, slippage and surface temperature the when shape by touch sensor perception contactant, surfaceness, shake, extracting object.Sense of touch mainly comprises power sense of touch and temperature sense of touch, and the touch sensor of superior performance is the key of tactilely-perceptible technology.
The researchist makes firmly sensitive membrane, monocrystalline silicon, taste with discrimination materials such as silicon, conductive rubber and optical fiber more has designed multiple touch sensor [Guo Tiantai such as pressure resistance type, piezoelectric type, condenser type, photo-electric, mechanical type, ultrasonic type, thermoelectric (al) type and magnetoelasticity formula, Qin Haixia, fiber crops Cheng Jian, Lin Yani. be applied to the tactile sensing technology of virtual reality and robot, lathe and hydraulic pressure, 2008,36 (11), 30-32.].
On March 25th, 2002, people such as U.S. SC Shu Erci have applied for flexible capacitance type touch sensor (number of patent application: 02808165.X) in China, the method that a kind of flexibility, capacitance type touch sensor is provided and has made numerous this touch sensors, acting force that can the detecting sensor surface of contact, major advantage are to possess characteristics such as low, the light and pliability of cost.On Dec 10th, 2003, people such as Denmark P Gravesen have applied for tactile sensor element and the sensor array (number of applying for a patent: 200380105850.8) in China, constitute capacitor by elastomeric two elastic surfaces and electrode, come detecting sensor or the suffered acting force of array surface by the variation that detects electric capacity, possess highly sensitive, volume is little and low cost and other advantages.Southeast China University has designed pressure resistance type 16 * 16 tactile sensing arrays, University Of Chongqing carried out the tactile sensing array of backbone conductive rubber research [Wang Dongsheng. the tactile sensing array of backbone conductive rubber and the research of calibration experiment thereof, master thesis, photoelectric project institute of University Of Chongqing, 2009.].Above touch sensor all is the sensor of condenser type or pressure resistance type, under the rugged surroundings such as inflammable, explosive and strong electromagnetic of can not be stable be operated in, and can only detect the acting force of surface of contact, can not detect the temperature of contactant.
On Dec 13rd, 2006, the impartial people in Korea S Korea Spro east has applied for relating to a kind of touch sensor (number of patent application: 200610166959.8) of back lighting device in China, form by light source, light guide plate and electrode etc., by detecting position, size and the shape that electrode pattern that touch sensor forms on the upper and lower surface of light guide plate detects contactant, can not detect the acting force and the temperature of contactant.On March 3rd, 2005, people such as Japanese shop Sunrise have applied for the optical tactile sensor (patent No.: 200580000909.6) in China, ideal relates to the employed touch sensor of applying method of the power of trying to achieve in bigger zone, sensor possesses sense of touch portion and photographic equipment, when the haptic surface of object contact resilient body, the action of this colored token is photographed and obtain sign image by photographic equipment, use is asked the power that is added on this haptic surface, the detection means complexity from the information about the sign action that this sign image obtains.On May 30th, 2008, Japan's hole originally opens first-class people and has applied for the optical sensor (number of applying for a patent: 200810098389.2) in China, sensor has light source, detecting means and reflecting surface, relative distance between reflecting surface and the fiber end face changes with the variation of physical quantitys such as pressure or temperature, and the variation by measured light intensity comes physical quantitys such as detected pressures or temperature.More than three kinds of optical profile type sensing touch sensors, all can be operated in the environment of inflammable, explosive and strong electromagnetic, but all light source there is very high requirement, particularly require stabilized intensity, the fluctuation of the intensity of light source has very big influence to the detection of physical signallings such as power or temperature, and can not set up large-scale distributed Measurement Network flexibly.
So, be necessary to design NEW TYPE OF COMPOSITE touch sensor and the sensor array of energy long-term work under rugged surroundings, fields such as that requirement can be operated in is inflammable, explosive, strong electromagnetic, and easily make up the distributed measurement network, can realize the temperature and the synchronous sensing of pressure of contactant.
Fiber Bragg Grating FBG have volume little, in light weight, anticorrosive, can integrated, anti-electromagnetic interference (EMI), and, can be operated in inflammable, explosive field by the optical wavelength signal sensing.A plurality of gratings can all be written on the optical fiber, and Fiber Bragg Grating FBG can be realized the heat transfer agent Wavelength-encoding, can utilize multiplexing technique that grating is addressed, and make the FBG sensor possess the ability that distributed sensing is measured.FBG is responsive simultaneously to temperature and strain, and when the temperature variation (no strain) of FBG, Prague centre wavelength and the variation of temperature of FBG reflection have good linear relationship; When having only effects of strain (temperature constant), Prague centre wavelength and the strain of FBG reflection have good linear relationship.So, FBG is the preferred sensitive element of design NEW TYPE OF COMPOSITE touch sensor and sensor array, this sensor and sensor array can long-term work under rugged surroundings such as inflammable, explosive, humidity and strong electromagnetic, and easily make up the distributed sensing network, can realize the temperature and the synchronous sensing of pressure of contactant.
Summary of the invention
Technical matters: The present invention be directed to the deficiencies in the prior art, based on Fiber Bragg Grating FBG (FBG, Fiber Bragg Grating), design can long-term stable operation under rugged surroundings, easily make up the NEW TYPE OF COMPOSITE touch sensor and the sensor array of distributed sensing network.
Technical scheme: the compound touch sensor of a kind of detected pressures simultaneously of the present invention and temperature comprises bridge-type elastic beam, first Fiber Bragg Grating FBG, second Fiber Bragg Grating FBG, first single-mode fiber, second single-mode fiber, first fiber coupler, second fiber coupler and the 3rd fiber coupler of metal construction; Wherein, the bridge-type elastic beam of metal construction, first Fiber Bragg Grating FBG, second Fiber Bragg Grating FBG, first single-mode fiber and second single-mode fiber are formed compound tactile sensing unit, first Fiber Bragg Grating FBG, second Fiber Bragg Grating FBG centre at the bridge-type elastic beam arranged in a crossed manner, first Fiber Bragg Grating FBG connects first fiber coupler by first single-mode fiber, second Fiber Bragg Grating FBG connects the 3rd fiber coupler by second single-mode fiber, and first fiber coupler, the 3rd fiber coupler are coupled to second fiber coupler by optical fiber.
The material of the bridge-type elastic beam of described metal construction is the Thin Elastic steel disc, the beam face thickness is less than 0.5mm, the horizontal smooth stria that a dark 0.15mm is arranged at the lower surface lateral symmetry axle place of beam has the vertical smooth stria of a dark 0.3mm at the vertical axis of symmetry of the lower surface of beam place.
Described first Fiber Bragg Grating FBG and second Fiber Bragg Grating FBG are complete same gratings, under the same external condition, the effective refractive index of the centre wavelength of two Bragg grating spectrum of reflected light, the cycle of grating and fibre core is identical, and the bragg wavelength of two Fiber Bragg Grating FBGs is distributed in 1310nm or 1550nm operation window.
Described first Fiber Bragg Grating FBG clings closely connected in horizontal smooth stria with epoxy resin, paste no bubble in the epoxy resin of back, and first Fiber Bragg Grating FBG is in little extended state; Second Fiber Bragg Grating FBG clings closely connected in vertical smooth stria with epoxy resin, paste no bubble in the epoxy resin of back, and second Fiber Bragg Grating FBG is in little extended state.
In described first fiber coupler and second fiber coupler, first fiber coupler, first port and second fiber coupler, first port weld together, in described the 3rd fiber coupler and second fiber coupler, the 3rd fiber coupler first port and second fiber coupler, second port weld together.
In described first fiber coupler and second fiber coupler, first fiber coupler, second port and single-mode fiber weld together, and the 3rd fiber coupler the 4th port and single-mode fiber are connected together.
The compound tactile sensor array of energy while detected pressures and temperature is formed in compound tactile sensing unit, and sensing unit is formed two kinds of compound tactile sensor arrays according to different topological structures, and the number of sensing unit is expanded according to different demands; All Fiber Bragg Grating FBGs that are pasted in the horizontal stria of elastic beam lower surface are distributed on the single-mode fiber, all Fiber Bragg Grating FBGs that are pasted in the vertical stria of elastic beam lower surface are distributed on another root single-mode fiber, be distributed in same optical fiber Bragg grating sensing centre wavelength on the optical fiber and have nothing in common with each other, the narrow-band spectrum non-overlapping copies of Fiber Bragg Grating FBG reflection in the course of work.
Prague centre wavelength that sticks on the Fiber Bragg Grating FBG that sensor array lists is distributed in the operation window of 1310nm or 1550nm simultaneously, and trend according to optical fiber, Prague centre wavelength of the grating on same optical fiber is increasing or decreasing successively, and the narrow-band spectrum of each optical grating reflection can not be overlapping in the course of the work.
Beneficial effect: the present invention is compared with the prior art, and has following advantage:
1. the present invention can be to temperature sense of touch and the synchronous sensing of power sense of touch, be compound touch sensor of a kind of power/temperature or sensor array, and based on two parameter matrix operation methods, can eliminate the influence of FBG, realize the synchro measure of sensor sheet surface contact pressure and temperature temperature and strain cross sensitivity.
The present invention can long-term work in the rugged surroundings of moist, inflammable, explosive and strong electromagnetic, and have the measuring accuracy height, the response time lacks and advantages such as good stability.
3. the present invention easily makes up distributed compound tactile sensing network.
Description of drawings
The compound touch sensor structural drawing of Fig. 1,
The compound tactile sensing cellular construction of Fig. 2 figure,
The compound tactile sensing cell schematics of Fig. 3,
The compound tactile sensor array synoptic diagram of Fig. 4 one dimension,
Fig. 54 * 4 compound tactile sensor array synoptic diagram,
The application scheme block diagram of Fig. 64 * 4 compound tactile sensor arrays.
Have among the figure: the bridge-type elastic beam of 1-metal construction; 2-first Fiber Bragg Grating FBG; 3-second Fiber Bragg Grating FBG; 4-first single-mode fiber; 5-second single-mode fiber; 6-first fiber coupler; 7-second fiber coupler; 8-the 3rd fiber coupler; The smooth stria of the dark 0.15mm of 9-; The smooth stria of the dark 0.3mm of 10-; 11-first fiber coupler first port; 12-first fiber coupler second port; 13-second fiber coupler first port; 14-the 3rd fiber coupler first port; 15-second fiber coupler second port; 16-the 3rd fiber coupler the 4th port; The compound tactile sensing of 17-unit; The 18-fixed orifice; The 19-fixed orifice; 20 other ports to the 23-fiber coupler; 24 to the compound tactile sensing of 28-unit; 29-4 * 4 a compound tactile sensing cell array.
Embodiment
A kind of compound touch sensor, sensor comprises the bridge-type elastic beam of metal construction, 2 Fiber Bragg Grating FBGs, single-mode fiber and 32 * 2 fiber couplers compositions, and wherein bridge-type elastic beam and 2 Fiber Bragg Grating FBGs are formed a compound tactile sensing unit.Described FBG is complete same grating, under the same external condition, the effective refractive index of the centre wavelength of two Bragg grating spectrum of reflected light, the cycle of grating and fibre core is identical, and the bragg wavelength of two Fiber Bragg Grating FBGs is distributed in 1310nm or 1550nm operation window; One of them FBG is pasted in the horizontal smooth stria of elastic beam lower surface with epoxy resin; Another FBG is pasted in the vertical smooth stria of elastic beam lower surface with epoxy resin.Act on the sensor surface as acting force, the FBG that is pasted in the horizontal smooth stria of elastic beam lower surface produces a transverse strain, and this FBG is responsive simultaneously to temperature and strain; The FBG that is pasted in the vertical smooth stria of elastic beam lower surface does not produce strain, and this FBG is only to responsive to temperature; Based on two parameter matrix operation methods, eliminate the influence of FBG to the cross sensitivity of temperature and strain, realize the synchro measure of sensor sheet surface contact pressure and temperature.
A kind of compound tactile sensor array, the compound tactile sensing array of one dimension that this sensor array is made up of above-mentioned composite sensing unit, the number of sensing unit can decide according to different needs; All FBG that are pasted in the horizontal stria of elastic beam lower surface are distributed on the single-mode fiber; All FBG that are pasted in the vertical stria of elastic beam lower surface are distributed on another root single-mode fiber; Prague centre wavelength that sticks on the FBG that sensor array lists is distributed in the operation window of 1310nm or 1550nm simultaneously, and trend according to optical fiber, Prague centre wavelength of FBG on same optical fiber is increasing or decreasing successively, and the narrow-band spectrum of each optical grating reflection can not be overlapping in the course of the work.
Another kind of compound tactile sensor array, this sensor array is made of 4 * 4 compound tactile sensing array above-mentioned composite sensing unit, but the number of sensing unit is not limited to 4 * 4, can decide according to different needs, all FBG that are pasted in the horizontal stria of elastic beam lower surface are distributed on the single-mode fiber; All FBG that are pasted in the vertical stria of elastic beam lower surface are distributed on another root single-mode fiber; Prague centre wavelength that sticks on the FBG that sensor array lists is distributed in the operation window of 1310nm or 1550nm simultaneously, and trend according to optical fiber, Prague centre wavelength of FBG on same optical fiber is increasing or decreasing successively, and the narrow-band spectrum of each optical grating reflection can not be overlapping in the course of the work.
A kind of compound touch sensor structure that the present invention relates to as shown in Figure 1, sensor is made up of bridge-type elastic beam 1, Fiber Bragg Grating FBG 2, Fiber Bragg Grating FBG 3, single-mode fiber 4, single- mode fiber 5,2 * 2 fiber couplers, 6,2 * 2 fiber couplers 7 and 2 * 2 fiber couplers 8 of metal construction.The bridge-type elastic beam 1 of metal construction, Fiber Bragg Grating FBG 2, Fiber Bragg Grating FBG 3, single-mode fiber 4 and single-mode fiber 5 are formed a compound tactile sensing unit, compound tactile sensing unit 17 structural drawing as shown in Figure 2, compound tactile sensing cell schematics is as shown in Figure 3.Described FBG is complete same grating, under the same external condition, the corresponding parameters such as effective refractive index of the centre wavelength of two FBG reflectance spectrums, the cycle of grating and fibre core are identical, and the bragg wavelength of two FBG is distributed in 1310nm or 1550nm operation window; One of them Fiber Bragg Grating FBG 2 usefulness epoxy resin is pasted in the horizontal smooth stria 9 of elastic beam lower surface; Another Fiber Bragg Grating FBG is pasted in the vertical smooth stria 10 of elastic beam lower surface with epoxy resin; The port one 3 of fiber coupler 6 welds together by the optical fiber bonding machine with the port one 1 of fiber coupler 7, and the port one 4 of fiber coupler 8 welds together by the optical fiber bonding machine with the port one 5 of fiber coupler 7; The port one 2 and the single-mode fiber 4 of fiber coupler 6 weld together by the optical fiber bonding machine, and the port one 6 and the single-mode fiber 5 of fiber coupler 8 weld together by the optical fiber bonding machine.Act on the sensor surface as acting force, Fiber Bragg Grating FBG 2 produces a transverse strain, and this Fiber Bragg Grating FBG is responsive simultaneously to temperature and strain; Fiber Bragg Grating FBG 3 does not produce strain, and this FBG is only to responsive to temperature; Based on two parameter matrix operation methods, eliminate the influence of FBG to temperature and strain cross sensitivity, realize the synchro measure of sensor sheet surface contact pressure and temperature.
The compound tactile sensor array of the one dimension that the present invention relates to as shown in Figure 4, the compound tactile sensor array of one dimension that this sensor array is made up of above-mentioned compound tactile sensing unit, the number of compound tactile sensing unit can decide according to different needs; All FBG that are pasted in the horizontal stria of elastic beam lower surface are distributed on the single-mode fiber; All FBG that are pasted in the vertical stria of elastic beam lower surface are distributed on another root single-mode fiber; Prague centre wavelength that sticks on the FBG that sensor array lists is distributed in the operation window of 1310nm or 1550nm simultaneously, and trend according to optical fiber, Prague centre wavelength of FBG on same optical fiber is increasing or decreasing successively, and the narrow-band spectrum of FBG reflection can not be overlapping in the course of the work; Different sensing units can be encoded according to the bragg wavelength of FBG.
4 * 4 the compound tactile sensor array that the present invention relates to as shown in Figure 5, this sensor array is formed 4 * 4 compound tactile sensor array by above-mentioned compound tactile sensing unit, but the number of sensing unit is not limited to 4 * 4, can decide according to different needs, all FBG that are pasted in the horizontal stria of elastic beam lower surface are distributed on the single-mode fiber; All FBG that are pasted in the vertical stria of elastic beam lower surface are distributed on another root single-mode fiber; Prague centre wavelength that sticks on the FBG that sensor array lists is distributed in the operation window of 1310nm or 1550nm simultaneously, and trend according to optical fiber, Prague centre wavelength of FBG on same optical fiber is increasing or decreasing successively, and the narrow-band spectrum of FBG reflection can not be overlapping in the course of the work; Different sensing units can be encoded according to the bragg wavelength of FBG.
Embodiment 1
Compound touch sensor that the present invention relates to or compound tactile sensor array, detection scheme in actual applications can be with reference to the detection scheme of 4 * 4 compound tactile sensor array, as shown in Figure 6.Centre wavelength is the port 20 that the wideband light source (bandwidth is 50nm) of 1310nm or 1550nm connects fiber coupler 7, all Bragg gratings in the broadband light incident sensor array, the reflected light of all Bragg gratings is from port 23 outgoing of the port 22 and the fiber coupler 8 of fiber coupler 6, the multi-channel wavelength detuner receives the reflected light of Bragg grating, wavelengt demodulator demodulates the wavelength that sticks on all Fiber Bragg Grating FBGs on the compound tactile sensor array in real time, based on two parameter matrix operation methods, eliminate the influence of FBG, realize the synchro measure of sensor array surface contact pressure and temperature temperature and strain cross sensitivity.

Claims (8)

1.一种复合触觉传感器,其特征在于该复合触觉传感器包括金属结构的桥式弹性梁(1)、第一光纤布拉格光栅(2)、第二光纤布拉格光栅(3)、第一单模光纤(4)、第二单模光纤(5)、第一光纤耦合器(6)、第二光纤耦合器(7)和第三光纤耦合器(8);其中,金属结构的桥式弹性梁(1)、第一光纤布拉格光栅(2)、第二光纤布拉格光栅(3)、第一单模光纤(4)和第二单模光纤(5)组成复合触觉传感单元(17),第一光纤布拉格光栅(2)、第二光纤布拉格光栅(3)交叉设置在桥式弹性梁(1)的中间,第一光纤布拉格光栅(2)通过第一单模光纤(4)接第一光纤耦合器(6),第二光纤布拉格光栅(3)通过第二单模光纤(5)接第三光纤耦合器(8),第一光纤耦合器(6)、第三光纤耦合器(8)通过光纤耦合到第二光纤耦合器(7)。1. A composite tactile sensor, characterized in that the composite tactile sensor comprises a bridge elastic beam (1), the first Fiber Bragg Grating (2), the second Fiber Bragg Grating (3), the first single-mode optical fiber (4), the second single-mode optical fiber (5), the first fiber coupler (6), the second fiber coupler (7) and the third fiber coupler (8); wherein, the bridge elastic beam of metal structure ( 1), the first fiber Bragg grating (2), the second fiber Bragg grating (3), the first single-mode fiber (4) and the second single-mode fiber (5) form a composite tactile sensing unit (17), the first The fiber Bragg grating (2) and the second fiber Bragg grating (3) are intersected in the middle of the bridge elastic beam (1), and the first fiber Bragg grating (2) is coupled to the first fiber through the first single-mode fiber (4) device (6), the second fiber Bragg grating (3) is connected to the third fiber coupler (8) through the second single-mode fiber (5), and the first fiber coupler (6) and the third fiber coupler (8) pass through The fiber is coupled to a second fiber coupler (7). 2.根据权利要求1所述的复合触觉传感器,其特征在于所述的金属结构的桥式弹性梁(1)的材料为弹性薄钢片,梁面厚度小于0.5mm,在梁的下表面横向对称轴处有一条深0.15mm的横向光滑细槽(9),在梁的下表面纵向对称轴处有一条深0.3mm的纵向光滑细槽(10)。2. The composite tactile sensor according to claim 1, wherein the material of the bridge elastic beam (1) of the metal structure is an elastic thin steel sheet, and the thickness of the beam surface is less than 0.5mm. There is a horizontal smooth groove (9) with a depth of 0.15 mm at the axis of symmetry, and a longitudinal smooth groove (10) with a depth of 0.3 mm at the longitudinal axis of symmetry on the lower surface of the beam. 3.根据权利要求1所述的复合触觉传感器,其特征在于所述的第一光纤布拉格光栅(2)和第二光纤布拉格光栅(3)是全同光栅,同一外界条件下,两个布拉格光栅反射的光谱的中心波长、光栅的周期和纤芯的有效折射率完全相同,两个光纤布拉格光栅的布拉格波长分布在1310nm或1550nm工作窗口。3. The compound tactile sensor according to claim 1, characterized in that said first fiber Bragg grating (2) and the second fiber Bragg grating (3) are identical gratings, and under the same external conditions, two Bragg gratings The central wavelength of the reflected spectrum, the period of the grating and the effective refractive index of the fiber core are exactly the same, and the Bragg wavelengths of the two fiber Bragg gratings are distributed in the working window of 1310nm or 1550nm. 4.根据权利要求3所述的复合触觉传感器,其特征在于所述的第一光纤布拉格光栅(2)用环氧树脂粘紧密贴于横向光滑细槽(9)中,粘贴好后环氧树脂内无气泡,第一光纤布拉格光栅(2)处于微拉伸状态;第二光纤布拉格光栅(3)用环氧树脂粘紧密贴于纵向光滑细槽(10)中,粘贴好后环氧树脂内无气泡,第二光纤布拉格光栅(3)处于微拉伸状态。4. The composite tactile sensor according to claim 3, characterized in that said first fiber Bragg grating (2) is glued in the transverse smooth groove (9) with epoxy resin, and the epoxy resin is pasted There are no air bubbles inside, and the first fiber Bragg grating (2) is in a slightly stretched state; the second fiber Bragg grating (3) is glued to the longitudinal smooth groove (10) with epoxy resin, and after pasting, the epoxy resin inside Without air bubbles, the second fiber Bragg grating (3) is in a slightly stretched state. 5.根据权利要求1所述的复合触觉传感器,其特征在于在所述的第一光纤耦合器(6)和第二光纤耦合器(7)中,第一光纤耦合器第一端口(13)与第二光纤耦合器第一端口(11)焊接在一起,在所述的第三光纤耦合器(8)和第二光纤耦合器(7)中,第三光纤耦合器第一端口(14)与第二光纤耦合器第二端口(15)焊接在一起。5. The compound tactile sensor according to claim 1, characterized in that in said first fiber coupler (6) and second fiber coupler (7), the first port of the first fiber coupler (13) Weld together with the second fiber coupler first port (11), in the third fiber coupler (8) and the second fiber coupler (7), the third fiber coupler first port (14) Weld together with the second port (15) of the second fiber optic coupler. 6.根据权利要求1所述的复合触觉传感器,其特征在于在所述的第一光纤耦合器(6)和第二光纤耦合器(7)中,第一光纤耦合器第二端口(12)与单模光纤(4)焊接在一起,第三光纤耦合器第四端口(16)与单模光纤(5)接在一起。6. The compound tactile sensor according to claim 1, characterized in that in said first fiber coupler (6) and second fiber coupler (7), the first fiber coupler second port (12) It is welded together with the single-mode optical fiber (4), and the fourth port (16) of the third optical fiber coupler is connected with the single-mode optical fiber (5). 7.一种如权利要求1所述的复合触觉传感器组成的传感器阵列,其特征在于复合触觉传感单元(17)组成能同时检测压力与温度的复合触觉传感器阵列,传感单元按照不同的拓扑结构组成二种复合触觉传感器阵列,传感单元的个数根据不同的需求进行扩展;所有粘贴于弹性梁下表面横向细槽中的光纤布拉格光栅分布在一根单模光纤上,所有粘贴于弹性梁下表面纵向细槽中的光纤布拉格光栅分布在另一根单模光纤上,分布在同一根光纤上的光纤布拉格光栅传感中心波长各不相同,工作过程中光纤布拉格光栅反射的窄带光谱互不重叠。7. A sensor array formed by a composite tactile sensor as claimed in claim 1, characterized in that the composite tactile sensor unit (17) forms a composite tactile sensor array that can detect pressure and temperature simultaneously, and the sensing unit is according to different topologies The structure consists of two composite tactile sensor arrays, and the number of sensing units is expanded according to different requirements; all fiber Bragg gratings pasted in the transverse grooves on the lower surface of the elastic beam are distributed on a single-mode optical fiber, and all pasted on the elastic beam The fiber Bragg gratings in the longitudinal grooves on the lower surface of the beam are distributed on another single-mode fiber, and the sensing center wavelengths of the fiber Bragg gratings distributed on the same fiber are different. Do not overlap. 8.根据权利要求7所述的复合触觉传感器的传感器阵列,其特征在于粘贴在传感器阵列上的光纤布拉格光栅的布拉格中心波长同时分布在1310nm或1550nm的工作窗口,并且按照光纤的走向,同一根光纤上的光栅的布拉格中心波长依次递增或递减,在工作过程中各光栅反射的窄带光谱不能重叠。8. The sensor array of the composite tactile sensor according to claim 7, characterized in that the Bragg center wavelengths of the fiber Bragg gratings pasted on the sensor array are simultaneously distributed in the working window of 1310nm or 1550nm, and according to the direction of the optical fiber, the same The Bragg center wavelength of the grating on the optical fiber increases or decreases sequentially, and the narrow-band spectra reflected by each grating cannot overlap during the working process.
CN201010290314.1A 2010-09-21 2010-09-21 Composite tactile sensor and sensor array Expired - Fee Related CN101982744B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201010290314.1A CN101982744B (en) 2010-09-21 2010-09-21 Composite tactile sensor and sensor array

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201010290314.1A CN101982744B (en) 2010-09-21 2010-09-21 Composite tactile sensor and sensor array

Publications (2)

Publication Number Publication Date
CN101982744A true CN101982744A (en) 2011-03-02
CN101982744B CN101982744B (en) 2012-11-14

Family

ID=43619646

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201010290314.1A Expired - Fee Related CN101982744B (en) 2010-09-21 2010-09-21 Composite tactile sensor and sensor array

Country Status (1)

Country Link
CN (1) CN101982744B (en)

Cited By (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102998023A (en) * 2012-11-14 2013-03-27 东南大学 Sliding temperature tactile sensor
CN105157892A (en) * 2015-04-30 2015-12-16 武汉理工大学 Flexible distributed force measuring pad and manufacturing method thereof
CN108161994A (en) * 2017-12-20 2018-06-15 清华大学 A kind of multi-modal tactile sensor
CN108195307A (en) * 2017-12-27 2018-06-22 北京信息科技大学 A kind of polynary bionical feeler of fiber bragg grating array
CN108871388A (en) * 2018-05-10 2018-11-23 刘正勇 Optical fiber touch sensor and sensor array
CN110779639A (en) * 2019-11-19 2020-02-11 重庆交通大学 A Fiber Bragg Grating-Based Tactile Sliding Sensor for Manipulators
TWI699511B (en) * 2018-11-12 2020-07-21 國立中央大學 Tactile sensor applied to a humanoid robots
CN111812290A (en) * 2020-07-17 2020-10-23 山东建筑大学 Water pollution monitoring biosensor, monitoring system and monitoring method
CN112014022A (en) * 2020-08-21 2020-12-01 之江实验室 Photoelectric fusion touch sensor based on micro-nano optical fiber
CN112683429A (en) * 2020-12-14 2021-04-20 重庆交通大学 Bionic electronic skin of fiber bragg grating
CN113218427A (en) * 2021-04-30 2021-08-06 浙江大学 Single battery temperature pressure gas composite sensing optical fiber probe, system and application

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1067503A (en) * 1991-06-05 1992-12-30 北京理工大学 Flexible optical fibre array tactile sensor
WO2002084876A1 (en) * 2001-04-17 2002-10-24 3M Innovative Properties Company Flexible capacitive touch sensor
US20050232532A1 (en) * 2004-03-01 2005-10-20 Wei-Chih Wang Polymer based distributive waveguide sensor for pressure and shear measurement
GB2459975A (en) * 2008-05-13 2009-11-18 Honda Motor Co Ltd Optical fibre sensor

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1067503A (en) * 1991-06-05 1992-12-30 北京理工大学 Flexible optical fibre array tactile sensor
WO2002084876A1 (en) * 2001-04-17 2002-10-24 3M Innovative Properties Company Flexible capacitive touch sensor
US20050232532A1 (en) * 2004-03-01 2005-10-20 Wei-Chih Wang Polymer based distributive waveguide sensor for pressure and shear measurement
GB2459975A (en) * 2008-05-13 2009-11-18 Honda Motor Co Ltd Optical fibre sensor

Cited By (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102998023B (en) * 2012-11-14 2014-07-16 东南大学 Sliding temperature tactile sensor
CN102998023A (en) * 2012-11-14 2013-03-27 东南大学 Sliding temperature tactile sensor
CN105157892A (en) * 2015-04-30 2015-12-16 武汉理工大学 Flexible distributed force measuring pad and manufacturing method thereof
CN108161994A (en) * 2017-12-20 2018-06-15 清华大学 A kind of multi-modal tactile sensor
CN108161994B (en) * 2017-12-20 2020-07-10 清华大学 Multi-modal touch sensing device
CN108195307A (en) * 2017-12-27 2018-06-22 北京信息科技大学 A kind of polynary bionical feeler of fiber bragg grating array
CN108871388B (en) * 2018-05-10 2021-04-09 刘正勇 Optical fiber touch sensor and sensing array
CN108871388A (en) * 2018-05-10 2018-11-23 刘正勇 Optical fiber touch sensor and sensor array
TWI699511B (en) * 2018-11-12 2020-07-21 國立中央大學 Tactile sensor applied to a humanoid robots
CN110779639A (en) * 2019-11-19 2020-02-11 重庆交通大学 A Fiber Bragg Grating-Based Tactile Sliding Sensor for Manipulators
CN111812290A (en) * 2020-07-17 2020-10-23 山东建筑大学 Water pollution monitoring biosensor, monitoring system and monitoring method
CN112014022A (en) * 2020-08-21 2020-12-01 之江实验室 Photoelectric fusion touch sensor based on micro-nano optical fiber
CN112683429A (en) * 2020-12-14 2021-04-20 重庆交通大学 Bionic electronic skin of fiber bragg grating
CN113218427A (en) * 2021-04-30 2021-08-06 浙江大学 Single battery temperature pressure gas composite sensing optical fiber probe, system and application

Also Published As

Publication number Publication date
CN101982744B (en) 2012-11-14

Similar Documents

Publication Publication Date Title
CN101982744B (en) Composite tactile sensor and sensor array
CN107515054B (en) Optical fiber temperature and refractive index measurement sensing device based on Michelson interferometer
CN104330101A (en) Optical fiber sensor capable of measuring temperatures and micrometric displacement simultaneously
CN102620858A (en) Double long period fiber grating (LPFG) temperature and humidity sensor
CN101825434A (en) Blazed fiber bragg grating demodulation-based micro-displacement sensor and detection method
CN104316106A (en) Optical fiber sensor based on Mach-Zehnder interference and fiber bragg grating
CN207501987U (en) Magnetic field and temperature dual sampling device based on fiber grating
CN102410850A (en) Reflective optical fiber sensor device
CN111999263B (en) Mesoscale micro-nano optical fiber humidity sensor
Heo et al. Tactile sensors using the distributed optical fiber sensors
CN202075070U (en) Device for measuring force bearing by adopting fibre bragg grating rod force sensor
CN204881905U (en) Temperature sensor of spherical structure optic fibre
CN114370967B (en) Three-dimensional force sensor and detection method based on polymer fiber optic junction
CN204461363U (en) A kind of material surface strain fiber grating reversing differential detecting sensor part
CN107367240B (en) Square structure fiber grating reverse differential strain detection sensing device
CN102997848A (en) Two-dimensional displacement sensor based on three-core single-mode fiber Bragg grating
CN208238740U (en) Double hump cone fiber optic bend sensor
CN201237522Y (en) Optical grating weighting transducer
CN105890533A (en) Material surface strain fiber grating reverse differential detection sensing device
CN201945404U (en) Sensor based on three-degree inclined multimode fiber bragg grating (MFBG) for measuring temperature and refractive index simultaneously
CN205785095U (en) A kind of Dynamic High-accuracy fiber strain sensing device
CN110017925B (en) Waveguide pressure sensor based on M-Z structure and detection method
CN104019928B (en) Seriation cushion layer structure optical fiber micro-bending sensor
CN103592064B (en) A kind of optical-fiber Fabry-Perot force sensor and preparation method thereof
CN106680536A (en) High-sensitivity single polarization-maintaining fiber interference type acceleration speed sensing system

Legal Events

Date Code Title Description
C06 Publication
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
C14 Grant of patent or utility model
GR01 Patent grant
C17 Cessation of patent right
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20121114

Termination date: 20130921