CN101879706A - Diamond grinding disc and manufacturing method thereof - Google Patents

Abstract

The present invention discloses a diamond grinding disc and a manufacturing method thereof, the method comprising the following steps: providing a housing unit, in which a plurality of diamond particles are arranged, and each diamond particle has at least one sharp-angle grinding end. Next, providing a guide mold, the guide mold having a plurality of grooves. Pressing the guide mold against the plurality of diamond particles so that the sharp-angle grinding ends of the diamond particles are respectively inserted corresponding to the grooves. Next, removing the guide mold, and then pouring a polymer material into the housing unit and covering the diamond particles. Hardening the polymer material, and then removing the housing unit to complete the diamond grinding disc of the present invention.

Description

Diamond grinding disc and manufacturing method thereof

technical field

The invention relates to a diamond grinding disc and a manufacturing method thereof, in particular to a diamond grinding disc capable of effectively controlling the arrangement direction of diamonds and a manufacturing method thereof.

Background technique

In recent years, due to the rapid and mature development of integrated circuit (Integrated Circuit, IC) technology, the semiconductor industry has become one of the booming industries, among which semiconductor products can be widely used in information, communications, consumer electronics, industrial instruments, transportation and national defense Space and other fields have a great impact on electronic products, and their importance cannot be overstated.

Silicon wafer (Silicon Wafer) is an extremely important material in the semiconductor industry, and the silicon wafer must first undergo a chemical mechanical polishing (CMP) process to make the surface of the silicon wafer flat before manufacturing chips on it. Follow-up process to improve the accuracy and pass rate of the process. The polishing pad (Polishing Pad) used in the chemical mechanical polishing process is used for long-term grinding, and its abrasive particles are filled into the gap of the polishing pad, resulting in a decrease in the grinding efficiency of the polishing pad. The polishing pad must be regularly trimmed to remove residual impurities and grinding Debris keeps the polishing pad in the best grinding state. Therefore, the semiconductor industry takes advantage of the hard characteristics of diamonds to apply diamonds to the pad conditioner (Pad Conditioner) that removes the abrasive pad. The shape of the pad conditioner is disc-shaped or ring-shaped, also known as diamond Diamond Disk Pad Conditioner.

In order to increase the life of the polishing pad dresser and improve the grinding characteristics, in China Taiwan Patent Publication No. 412461 Patent "Diamond Disc for Dressing Wafer Polishing Pad and Its Manufacturing Method" and US Patent No. 5,092,910 "Abrasive Tool and Method For Making" In the present invention, a method of using a mold hole or a screen with regularly distributed holes is disclosed to make the diamond particles regularly arrange patterns on the grinding tool and its process method, which replaces the diamond particles on the traditional grinding tool. Random and irregular arrangement. In addition, on July 11, 2003, Taiwan Patent Announcement No. 541226 Patent "Abrasive Tool with Contoured Abrasive Particles and Manufacturing Method thereof" discloses a method for uniformly arranging diamond particles with equal heights. Abrasive grain positioning grooves arranged on the carrier at appropriate intervals are used to fill the bonding agent in the abrasive grain bonding grooves so that the alignment of abrasive grains is consistent.

Although China Taiwan No. 412461 patent and U.S. No. 5,092,910 patent can achieve the purpose of making each diamond particle evenly arranged at an appropriate distance, the mesh size of the die hole or screen used is larger than that of the diamond particle. The particles can only be arranged regularly according to the position of the mesh, but the orientation of each diamond particle at the arrangement position (Orientation) cannot be controlled, resulting in uneven diamond exposure heights on the diamond disc, and the grinding uniformity and use of the diamond disc dresser There is a great adverse effect on life expectancy. In addition, after the diamond particles are fixed and arranged on the wafer surface, a brazing process is still required to make the diamond particles tightly bonded to the wafer surface, which leads to the deformation of the substrate and the degradation of the diamond particles.

Also, the No. 541226 patent of China Taiwan is used for arranging the carrier of the diamond particles, and the positioning groove of the predetermined shape must be milled out first, so that the manufacturing cost increases due to the additional processing steps of the carrier, and in order to make the diamond particles tend to the same orientation, the More manufacturing time is spent on the process of arranging diamond particles, resulting in lower efficiency in producing diamond disc dressers.

In the manufacturing method of the above-mentioned commonly used diamond disc dresser, although a plurality of diamond particles can be regularly and evenly arranged, the orientation of each diamond particle cannot be made to be consistent, or it takes too much cost and manufacturing time to achieve it. The purpose of the alignment and orientation of abrasive particles. Accordingly, there are still many problems to be solved in the existing diamond grinding disc dresser.

Contents of the invention

In view of the above problems, the present invention provides a diamond grinding disc capable of effectively controlling the arrangement direction of diamonds and its manufacturing method, so as to solve the problem of uneven distribution of diamond particles, disordered direction and orientation of diamond particles in the prior art, and uneven diamond particles. Limitations or disadvantages where the process is too complex and costly.

The manufacturing method of the diamond grinding disc disclosed in the present invention firstly provides a housing unit, and attaches a plastic material in the housing unit, and then sticks a plurality of diamond particles on the plastic material, and these diamond particles have at least An acute-angle grinding end protrudes from the plastic material. Next, a guide mold is provided, wherein one side of the guide mold has a plurality of tapered grooves, and the guide mold is pressed against a plurality of diamond particles, so that the sharp-angled grinding ends of the diamond particles are respectively inserted into these grooves. set up. Next, the guiding mold is removed, and then a polymer material is poured into the containing unit to cover the diamond particles. The polymer material is hardened to fix the diamond particles, and then the accommodating unit is removed to complete the diamond grinding disc of the present invention.

The effect of the present invention is to provide a guide mold that can be designed as tapered grooves with different shapes, sizes and angles, so that the diamond particles can be embedded in the tapered grooves of the guide mold with the sharp grinding end, so that the diamond particles can be more effective. The opportunity of multi-turning causes multiple diamond particles to be evenly arranged and have a consistent direction orientation, so as to achieve the purpose of diamond grinding disc with good grinding effect.

The detailed features and advantages of the present invention are described in detail below in the implementation manner, and its content is enough to make any person familiar with the related art understand the technical content of the present invention and implement it accordingly, and according to the content disclosed in this specification, the patent scope of the application and the drawings Anyone who is familiar with the related art can easily understand the aforementioned purpose and advantages of the present invention.

The above descriptions about the contents of the present invention and the following descriptions of the embodiments are used to demonstrate and explain the principles of the present invention, and provide further explanations of the protection scope of the claims of the present invention.

Description of drawings

1A to 1C are schematic flow charts of the manufacturing steps of the guide mold in a preferred embodiment of the present invention;

2A to 2E are schematic diagrams of the manufacturing process of a diamond grinding disc according to a preferred embodiment of the present invention;

Fig. 3 is the schematic sectional view of diamond grinding disc of the present invention;

Fig. 4A is the structural representation of diamond grinding disc of the present invention; And

Fig. 4B is a schematic structural view of the diamond grinding disc of the present invention.

Among them, the reference signs are

100....................................Metal molds

103....................................Protrusion

104 Resin material

200....................................Guide mold

201 ................................................. groove

300...................................Accommodating unit

400................................................Plastic material

500, 500a, 500b ......... Diamond Granules

501, 501a, 501b .........Acute-angle grinding end

600....................................Pedestal

700 ...curing jelly

800 Polymer material

Detailed ways

In order to have a further understanding of the purpose, structure, features, and functions of the present invention, the following detailed descriptions are provided in conjunction with the embodiments.

The present invention uses a guide mold to adjust the arrangement direction of the diamond grains of the diamond grinding disc. First, please refer to FIGS. First, a metal mold 100 ( FIG. 1A ) is provided. The metal mold 100 has a plurality of protrusions 103 , such as cones, and the protrusions 103 are separated from each other by a fixed distance. Then, pour a resin material 104 on the metal mold 100 and cover the protruding portion 103 ( FIG. 1B ), the resin material is epoxy resin (epoxy resin). Thereafter, the resin material 104 is hardened and separated from the metal mold 100 . Since the metal mold 100 has the protruding portion 103 , the hardened resin material 104 forms a corresponding groove at the protruding portion 103 of the metal mold. After the hardened resin material 104 is separated from the metal mold 100, the guide mold 200 (FIG. 1C) of the present invention is formed, wherein the guide mold 200 has a plurality of grooves 201, and the structure of the groove is a cone, such as Triangular or quadrangular pyramids, and the pyramids can have the same side length or different side lengths. In addition, the bottom of the groove 201 of the guiding mold is V-shaped, which has an included angle, the angle is 100° to 150°, and the size of the groove 201 is 150 to 215 microns (μm). In addition, the groove 201 can be The same size or different sizes, but not limited to the disclosed embodiments of the present invention.

Next, please refer to FIG. 2A to FIG. 2E , which are schematic diagrams of the manufacturing process of a diamond grinding disc according to a preferred embodiment of the present invention. First, a housing unit 300 is provided, and a plastic material 400 is attached in the housing unit 300, and a plurality of diamond particles 500 are adhered to the plastic material 400 (Fig. 2A), wherein the diameter of the diamond particles 500 is 250 to 420 microns (μm), and have at least one sharp-angle grinding end 501 protruding from the plastic material 400 . Next, guide mold 200 is provided, and guide mold 200 is pressed against on the diamond grain 500 (Fig. 2B), and diamond grain is inserted corresponding to the groove 201 of guide mold respectively, because the groove 201 of guide mold The corresponding diamond particle 200 is set, therefore, when applying pressure on the guide mold 200, the groove 201 will change the arrangement direction of the diamond particle, so that the sharp angle grinding end 501 of the diamond particle is against the groove 201 and is in contact with the groove. The bottom of the V-shape is fitted, so that the arrangement direction of the diamond particles 200 is changed. After that, the guide mold 200 is removed.

Next, pour a polymer material 800 into the accommodation unit 300 ( FIG. 2C ), and cover the diamond particles 500 . The material of the polymer material 800 is epoxy resin, and the epoxy resin is used as a bonding agent for the diamond particles 500 , which can avoid the deformation of the base material and the deterioration of diamond particles caused by the high-temperature brazing process in the prior art. After that, the polymer material 800 is hardened to form a base 600 ( FIG. 2D ). Finally, the accommodating unit 300 and the plastic material 400 are removed to form the diamond grinding disc of the present invention ( FIG. 2E ).

It should be noted that the flatness of the surface of the base 600 formed by the polymer material is not good. In order to improve the overall flatness of the grinding disc and improve the problem of the polymer material around the diamond particle 500 being sunken after the process , can selectively form a cured glue 700 on the hardened base 600, wherein the cured glue 700 is a photocurable glue (UV glue), and by the irradiation of ultraviolet light, the photocurable glue is produced Hardened to obtain a diamond grinding disc with a flat surface and 500 diamond particles.

Please refer to FIG. 3 , which is a schematic cross-sectional view of a diamond grinding disc of the present invention, including a base 600 and a plurality of diamond particles 500, the material of the base 600 is epoxy resin, and the diamond particles 500 have at least one acute-angle grinding end 501, The diamond particles 500 are radially distributed on the base 600, and the sharp-angled grinding ends 501 are exposed on the surface of the base 600, forming a state where the sharp-angled grinding ends 501 of a plurality of diamond particles 500 are all exposed to the base 600 at the same height in the axial direction .

It is also worth noting that the diamond grinding disc of the present invention can also be formed by changing the shape, angle or size of the groove 201 of the guide mold 200, for example, when the structure of the groove 201 is a cone with different side lengths. Diamond grinding discs with diamond particles at different arrangement angles as shown in Figure 4A and Figure 4B. As shown in FIG. 4A, a plurality of diamond particles 500a are radially distributed on the base 600, and the sharp-angled grinding ends 501a of the diamond particles are based on the axis of the base 600, and gradually increase toward the outer periphery in concentric circles. The inclination angle is such that the diamond grinding disc has a shape with a high center and a low periphery. Of course, the inclination angle can also be gradually increased from the concentric circles to the axis, which is not limited to this embodiment.

In addition, a diamond grinding disc as shown in FIG. 4B can also be manufactured, wherein a plurality of diamond particles 500b are radially distributed on the base 600, and the sharp-angle grinding ends 501b of the diamond particles near the outer periphery are exposed in the axial direction. The base 600 and the rest of the diamond grains 500b gradually increase their inclination angles towards the axis of the base 600 in concentric circles, so that the diamond grinding disc has a shape with a center low and a periphery high. Those who are familiar with this technology can also design the surface morphology of diamond grinding discs into various geometric shapes to meet the requirements of diamond grinding discs in the actual application of grinding technology, and do not take the embodiments disclosed in the present invention as limit.

The diamond grinding disc of the present invention uses a guide mold with multiple grooves to press the grooves against the diamond particles, so that the sharp-angled grinding ends of the diamond particles are embedded in the grooves, so that the diamond particles are Guide the mold to adjust its arrangement direction, and coat the base formed by the polymer material with the cured jelly, in addition to greatly increasing the chance of the diamond particles turning, reducing the manufacturing cost, and will not appear in the prior art. The disadvantage of being unable to control the orientation of diamond particles by using the screen mesh can avoid the deformation of the substrate and the deterioration of diamond particles caused by the high-temperature brazing process.

Although the present invention has been disclosed above with a preferred embodiment, it is not intended to limit the present invention. Those skilled in the art can make various corresponding modifications according to the present invention without departing from the spirit and essence of the present invention. Changes and modifications, but these corresponding changes and modifications should belong to the scope of protection of the appended claims of the present invention.

Claims (18)

1. A method for manufacturing a diamond grinding disc, characterized in that, comprises the following steps: A housing unit is provided, and a plurality of diamond particles are arranged in the housing unit, and each of the diamond particles has at least one acute-angle grinding end; providing a guide mold, the guide mold has a plurality of grooves; Pressing the guide mold against the diamond particles so that the sharp-angle grinding ends of the diamond particles are respectively inserted corresponding to the grooves; remove the pilot mold; pouring a polymer material into the containing unit and covering the diamond particles; harden the polymeric material; and Remove the containment unit. 2 . The manufacturing method according to claim 1 , further comprising attaching a plastic material in the accommodating unit, and the sharp-angle grinding ends of the diamond particles protrude from the plastic material. 3. The manufacturing method according to claim 1, further comprising forming a cured jelly on the hardened polymer material. 4. The manufacturing method according to claim 3, wherein the cured jelly is a photocurable glue. 5. The manufacturing method according to claim 1, wherein the polymer material is made of epoxy resin. 6. The manufacturing method according to claim 1, wherein the forming of the grooves of the guide molds comprises the following steps: providing a metal mold having a plurality of depressions; providing a resin layer on the metal mold and covering the depressions; hardening the resin layer; and The hardened resin layer is separated from the metal mold to obtain the guide mold. 7. The manufacturing method according to claim 6, wherein the resin layer is epoxy resin. 8. The manufacturing method according to claim 6, wherein the grooves are conical. 9. The manufacturing method according to claim 8, wherein the pyramids comprise triangular pyramids or quadrangular pyramids. 10. The manufacturing method according to claim 8, wherein the tapered bodies have the same or unequal side lengths. 11 . The manufacturing method according to claim 6 , wherein the bottoms of the grooves have an included angle, and the included angle is 100° to 150°. 12. The manufacturing method as claimed in claim 6, wherein the grooves have a size of 150-215 microns, and the diamond particles have a particle size of 250-420 microns. 13 . The manufacturing method according to claim 1 , wherein the sharp-angled grinding ends of the diamond particles are respectively inserted corresponding to the grooves, so that the diamond particles are turned around. 14 . 14. A diamond grinding disc manufactured by the manufacturing method according to claim 1, characterized in that, comprising: a polymer base; and A plurality of diamond particles are arranged on the polymer base, and each of the diamond particles has at least one sharp-angle grinding end and is exposed on the surface of the polymer base. 15. The diamond grinding disc according to claim 14, wherein the polymer base is made of epoxy resin. 16. The diamond grinding disc according to claim 14, wherein the diamond particles are radially arranged on the base, and the sharp-angle grinding ends of the diamond particles are exposed axially at the same height base. 17. The diamond grinding disc according to claim 14, wherein the diamond particles are radially distributed on the base, and the sharp-angle grinding ends of the diamond particles are based on the axis of the base , gradually increasing the inclination angle toward the outer periphery in concentric circles, so that the diamond grinding disc has a shape with a high center and a low periphery. 18. The diamond grinding disc according to claim 14, wherein the diamond particles are radially distributed on the base, and the sharp-angle grinding ends of the diamond particles near the outer periphery are exposed axially On the base, the rest of the diamond particles gradually increase their inclination angles towards the axis of the base in concentric circles, so that the diamond grinding disc has a shape with a lower center and a higher periphery.

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