CN101876065A - Method of modifying inner surface of slender insulating tube by plasma discharge under normal pressure - Google Patents
Method of modifying inner surface of slender insulating tube by plasma discharge under normal pressure Download PDFInfo
- Publication number
- CN101876065A CN101876065A CN 201010186416 CN201010186416A CN101876065A CN 101876065 A CN101876065 A CN 101876065A CN 201010186416 CN201010186416 CN 201010186416 CN 201010186416 A CN201010186416 A CN 201010186416A CN 101876065 A CN101876065 A CN 101876065A
- Authority
- CN
- China
- Prior art keywords
- insulating tube
- plasma
- voltage
- normal pressure
- plasma discharge
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Images
Landscapes
- Plasma Technology (AREA)
Abstract
一种利用常压下等离子体放电对细长绝缘管内表面改性的方法，属于低温等离子体技术领域中材料表面改性技术。其特征是在待处理的细长绝缘管的两端插入边缘锋利的中空的金属电极，在这两个中空的金属电极上加上工作频率为40-50kHz范围内的调幅交流电压或脉冲，通入细长绝缘管内的氟气放电产生了高电子密度的等离子体，并根据实际需要通入所要使用的活性气体使之混合于氩载气中，产生所需的化学自由基来完成介质管内表面的改性和膜沉积。本发明的效果和益处是实现了对细长绝缘管内表面改性的目的，设计思路简洁，在降低设备成本上和增加可操作性上具有突出的优点。
The invention discloses a method for modifying the inner surface of a slender insulating tube by using plasma discharge under normal pressure, which belongs to the material surface modification technology in the field of low-temperature plasma technology. It is characterized in that hollow metal electrodes with sharp edges are inserted at both ends of the slender insulating tube to be treated, and an amplitude-modulated AC voltage or pulse with a working frequency in the range of 40-50kHz is applied to the two hollow metal electrodes. The discharge of fluorine gas into the slender insulating tube produces plasma with high electron density, and according to the actual needs, the active gas to be used is mixed with the argon carrier gas to generate the required chemical free radicals to complete the inner surface of the dielectric tube modification and film deposition. The effect and benefit of the invention is that the purpose of modifying the inner surface of the slender insulating tube is realized, the design idea is simple, and it has outstanding advantages in reducing equipment cost and increasing operability.
Description
Technical field
The invention belongs to material surface modifying technology in the lower temperature plasma technology field, relate to the argon plasma that in elongated flexible insulated dielectric tube, produces high electron density, realize the method for modifying inner surface by mixing reactive gas.
Background technology
Answer the various needs of science and technology and production practice, often require the insulation tube internal surface to want possess hydrophilic property, hydrophobicity, protection against corrosion, various characteristicses such as disinfection.The plasma body that utilizes atmosphere pressure discharging to produce carries out surface modification and thereby plated film realizes that these characteristics are technological approaches of exploring at present.Because for the rough vacuum plasma technique, on the one hand because of not needing vacuum apparatus to greatly reduce investment cost and reduced the complicacy that operation of equipment is safeguarded, thereby under atmospheric pressure can produce on the other hand the active particle shortening treatment time of greater concn.Yet under atmospheric pressure the voltage breakdown by discharge acquisition plasma body is very high, therefore to the requirement harshness of power supply, especially will produce the plasma body of big scale, and too high voltage breakdown has seriously restricted further applying of this technology.In addition, gas flow required in the normal atmosphere open system is very big, considers from the economy angle, and the carrier gas of use must adopt cheap gas could give prominence to the advantage of this technology.
At present, the fluidics that is adopted is many to be carrier gas with the helium, moreover the jet length that the fluidics that is adopted produces is not enough to satisfied requirement to the internal surface of elongated tube even processing; In addition, has the feature of the thread discharge of typical dielectric impedance by twine electrode at the medium tube outside surface at the plasma body that method produced of pipe underexcitation helium or argon gas discharging, and be limited by the thickness and the specific inductivity of medium tube wall, discharge scenario is very complicated, application conditions harshness not only, and its range of application also is very restricted.We propose a kind of method is to utilize at the inner plasma body that directly produces of medium tube, rather than see through generation plasma body electric field action under of inducing of tube wall, in the plasma discharge that with the argon gas is carrier gas, sneak into reactive gas, finish plasma chemical reaction, form the modification that various useful free radicals are realized internal surface.
Summary of the invention
The purpose of this invention is to provide a kind of argon plasma that in elongated flexible insulated dielectric tube, produces high electron density, realize the method for the modification of internal surface by mixing reactive gas.
To achieve these goals, technical scheme of the present invention is: the metal electrode that inserts the hollow of sharp edges at the two ends of elongated insulation tube, and sealing fixes and allows gas flow into from the endoporus of one of them electrode, from the endoporus of another electrode, flow out, add that on the metal electrode of these two hollows operating frequency is the voltage of alternating current in 40～50kHz scope.Increase voltage gradually, plasma jet is produced by the drive electrode end and spreads to ground-electrode, forms complete discharge channel at last.Further regulate voltage of supply, make the final arc discharging plasma that forms high electron density in the discharge channel.Then, feed the reactive gas that will use according to actual needs and make it to be mixed in the argon carrier gas, thereby produce modification or the plated film that required chemically-active particle is finished the medium tube internal surface.
The plasma discharge that utilizes under the normal pressure of the present invention feeds the reactive gas that will use in argon plasma discharge back and after forming complete discharge channel, the generation chemically-active particle to the method for elongated insulation tube modifying inner surface.
Of the present inventionly utilize that plasma discharge is to the method for elongated insulation tube modifying inner surface under the normal pressure, handled elongated tubular material is an insulating material, and is crooked arbitrarily under the situation of not stopping up gas channel.
The plasma discharge that utilizes under the normal pressure of the present invention is to the method for elongated insulation tube modifying inner surface, and described power supply is sinusoidal high-voltage power supply of pulsed modulation or pulsed high voltage generator.
Effect of the present invention and benefit are: the plasma body that has produced high electron density in elongated insulation tube, produce the processing of various active particles realization internal surfaces and the physical environment that the film deposition provides wide operation window for mixing reactive gas, since among the present invention by having selected best alternate current operation frequency that required operating voltage is reduced greatly, with respect to existing technology, design technology project of the present invention is succinct, has outstanding advantage on the reduction equipment cost and on the increase operability.
Description of drawings
Accompanying drawing is to utilize under the normal pressure plasma discharge to the method principle schematic of elongated insulation tube modifying inner surface.
Among the figure: 1 elongated insulation tube; The voltage drive electrode of 2 hollows; The ground-electrode of 3 hollows; 4 high-voltage ac powers; 5 drive electrode heat resistant joint rings; 6 ground-electrode heat resistant joint rings; 7 gas blending bins; 8 carrier gas flux meters; 9 reactive gas under meters; 10 argon bottles; 11 reactive gas bottles.
Embodiment
Be described in detail the specific embodiment of the present invention below in conjunction with technical scheme and accompanying drawing.
At first, with the pending elongated insulation tube of the ground-electrode 3 relative insertions of the voltage drive electrode 2 of hollow and hollow 1 inner about 2 centimetres, and be fixed on the end of pipe with drive electrode heat resistant joint ring 5 and ground-electrode heat resistant joint ring 6, allow working gas feed in the elongated insulation tube 1, discharge in the hole by the ground-electrode 3 of hollow by the blowhole of the voltage drive electrode 2 of hollow.High-voltage ac power 4 is applied on the voltage drive electrode 2 of hollow, optimum working frequency (OWF) is in the scope of 40～50kHz, can obtain minimum voltage breakdown, and by further increasing power stable plasma discharge of acquisition in pipe, up to the generation of arc discharge, make the electron density of internal plasma reach job requirement.The length of the elongated insulation tube 1 that institute's making alive is handled with the need and increasing.Then, in pure argon under the discharge stability, opening reactive gas under meter 9 feeds reactive gass argon gas and reactive gas is fed in the plasma body in the elongated insulation tube 1 by the blowhole of the voltage drive electrode 2 of hollow behind the thorough mixing in gas blending bin 7, produce required active free particle, thereby realize the purpose of modifying inner surface.
Claims (3)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201010186416 CN101876065A (en) | 2010-05-25 | 2010-05-25 | Method of modifying inner surface of slender insulating tube by plasma discharge under normal pressure |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201010186416 CN101876065A (en) | 2010-05-25 | 2010-05-25 | Method of modifying inner surface of slender insulating tube by plasma discharge under normal pressure |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN101876065A true CN101876065A (en) | 2010-11-03 |
Family
ID=43018744
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 201010186416 Pending CN101876065A (en) | 2010-05-25 | 2010-05-25 | Method of modifying inner surface of slender insulating tube by plasma discharge under normal pressure |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN101876065A (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102510654A (en) * | 2011-10-18 | 2012-06-20 | 大连理工大学 | Atmospheric-pulse-modulated microwave plasma generation device |
| CN105755452A (en) * | 2016-04-18 | 2016-07-13 | 北京大学 | A device for spraying TiO2 nanometer coating on the inner wall of the lumen |
| CN111954360A (en) * | 2020-09-18 | 2020-11-17 | 云南电网有限责任公司电力科学研究院 | Large-area cold plasma generating device and method based on mixed gas |
| CN113198804A (en) * | 2021-04-30 | 2021-08-03 | 辽宁科技大学 | Method and apparatus for cleaning inner wall of slender pipeline by inert gas ionization |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1382829A (en) * | 2001-04-27 | 2002-12-04 | 中国科学院物理研究所 | Method for modifying inner surface of tubular workpiece |
| CN2604846Y (en) * | 2003-02-26 | 2004-02-25 | 王守国 | Atmospheric radio-frequency cylinder external emission cold plasma generator |
| CN1851045A (en) * | 2006-05-31 | 2006-10-25 | 大连理工大学 | Slender metal pipe inner wall diamond-film-like deposition method using DC glow discharge |
-
2010
- 2010-05-25 CN CN 201010186416 patent/CN101876065A/en active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1382829A (en) * | 2001-04-27 | 2002-12-04 | 中国科学院物理研究所 | Method for modifying inner surface of tubular workpiece |
| CN2604846Y (en) * | 2003-02-26 | 2004-02-25 | 王守国 | Atmospheric radio-frequency cylinder external emission cold plasma generator |
| CN1851045A (en) * | 2006-05-31 | 2006-10-25 | 大连理工大学 | Slender metal pipe inner wall diamond-film-like deposition method using DC glow discharge |
Non-Patent Citations (2)
| Title |
|---|
| 《Applied physics letters》 20090316 Shou-Zhe Li et al. Optical diagnosis of an argon/oxygen needle plasma generated at atmospheric pressure 第111501-2页右栏第9行至111501-3页右栏第6行及图5 1-3 第94卷, 第11期 2 * |
| 《Physics of Plasmas》 20100222 Shou-Zhe Li et al. Spectroscopic study of a long high-electron-density argon plasma column generated at atmospheric pressure 第020702-1页左栏第30行至右栏第23行及图1 1-3 第17卷, 第2期 2 * |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102510654A (en) * | 2011-10-18 | 2012-06-20 | 大连理工大学 | Atmospheric-pulse-modulated microwave plasma generation device |
| CN105755452A (en) * | 2016-04-18 | 2016-07-13 | 北京大学 | A device for spraying TiO2 nanometer coating on the inner wall of the lumen |
| CN111954360A (en) * | 2020-09-18 | 2020-11-17 | 云南电网有限责任公司电力科学研究院 | Large-area cold plasma generating device and method based on mixed gas |
| CN113198804A (en) * | 2021-04-30 | 2021-08-03 | 辽宁科技大学 | Method and apparatus for cleaning inner wall of slender pipeline by inert gas ionization |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN102595757B (en) | Three-electrode discharge device for generating large-volume atmosphere pressure plasma | |
| CN103789716B (en) | A kind of atmosphere cold plasma jet is to the method for metal surface properties modification | |
| CN104936371B (en) | A kind of coreless armature dielectric impedance structure | |
| CN102307425A (en) | Combinable array plasma generating device | |
| CN206024220U (en) | A kind of low-temperature plasma jet device | |
| CN108834298A (en) | A device and method for controlling the length of radio frequency jet through auxiliary discharge | |
| CN103179772B (en) | Produce method and the special purpose device thereof of DC Atmospheric Pressure Glow Discharge | |
| CN105792495B (en) | A kind of device and method generating atmospheric pressure homogeneous plasma brush | |
| CN104411083B (en) | Device and method for producing continuous low-temperature large-section atmospheric pressure plasma plumes | |
| CN102307426A (en) | Plasma generating device | |
| CN101876065A (en) | Method of modifying inner surface of slender insulating tube by plasma discharge under normal pressure | |
| CN1851045A (en) | Slender metal pipe inner wall diamond-film-like deposition method using DC glow discharge | |
| CN103945627A (en) | Handheld large-area low-temperature plasma generator | |
| CN102510654A (en) | Atmospheric-pulse-modulated microwave plasma generation device | |
| CN108848604A (en) | A kind of portable micro-hollow cathode discharge plasma fluidic device | |
| CN115315055A (en) | A microwave cold plasma jet device | |
| CN102036460B (en) | Tabulate plasma generating device | |
| CN103220874A (en) | Plasma array based on dielectric barrier discharging | |
| KR20120005862A (en) | Low temperature atmospheric plasma jet generator | |
| CN103079328A (en) | Dielectric barrier discharge electrode and manufacture method of dielectric barrier discharge electrode | |
| CN104470180A (en) | A kind of plasma jet generation device and method based on tapered quartz glass tube | |
| KR20120005870A (en) | Capillary driven electrode type atmospheric plasma jet generator | |
| CN104284505A (en) | Atmospheric low temperature plasma flowing water powder material modification system | |
| CN105025649B (en) | The apparatus and method of inductively hot plasma are generated under a kind of low pressure | |
| CN205596439U (en) | A Portable Vortex Plasma Spray Gun |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C02 | Deemed withdrawal of patent application after publication (patent law 2001) | ||
| WD01 | Invention patent application deemed withdrawn after publication |
Open date: 20101103 |