CN101867081A - A two-dimensional chip dual-mode resonator, filter and manufacturing method thereof - Google Patents

Abstract

The present invention relates to a two-dimensional chip dual-mode resonator, a filter and a manufacturing method thereof. The two-dimensional chip dual-mode resonator includes a resonator component for exciting two degenerate resonance modes. The two-dimensional The three-dimensional chip dual-mode resonator also includes: one or more adjustment components for adjusting the resonance frequency of the degenerate resonance mode and the coupling coefficient between the two degenerate resonance modes to a preset standard, the The adjustment component is a one-dimensional or two-dimensional figure, and is located on the same plane as the resonator component. The invention can make the resonance frequency of the degenerate resonance mode of the two-dimensional chip double-mode resonator and the coupling coefficient between the two degenerate resonance modes reach the preset standard.

Description

A two-dimensional chip dual-mode resonator, filter and manufacturing method thereof

technical field

The invention relates to a microstrip filter, in particular to a two-dimensional chip double-mode filter and a manufacturing method thereof.

Background technique

In microwave engineering, microstrip resonators can form microstrip filters of different orders, a passive device that is widely used in many microwave circuits and systems to select signals of specific frequencies.

High-temperature superconducting filter is a planar device made of high-temperature superconducting materials, which is composed of several planar resonators arranged according to certain rules. Compared with conventional materials, it has low differential input loss, high out-of-band rejection and frequency selective characteristics, which can greatly improve the sensitivity of the system, but the power handling capacity of the high temperature superconducting filter is very poor. One solution is to use a two-dimensional chip resonator. Due to the large area of the two-dimensional chip resonator, it is difficult to make a high-order filter, so the frequency selection characteristics of the filter are poor. Using dual-mode technology can excite two degenerate resonance modes in the same resonator, greatly reducing the size of the filter.

Therefore, the two-dimensional chip dual-mode resonator is considered to be a solution to the poor power handling capacity of the high temperature superconducting filter. However, it is difficult to adjust the resonance frequency of the two degenerate resonance modes of the two-dimensional chip dual-mode resonator, and it is difficult to control the coupling coefficient between the two degenerate resonance modes, especially for narrow-band filters with a bandwidth less than 1%, it is difficult to obtain good filter response.

Contents of the invention

In order to solve the above-mentioned technical problems, the present invention provides a two-dimensional chip dual-mode resonator, a filter and a manufacturing method thereof, which can make the resonance frequency of the degenerate resonance mode of the two-dimensional chip dual-mode resonator and the two The coupling coefficient between the degenerate resonance modes reaches the preset standard.

The invention discloses a two-dimensional chip dual-mode resonator, which includes a resonator component for exciting two degenerate resonance modes, and the two-dimensional chip dual-mode resonator also includes:

one or more adjustment components for adjusting the resonance frequency of the degenerate resonance mode and the coupling coefficient between the two degenerate resonance modes to a preset standard,

The adjustment component is a one-dimensional or two-dimensional figure, and is located on the same plane as the resonator component.

The shape of the adjusting component is triangle, square, polygon or circle.

The adjustment component is a double broken line or a single broken line.

The adjustment component is solid or hollow.

The tuning assembly has an area less than 50% of the resonator assembly area.

The tuning component is made of the same material as the resonator component.

The invention also discloses a two-dimensional chip dual-mode filter, which includes a two-dimensional chip dual-mode resonator;

The two-dimensional chip dual-mode resonator includes a resonator component for exciting two degenerate resonance modes, and one or more resonant frequencies for adjusting the degenerate resonance mode and the two degenerate resonance modes The coupling coefficient between the resonant modes is adjusted to a preset standard, and the adjusted component is a one-dimensional or two-dimensional figure, and is located on the same plane as the resonator component.

The shape of the adjusting component is triangle, square, polygon or circle.

The adjustment component is a double broken line or a single broken line.

The adjustment component is solid or hollow.

The tuning assembly has an area less than 50% of the resonator assembly area.

The tuning component is made of the same material as the resonator component.

The invention also discloses a method for manufacturing a two-dimensional chip dual-mode resonator, which includes forming a resonator component for exciting two degenerate resonance modes, and simultaneously forming one or more adjustment components on the resonator component The plane where the resonance frequency of the degenerate resonance mode and the coupling coefficient between the two degenerate resonance modes are adjusted to a preset standard;

The adjustment component is a one-dimensional or two-dimensional figure.

The shape of the adjusting component is triangle, square, polygon or circle.

The adjustment component is a double broken line or a single broken line.

The adjustment component is solid or hollow.

The tuning assembly has an area less than 50% of the resonator assembly area.

The tuning component is made of the same material as the resonator component.

The beneficial effect of the present invention is that, by forming an adjustment component on the plane where the existing two-dimensional chip dual-mode resonator is located, the degenerate resonance mode resonance frequency and two degenerate resonances of the basic resonant unit of the dual-mode filter can be effectively adjusted Coupling coefficient between modes; and the present invention is simple and convenient, intuitive, high in adjustment efficiency, can shorten the design time of two-dimensional dual-mode filter; the present invention is not only applicable to superconducting filter but also applicable to conventional planar metal microstrip filter .

Description of drawings

Fig. 1 is the structural diagram of embodiment 1 of the two-dimensional chip double-mode resonator of the present invention;

Fig. 2 is the structural diagram of the embodiment 2 of the two-dimensional chip double-mode resonator of the present invention;

Fig. 3 is the structural diagram of the embodiment 3 of the two-dimensional chip double-mode resonator of the present invention;

Fig. 4 is the structural diagram of the embodiment 4 of the two-dimensional chip double-mode resonator of the present invention;

Fig. 5 is the structural diagram of embodiment 5 of the two-dimensional chip double-mode resonator of the present invention;

Fig. 6 is the structural diagram of the specific embodiment of the 4th order two-dimensional slice dual-mode filter of the present invention;

Fig. 7 is the reflection response simulation result figure of the 4th-order two-dimensional slice dual-mode filter of prior art;

Fig. 8 is the result diagram of the current distribution in the working frequency band of the 4th order two-dimensional sheet dual-mode filter of the prior art;

Fig. 9 is the simulation and actual filter test result diagram of the 4th order two-dimensional chip dual-mode filter of the present invention;

Fig. 10 is the result figure of the current distribution in the working frequency band of the 4th-order two-dimensional chip dual-mode filter of the present invention;

Fig. 11 is a structural diagram of a specific embodiment of the 6-order two-dimensional sheet dual-mode filter of the present invention;

Fig. 12 is a structural diagram of a specific embodiment of an 8-order two-dimensional sheet dual-mode filter of the present invention;

FIG. 13 is a structural diagram of a specific embodiment of the 12-order two-dimensional chip dual-mode filter of the present invention.

Detailed ways

The present invention will be described in further detail below in conjunction with the accompanying drawings.

The two-dimensional chip dual-mode resonator of the present invention includes a resonator component for exciting two degenerate resonance modes and one or more resonance frequencies and two degenerate resonance modes for adjusting the degenerate resonance modes The coupling coefficient between them is adjusted to a preset standard adjustment component, and the adjustment component is a one-dimensional or two-dimensional figure, and is located on the same plane as the resonator component.

The area of the tuning assembly is less than 50% of the area of the resonator assembly. The tuning component is made of the same material as the resonator component.

The resonator component is a two-dimensional chip double-mode resonator in the prior art.

Example 1

As shown in Figure 1, the resonator component in Embodiment 1 is a corner-cut square dual-mode resonator 101, and the corner-cut square dual-mode resonator 101 excites two degenerate resonance modes, respectively the first mode 1 and the second mode Mode 2. The adjustment component is a rectangular component 102, which is located on one side of the lower lateral side of the corner-cut square dual-mode resonator 101, and the long side and short side of the rectangular component 102 are respectively the same as the transverse side and vertical The sides are parallel.

The parameter a represents the length of the rectangle, and the parameter b represents the width of the rectangle. The parameter g represents the distance from the upper long side of the rectangular component 102 to the lower lateral side of the corner-cut square dual-mode resonator 101, and the parameter d represents the short side distance of the rectangular component 102 on the right side of the corner-cut square dual-mode resonator 101. The vertical edge distance.

Changing the values of parameters a and b adjusts the size of the rectangular component 102 , and adjusting the values of parameters g and d adjusts the position of the rectangular component 102 relative to the corner-cut square dual-mode resonator 101 . Determine the size and position of the rectangular component 102 through the above adjustments, so that the resonant frequency of the first mode 1 and the second mode 2 in the cut-off square dual-mode resonator 101 and the coupling coefficient between the two degenerate resonant modes reach the preset standard.

Example 2

As shown in Figure 2, the resonator component in Embodiment 2 is a corner-cut square dual-mode resonator 201, and the corner-cut square dual-mode resonator 201 excites two degenerate resonance modes, which are the first mode 1 and the second mode 2. The adjustment component is a double broken line component 202, which is located on the right vertical side of the square double-mode resonator 201 with a cut angle. parallel to the vertical side.

Example 3

As shown in Figure 3, the resonator component in Embodiment 3 is a corner-cut square dual-mode resonator 301, and the corner-cut square dual-mode resonator 301 excites two degenerate resonance modes, which are the first mode 1 and the second mode 2. The adjustment component is a rhombus component 302 located on the hypotenuse side of the square dual-mode resonator 301 with cut corners. One side of the rhombus component 302 is parallel to the hypotenuse of the corner-cut square dual-mode resonator 301 .

Example 4

As shown in Figure 4, the resonator component in Embodiment 4 is a hollow rounded square dual-mode resonator 401, and the hollow rounded square dual-mode resonator 401 excites two degenerate resonance modes, which are the first mode 1 and the second mode Two mode 2. There are two adjustment components, component 402 and rectangular component 403 respectively. Assembly 402 consists of a rectangle and two semicircles. The component 402 is located on the left vertical side of the hollow rounded square dual-mode resonator 401 , and the rectangular side of the component 402 is parallel to the vertical side of the hollow rounded square dual-mode resonator 401 . The rectangular component 403 is located on one side of the upper lateral side of the hollow rounded square dual-mode resonator 401 , and the long side of the rectangular component 403 is parallel to the lateral side of the hollow rounded square dual-mode resonator 401 .

Example 5

As shown in FIG. 5, in Embodiment 5, the resonator component is a regular triangular double-mode resonator 501 with cut corners, and the double-mode resonator 501 with regular triangles with cut corners excites two degenerate resonant modes, denoted as the first mode 1 and Second mode 2. There are two adjustment assemblies, namely a first diamond assembly 502 and a second diamond assembly 503 . The first rhombus component 502 is located on one side of a waist of the regular triangular double-mode resonator 501 with cut corners, and one side of the first rhomboid component 502 is parallel to the bottom side of the double-mode resonator 501 . The second rhombus component 503 is located on one side of the other waist of the equilateral triangular double-mode resonator 501 with cut angles, and one side of the second rhombus component 503 is parallel to the bottom side of the dual-mode resonator 501 with regular triangles with cut corners.

The two-dimensional chip dual-mode filter of the present invention includes a two-dimensional chip dual-mode resonator. The two-dimensional chip dual-mode resonator includes a resonator component for exciting two degenerate resonance modes and one or more for adjusting the frequency of the degenerate resonance mode and the coupling coefficient between the two degenerate resonance modes To a preset standard adjustment component, the adjustment component is a one-dimensional or two-dimensional figure, and is located on the same plane as the resonator component. The area of the tuning assembly is less than 50% of the area of the resonator assembly. The tuning component is made of the same material as the resonator component. The filter is a superconducting filter or a conventional planar metal microstrip filter.

As shown in FIG. 6 , taking the Chebyshev 4th order filter as an example, the filter includes two resonators. Each resonator has a square resonator that is cut off a piece of isosceles right triangle on the corner as the resonator component of the resonator, and the two corner-cut square dual-mode resonators are the first resonator component 611 and the second resonator component 611 respectively. Resonator Assembly 621 .

The first resonator assembly 611 excites two degenerate resonance modes. A first adjusting member 612 is formed on the left vertical side of the first resonator member 611 . The first adjusting component 612 is rectangular, and its long side is parallel to the vertical side of the first resonator component 611 .

A partially enlarged view of the cut corner of the first resonator assembly 611 is marked as 613, and the parameter _c2 is used to indicate the size of the cut corner. d ₂ represents the distance between the first resonator component 611 and the second resonator component 621 .

The second resonator assembly 621 excites two degenerate resonance modes. A second adjusting member 622 is formed on the right vertical side of the second resonator member 621 . The second adjustment component 622 is rectangular, and its long side is parallel to the vertical side of the second resonator component 621 .

The filter also includes two input and output coupling lines.

The size of the long side of the first adjustment component 612 is denoted as a ₂ , and the distance between the long side of the first adjustment component 612 on the right and the vertical side of the first resonator component 611 on the left is denoted as a parameter g ₂ . The tuning parameters _a2 and _g2 determine the size and position of the first adjustment component 612 so that the resonance frequency of the degenerate resonance mode of the filter and the coupling coefficient between the two degenerate resonance modes of each resonator component reach Default standard.

The simulation results of the reflection response of the 4th-order two-dimensional chip dual-mode filter without adjustment components and the current distribution in the working frequency band are shown in Figure 7 and Figure 8, respectively. The simulation results of the reflection response of the filter in the above embodiment, the actual test results, and the current distribution are shown in Fig. 9 and Fig. 10 respectively. The simulation software is sonnet.

Before adding the adjustment component, the reflection response of the filter is poor, and the reflection in the passband of the filter is less than -3dB, as shown in Figure 7. After adding the adjustment component, the reflection response of the filter can be optimized after selecting appropriate parameters , the reflection in the passband of the filter is less than -15dB, as shown in Figure 9. As shown in the simulated current distribution diagram, the brighter the current density in Figure 8 and Figure 10, the greater the current density. higher than average density.

The 6th-order dual-mode filter of the present invention is shown in Figure 11, has three resonators, is respectively the first resonator, the second resonator and the third resonator; The first resonator and the second resonator are the resonator of the present invention device, and the third resonator is a prior art resonator.

The resonator component of the first resonator is a corner-cut square dual-mode resonator 1111, which excites two degenerate resonance modes, namely the first mode 1 and the second mode 2; the adjustment component 1112 of the first resonator consists of a rectangular and a half The circular composition is located on the left vertical side of the corner-cut square dual-mode resonator 1111 , and the rectangular side of the adjustment component 1112 is parallel to the vertical side of the corner-cut square dual-mode resonator 1111 .

The resonator component of the second resonator is a corner-cut square dual-mode resonator 1121, which excites two degenerate resonance modes, namely the third mode 3 and the fourth mode 4; the second resonator has two adjustment components, the adjustment component 1122 and adjustment assembly 1123. The adjustment component 1122 is rectangular and located on the upper lateral side of the corner-cut square dual-mode resonator 1121 , and the long side of the adjustment component 1122 is parallel to the transverse side of the corner-cut square dual-mode resonator 1121 . The adjustment component 1123 is triangular and located on one side of the hypotenuse of the square dual-mode resonator 1121 with cut corners, and one side of the adjustment component 1123 is parallel to the hypotenuse.

The third resonator is a resonator in the prior art, which does not include an adjustment component, and the third resonator is a corner-cut square dual-mode resonator 1131 .

The 8th-order dual-mode filter of the present invention, as shown in FIG. 12 , has four resonators, namely the fourth resonator, the fifth resonator, the sixth resonator and the seventh resonator.

The resonator component of the fourth resonator is a corner-cut square dual-mode resonator 1211, which excites two degenerate resonance modes, namely the first mode 1 and the second mode 2; the adjustment component 1212 of the fourth resonator consists of a rectangular and a half The circular structure is located on the left vertical side of the square dual-mode resonator 1211 with cut corners, and the rectangular side is parallel to the vertical side of the square dual-mode resonator 1211 with cut corners.

The resonator component of the fifth resonator is a corner-cut square dual-mode resonator 1221, which excites two degenerate resonance modes, namely the third mode 3 and the fourth mode 4; the adjustment component 1222 of the fifth resonator is rectangular, located at On one side of the upper lateral side of the corner-cut square dual-mode resonator 1121 , the short side of the adjustment component 1222 is parallel to the vertical side of the corner-cut square dual-mode resonator 1221 .

The resonator component of the sixth resonator is a corner-cut square dual-mode resonator 1231, which excites two degenerate resonance modes, namely the fifth mode 5 and the sixth mode 6; the adjustment component 1232 of the sixth resonator is a rounded hollow The rectangle is located on the left vertical side of the square dual-mode resonator 1231 with cut corners, and the long side of the rectangle of the adjustment component 1232 is parallel to the vertical side of the square dual-mode resonator 1231 with cut corners.

The resonator component of the seventh resonator is a corner-cut square dual-mode resonator 1241, which excites two degenerate resonance modes, namely the seventh mode 7 and the eighth mode 8; the adjustment component 1242 of the seventh resonator is a single broken line, Located on the side of the upper lateral side of the corner-cut square dual-mode resonator 1241 , the long side of the adjustment component 1242 is parallel to the lateral side of the corner-cut square dual-mode resonator 1241 .

As shown in Figure 13, the 12th-order dual-mode filter of the present invention has six resonators, namely the eighth resonator, the ninth resonator, the tenth resonator, the eleventh resonator, the twelfth resonator and the twelfth resonator. Thirteen resonators; the thirteenth resonator is a prior art resonator, and the other resonators are resonators of the present invention.

The resonator component of the eighth resonator is a corner-cut square dual-mode resonator 1311, which excites two degenerate resonance modes, namely the first mode 1 and the second mode 2; the adjustment component 1312 of the eighth resonator consists of a rectangular and a half The circular structure is located on the left vertical side of the corner-cut square dual-mode resonator 1311 , and the rectangular side of the adjustment component 1312 is parallel to the vertical side of the corner-cut square dual-mode resonator 1311 .

The resonator component of the ninth resonator is a corner-cut square dual-mode resonator 1321, which excites two degenerate resonance modes, namely the third mode 3 and the fourth mode 4; the adjustment component 1322 of the ninth resonator is rectangular, located at On one side of the upper transverse side of the corner-cut square dual-mode resonator 1321 , the long side of the adjustment component 1322 is parallel to the transverse side of the corner-cut square dual-mode resonator 1321 .

The resonator component of the tenth resonator is a corner-cut square dual-mode resonator 1331, which excites two degenerate resonance modes, namely the fifth mode 5 and the sixth mode 6; the adjustment component 1332 of the tenth resonator is an isosceles right-angle The triangle is located on the upper lateral side of the square dual-mode resonator 1331 with cut corners, and the straight side of the adjustment component 1332 is parallel to the vertical side of the square dual-mode resonator 1331 with cut corners.

The resonator component of the eleventh resonator is a corner-cut square dual-mode resonator 1341, which excites two degenerate resonance modes, namely the seventh mode 7 and the eighth mode 8; the adjustment component 1342 of the eleventh resonator is hollow Ellipse, located on the side of the lower transverse side of the square dual-mode resonator 1341 with cut corners, the long axis of the adjustment component 1342 is parallel to the transverse side of the square dual-mode resonator 1341 with cut corners.

The resonator component of the twelfth resonator is a corner-cut square dual-mode resonator 1351, which excites two degenerate resonance modes, namely the ninth mode 9 and the tenth mode 10; the adjustment component 1352 of the twelfth resonator is a single The broken line is located on the side of the lower transverse side of the square dual-mode resonator 1351 with cut corners, and the long side of the adjustment component 1352 is parallel to the transverse side of the square dual-mode resonator 1351 with cut corners.

The thirteenth resonator is a corner-cut square dual-mode resonator 1361 , which excites two degenerate resonance modes, namely the eleventh mode 11 and the twelfth mode 12 .

The manufacturing method of the two-dimensional sheet dual-mode resonator of the present invention includes forming a resonator component for exciting two degenerate resonance modes, and forming one or more adjustment components on the plane where the resonator component is located to adjust The resonance frequency of the degenerate resonance mode and the coupling coefficient between the two degenerate resonance modes meet preset standards.

The superconducting microstrip resonator in the present invention is manufactured according to the usual process, that is, it is manufactured according to process steps such as photolithography, dry etching, cutting, assembling, etc., and belongs to the prior art.

Various modifications can be made to the above contents by those skilled in the art without departing from the spirit and scope of the present invention defined by the claims. Therefore, the scope of the present invention is not limited to the above description, but is determined by the scope of the claims.

Claims (13)

1. a two-dimensional sheet dual-mode resonator comprises the resonator assembly that is used to excite two kinds of degeneracy modes of resonance, it is characterized in that, described two-dimensional sheet dual-mode resonator also comprises:

One or more resonance frequencys that are used to regulate described degeneracy mode of resonance and the coupling coefficient between described two kinds of degeneracy modes of resonance be to the adjusting part of preset standard,

Described adjusting part is one dimension or X-Y scheme, is positioned at same plane with described resonator assembly.

2. two-dimensional sheet dual-mode resonator as claimed in claim 1 is characterized in that, described adjusting part be shaped as triangle, square, polygon or circle.

3. two-dimensional sheet dual-mode resonator as claimed in claim 1 is characterized in that, described adjusting part is dual slope or single broken line.

4. two-dimensional sheet dual-mode resonator as claimed in claim 2 is characterized in that, described adjusting part is solid or hollow.

5. two-dimensional sheet dual-mode resonator as claimed in claim 2 is characterized in that the area of described adjusting part is less than 50% of described resonator assembly area.

6. two-dimensional sheet dual-mode resonator as claimed in claim 1 is characterized in that,

Described adjusting part is identical with described resonator assembly material.

7. a two-dimensional sheet dual-mode filter is characterized in that, described filter comprises as any one described two-dimensional sheet dual-mode resonator in the claim 1 to 6.

8. the manufacture method of a two-dimensional sheet dual-mode resonator, it is characterized in that, comprise the resonator assembly that is formed for exciting two kinds of degeneracy modes of resonance, and form one or more adjusting parts simultaneously in plane, described resonator assembly place, arrive preset standard with resonance frequency and the coupling coefficient between described two kinds of degeneracy modes of resonance of regulating described degeneracy mode of resonance;

Described adjusting part is one dimension or X-Y scheme.

9. the manufacture method of two-dimensional sheet dual-mode resonator as claimed in claim 8 is characterized in that, described adjusting part be shaped as triangle, square, polygon or circle.

10. the manufacture method of two-dimensional sheet dual-mode resonator as claimed in claim 8 is characterized in that, described adjusting part is dual slope or single broken line.

11. two-dimensional sheet dual-mode resonator as claimed in claim 9 is characterized in that, described adjusting part is solid or hollow.

12. two-dimensional sheet dual-mode resonator as claimed in claim 9 is characterized in that, the area of described adjusting part is less than 50% of described resonator assembly area.

13. two-dimensional sheet dual-mode resonator as claimed in claim 8 is characterized in that,

Described adjusting part is identical with described resonator assembly material.

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