CN101770923B - Method for loading plasma enhanced chemical vapor deposition equipment and glass panel - Google Patents

Abstract

The invention discloses a plasma-enhanced chemical vapor deposition equipment and a glass plate loading method. The dimensions of the groove bar and the supporting wheel in the equipment are improved, so that the distance between the inner wall of the groove bar and the pole plate is greater than the thickness of the glass plate, and the track of the supporting plate wheel The width is greater than the thickness of the glass plate; in addition, a clamping mechanism support plate is fixedly connected to the outside of the U-shaped aluminum groove at both ends, the clamping mechanism support plate is fixed with a clamping mechanism bracket, and the clamping mechanism bracket corresponding to the two ends is connected with a Clamping mechanism: when loading, first put the lower clamping strips close to both sides of the lower part of the polar plate, then put the glass plate and the upper clamping strips into both sides of the polar plate at the same time, after the glass plate is loaded, put all the upper clamping strips and Take out the lower clamping strip, and finally rotate each clamping mechanism 90° in the order of the lower part first and then the upper part, so that the glass plate is close to the two sides of the polar plate to complete the loading. The invention can reduce the friction between the glass plate and the polar plate to the greatest extent, ensure the coating film quality, thereby reducing the reject rate and improving economic benefits.

Description

Plasma enhanced chemical vapor deposition equipment and glass plate loading method

technical field

The present invention relates to solar cell production technology, in particular, relates to plasma enhanced chemical vapor deposition equipment, that is, flat panel PEVCD equipment, and a corresponding glass plate loading method.

Background technique

With the continuous improvement of human productivity and living standards, people's demand for traditional energy such as oil and coal is increasing day by day. Currently the most widely used petrochemical energy is not only limited in quantity and facing depletion, but also more and more harmful to the environment. With the increasingly serious problems of resource depletion, environmental pollution and ecological damage, countries around the world have been competing to implement sustainable energy policies in recent years, hoping that inexhaustible, clean and environmentally friendly renewable energy can change the energy structure of mankind. Among them, solar energy has become the consensus of human beings to use renewable energy with its unique advantages of abundant sources, no pollution, low cost and free use.

Plasma-enhanced chemical vapor deposition equipment, that is, flat-panel PECVD (Plasma Enhanced Chmical Vapor Deposition) equipment is one of the most critical equipment in solar cell production. Plasma Enhanced Chemical Vapor Deposition (PEVCD) technology uses low-temperature plasma as an energy source. The sample is placed on a plate of glow discharge under low pressure, and the temperature of the sample is raised to a predetermined temperature by glow discharge (or an additional heating element). temperature, and then an appropriate amount of reaction gas is introduced, and the gas undergoes a series of chemical reactions and plasma reactions to form a solid film on the surface of the sample.

As shown in Figure 1 and Figure 2, the current flat-panel PECVD equipment is mainly composed of a U-shaped aluminum tank at the bottom, a support bridge, sampans on both sides, a top cover and a strip roof, and several pole plates are inserted on the support bridge. The strip-loading top plate is provided with grooved bars, and the grooved bars are used for positioning the top of the pole plate, and supporting plate wheels are symmetrically arranged on both sides of the bottom of the pole plate. Wherein the size of the groove bar and the supporting plate wheel is just to make the coated glass plate close to both sides of the pole plate after being loaded. In production, since the glass plate to be coated is inserted and taken out close to the pole plate, the glass plate and the pole plate will scratch each other due to friction, which will affect the quality of the coating. Therefore, during the production process of the solar cell plate The high scrap rate leads to poor economic benefits.

Contents of the invention

The technical problem to be solved by the present invention is to provide a plasma-enhanced chemical vapor deposition equipment with an improved structure, which can minimize the friction between the glass plate and the pole plate, ensure the quality of the coating film, thereby reducing the scrap rate and improving economic benefits.

Another technical problem to be solved by the present invention is to provide an improved glass plate loading method for plasma-enhanced chemical vapor deposition equipment, which is specially suitable for the equipment of the present invention.

In order to solve the above technical problems, the present invention is achieved through the following technical solutions:

A plasma-enhanced chemical vapor deposition equipment, comprising a U-shaped aluminum trough laid flat on the bottom, two ends of the U-shaped aluminum trough are fixed with sampans through foot brackets, and poles are fixedly inserted between the sampans. The support bridge of the pole plate, the top of the pole plate is limited by the groove bar arranged on the top plate of the strip, the two sides of the top plate of the strip are fixedly connected with the top of the sampan, and the two sides of the lower part of the pole plate are symmetrically provided with supporting plates wheel, the distance between the inner wall of the groove bar and the pole plate is greater than the thickness of the glass plate, and the track width of the supporting plate wheel is greater than the thickness of the glass plate;

The outside of the U-shaped aluminum groove at both ends is fixedly connected with a clamping mechanism support plate, and the clamping mechanism support plate is fixed with a clamping mechanism bracket, and a clamping mechanism is connected between the corresponding clamping mechanism brackets at both ends;

The supporting plate of the clamping mechanism is an angle steel with bolt holes on the surface;

The bracket of the clamping mechanism is a column with a mounting seat at the bottom, a bracket accessory is installed on the upper and lower parts of the column, the column and the bracket accessory are respectively provided with semicircular grooves, and the two semi-circular grooves are respectively installed. The circular groove is spliced into a circular through hole, and the center of the circular through hole is on the vertical centerline of the clamping mechanism bracket;

The clamping mechanism includes an elliptical cylinder with rotating knobs at both ends, and a cylindrical journal inserted in a circular through hole of the clamping mechanism bracket is arranged between the rotating knob and the elliptical cylinder.

The distance between the inner wall of the groove bar and the pole plate is 1.5 mm to 2 mm greater than the thickness of the glass plate.

The track width of the supporting wheel is 1.5 mm to 2 mm larger than the thickness of the glass plate.

Another technical solution provided by the present invention is a glass plate loading method using the above-mentioned plasma-enhanced chemical vapor deposition equipment, the method consists of the following steps:

a. In the state where the long axis of the elliptical cylinder of the clamping mechanism is vertical, first install each set of lower clamping strips close to the two sides of the lower part of the polar plate, and then put the glass plate and each set of upper clamping strips at the same time Install on both sides of the pole plate so that the upper clamping strip is located in the gap between the glass plate and the pole plate;

b. After all the glass plates are loaded, take out all the upper and lower clips;

c. Rotate each clamping mechanism by 90° in the order of the lower part and then the upper part, that is, the long axis of the elliptical cylinder of the clamping mechanism is turned to the horizontal direction, so that the glass plate is close to the two sides of the polar plate, and the loading is completed.

The above method may also consist of the following steps:

a. In the state where the long axis of the elliptical cylinder of the clamping mechanism is vertical, first install each set of lower clamping strips close to the two sides of the lower part of the polar plate, and then put the glass plate and each set of upper clamping strips at the same time Install on both sides of the pole plate so that the upper clamping strip is located in the gap between the glass plate and the pole plate;

b. After each group of glass plates is loaded, take out the corresponding upper and lower clips;

c. Turn the clamping mechanism next to the loaded glass plate by 90° in the order of first the lower part and then the upper part, the long axis of the elliptical cylinder of the clamping mechanism is turned to the horizontal direction, and the glass plate is close to the two sides of the polar plate;

d. Repeat step (b) and step (c) one by one until all the glass plates are clamped, ie the loading is completed.

The beneficial effects of the present invention are:

Through the improvement of the plasma-enhanced chemical vapor deposition equipment, especially the relevant mechanism for glass plate loading in the equipment, the loading process of the glass plate can be decomposed into two steps from the original one-time close-to-the-plate feeding: In the first step, the glass plate is fed along the loose groove and the pallet wheel track, and in the second step, the glass plate is pressed tightly by the clamping mechanism. In this way, the friction between the glass plate to be coated and the pole plate can be reduced to the greatest extent, and the problem of high scrap rate caused by scratches in the production process of solar panels can be solved, thereby reducing the scrap rate and improving economic benefits, and the structure is simple and easy to operate. convenient.

Description of drawings

Fig. 1 is the structural representation of the plasma-enhanced chemical vapor deposition equipment in the prior art;

Figure 1-1 is the front view of Figure 1;

Fig. 2 is the structural representation of plasma-enhanced chemical vapor deposition equipment of the present invention;

Figure 2-1 is the front view of Figure 2;

Figure 2-2 is a rear view of Figure 2;

Fig. 2-3 is the right view of Fig. 2;

Figure 3-1 is the front view of the long groove;

Figure 3-2 is the left view of the long groove bar;

Figure 3-3 is a top view of the long groove bar;

Figure 4-1 is the front view of the short groove;

Figure 4-2 is the left view of the short groove;

Figure 4-3 is a top view of the short groove;

Figure 5-1 is the front view of the pallet wheel;

Figure 5-2 is a left view of the pallet wheel;

Figure 6-1 is a front view of the support plate of the front clamping mechanism;

Figure 6-2 is a left view of the front clamping mechanism support plate;

Figure 6-3 is a top view of the support plate of the front clamping mechanism;

Figure 7-1 is a front view of the support plate of the rear clamping mechanism;

Figure 7-2 is a left view of the support plate of the rear clamping mechanism;

Figure 7-3 is a top view of the support plate of the rear clamping mechanism;

Fig. 8 is a schematic structural view of the clamping mechanism bracket;

Fig. 8-1 is the front view of the column in Fig. 8;

Fig. 8-2 is the left side view of column in Fig. 8;

Figure 8-3 is a top view of the column in Figure 8;

Figure 8-4 is a front view of the bracket fitting in Figure 8;

Figure 8-5 is a side view of the bracket fitting in Figure 8;

Figure 8-6 is a top view of the bracket fitting in Figure 8;

Fig. 9 is a schematic structural view of the clamping mechanism;

Figure 9-1 is a top view of Figure 9;

Figure 9-2 is a left view of Figure 9;

Figure 9-3 is a front view of Figure 9;

Figure 10-1 is a partial view of the glass plate when it is loaded but not clamped;

Figure 10-2 is a partial view of the glass plate when loaded and clamped.

In the figure: Top cover——1 Top plate with strips——2 Long groove——3

Pole plate——4 Pallet wheel——5 Support bridge——6

The first U-shaped aluminum slot——7 The second U-shaped aluminum slot——8 The third U-shaped aluminum slot——9

Foot bracket——10 Sampan——11 Front clamping mechanism support plate——12

Clamping mechanism bracket——13 Mounting seat——131 Bracket accessories——132

Circular through hole——133 Column——134 Semicircular groove——135

Clamping mechanism——14 Turn knob——141 Ellipse cylinder——142

Cylindrical journal——143 Rear clamping mechanism support plate——15 Upper clip——16

Glass plate——17 Lower clip——18

Detailed ways

Below in conjunction with accompanying drawing and embodiment the present invention will be described in further detail:

The invention provides a technical scheme for improving plasma-enhanced chemical vapor deposition equipment, that is, flat-panel PECVD equipment. Figure 1 is a schematic structural view of the main body of a flat-panel PECVD equipment in the prior art, including a first U-shaped aluminum groove 7 placed horizontally at the front end of the bottom of the equipment, a second U-shaped aluminum groove 8 in the middle, and a third U-shaped aluminum groove at the rear end 9. The two ends of the above three U-shaped aluminum grooves are respectively connected by a foot bracket 10 perpendicular to them, and are fixedly connected to the sampans 11 on both sides through the foot bracket 10 . The top of the sampan 11 is connected with a strip top plate 2 by screws, and a top cover 1 is arranged on the strip top plate 2 .

As shown in FIG. 1-1 , six support bridges 6 are arranged between the two sampans 11 , and the two ends of each support bridge 6 are respectively fixedly connected to the left and right sampans 11 by screws. The support bridge 6 is provided with a plurality of insertion slots, and each insertion slot is inserted with a pole plate 4 . The anode plate and the cathode plate are installed at intervals, and generally the lower end of the anode plate is installed through the anode plate seat.

The lower surface of the strip-loading top plate 2 is located at the position corresponding to the pole plate 4, and several columns of grooved bars 3 are installed, and each row of grooved bars 3 includes a short grooved bar arranged in the middle and four long grooves arranged on both sides. strip. The groove bar 3 is used to limit the top of the pole plate 4, thereby cooperating with the support bar 6 up and down to fix the pole plate 4 upright and ensure their verticality. The structure of the long groove bar 3 is shown in Figure 3-1 to Figure 3-3, and the structure of the short groove bar 3 is shown in Figure 4-1 to Figure 4-3, especially through Figure 3-2 and Figure 4-2 It can be seen that the middle of the groove bar 3 is provided with a deepest concave surface, which is used for inserting the pole plate 4 into it for limiting.

The lower part of the pole plate 4 is provided with supporting wheels 5 above the support bridge 6 , and the supporting wheels 5 are symmetrically arranged in a group on both sides of the pole plate 4 . The structure of a single pallet wheel 5 can be seen in Fig. 5-1 and Fig. 5-2. The inner side of the pallet wheel 5 is depressed to form a track for inserting the coated glass plate 17.

In the prior art, the dimensions of the grooved bar 3 and the supporting wheel 5 are just such that the coated glass plate 17 is placed in close contact with both sides of the pole plate 4 . That is to say, the distance between the inner wall of the groove bar 3 and the pole plate 4 is only slightly greater than the thickness of the glass plate 17, that is, the opening width L1 of the groove bar 3 in Fig. 3-2 is basically equal to the thickness of the pole plate 4 and the distance between the two glass plates 17. The sum of the thicknesses; and the track width of the supporting wheel 5 is only slightly greater than the thickness of the glass plate 17, that is, the L2 dimension length of the supporting wheel 5 in FIG. 4-1 is substantially equal to the thickness of the glass plate 17. Therefore, in production, when the coated glass plate 17 is inserted and taken out, it is all carried out close to the pole plate 4, and the glass plate 17 and the pole plate 4 will scratch each other due to friction, thereby affecting the quality of the coating.

Figure 2 and Figure 2-1 to Figure 2-3 show the improved plasma-enhanced chemical vapor deposition equipment of the present invention, which mainly improves the equipment from the following two aspects.

On the one hand, the size of the grooved bar 3 and the supporting wheel 5 is adjusted so that the distance between the inner wall of the grooved bar 3 and the pole plate 4 is greater than the thickness of the glass plate 17, and the track width of the supporting plate wheel 5 is greater than that of the glass plate 17 thickness. Generally speaking, the opening width L1 of the groove bar 3 can be increased by 3 mm to 4 mm; the dimension L2 of the pallet wheel 5 can be increased by 1.5 mm to 2 mm. Like this just can make glass plate 17 no longer cling to pole plate 4 when loading and unloading.

On the other hand, as shown in Figures 2-3, the front clamping mechanism support plate 12 and the rear clamping mechanism support plate 12 are fixed on the outside of the first U-shaped aluminum groove 7 and the third U-shaped aluminum groove 9 respectively. plate 15. Figure 6-1 to Figure 6-3 show the structure of the support plate 12 of the front clamping mechanism, which is made of angle steel, and several threaded holes are provided on the surface of the two wing plates, and one wing plate is close to the first U-shaped aluminum groove 7 and fixed thereto; then the other wing plate surface is in a horizontal state and can be used to install the clamping mechanism bracket 13. Similarly, FIG. 7-1 to FIG. 7-3 show the structure of the support plate 15 of the rear clamping mechanism.

FIG. 8 shows the assembly clamping mechanism bracket 13 after assembly, which includes a column 134 with a mounting seat 131 at the bottom, and a bracket accessory 132 mounted on the upper and lower parts of the column 134 . As shown in Figure 8-1 to Figure 8-6, the column 134 and the bracket fitting 132 are respectively provided with semicircular grooves 135, and the two semicircular grooves 135 are just spliced into a circular through hole 133 , the center of the circular through hole 133 is on the vertical centerline of the bracket 13 of the clamping mechanism. As shown in Figure 2-2, the installation and clamping mechanism bracket 13 is arranged between every two adjacent pole plates 4, only one is drawn for easy reading, and the rest are replaced by centerlines.

A clamping mechanism 14 is connected between the clamping mechanism brackets 13 corresponding to the two ends. As shown in Figure 9 and Figure 9-1 to Figure 9-3, the clamping mechanism 14 includes an elliptical cylinder 142 with rotating knobs 141 at both ends, and a The cylindrical journal 143 is used to pass through the circular through hole 133 of the clamping mechanism bracket 13 .

As shown in FIG. 10-1 and FIG. 10-2 , the elliptical cylinder 142 in the middle section of the clamping mechanism 14 can be rotated by applying force to the rotating knob 141 from the outside. As shown in Figure 10-1, when the major axis of the elliptical section of the elliptical cylinder 142 is in a vertical state, the glass plate 17 can be sent in or taken out along a relatively loose track; When the long axis is in a horizontal state, the function of clamping the glass plate 17 can be realized.

When carrying out the loading of glass plate 17, also need to use these two kinds of auxiliary parts of upper clamping bar 16 and lower clamping bar 18. The plasma-enhanced chemical vapor deposition equipment glass loading method of the present invention consists of the following steps:

a. In the state where the major axis of the elliptical cylinder 142 of the clamping mechanism 14 is vertical, each group of lower clamping strips 18 is firstly packed into the two sides of the lower part of the pole plate 4, and then the glass plate 17 and each Set the upper clamping strips 16 into both sides of the pole plate 4 at the same time, so that the upper clamping strips 16 are located in the gap between the inner wall of the groove bar 3 and the pole plate 4;

b. After all the glass plates 17 are loaded, take out all the upper clamping strips 16 and the lower clamping strips 18;

c. Rotate each clamping mechanism 14 by 90° in the order of the lower part and then the upper part, that is, the long axis of the elliptical cylinder 142 of the clamping mechanism 14 is turned to the horizontal direction, so that the glass plate 17 is close to the two sides of the pole plate 4 , the loading is complete.

The above-mentioned glass loading method can also be carried out sequentially according to the following steps:

a. In the state where the major axis of the elliptical cylinder 142 of the clamping mechanism 14 is vertical, each group of lower clamping strips 18 is firstly packed into the two sides of the lower part of the pole plate 4, and then the glass plate 17 and each Set the upper clamping strips 16 into both sides of the pole plate 4 at the same time, so that the upper clamping strips 16 are located in the gap between the inner wall of the groove bar 3 and the pole plate 4;

b. After each group of glass plates 17 is loaded, take out the corresponding upper clamping strip 16 and lower clamping strip 18;

c. Turn the clamping mechanism 14 next to the loaded glass plate 17 by 90° in the order of the lower part and then the upper part. The long axis of the elliptical cylinder 142 of the clamping mechanism 14 is turned to the horizontal direction, and the glass plate 17 is close to the Both sides of the pole plate 4;

d. Step (b) and step (c) are repeated one by one until all the glass plates 17 are clamped, that is, the loading is completed.

The difference between the above two methods mainly lies in that one is to rotate the clamping mechanism 14 after taking out each group of upper clamping strips 16 and lower clamping strips 18; Then rotate the clamping mechanism 14 in unison.

Wherein, special attention should be paid to rotating the clamping mechanism 14 in the order of lower first and then upper, so that the glass plate 17 can be safely leaned against the pole plate 4 . If the clamping mechanism 14 of the upper part is rotated earlier and then the clamping mechanism 14 of the lower part is rotated, then when the clamping mechanism 14 of the lower part is rotated, the upper end of the glass plate 17 which has leaned against the pole plate 4 must move upwards for a small distance to reach The effect that the whole glass plate 17 fits together. In this way, the upper part of the glass plate 17 will scratch the pole plate 4, therefore, the rotation sequence of the lower part and then the upper part of the clamping mechanism 14 can prevent the occurrence of this problem.

Although the preferred embodiments of the present invention have been described above in conjunction with the accompanying drawings, the present invention is not limited to the above-mentioned specific embodiments. The above-mentioned specific embodiments are only illustrative and not restrictive. Those of ordinary skill in the art Under the enlightenment of the present invention, without departing from the purpose of the present invention and the scope of protection of the claims, personnel can also make specific changes in many forms, and these all belong to the protection scope of the present invention.

Claims (5)

1. A plasma-enhanced chemical vapor deposition equipment, comprising a U-shaped aluminum tank horizontally arranged at the bottom, two ends of the U-shaped aluminum tank are fixed with sampans through foot brackets, and the sampans are fixedly plugged in There is a support bridge with pole plates, the top of the pole plates is limited by the grooves arranged on the top plate with strips, the two sides of the top plate with strips are fixedly connected with the top of the sampan, and the two sides of the lower part of the pole plates are arranged symmetrically The supporting wheel is characterized in that the distance between the inner wall of the groove and the pole plate is greater than the thickness of the glass plate, and the track width of the supporting wheel is greater than the thickness of the glass plate; The outside of the U-shaped aluminum groove at both ends is fixedly connected with a clamping mechanism support plate, and the clamping mechanism support plate is fixed with a clamping mechanism bracket, and a clamping mechanism is connected between the corresponding clamping mechanism brackets at both ends; The supporting plate of the clamping mechanism is an angle steel with bolt holes on the surface; The bracket of the clamping mechanism is a column with a mounting seat at the bottom, a bracket accessory is installed on the upper and lower parts of the column, the column and the bracket accessory are respectively provided with semicircular grooves, and the two semi-circular grooves are respectively installed. The circular groove is spliced into a circular through hole, and the center of the circular through hole is on the vertical centerline of the clamping mechanism bracket; The clamping mechanism includes an elliptical cylinder with rotating knobs at both ends, and a cylindrical journal inserted in a circular through hole of the clamping mechanism bracket is arranged between the rotating knob and the elliptical cylinder. 2 . The plasma-enhanced chemical vapor deposition device according to claim 1 , wherein the distance between the inner wall of the groove bar and the polar plate is 1.5 mm to 2 mm larger than the thickness of the glass plate. 3 . 3 . The plasma-enhanced chemical vapor deposition equipment according to claim 1 , wherein the track width of the supporting wheel is 1.5 mm to 2 mm larger than the thickness of the glass plate. 4 . 4. A glass loading method for plasma-enhanced chemical vapor deposition equipment, characterized in that the method is applied to the equipment of claim 1 and consists of the following steps: a. In the state where the long axis of the elliptical cylinder of the clamping mechanism is vertical, first install each set of lower clamping strips close to the two sides of the lower part of the polar plate, and then put the glass plate and each set of upper clamping strips at the same time Install on both sides of the pole plate so that the upper clamping strip is located in the gap between the glass plate and the pole plate; b. After all the glass plates are loaded, take out all the upper and lower clips; c. Rotate each clamping mechanism by 90° in the order of the lower part and then the upper part, that is, the long axis of the elliptical cylinder of the clamping mechanism is turned to the horizontal direction, so that the glass plate is close to the two sides of the polar plate, and the loading is completed. 5. A glass loading method for plasma-enhanced chemical vapor deposition equipment, characterized in that the method is applied to the equipment of claim 1 and consists of the following steps: a. In the state where the long axis of the elliptical cylinder of the clamping mechanism is vertical, first install each set of lower clamping strips close to the two sides of the lower part of the polar plate, and then put the glass plate and each set of upper clamping strips at the same time Install on both sides of the pole plate so that the upper clamping strip is located in the gap between the glass plate and the pole plate; b. After each group of glass plates is loaded, take out the corresponding upper and lower clips; c. Turn the clamping mechanism next to the loaded glass plate by 90° in the order of first the lower part and then the upper part, the long axis of the elliptical cylinder of the clamping mechanism is turned to the horizontal direction, and the glass plate is close to the two sides of the polar plate; d. Repeat step (b) and step (c) one by one until all the glass plates are clamped, ie the loading is completed.

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