CN202265608U - Anti-diffraction solar battery deposition device - Google Patents

Abstract

The utility model relates to a deposition device for solar cells, which belongs to the technical field of solar cells. Solve technical problems such as how to reduce the diffraction phenomenon and prevent the friction between the substrate and the electrode plate during the solar cell deposition process. The solar cell deposition device designed by the utility model includes a deposition box equipped with an electrode plate array, each electrode plate in the electrode plate array is equipped with at least two guide rail grooves, and the deposition substrate is placed between the two guide rail grooves, and An anti-friction pad is arranged between the substrate and the electrode plate, and the pad is closely attached to the contact surface of the deposition substrate and the electrode plate. The utility model has a simple structure, not only avoids the generation of diffraction, but also prevents the friction between the substrate and the electrode plate, and at the same time can realize the installation of substrates of different specifications on the same electrode plate, thereby improving the production efficiency.

Description

Anti-diffraction solar cell deposition device

technical field

The utility model relates to a deposition device for solar cells, in particular to a deposition device for preventing diffraction of thin-film solar cells during the coating process, and belongs to the technical field of solar cells.

Background technique

At present, thin-film solar cells are prepared by plasma-enhanced chemical vapor deposition (PECVD), and radio-frequency (RF) glow discharge is used to prepare the photoelectric conversion layer of the cell. When PECVD deposits thin-film solar cells, the substrate is usually placed in two forms: flat and vertical. For example, the technology disclosed in Patent No.: 200710176718.6 "PECVD equipment for growing silicon-based thin films and high-efficiency silicon-based thin-film solar cells" is The technology disclosed in the patent number: 201010197749.1 "Thin Film Deposition Equipment" adopts the form of standing substrates. Usually, the vertical substrate form is used in a single-chamber multi-chip deposition system, while the flat-laying substrate form is used in a multi-chamber single-chip continuous deposition system. Because the number of substrates deposited in the vertical substrate format is more than that of the flat substrate format, the vertical substrate format is favored. However, there is a problem of how the substrate is closely attached to the surface of the electrode plate in the form of a vertical substrate. If the substrate and the electrode plate are not tightly attached, the deposition gas will penetrate into the substrate through the gap between the substrate and the electrode plate, resulting in glow Diffraction occurs during the discharge process, which causes the film to be deposited around the light-receiving surface of the substrate, and causes the following problems: first, the subsequent laser cannot scratch the film layer around the light-receiving surface of the substrate; second, the effective area of the battery is reduced, Light cannot penetrate this film layer, which affects the electrical performance of the solar cell; thirdly, it seriously affects the appearance of the solar cell module.

The support and fixation of the vertical substrate on the surface of the electrode plate is mainly supported by wheels. There is a certain gap between the substrate and the electrode plate, which is convenient for taking and placing the substrate, and the substrate will not contact and rub against the electrode plate, but the substrate The film and the electrode plate cannot be in close contact, resulting in diffraction phenomenon and affecting the quality of the battery after deposition.

Contents of the invention

The utility model aims at the defects existing in the prior art, solves technical problems such as how to reduce the diffraction phenomenon and prevent the friction between the substrate and the electrode plate in the process of solar cell deposition, and designs a kind of substrate that does not have diffraction when standing upright and deposits PECVD fixture that does not rub against the substrate.

The technical solution adopted by the utility model to solve the technical problem: design an anti-diffraction solar cell deposition device, including a deposition box equipped with an electrode plate array, which is characterized in that each electrode plate in the electrode plate array is equipped with There are at least two guide rail grooves, and the deposition substrate is placed between the two guide rail grooves, and an anti-friction protection pad is provided between the substrate and the electrode plate, and the protection pad is closely attached to the contact surface of the deposition substrate and the electrode plate.

The substrates to be deposited are symmetrically placed on both sides of the electrode plate, and the symmetrical substrates are respectively placed in the guide rail grooves installed symmetrically at both ends of the electrode plate.

The guide rail grooves installed symmetrically at both ends of the electrode plate are arc-shaped single-sided grooves, and a platform for placing protective pads is provided on the edge.

In the electrode plate array, there is at least one electrode plate with double-sided discharge installation, and two substrates to be deposited are placed on each discharge surface, and guide rail grooves are respectively installed at the end and middle of the electrode plate, and the substrate to be deposited The sheets are placed in the guide rail grooves that are installed at the end and middle of the electrode plate.

Each discharge surface of the electrode plate array is equipped with two or more substrates, and the end and middle of the electrode plate are respectively equipped with guide rail grooves. "I"-shaped double-sided groove, and the installation position of the middle guide rail groove can be adjusted according to the size of the substrate. The substrate to be deposited is placed upright in the groove of the guide rail, and the substrate and the electrode plate are closely attached.

In the electrode plate array, two substrates to be deposited are installed on each discharge surface of the electrode plate. , the other end of the substrate is placed in the I-shaped double-sided groove in the middle of the electrode plate.

The substrate to be deposited on the electrode plate is glass or flexible substrate.

The flexible substrate to be deposited is placed in the guide rail groove of the electrode plate, and a pressing mechanism is provided on the guide rail, and the flexible substrate is pressed and stood in the guide rail groove by the pressing mechanism.

The pressing mechanism on the guide rail of the electrode plate is mainly composed of a fixed plate, a rotating shaft, a pressure spring and a positioning pin. The rotating shaft and the pressing spring are connected to the groove of the guide rail, and are installed on the electrode plate by the fixed plate. The flexible substrate to be deposited It is pressed tightly on the discharge surface of the electrode plate by the compression spring. the

Both ends of the electrode plate are equipped with guide rail grooves, and the guide rail groove on the top of the electrode plate is a "T"-shaped double-sided groove with a pressing mechanism. One side of the groove is placed with the substrate to be deposited, and the other side is equipped with a pressing device. Spring, the substrate to be deposited is pressed on the electrode plate by the pressure spring, and the flexible substrate to be deposited is pressed by the pressing mechanism to be in close contact with the electrode plate. A boss for pressing the flexible substrate is also arranged in the guide rail groove of the electrode plate.

The beneficial effect of the utility model is that a deposition fixture with a simple structure is designed, and a guide rail groove for supporting and fixing the substrate is arranged in the fixture, and the guide rail groove adopts an arc design, which is convenient for installing the substrate; There is a protective pad between them, so that the substrate can be attached to the electrode plate without friction, and the diffraction phenomenon is completely avoided. The design of the guide rail groove for installing the substrate is flexible, and the installation position of the guide rail groove can be adjusted according to the size of the substrate, so that substrates of different specifications can be installed on the same electrode plate, and solar cells of different sizes can be deposited at one time, which solves the problem of the existing single cavity Only one specification of solar cells can be deposited, and the production efficiency is improved at the same time.

Description of drawings

Fig. 1: Schematic diagram of the structure of the utility model.

Figure 2: Enlarged view of part A in Figure 1.

Figure 3: Schematic diagram of the structure of Example 1.

Figure 4: Schematic diagram of the structure of Example 2.

Figure 5: Schematic diagram of the cross-section of the arc-shaped single-sided groove 3.

Fig. 6: The schematic cross-sectional view of the I-shaped bilateral groove 3' in Fig. 4.

Fig. 7: Schematic diagram of the structure of the third embodiment.

Figure 8: An enlarged schematic view of B in Figure 7.

Figure 9: Schematic diagram of the C-C section in Figure 8.

Fig. 10: A schematic cross-sectional view of the rotating track groove in Fig. 7.

Fig. 11: Schematic diagram of the structure of the rotating shaft 7 in Fig. 7 .

Fig. 12: Schematic diagram of the structure of the fixing plate 11 in Fig. 7 .

In the figure: 1. deposition box, 2. electrode plate, 3. rail groove, 3-1, edge platform I, 3-2, lower hook arc I, 3', I-shaped double-sided groove, 3'-1, edge platform II, 3-2, lower hook arc II, 4, substrate, 5, fixing bolt, 6, anti-friction pad, 3", rotating track groove, 4', flexible substrate, 7, rotating shaft, 8, toggle Axle, 9, stage clip, 10, positioning pin, 11, fixed plate, 12, fixed bolt.

Detailed ways

Each electrode plate 2 in the deposition fixture of the present utility model is equipped with at least two guide rail grooves 3, the deposition substrate 4 is placed between the two guide rail grooves 3, and an anti-friction pad is provided between the substrate 4 and the electrode plate 6. The protective pad 6 is in close contact with the contact surface of the deposition substrate 4 and the electrode plate 2 . The design of the guide rail groove for installing the substrate is flexible. The guide rail groove at both ends of the electrode plate is a single-sided arc groove, the guide rail groove in the middle of the electrode plate is an I-shaped double-sided groove, and the double-sided groove in the middle and the arc-shaped groove at both ends of the electrode plate are single The combination of grooves can realize the installation of substrates of different specifications on the same electrode plate, and deposit solar cells of different sizes at one time, which improves the production efficiency and solves the technical difficulty that the existing single cavity can only deposit solar cells of one specification.

Embodiment one:

As shown in Figure 3, the electrode plates located on both sides in the electrode plate array in the deposition fixture are discharged on one side, and the other electrode plates are all discharged on both sides. Each discharge surface of the electrode plate is equipped with a substrate 4 to be deposited. The sheet 4 is placed in the symmetrical guide rail groove 3 at both ends of the electrode plate. The guide rail groove 3 is an arc-shaped single-sided groove, and the arc-shaped single-sided groove is installed on the edges of the two ends of the electrode plate 2 in the deposition box 1 through the fixing bolts 5 , so that the arc-shaped notches I3-2 of the arc-shaped unilateral grooves at both ends of the electrode plate face up and down, and the distance between the guide rail grooves 3 at both ends of the electrode plate is slightly larger than the size of the deposition substrate. When inserting the substrate 4 into the arc-shaped unilateral groove, first rub the anti-friction protection pad 6 into the edge platform I3-1 of the upper and lower two arc-shaped unilateral grooves. After the substrate is installed, take out the anti-friction protection pad 6 , There is a close surface contact between the electrode plate 2 and the substrate 4 . Coating film on the deposition substrate 4, after the deposition is completed, before taking out the substrate 4, rub the anti-friction protection pad 6 into the edge platform I3-1 of the two arc-shaped unilateral grooves, and then take the deposited substrate 4 .

The guide rail groove 3 on the electrode plate in the deposition fixture of the utility model is made of extruded aluminum profile, which is easy to process, not easily deformed, and low in cost. The guide rail groove 3 is made of aluminum alloy material with high hardness and will not be damaged during sandblasting cleaning , The arc-shaped structure of the arc-shaped single-sided groove is consistent with the rounded corners of the substrate, which is convenient for the substrate to rub in, and the substrate is placed firmly in the guide rail groove without shaking.

Embodiment two:

As shown in Figure 4, two substrates 4 to be deposited are installed on the discharge surface of the electrode plates in the electrode plate array in the deposition fixture, and the substrates are placed in the guide rail grooves 3 that are installed at the end and middle of the electrode plates. The guide rail groove 3 at the end of the electrode plate 2 is an arc-shaped single-sided groove 3-2, the guide rail groove 3 in the middle of the electrode plate 2 is a mirror-symmetric bilateral groove 3'-2, and one end of the substrate 4 to be deposited is placed on the electrode plate In the guide rail groove at the end, the other end of the substrate 4 is placed in the guide rail groove in the middle of the electrode plate. Install the arc-shaped single-sided groove 3-2 on the upper and lower edges of the electrode plate 2 on the deposition box 1 through the fixing bolts 5, so that the arc-shaped notch I3-2 of the arc-shaped single-sided groove is opposite up and down, and simultaneously connect the two sides The groove 3'-2 is installed in the middle of the electrode plate 2 through the fixing bolt 5. When the substrate 4 is inserted between the guide rail groove at the end of the electrode plate and the bilateral groove 3'-2 in the middle of the electrode plate, the anti-friction pad 6 rub into the edge platform I3-1 of the arc-shaped unilateral groove 3-2 and the edge platform II3'-1 of both sides 3', after the substrate is installed, take out the anti-friction protection pad 6 to make the electrode plate 2 and the substrate There is a snug surface contact between the sheets 4 . Start to coat the substrate 4 to be deposited. After the deposition is completed, before taking out the substrate 4, first wipe the anti-friction protection pad 6 between the electrode plate and the substrate, and then take the substrate 4.

When more than two substrates 4 are installed on each discharge surface of the electrode plate 2 in the electrode plate array, a plurality of mirror symmetrical bilateral grooves 3'-2 can be installed in the middle of the electrode plate, and can be based on the substrate 4 Adjust the installation position of the bilateral rail grooves according to the size, so that substrates of different specifications can be deposited in the same deposition fixture, which solves the technical problem that only one specification can be deposited in a single chamber.

Embodiment three:

As shown in Fig. 7, the deposition jig designed by the present invention is also suitable for depositing flexible thin-film solar cells. Since the flexible substrate 4' is usually made of thin polymer material or thin metal material, if the track groove 3 without a pressing mechanism is used on the upper and lower sides, the flexible substrate 4' is equivalent to being placed freely in the groove, then the flexible substrate 4' will be due to Falling down due to its own weight, bulging or waves appear in the middle part, which cannot be tightly attached to the electrode plate 2, which affects the deposition effect. Therefore, for the deposition fixture for the flexible substrate 4', it is necessary to press the upper edge of the flexible substrate 4' so that it cannot fall down. On the basis of Embodiment 1, this embodiment sets the guide rail at the upper end of the electrode plate The pressing mechanism, the flexible substrate 4 ′ is pressed by the pressing mechanism to stand in the guide rail groove 3 , and the flexible substrate 4 ′ to be deposited is pressed by the pressing mechanism to be in close contact with the electrode plate 2 . There is a pressing mechanism and the guide rail groove can be rotated. When the flexible substrate 4' is placed, the rotating shaft 7 is rotated by the toggle shaft 8 to overcome the pressure of the compression spring 9 and drive the rotating track groove 3" to rotate together, so that the flexible substrate 4' It is easy to place. When the flexible substrate 4' is placed, loosen the toggle shaft 8, and the rotating track groove 3" will be pressed against the flexible substrate 4' due to the action of the compression spring 9 pressed on it. , to realize the pressing effect on the upper edge of the flexible substrate 4 ′, so that the flexible substrate 4 ′ can be well and flatly attached to the electrode plate 2 .

See Figure 7 to Figure 12, the pressing mechanism on the guide rail of the electrode plate is mainly composed of a fixed plate 11, a rotating shaft 7, a toggle shaft 8, a pressure spring 9, a positioning pin 10 and a rotating track groove 3". The spring 9 is connected to the guide rail groove 3, and is installed on the electrode plate 2 by the fixed plate 11, and the flexible substrate 4' to be deposited is pressed on the discharge surface of the electrode plate 2 by the compression spring 9. The fixed plate 11 has good wear resistance The metal plate is fixed on the two end faces of the electrode plate 2 by the fixing bolt 12 through the fixing hole 11-2, and the through hole 11-1 that can pass the rotating shaft 7 is arranged on the fixing plate 11, and the size of the through hole 11-1 is just enough to make The rotating shaft 7 rotates freely inside it without shaking, and the rotating shaft 7 passes through the through hole 11-1 of the fixed plate 11, the clip spring 9 and the through hole 3"-1 of the rotating track groove 3" from one side, and then passes through the The stage clip 9 on the other side and the through hole 11-1 of the fixed plate 11 have a fixed hole 7-1 at the two ends of the rotating shaft 7, and the toggle shaft 8 is fixed on it, and there is also a hole on it. The positioning hole 7-2 is used to fix the rotating track groove 3" on the rotating shaft through the positioning pin 10, so that the rotating track groove 3" can rotate together with the rotating shaft 7, and the compression spring 9 is sleeved on the inner side of the rotating shaft 7 near the fixed plate 11 One presser foot presses on the electrode plate 2, and the other presser foot presses on the pressure spring groove 3"-4 of the rotating track groove 3". The section of the rotating track groove 3" is T-shaped, and there is a through hole 3 at the upper end "-1, and an arc 3"-2 concentric with the through hole 3"-1 is made on the inner top edge close to the electrode plate 2, so that the rotating track groove 3" can stick to the electrode plate 2 and rotate, and the lower part is close to the electrode The inner side of the board 2 has a substrate groove 3"-5 and a small convex circle 3"-3 at the lower end angle inward. The small convex circle 3"-3 is used to press the flexible substrate 4', and there is a compression spring groove 3 outside the lower end "-4, can make the presser foot of stage clip 9 can not slip off.

The embodiments of the present utility model have been described in detail above in conjunction with the accompanying drawings, but the present utility model is not limited to the above-mentioned embodiments. Make various changes below.

Claims (10)

1. the solar cell deposition device of an anti-diffraction; Comprise the deposition box (1) that the battery lead plate array is housed; It is characterized in that on the every electrode plate (2) in the said battery lead plate array at least two guide-track grooves (3) being housed; Deposition substrate (4) is placed between two guide-track grooves (3), and is provided with antifriction protection pad (6) between substrate (4) and the battery lead plate, and this protection pad (6) is adjacent to the contact surface of deposition substrate (4) and battery lead plate (2).

2. the solar cell deposition device of anti-diffraction according to claim 1 is characterized in that said deposition substrate (4) is installed between two symmetric guide-track grooves (3), and this guide-track groove is fixed on the edge at battery lead plate (2) two ends.

3. the solar cell deposition device of anti-diffraction according to claim 2 is characterized in that the said guide-track groove (3) that is fixed on battery lead plate (2) two ends is the monolateral groove of arc, and its edge is provided with the platform that width is placed antifriction protection pad (6).

4. the solar cell deposition device of anti-diffraction according to claim 1; Guide-track groove (3) all is equipped with at the two ends and the middle part that it is characterized in that said battery lead plate (2); The guide-track groove that wherein is positioned at two ends is the monolateral groove of arc; The guide-track groove that is positioned at the middle part is the bilateral groove of " worker " font, and the groove that is somebody's turn to do " worker " font both sides cooperates with the monolateral groove of the arc at battery lead plate two ends respectively, and deposition substrate is installed between groove and the monolateral groove of arc.

5. the solar cell deposition device of anti-diffraction according to claim 4 is characterized in that being equipped with at least on said every electrode plate (2) two deposition substrate (4).

6. the solar cell deposition device of anti-diffraction according to claim 1 is characterized in that the deposition substrate (4) on the said battery lead plate is glass or flexible base, board.

7. the solar cell deposition device of anti-diffraction according to claim 6 is characterized in that the guide-track groove (3) on the said battery lead plate is provided with hold-down mechanism, and substrate (4) is fixed in the guide-track groove (3) by hold-down mechanism, and is adjacent to battery lead plate (2).

8. the solar cell deposition device of anti-diffraction according to claim 7; The hold-down mechanism that it is characterized in that the guide-track groove (3) on the said battery lead plate mainly is made up of retaining plate (11), rotation axis (7), stage clip (9) and steady brace (10); Said rotation axis (7) is connected the guide groove (3) of guide rail with stage clip (9); And be installed on the battery lead plate (2) by retaining plate (11), treat that sedimentary flexible base, board (4 ') is pressed on the discharge face of battery lead plate (2) by stage clip (9).

9. the solar cell deposition device of anti-diffraction according to claim 8; It is characterized in that the guide-track groove (3) on the said battery lead plate is the bilateral groove of " T " shape; Wherein place in the groove on one side and remain sedimentary substrate (4); Stage clip (9) is installed in the other side groove, treats that sedimentary substrate (4) is pressed on the battery lead plate by stage clip (9).

10. the solar cell deposition device of anti-diffraction according to claim 9; Guide-track groove (3) all is equipped with at the two ends that it is characterized in that said battery lead plate; Wherein the guide-track groove of upper end is the bilateral groove of " T " shape; The guide-track groove of lower end is the monolateral groove of arc, treats in the guide-track groove (3) that sedimentary substrate (4) is a flexible base, board.

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