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CN101504366A - Oxygen concentration detecting instrument - Google Patents

Oxygen concentration detecting instrument Download PDF

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CN101504366A
CN101504366A CNA2009100715126A CN200910071512A CN101504366A CN 101504366 A CN101504366 A CN 101504366A CN A2009100715126 A CNA2009100715126 A CN A2009100715126A CN 200910071512 A CN200910071512 A CN 200910071512A CN 101504366 A CN101504366 A CN 101504366A
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diode laser
photodetector
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CN101504366B (en
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张治国
娄秀涛
高宝烈·萨姆斯菲林
陈斌
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Harbin Institute of Technology Shenzhen
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Abstract

氧气浓度检测仪，属于气体浓度检测技术领域。本发明的目的是解决现有基于光谱技术的测氧仪使用单模二极管激光器成本高、输出波长对温度变化敏感的问题。本发明信号发生器的输出端连接驱动器的输入端，驱动器的输出端连接可调谐多模二极管激光器的输入端，可调谐多模二极管激光器的输出光经准直透镜透射得到平行光，平行光经分光镜分成透射光和反射光，透射光经过样品池后入射到第一聚焦透镜聚焦后入射到第一光电探测器，反射光做为参考光最后入射到第二光电探测器，两路光信号转为电信号后经A/D转换器输入至计算机，样品池中的介质是待测氧气气体，可调谐多模二极管激光器的中心波长为760nm。本发明用于氧气浓度的监测。

Figure 200910071512

An oxygen concentration detector belongs to the technical field of gas concentration detection. The purpose of the present invention is to solve the problems that the current oxygen measuring instrument based on spectrum technology uses a single-mode diode laser with high cost and the output wavelength is sensitive to temperature changes. The output end of the signal generator of the present invention is connected to the input end of the driver, and the output end of the driver is connected to the input end of the tunable multimode diode laser. The output light of the tunable multimode diode laser is transmitted through the collimating lens to obtain parallel light, and the parallel light passes through The beam splitter is divided into transmitted light and reflected light. The transmitted light passes through the sample cell and enters the first focusing lens to focus and then enters the first photodetector. The reflected light is used as a reference light and finally enters the second photodetector. Two optical signals After being converted into an electrical signal, it is input to the computer through the A/D converter. The medium in the sample cell is oxygen gas to be measured. The center wavelength of the tunable multimode diode laser is 760nm. The invention is used for monitoring the oxygen concentration.

Figure 200910071512

Description

氧气浓度检测仪 Oxygen concentration detector

技术领域 technical field

本发明涉及一种氧气浓度检测仪，属于气体浓度检测技术领域。The invention relates to an oxygen concentration detector and belongs to the technical field of gas concentration detection.

背景技术 Background technique

对氧气浓度的精确和低成本测量在环境监测、生物医疗和工业节能等领域都具有重要意义。针对不同的具体应用对象，人们发展了各种不同种类的测氧仪，测量原理主要是基于固态电解法、顺磁法、电化电池法、化学发光法等。然而以上这几种技术都是接触测量，在工业应用中容易出现使探测装置中毒现象，并且传感探头易受腐蚀，影响仪器的使用寿命，在使用过程中需要经常校准才能保证测量的准确性。Accurate and low-cost measurement of oxygen concentration is of great significance in the fields of environmental monitoring, biomedicine and industrial energy saving. For different specific application objects, people have developed various types of oxygen measuring instruments. The measurement principles are mainly based on solid-state electrolysis, paramagnetic method, electrochemical cell method, and chemiluminescence method. However, the above-mentioned technologies are all contact measurements, which are prone to poisoning of the detection device in industrial applications, and the sensing probe is susceptible to corrosion, which affects the service life of the instrument. Frequent calibration is required during use to ensure the accuracy of the measurement. .

相比之下，基于激光光谱技术的氧气测量仪具有非接触、响应速度快、使用寿命长的优势。尤其是基于可调谐二极管激光吸收光谱技术(TDLAS)的测氧仪器更是具有高灵敏、低能耗、小型化的优点。但是TDLAS技术的缺点是：为了实现对目标气体的测量，对光源的单模输出具有很高的要求，通常的TDLAS系统必须使用单模二极管激光器才能满足这种输出的要求，而单模二极管激光器的工艺复杂性导致它的成本很高。此外，单模二极管激光器的输出波长对工作温度变化十分敏感，必须采用严格的温控设施，这提高了系统的复杂性，并且即使这样也难以保证仪器在复杂多变的工业环境中实现长期稳定测量，因此限制了基于TDLAS技术的测氧仪的广泛应用。In contrast, the oxygen measuring instrument based on laser spectroscopy has the advantages of non-contact, fast response and long service life. In particular, oxygen measuring instruments based on Tunable Diode Laser Absorption Spectroscopy (TDLAS) have the advantages of high sensitivity, low energy consumption, and miniaturization. But the disadvantage of TDLAS technology is: in order to realize the measurement of the target gas, the single-mode output of the light source has high requirements, and the usual TDLAS system must use a single-mode diode laser to meet the requirements of this output, and the single-mode diode laser The complexity of the process leads to its high cost. In addition, the output wavelength of single-mode diode lasers is very sensitive to changes in operating temperature, and strict temperature control facilities must be used, which increases the complexity of the system, and even then it is difficult to ensure long-term stability of the instrument in a complex and changeable industrial environment measurement, thus limiting the wide application of oxygen meters based on TDLAS technology.

发明内容 Contents of the invention

本发明的目的是解决现有基于光谱技术的测氧仪使用单模二极管激光器成本高、输出波长对温度变化敏感的问题，提供了一种采用可调谐多模二极管激光器的氧气浓度检测仪，它利用空气中的氧气作为参考气体，实现对氧气浓度的检测。The purpose of the present invention is to solve the problems of high cost of using single-mode diode lasers and sensitivity of output wavelength to temperature changes in existing oxygen measuring instruments based on spectrum technology, and provides an oxygen concentration detector using tunable multi-mode diode lasers, which Oxygen in the air is used as a reference gas to detect the oxygen concentration.

本发明由信号发生器、驱动器、可调谐多模二极管激光器、准直透镜、分光镜、样品池、第一聚焦透镜、第一光电探测器、反射镜组、第二聚焦透镜、第二光电探测器、A/D转换器和计算机组成，信号发生器的一个输出端连接驱动器的输入端，驱动器的输出端连接可调谐多模二极管激光器的输入端，可调谐多模二极管激光器的输出光入射到准直透镜内，经准直透镜透射得到平行光，所述平行光经分光镜分成透射光和反射光，所述透射光经过样品池后入射到第一聚焦透镜，经第一聚焦透镜聚焦后入射到第一光电探测器的光信号输入端，所述反射光经反射镜组反射后入射到第二聚焦透镜，经第二聚焦透镜聚焦后入射到第二光电探测器的光信号输入端，信号发生器的另一个输出端、第一光电探测器和第二光电探测器的电信号输出端分别连接A/D转换器的一个输入端，A/D转换器的输出端连接计算机的输入端，样品池中的介质是待测氧气气体，可调谐多模二极管激光器的中心波长为760nm。The present invention consists of a signal generator, a driver, a tunable multimode diode laser, a collimating lens, a beam splitter, a sample pool, a first focusing lens, a first photodetector, a mirror group, a second focusing lens, and a second photodetector Composed of a device, an A/D converter and a computer, one output end of the signal generator is connected to the input end of the driver, and the output end of the driver is connected to the input end of the tunable multimode diode laser, and the output light of the tunable multimode diode laser is incident on the In the collimator lens, parallel light is transmitted through the collimator lens, and the parallel light is divided into transmitted light and reflected light by the beam splitter. The transmitted light enters the first focusing lens after passing through the sample cell, and after being focused by the first focusing lens Incident to the optical signal input end of the first photodetector, the reflected light is incident to the second focusing lens after being reflected by the mirror group, and incident to the optical signal input end of the second photodetector after being focused by the second focusing lens, The other output end of the signal generator, the electrical signal output ends of the first photodetector and the second photodetector are respectively connected to an input end of the A/D converter, and the output end of the A/D converter is connected to the input end of the computer , the medium in the sample cell is oxygen gas to be measured, and the central wavelength of the tunable multimode diode laser is 760nm.

本发明的优点是：The advantages of the present invention are:

本发明能够实现在监测仪器处于复杂多变环境的情况下对氧气浓度的精确检测。在具备TDLAS技术高灵敏、高选择、快速响应的基础上，通过采用生产工艺简单、价格低廉的760nm可调谐多模二极管激光器作为光源，多模二极管激光器的成本仅为同类单模二极管激光器的十分之一，大大降低了测量装置的成本；通过引入关联光谱技术利用空气中的氧气做适时关联校准，对激光输出波长的稳定性要求大大降低，测量结果对环境温度变化不再敏感，提高了长期测量的稳定性。The invention can realize accurate detection of the oxygen concentration under the condition that the monitoring instrument is in a complex and changeable environment. On the basis of high sensitivity, high selectivity and fast response of TDLAS technology, by using 760nm tunable multi-mode diode laser with simple production process and low price as light source, the cost of multi-mode diode laser is only ten times that of similar single-mode diode laser 1/1, which greatly reduces the cost of the measurement device; by introducing correlation spectroscopy technology and using oxygen in the air for timely correlation calibration, the stability requirements for the laser output wavelength are greatly reduced, and the measurement results are no longer sensitive to ambient temperature changes. Long-term measurement stability.

附图说明 Description of drawings

图1是本发明的整体结构示意图。Fig. 1 is a schematic diagram of the overall structure of the present invention.

具体实施方式 Detailed ways

具体实施方式一：下面结合图1说明本实施方式，本实施方式由信号发生器1、驱动器2、可调谐多模二极管激光器3、准直透镜4、分光镜5、样品池6、第一聚焦透镜7、第一光电探测器8、反射镜组9、第二聚焦透镜10、第二光电探测器11、A/D转换器12和计算机13组成，信号发生器1的一个输出端连接驱动器2的输入端，驱动器2的输出端连接可调谐多模二极管激光器3的输入端，可调谐多模二极管激光器3的输出光入射到准直透镜4内，经准直透镜4透射得到平行光，所述平行光经分光镜5分成透射光和反射光，所述透射光经过样品池6后入射到第一聚焦透镜7，经第一聚焦透镜7聚焦后入射到第一光电探测器8的光信号输入端，所述反射光经反射镜组9反射后入射到第二聚焦透镜10，经第二聚焦透镜10聚焦后入射到第二光电探测器11的光信号输入端，信号发生器1的另一个输出端、第一光电探测器8和第二光电探测器11的电信号输出端分别连接A/D转换器12的一个输入端，A/D转换器12的输出端连接计算机13的输入端，样品池6中的介质是待测氧气气体，可调谐多模二极管激光器3的中心波长为760nm。Specific Embodiment 1: The present embodiment will be described below in conjunction with FIG. 1. This embodiment consists of a signal generator 1, a driver 2, a tunable multimode diode laser 3, a collimator lens 4, a beam splitter 5, a sample cell 6, and a first focus Lens 7, first photodetector 8, mirror group 9, second focusing lens 10, second photodetector 11, A/D converter 12 and computer 13, one output end of signal generator 1 is connected to driver 2 The input end of the driver 2 is connected to the input end of the tunable multimode diode laser 3, the output light of the tunable multimode diode laser 3 is incident into the collimator lens 4, and the collimator lens 4 is transmitted to obtain parallel light, so The parallel light is divided into transmitted light and reflected light by the beam splitter 5, the transmitted light is incident on the first focusing lens 7 after passing through the sample cell 6, and the light signal incident on the first photodetector 8 after being focused by the first focusing lens 7 The input end, the reflected light is incident on the second focusing lens 10 after being reflected by the mirror group 9, and is incident on the optical signal input end of the second photodetector 11 after being focused by the second focusing lens 10, the other of the signal generator 1 An output end, the electrical signal output end of the first photodetector 8 and the second photodetector 11 are respectively connected to an input end of the A/D converter 12, and the output end of the A/D converter 12 is connected to the input end of the computer 13 , the medium in the sample cell 6 is oxygen gas to be measured, and the center wavelength of the tunable multimode diode laser 3 is 760nm.

可调谐多模二极管激光器3的波长为760nm-765nm可调。The wavelength of the tunable multimode diode laser 3 is adjustable from 760nm to 765nm.

工作原理：信号发生器1通过频率为f1的正弦波调制产生频率为f2的锯齿波，f1的频率大于f2频率的100倍，锯齿波信号加载到可调谐多模二极管激光器3的驱动器2上对可调谐多模二极管激光器3的输出光频率进行调谐和调制，使得输出光的频率在f1频率震荡下以f2的频率扫过760nm附近的氧气吸收线；可调谐多模二极管激光器3的输出光通过一个准直透镜4准直后由一个分光镜5分成两路光束：一路通过装有未知浓度氧气的样品池6后，由第一聚焦透镜7聚焦后入射到第一光电探测器8的光接收面上；另一路作为参考光通过一个反射镜组9后由第二聚焦透镜10聚焦后入射到第二光电探测器11的光接收面上；两路光电探测器产生的电信号通过A/D转换器12将模拟信号转换成数字电信号，然后输入到计算机13进行处理。信号发生器1产生的TTL触发信号用于同步A/D转换器12的模数转换过程，保证样品信号和参考信号的同步性。计算机13从带调制的数字信号中解调出频率为2f1的二次谐波信号，并依据计算式Cs＝As(ω0)I0rLrCr/Ar(ω0)I0sLs得出待测气体中的氧气浓度。式中Cs为样品池中含有的待测氧气浓度，As(ω0)为样品光的二次谐波信号，I0s为入射到样品池的初始光强，Cr为空气中的氧气浓度，Lr为参考光通过空气的光学长度，Ar(ω0)为参考光的二次谐波信号，I0r为参考光入射到空气的初始光强，Ls为样品光通过样品池的光学长度。Working principle: signal generator 1 generates a sawtooth wave with frequency f2 through sine wave modulation with frequency f1 , the frequency of f1 is greater than 100 times the frequency of f2 , and the sawtooth wave signal is loaded to the tunable multimode diode laser 3 The frequency of the output light of the tunable multimode diode laser 3 is tuned and modulated on the driver 2, so that the frequency of the output light sweeps the oxygen absorption line near 760nm at the frequency of f2 under f1 frequency oscillation; the tunable multimode diode laser The output light of the laser 3 is collimated by a collimator lens 4 and then divided into two beams by a beam splitter 5: one beam passes through a sample cell 6 with an unknown concentration of oxygen, is focused by the first focusing lens 7, and then enters the first photoelectric beam. on the light-receiving surface of the detector 8; the other road is incident on the light-receiving surface of the second photodetector 11 after being focused by the second focusing lens 10 after passing through a reflector group 9 as a reference light; the two-way photodetector produces The electrical signal is converted from an analog signal into a digital electrical signal by an A/D converter 12, and then input to a computer 13 for processing. The TTL trigger signal generated by the signal generator 1 is used to synchronize the analog-to-digital conversion process of the A/D converter 12 to ensure the synchronization between the sample signal and the reference signal. The computer 13 demodulates the second harmonic signal with a frequency of 2f 1 from the modulated digital signal, and according to the calculation formula C s =A s (ω 0 )I 0r L r C r /A r (ω 0 )I 0s L s to obtain the oxygen concentration in the gas to be measured. In the formula, C s is the oxygen concentration to be measured in the sample cell, A s (ω 0 ) is the second harmonic signal of the sample light, I 0s is the initial light intensity incident on the sample cell, and C r is the oxygen in the air concentration, L r is the optical length of the reference light passing through the air, A r (ω 0 ) is the second harmonic signal of the reference light, I 0r is the initial light intensity of the reference light incident on the air, L s is the sample light passing through the sample cell the optical length.

具体实施方式二：本实施方式与实施方式一的不同之处在于反射镜组9由多个反射镜组成，入射到反射镜组9的光经过每个反射镜的反射后入射到所述第二聚焦透镜10。其它组成及连接方式与实施方式一相同。Embodiment 2: The difference between this embodiment and Embodiment 1 is that the reflector group 9 is composed of a plurality of reflectors, and the light incident on the reflector group 9 is incident on the second reflector after being reflected by each reflector. Focusing lens 10. Other composition and connection methods are the same as those in Embodiment 1.

反射镜组9的作用是让参考光在有限的空间内通过更长的吸收光程，提高参考信号的信噪比，从而提高测量的精度。The function of the mirror group 9 is to allow the reference light to pass through a longer absorption path in a limited space, so as to improve the signal-to-noise ratio of the reference signal, thereby improving the measurement accuracy.

Claims (2)

1、一种氧气浓度检测仪，其特征在于它由信号发生器(1)、驱动器(2)、可调谐多模二极管激光器(3)、准直透镜(4)、分光镜(5)、样品池(6)、第一聚焦透镜(7)、第一光电探测器(8)、反射镜组(9)、第二聚焦透镜(10)、第二光电探测器(11)、A/D转换器(12)和计算机(13)组成，信号发生器(1)的一个输出端连接驱动器(2)的输入端，驱动器(2)的输出端连接可调谐多模二极管激光器(3)的输入端，可调谐多模二极管激光器(3)的输出光入射到准直透镜(4)内，经准直透镜(4)透射得到平行光，所述平行光经分光镜(5)分成透射光和反射光，所述透射光经过样品池(6)后入射到第一聚焦透镜(7)，经第一聚焦透镜(7)聚焦后入射到第一光电探测器(8)的光信号输入端，所述反射光经反射镜组(9)反射后入射到第二聚焦透镜(10)，经第二聚焦透镜(10)聚焦后入射到第二光电探测器(11)的光信号输入端，信号发生器(1)的另一个输出端、第一光电探测器(8)和第二光电探测器(11)的电信号输出端分别连接A/D转换器(12)的一个输入端，A/D转换器(12)的输出端连接计算机(13)的输入端，样品池(6)中的介质是待测氧气气体，可调谐多模二极管激光器(3)的中心波长为760nm。1. An oxygen concentration detector, characterized in that it consists of a signal generator (1), a driver (2), a tunable multimode diode laser (3), a collimating lens (4), a beam splitter (5), a sample Pool (6), first focusing lens (7), first photodetector (8), mirror group (9), second focusing lens (10), second photodetector (11), A/D conversion Composed of a device (12) and a computer (13), an output end of the signal generator (1) is connected to an input end of a driver (2), and an output end of the driver (2) is connected to an input end of a tunable multimode diode laser (3) , the output light of the tunable multimode diode laser (3) is incident into the collimator lens (4), and is transmitted through the collimator lens (4) to obtain parallel light, and the parallel light is divided into transmitted light and reflected light by a beam splitter (5) The transmitted light is incident on the first focusing lens (7) after passing through the sample cell (6), and is incident on the optical signal input end of the first photodetector (8) after being focused by the first focusing lens (7). The reflected light is incident on the second focusing lens (10) after being reflected by the mirror group (9), is incident on the optical signal input end of the second photodetector (11) after being focused by the second focusing lens (10), and the signal is generated The other output end of the device (1), the electrical signal output end of the first photodetector (8) and the second photodetector (11) are respectively connected to an input end of the A/D converter (12), and the A/D The output end of the converter (12) is connected to the input end of the computer (13), the medium in the sample cell (6) is oxygen gas to be measured, and the center wavelength of the tunable multimode diode laser (3) is 760nm. 2、根据权利要求1所述的氧气浓度检测仪，其特征在于反射镜组(9)由多个反射镜组成，入射到反射镜组(9)的光经过每个反射镜的反射后入射到所述第二聚焦透镜(10)。2. The oxygen concentration detector according to claim 1, characterized in that the reflector group (9) is composed of a plurality of reflectors, and the light incident on the reflector group (9) is incident on the reflector after being reflected by each reflector. The second focusing lens (10).
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