CN106596444A - Oxygen concentration measuring system based on ultraviolet broadband absorption spectrum and measuring method - Google Patents
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- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 title claims abstract description 72
- 239000001301 oxygen Substances 0.000 title claims abstract description 72
- 229910052760 oxygen Inorganic materials 0.000 title claims abstract description 72
- 238000000862 absorption spectrum Methods 0.000 title claims abstract description 16
- 238000000034 method Methods 0.000 title claims abstract description 15
- 239000007789 gas Substances 0.000 claims abstract description 65
- 238000005259 measurement Methods 0.000 claims abstract description 28
- 239000013307 optical fiber Substances 0.000 claims abstract description 17
- YZCKVEUIGOORGS-OUBTZVSYSA-N Deuterium Chemical compound [2H] YZCKVEUIGOORGS-OUBTZVSYSA-N 0.000 claims abstract description 12
- 229910052805 deuterium Inorganic materials 0.000 claims abstract description 12
- 238000000691 measurement method Methods 0.000 claims abstract description 7
- 230000003595 spectral effect Effects 0.000 claims abstract description 4
- 230000003287 optical effect Effects 0.000 claims description 16
- 239000010453 quartz Substances 0.000 claims description 9
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 9
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- 238000002835 absorbance Methods 0.000 claims description 6
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 4
- 229910052757 nitrogen Inorganic materials 0.000 claims description 2
- 238000005516 engineering process Methods 0.000 abstract description 7
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- 238000001228 spectrum Methods 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 description 2
- 238000011088 calibration curve Methods 0.000 description 2
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- 238000010791 quenching Methods 0.000 description 1
- 230000000171 quenching effect Effects 0.000 description 1
- 238000000411 transmission spectrum Methods 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
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Abstract
一种基于紫外宽带吸收光谱的氧气浓度测量系统及测量方法。涉及一种气体浓度的检测装置及方法。为了解决氧传感器技术测量氧气浓度时，稳定性差、误差大、维护困难、成本高、灵敏度不高的问题。本发明所述的氘灯发出的紫外宽带光经过第一透镜准直为平行光后射入气体池内，经过待测氧气吸收导致平行光的光谱强度减弱形成透射光；透射光经过第二透镜汇聚后经过光纤入射到光谱仪中，光谱仪将汇聚光转换为数据信号；计算机对光谱仪的数据信号进行数据处理，得出待测氧气的浓度。有益效果为降低了测量结果的不确定性，测量误差小、测量结果更精确，抗干扰能力强，灵敏度高。适用于工业过程中的氧气监测、环境大气监测。
An oxygen concentration measurement system and measurement method based on ultraviolet broadband absorption spectrum. The invention relates to a gas concentration detection device and method. In order to solve the problems of poor stability, large error, difficult maintenance, high cost and low sensitivity when oxygen sensor technology measures oxygen concentration. The ultraviolet broadband light emitted by the deuterium lamp of the present invention is collimated into parallel light by the first lens and then injected into the gas pool, and the spectral intensity of the parallel light is weakened to form transmitted light after being absorbed by the oxygen to be measured; the transmitted light is converged by the second lens After that, it enters the spectrometer through the optical fiber, and the spectrometer converts the concentrated light into a data signal; the computer processes the data signal of the spectrometer to obtain the concentration of oxygen to be measured. The beneficial effect is that the uncertainty of the measurement result is reduced, the measurement error is small, the measurement result is more accurate, the anti-interference ability is strong, and the sensitivity is high. It is suitable for oxygen monitoring and ambient air monitoring in industrial processes.
Description
技术领域technical field
本发明涉及一种气体浓度的检测装置及方法。The invention relates to a gas concentration detection device and method.
背景技术Background technique
氧气(O2)不仅是大气中的重要组成物质，也是工业生产过程和医疗仪器中的重要气体，对氧气进行浓度监测对环境监测、工业过程控制等方面都有着重要作用。氧气是助燃气体，在工业生产过程当中，实时并准确地在线监控和反馈氧气浓度，并根据要求进行控制是节能减排的重要手段之一。同时，在金属冶炼、无氧焊接等行业中，痕量氧气检监测可以保证工业生产的顺利进行和操作人员的安全。因此，无论是环境监测，还是工业生产过程控制，都对发展高灵敏度、高准确性、实时性强、便携小型化的氧气浓度检测仪器有极大需要。Oxygen (O 2 ) is not only an important component of the atmosphere, but also an important gas in industrial production processes and medical instruments. Monitoring the concentration of oxygen plays an important role in environmental monitoring and industrial process control. Oxygen is a combustion-supporting gas. In the process of industrial production, real-time and accurate online monitoring and feedback of oxygen concentration, and control according to requirements is one of the important means of energy saving and emission reduction. At the same time, in metal smelting, oxygen-free welding and other industries, trace oxygen detection and monitoring can ensure the smooth progress of industrial production and the safety of operators. Therefore, whether it is environmental monitoring or industrial production process control, there is a great need for the development of oxygen concentration detection instruments with high sensitivity, high accuracy, strong real-time performance, portability and miniaturization.
氧传感器技术被广泛应用于氧气测量，采用氧传感器技术测量O2浓度仍然存在一些问题，限制了这种技术在工业中的应用。氧传感器主要包括：原电池式，氧气能力充足时输出平稳，但稳定性保持方面仍有待改进；热磁式，使用过程中无损耗、寿命长，但响应速度慢、测量误差大、易发生堵塞、元件腐蚀；氧化锆式，适用于650℃以上高温环境，工作温度高，不适用于低温环境，制备工艺复杂，成本高；荧光淬灭式，荧光强度很弱，易受干扰、精度不高；吸收光谱技术，利用了气体在特定波段的特征吸收强度与浓度之间的固定关系来实现气体浓度的测量，可实现氧气浓度的长时间、实时测量，稳定性好。吸收光谱技术中，气体的吸收满足Beer-Lambert定律，即I(λ)＝I0(λ)exp(-σ(λ)CL)，式中，I(λ)表示在波长λ处探测到的透射光强，I0(λ)表示在波长λ处的入射光强，C为O2的浓度，L为吸收的光程长度，σ(λ)为O2的吸收截面；由此公式能够得出，吸收光谱技术的吸光度A为A＝ln(I0(λ)/I(λ))。目前常采用O2在760nm附近的吸收进行O2测量，但O2在红外波段的吸收信号很小，测量误差大，导致测量结果灵敏度不高，同时，红外吸收的特异性不高，容易受其他干扰气体的影响，并且红外探测的成本会随探测性能的提高而急剧上升。Oxygen sensor technology is widely used in oxygen measurement, and there are still some problems in measuring O2 concentration with oxygen sensor technology, which limit the application of this technology in industry. Oxygen sensors mainly include: primary battery type, stable output when the oxygen capacity is sufficient, but the stability needs to be improved; thermal magnetic type, no loss during use, long life, but slow response speed, large measurement error, and prone to blockage , Component corrosion; zirconia type, suitable for high temperature environments above 650°C, high working temperature, not suitable for low temperature environments, complex preparation process, high cost; fluorescence quenching type, weak fluorescence intensity, susceptible to interference, and low precision ; Absorption spectroscopy technology uses the fixed relationship between the characteristic absorption intensity and concentration of gas in a specific band to realize the measurement of gas concentration, which can realize long-term and real-time measurement of oxygen concentration with good stability. In the absorption spectroscopy technique, the absorption of gas satisfies the Beer-Lambert law, that is, I(λ)=I 0 (λ)exp(-σ(λ)CL), where I(λ) represents the gas detected at the wavelength λ The transmitted light intensity, I 0 (λ) represents the incident light intensity at the wavelength λ, C is the concentration of O 2 , L is the optical path length of absorption, and σ(λ) is the absorption cross section of O 2 ; from this formula, It is shown that the absorbance A of the absorption spectroscopy technique is A=ln(I 0 (λ)/I(λ)). At present, the absorption of O 2 near 760nm is often used to measure O 2 , but the absorption signal of O 2 in the infrared band is very small, and the measurement error is large, resulting in low sensitivity of the measurement results. At the same time, the specificity of infrared absorption is not high, and it is easy to be affected The influence of other interfering gases, and the cost of infrared detection will rise sharply with the improvement of detection performance.
因此，我们需要寻找新的具有大吸收截面、吸收特性明显的吸收波段来实现O2的精准测量。Therefore, we need to find new absorption bands with large absorption cross-section and obvious absorption characteristics to realize the precise measurement of O 2 .
发明内容Contents of the invention
本发明的目的是为了解决氧传感器技术测量氧气浓度时，稳定性差、误差大、维护困难、成本高、灵敏度不高的问题。提出了一种基于紫外宽带吸收光谱的氧气浓度测量系统及测量方法。The purpose of the present invention is to solve the problems of poor stability, large error, difficult maintenance, high cost and low sensitivity when oxygen sensor technology measures oxygen concentration. An oxygen concentration measurement system and measurement method based on ultraviolet broadband absorption spectroscopy are proposed.
本发明所述的一种基于紫外宽带吸收光谱的氧气浓度测量系统，该系统包括氘灯、第一透镜、气体池、第二透镜、光纤和光谱仪；An oxygen concentration measurement system based on ultraviolet broadband absorption spectrum according to the present invention, the system includes a deuterium lamp, a first lens, a gas cell, a second lens, an optical fiber and a spectrometer;
所述氘灯发出的紫外宽带光，经过第一透镜，射入气体池内，气体池的出射光经过第二透镜，射入光纤的一端；The ultraviolet broadband light emitted by the deuterium lamp is injected into the gas cell through the first lens, and the outgoing light of the gas cell is injected into one end of the optical fiber through the second lens;
所述光纤的另一端与光谱仪的光信号接收端相连；The other end of the optical fiber is connected to the optical signal receiving end of the spectrometer;
所述光谱仪的数据信号输入输出端与计算机相连；The data signal input and output terminals of the spectrometer are connected with the computer;
所述气体池内充入待测氧气。The gas cell is filled with oxygen to be tested.
优选的是，所述第一透镜和第二透镜均为石英凸透镜。Preferably, both the first lens and the second lens are quartz convex lenses.
优选的是，所述气体池设置有入射窗口、出射窗口、入气口和出气口；Preferably, the gas cell is provided with an incident window, an exit window, a gas inlet and a gas outlet;
气体池为圆柱型气体池，入射窗口和出射窗口分别位于圆柱型气体池的两个端面上，入气口和出气口分别位于圆柱型气体池的两端侧壁上；The gas cell is a cylindrical gas cell, the incident window and the exit window are respectively located on the two end faces of the cylindrical gas cell, and the gas inlet and the gas outlet are respectively located on the two side walls of the cylindrical gas cell;
所述入射窗口和出射窗口上均为石英窗口。Both the incident window and the exit window are quartz windows.
本发明所述的一种基于紫外宽带吸收光谱的氧气浓度测量系统的测量方法，该方法包括以下步骤：A kind of measurement method of the oxygen concentration measuring system based on ultraviolet broadband absorption spectrum of the present invention, the method comprises the following steps:
步骤一、氘灯发出的紫外宽带光经过第一透镜准直为平行光；Step 1, the ultraviolet broadband light emitted by the deuterium lamp is collimated into parallel light through the first lens;
步骤二、平行光射入气体池内，平行光经过待测氧气吸收导致平行光的光谱强度减弱形成透射光；Step 2. Parallel light is injected into the gas cell, and the spectral intensity of the parallel light is weakened to form transmitted light after being absorbed by the oxygen to be measured;
步骤三、透射光经过第二透镜汇聚后，形成汇聚光；Step 3, the transmitted light is converged by the second lens to form converged light;
步骤四；汇聚光经过光纤入射到光谱仪中，光谱仪将汇聚光转换为数据信号；Step 4: The concentrated light is incident into the spectrometer through the optical fiber, and the spectrometer converts the concentrated light into a data signal;
步骤五、计算机对光谱仪的数据信号进行数据处理，得出待测氧气的浓度。Step 5, the computer performs data processing on the data signal of the spectrometer to obtain the concentration of oxygen to be measured.
优选的是，所述步骤五中计算机对光谱仪的数据信号进行数据处理过程为：对待测氧气吸收处于186nm-200nm波段的平行光的吸收度进行积分，得到与待测氧气浓度相关的光学参量OP，通过将待测氧气浓度的光学参量OP与系统的氧气浓度定标曲线进行对比，得出待测氧气浓度。Preferably, in the step five, the computer performs data processing on the data signal of the spectrometer as follows: integrating the absorbance of the parallel light absorbed by the oxygen to be measured in the 186nm-200nm band to obtain the optical parameter OP related to the oxygen concentration to be measured , by comparing the optical parameter OP of the oxygen concentration to be measured with the oxygen concentration calibration curve of the system, the oxygen concentration to be measured is obtained.
本发明的有益效果是采用紫外吸收光谱技术，同时选用186nm-200nm波段的待测氧气吸收，该波段的吸收截面大，吸收截面能够达到10-21量级，从而提高光谱仪的数据信号、提高整体光谱的信噪比，降低了测量结果的不确定性，测量误差小、测量结果更精确；吸收特征明显，对外界环境的抗干扰能力强，灵敏度高；数据处理过程简单，操作简便，系统稳定性高、实时性高，成本低，无需定期维护。The beneficial effect of the present invention is that the ultraviolet absorption spectrum technology is adopted, and the oxygen absorption to be measured is selected at the same time in the 186nm -200nm band. The signal-to-noise ratio of the spectrum reduces the uncertainty of the measurement results, the measurement error is small, and the measurement results are more accurate; the absorption characteristics are obvious, the anti-interference ability to the external environment is strong, and the sensitivity is high; the data processing process is simple, easy to operate, and the system is stable. High performance, high real-time performance, low cost, no need for regular maintenance.
附图说明Description of drawings
图1为具体实施方式一所述的一种基于紫外宽带吸收光谱的氧气浓度测量系统的结构示意图；Fig. 1 is a schematic structural diagram of an oxygen concentration measurement system based on ultraviolet broadband absorption spectroscopy described in Embodiment 1;
图2为具体实施方式三中气体池的结构示意图；Fig. 2 is the structural representation of the gas pool in the specific embodiment 3;
图3为具体实施方式五中入射光谱、透射光谱及吸收光谱的示意图；Fig. 3 is the schematic diagram of incident spectrum, transmission spectrum and absorption spectrum in specific embodiment five;
图4为具体实施方式五中光学参量OP与氧气浓度关系示意图。Fig. 4 is a schematic diagram of the relationship between the optical parameter OP and the oxygen concentration in Embodiment 5.
具体实施方式detailed description
具体实施方式一：结合图1说明本实施方式，本实施方式所述的一种基于紫外宽带吸收光谱的氧气浓度测量系统，该系统包括氘灯1、第一透镜2、气体池3、第二透镜4、光纤5和光谱仪6；Specific Embodiment 1: This embodiment is described in conjunction with FIG. 1. An oxygen concentration measurement system based on ultraviolet broadband absorption spectrum described in this embodiment includes a deuterium lamp 1, a first lens 2, a gas cell 3, a second Lens 4, optical fiber 5 and spectrometer 6;
所述氘灯1发出的紫外宽带光，经过第一透镜2，射入气体池3内，气体池3的出射光经过第二透镜4，射入光纤5的一端；第一透镜2用于将紫外宽带光准直为平行光，第二透镜4用于将透射光转换为汇聚光，光纤5用于传导汇聚光，光纤5采用石英光纤，石英光纤的紫外传导率更好，能有效的防止汇聚光在传导过程中光强度减弱，引起测量误差；The ultraviolet broadband light that described deuterium lamp 1 sends, passes first lens 2, injects in the gas cell 3, and the outgoing light of gas cell 3 passes second lens 4, injects one end of optical fiber 5; The first lens 2 is used for The ultraviolet broadband light is collimated into parallel light, the second lens 4 is used to convert the transmitted light into converging light, the optical fiber 5 is used to conduct the converging light, and the optical fiber 5 is made of quartz fiber. The light intensity of the concentrated light is weakened during the transmission process, causing measurement errors;
所述光纤5的另一端与光谱仪6的光信号接收端相连；The other end of the optical fiber 5 is connected to the optical signal receiving end of the spectrometer 6;
所述光谱仪6的数据信号输入输出端与计算机7相连；光谱仪6用于对入射光、透射光分光；The data signal input and output terminals of the spectrometer 6 are connected with the computer 7; the spectrometer 6 is used for splitting the incident light and the transmitted light;
所述气体池3内充入待测氧气。The gas cell 3 is filled with oxygen to be tested.
在本实施方式中，采用氘灯1作为光源，氘灯1发出的紫外宽带光经过第一透镜2准直为平行光，经过准直的平行光射入气体池3内，气体池3用于承载待测氧气，由气体池射出的透射光经过第二透镜4汇聚，转换为汇聚光，汇聚光射入光纤5中，由光纤5耦合进入光谱仪6中，光谱仪6将数据信号传入计算机7，最后由计算机7对数据信号进行处理，得到待测氧气的浓度。In this embodiment, a deuterium lamp 1 is used as a light source, and the ultraviolet broadband light emitted by the deuterium lamp 1 is collimated into parallel light through the first lens 2, and the collimated parallel light is injected into the gas cell 3, and the gas cell 3 is used for Carrying the oxygen to be measured, the transmitted light emitted by the gas cell is converged by the second lens 4 and converted into converged light. The converged light is injected into the optical fiber 5, coupled into the spectrometer 6 by the optical fiber 5, and the spectrometer 6 transmits the data signal to the computer 7 , and finally the computer 7 processes the data signal to obtain the concentration of oxygen to be measured.
具体实施方式二：本实施方式是对具体实施方式一所述的一种基于紫外宽带吸收光谱的氧气浓度测量系统进一步限定，在本实施方式中，所述第一透镜2和第二透镜4均为石英凸透镜，石英凸透镜的紫外透过率较高，分别能有效的将紫外宽带光转换为平行光、有效的将透射光转换为汇聚光。Specific embodiment 2: This embodiment further defines the oxygen concentration measurement system based on ultraviolet broadband absorption spectrum described in specific embodiment 1. In this embodiment, the first lens 2 and the second lens 4 are both It is a quartz convex lens. The ultraviolet transmittance of the quartz convex lens is high, which can effectively convert ultraviolet broadband light into parallel light and effectively convert transmitted light into converging light.
具体实施方式三：结合图2说明本实施方式，本实施方式是对具体实施方式二所述的一种基于紫外宽带吸收光谱的氧气浓度测量系统进一步限定，在本实施方式中，所述气体池3设置有入射窗口、出射窗口、入气口和出气口；Specific embodiment three: This embodiment is described in conjunction with FIG. 2. This embodiment is to further limit the oxygen concentration measurement system based on ultraviolet broadband absorption spectrum described in specific embodiment two. In this embodiment, the gas cell 3. It is provided with an incident window, an exit window, an air inlet and an air outlet;
气体池3为圆柱型气体池，入射窗口和出射窗口分别位于圆柱型气体池的两个端面上，入气口和出气口分别位于圆柱型气体池的两端侧壁上；圆柱型气体池能够加快气体的交换速度；入气口和出气口分别位于圆柱型气体池的两端侧壁上能够减少气室内的死角，使气室内气体交换的效果更好，同时为了达到更好的空气交换效果入气口和出气口为反向开口；The gas cell 3 is a cylindrical gas cell, the incident window and the exit window are respectively located on the two end faces of the cylindrical gas cell, and the gas inlet and the gas outlet are respectively located on the two end side walls of the cylindrical gas cell; the cylindrical gas cell can accelerate The gas exchange speed; the gas inlet and the gas outlet are respectively located on the side walls of the two ends of the cylindrical gas pool, which can reduce the dead angle in the gas chamber, so that the effect of gas exchange in the gas chamber is better, and at the same time, in order to achieve better air exchange effect, the gas inlet And the air outlet is a reverse opening;
所述入射窗口和出射窗口上均为石英窗口，石英窗口具有更好的紫外透过率。Both the incident window and the exit window are quartz windows, and the quartz windows have better ultraviolet transmittance.
具体实施方式四：本实施方式是基于具体实施方式一所述的一种基于紫外宽带吸收光谱的氧气浓度测量系统的氧气浓度测量方法，该方法包括以下步骤：Embodiment 4: This embodiment is based on the oxygen concentration measurement method of an oxygen concentration measurement system based on ultraviolet broadband absorption spectroscopy described in Embodiment 1. The method includes the following steps:
步骤一、氘灯1发出的紫外宽带光经过第一透镜2准直为平行光；Step 1, the ultraviolet broadband light emitted by the deuterium lamp 1 is collimated into parallel light through the first lens 2;
步骤二、平行光射入气体池3内，平行光经过待测氧气吸收导致平行光的光谱强度减弱形成透射光；Step 2: Parallel light is injected into the gas cell 3, and the spectral intensity of the parallel light is weakened to form transmitted light after being absorbed by the oxygen to be measured;
步骤三、透射光经过第二透镜4汇聚后，形成汇聚光；Step 3, the transmitted light is converged by the second lens 4 to form converged light;
步骤四；汇聚光经过光纤5入射到光谱仪6中，光谱仪6将汇聚光转换为数据信号；Step 4: the converged light is incident on the spectrometer 6 through the optical fiber 5, and the spectrometer 6 converts the converged light into a data signal;
步骤五、计算机7对光谱仪6的数据信号进行数据处理，得出待测氧气的浓度。Step five, the computer 7 performs data processing on the data signal of the spectrometer 6 to obtain the concentration of oxygen to be measured.
具体实施方式五：结合图3和图4说明本实施方式，本实施方式是对具体实施方式四所述的一种基于紫外宽带吸收光谱的氧气浓度测量系统的氧气浓度测量方法进一步限定，在本实施方式中，所述步骤五中计算机7对光谱仪6的数据信号进行数据处理过程为：对待测氧气吸收处于186nm-200nm波段的平行光的吸光度A进行积分，得到与待测氧气浓度相关的光学参量OP,通过将待测氧气浓度的光学参量OP与系统的氧气浓度定标曲线进行对比，得出待测氧气浓度。Specific embodiment five: This embodiment is described in conjunction with Fig. 3 and Fig. 4. This embodiment is to further limit the oxygen concentration measurement method of an oxygen concentration measurement system based on ultraviolet broadband absorption spectrum described in specific embodiment four. In the embodiment, in the step five, the computer 7 performs data processing on the data signal of the spectrometer 6 as follows: the absorbance A of the parallel light absorbed by the oxygen to be measured is in the 186nm-200nm band, and the optical density related to the oxygen concentration to be measured is obtained. Parameter OP, by comparing the optical parameter OP of the oxygen concentration to be measured with the oxygen concentration calibration curve of the system, the oxygen concentration to be measured is obtained.
在本实施方式，依据Beer-Lambert定律，对入射光谱与透射光谱的比值取对数，并对得到的吸收光谱在186nm-200nm波段的吸光度A进行积分，得到待测氧气浓度相关的光学参量OP，随着待测氧气浓度的增加，待测氧气吸收平行光的强度不断增强，光学参量OP变大，光学参量OP与浓度存在单调的函数关系，如图4所示。因此，当某一浓度下的光学参量确定时，通过此单调关系，即可得出对应的浓度，实现了测量氧气浓度的目的；通过将待测氧气浓度的光学参量OP与系统的氧气浓度定标曲线进行对比，得到待测氧气的浓度；In this embodiment, according to the Beer-Lambert law, take the logarithm of the ratio of the incident spectrum to the transmitted spectrum, and integrate the absorbance A of the obtained absorption spectrum in the 186nm-200nm band to obtain the optical parameter OP related to the oxygen concentration to be measured , with the increase of the concentration of the oxygen to be measured, the intensity of the parallel light absorbed by the oxygen to be measured is continuously enhanced, and the optical parameter OP becomes larger, and the optical parameter OP has a monotone function relationship with the concentration, as shown in Figure 4. Therefore, when the optical parameter at a certain concentration is determined, the corresponding concentration can be obtained through this monotonic relationship, and the purpose of measuring the oxygen concentration is realized; by combining the optical parameter OP of the oxygen concentration to be measured with the oxygen concentration of the system The standard curve is compared to obtain the concentration of oxygen to be measured;
所述Beer-Lambert定律为：I(λ)＝I0(λ)exp(-σ(λ)CL)；式中，I(λ)表示在波长λ处探测到的光强，即透射光光强；I0(λ)表示在波长λ处的入射光强，即即气体池内充入高纯氮气后的透射光强；C为O2的浓度；L为吸收的光程长度；σ(λ)为O2的吸收截面，由此公式能够得出，吸收光谱技术的吸光度A为A＝ln(I0(λ)/I(λ))。The Beer-Lambert law is: I(λ)=I 0 (λ)exp(-σ(λ)CL); in the formula, I(λ) represents the light intensity detected at the wavelength λ, that is, the transmitted light Intensity; I 0 (λ) represents the incident light intensity at the wavelength λ, that is, the transmitted light intensity after the gas cell is filled with high-purity nitrogen; C is the concentration of O 2 ; L is the optical path length of absorption; σ(λ ) is the absorption cross section of O 2 , from this formula it can be concluded that the absorbance A of the absorption spectroscopy technique is A=ln(I 0 (λ)/I(λ)).
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