CN101471214A - Diamond thin-film solar cell and method for producing the same - Google Patents
Diamond thin-film solar cell and method for producing the same Download PDFInfo
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- 229910003460 diamond Inorganic materials 0.000 title claims abstract description 38
- 239000010432 diamond Substances 0.000 title claims abstract description 38
- 239000010409 thin film Substances 0.000 title claims abstract description 13
- 238000004519 manufacturing process Methods 0.000 title claims description 4
- 239000002184 metal Substances 0.000 claims abstract description 15
- 239000011358 absorbing material Substances 0.000 claims abstract description 8
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 15
- 229910052710 silicon Inorganic materials 0.000 claims description 15
- 239000010703 silicon Substances 0.000 claims description 15
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 claims description 12
- 239000000758 substrate Substances 0.000 claims description 11
- 230000005684 electric field Effects 0.000 claims description 9
- 238000000034 method Methods 0.000 claims description 9
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 6
- 239000001257 hydrogen Substances 0.000 claims description 6
- 229910052739 hydrogen Inorganic materials 0.000 claims description 6
- 239000001301 oxygen Substances 0.000 claims description 6
- 229910052760 oxygen Inorganic materials 0.000 claims description 6
- 238000000151 deposition Methods 0.000 claims description 5
- 230000008021 deposition Effects 0.000 claims description 5
- 230000000694 effects Effects 0.000 claims description 5
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims description 3
- 238000003486 chemical etching Methods 0.000 claims description 3
- 239000007789 gas Substances 0.000 claims description 3
- 150000002431 hydrogen Chemical class 0.000 claims description 3
- 230000010355 oscillation Effects 0.000 claims description 3
- ORILYTVJVMAKLC-UHFFFAOYSA-N adamantane Chemical compound C1C(C2)CC3CC1CC2C3 ORILYTVJVMAKLC-UHFFFAOYSA-N 0.000 claims 2
- 229910001573 adamantine Inorganic materials 0.000 claims 2
- 239000011159 matrix material Substances 0.000 claims 2
- 238000003754 machining Methods 0.000 claims 1
- 239000012528 membrane Substances 0.000 claims 1
- 238000005268 plasma chemical vapour deposition Methods 0.000 claims 1
- 239000011347 resin Substances 0.000 claims 1
- 229920005989 resin Polymers 0.000 claims 1
- 239000010408 film Substances 0.000 abstract description 6
- 238000006243 chemical reaction Methods 0.000 abstract description 3
- 230000005855 radiation Effects 0.000 abstract description 3
- 229910021419 crystalline silicon Inorganic materials 0.000 abstract description 2
- 238000002360 preparation method Methods 0.000 abstract 1
- 238000010586 diagram Methods 0.000 description 3
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 3
- 238000010248 power generation Methods 0.000 description 3
- 238000005229 chemical vapour deposition Methods 0.000 description 2
- 230000007704 transition Effects 0.000 description 2
- 241000282414 Homo sapiens Species 0.000 description 1
- JJWKPURADFRFRB-UHFFFAOYSA-N carbonyl sulfide Chemical compound O=C=S JJWKPURADFRFRB-UHFFFAOYSA-N 0.000 description 1
- 238000005265 energy consumption Methods 0.000 description 1
- 238000003912 environmental pollution Methods 0.000 description 1
- 230000017525 heat dissipation Effects 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000002210 silicon-based material Substances 0.000 description 1
- 230000005676 thermoelectric effect Effects 0.000 description 1
- 238000012876 topography Methods 0.000 description 1
- 239000002918 waste heat Substances 0.000 description 1
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Abstract
本发明涉及到一种空间能源技术领域的太阳能电池,具体涉及到一种应用特殊结构金刚石薄膜的太阳能电池及其制备方法。这种金刚石薄膜太阳能电池的主要结构包括阴极和阳极:阴极结构是:在晶体硅表面大量均匀分布的小孔内的尺寸为3~4μm的金字塔形金刚石小锥体,和金属层组合形成阴极,阴极背面加上一层黑体吸热材料,利用平板金属作为阳极。太阳能电池的工作原理是,利用聚光装置,将太阳光会聚到阴极背面的黑体吸热材料上,将阴极加热到1000℃以上,使大量电子从小锥体的尖端发射出来,在外加电场的作用下,电子流向金属阳极形成电流。本发明涉及到的金刚石薄膜电池,光电转换效率可以提升至50%,可承受500℃以上的高温而不损坏,并耐空间辐射。
The invention relates to a solar cell in the technical field of space energy, in particular to a solar cell using a special-structured diamond film and a preparation method thereof. The main structure of this diamond thin-film solar cell includes a cathode and an anode: the cathode structure is: a pyramid-shaped diamond cone with a size of 3-4 μm in a large number of uniformly distributed small holes on the surface of crystalline silicon, combined with a metal layer to form a cathode, A layer of black body heat absorbing material is added to the back of the cathode, and the flat metal is used as the anode. The working principle of a solar cell is to use a concentrating device to condense sunlight onto the blackbody heat absorbing material on the back of the cathode, and heat the cathode to above 1000°C, so that a large number of electrons are emitted from the tip of the small cone. Next, electrons flow to the metal anode to form an electric current. The diamond thin film battery involved in the invention can increase the photoelectric conversion efficiency to 50%, can withstand high temperatures above 500°C without damage, and is resistant to space radiation.
Description
技术领域 technical field
本发明涉及到一种空间能源技术领域的太阳能电池,具体涉及到一种应用特殊结构金刚石薄膜的太阳能电池。The invention relates to a solar cell in the technical field of space energy, in particular to a solar cell using a diamond film with a special structure.
背景技术 Background technique
太阳能是地球上一个用之不竭的可再生能源宝库,太阳40分钟内投射到地球表面的能量就相当于全世界每年消耗能量的总和。因此,如果能充分地利用太阳能,人类的未来就有了保障。人类利用太阳能的想法其实由来已久,最早是将它转换为热能加以利用,后来光伏效应的发现使太阳能转化为电能成为可能,从而为解决地球能源枯竭的问题提供了希望。Solar energy is an inexhaustible treasure house of renewable energy on the earth. The energy projected by the sun to the surface of the earth within 40 minutes is equivalent to the sum of the annual energy consumption of the whole world. Therefore, if solar energy can be fully utilized, the future of mankind will be guaranteed. The idea of human beings to utilize solar energy has a long history. At first, it was converted into thermal energy for utilization. Later, the discovery of the photovoltaic effect made it possible to convert solar energy into electrical energy, thus providing hope for solving the problem of the earth's energy depletion.
专家预测,到2030年太阳能发电将占世界发电总量的50%,所以,大力发展太阳电池产业是一件有利于降低环境污染并造福于人类的伟大事业,太阳电池也必将成为人类未来能源的希望之星。Experts predict that solar power generation will account for 50% of the world's total power generation by 2030. Therefore, vigorously developing the solar cell industry is a great cause that is conducive to reducing environmental pollution and benefiting mankind. Solar cells will also become the future energy source of mankind. star of hope.
从目前的发展状况来看,由于受单晶硅材料价格和单晶硅电池制备过程的限制,若要再大幅度地降低单晶硅太阳电池成本是非常困难的,从而会阻碍太阳电池的进一步推广应用。Judging from the current development status, due to the limitation of the price of monocrystalline silicon materials and the manufacturing process of monocrystalline silicon cells, it is very difficult to significantly reduce the cost of monocrystalline silicon solar cells, which will hinder the further development of solar cells. Promote apps.
发明内容 Contents of the invention
本发明的目的在于提供一种利用具有特殊结构的金刚石薄膜作为阴极的太阳能电池。The object of the present invention is to provide a solar cell using a diamond film with a special structure as a cathode.
本发明的目的可通过以下技术措施实现:The purpose of the present invention can be achieved through the following technical measures:
在金属阴极上生长有大量均匀分布的、3~4μm尺度的金字塔形金刚石小锥体,锥体的密度为每cm2面积一千万量级;在电场作用下,利用锥体尖端的场发射效应发射出电子,通过加热阴极,达到1000℃以上的温度,使发出的电子数量大幅度增加,到达阳极后,形成电流。A large number of evenly distributed pyramid-shaped diamond cones with a scale of 3 to 4 μm grow on the metal cathode, and the density of the cones is on the order of ten million per cm2 area; under the action of an electric field, the field emission of the cone tip is used The effect emits electrons, and by heating the cathode to a temperature above 1000°C, the number of emitted electrons is greatly increased, and after reaching the anode, a current is formed.
本发明的目的还可以通过以下技术措施实现:The purpose of the present invention can also be achieved through the following technical measures:
(1)利用化学刻蚀方法或者激光直写方法,在硅基底的表面加工出大量均匀分布的、直径约为5μm的小孔,孔深度为4~5μm,小孔在硅基底表面呈正方形排列,孔间距约为10μm,每cm2面积上的小孔数量在千万量级;(1) Using chemical etching method or laser direct writing method, a large number of uniformly distributed small holes with a diameter of about 5 μm are processed on the surface of the silicon substrate, and the hole depth is 4 to 5 μm. The small holes are arranged in a square on the surface of the silicon substrate , the hole spacing is about 10 μm, and the number of small holes per cm2 area is on the order of tens of millions;
(2)利用微波等离子体化学气相沉积方法(MPECVD),在硅基底上生长金刚石薄膜,工作气体为氢气(H2)、甲烷(CH4)和氧气(02);沉积参数为:基片温度1000℃,微波功率3.5kW,沉积室气压5kPa,氢气流量200sccm,甲烷流量8sccm,氧气流量1sccm。小孔内就会生长出金字塔形的金刚石小锥体,控制生长时间,可以改变小锥体的尺度,使锥体底边尺寸控制在3~4μm范围;(2) Using microwave plasma chemical vapor deposition (MPECVD) to grow a diamond film on a silicon substrate, the working gases are hydrogen (H 2 ), methane (CH 4 ) and oxygen (0 2 ); the deposition parameters are: substrate The temperature is 1000° C., the microwave power is 3.5 kW, the deposition chamber pressure is 5 kPa, the flow rate of hydrogen is 200 sccm, the flow rate of methane is 8 sccm, and the flow rate of oxygen is 1 sccm. A small pyramid-shaped diamond cone will grow in the small hole, and the scale of the small cone can be changed by controlling the growth time, so that the size of the bottom edge of the cone can be controlled within the range of 3-4 μm;
(3)在生长有金字塔形金刚石小锥体的硅基底背面加上金属层作为阴极,金属层上再加一层黑体吸热材料,和金属阳极组合,工作时在两极间加上电场,构成金刚石薄膜太阳能电池。(3) Add a metal layer on the back of the silicon substrate with pyramid-shaped diamond cones as the cathode, add a layer of black body heat-absorbing material on the metal layer, and combine it with the metal anode, and apply an electric field between the two poles during operation to form Diamond thin film solar cells.
本发明的目的还可以通过以下技术措施实现:The purpose of the present invention can also be achieved through the following technical measures:
利用聚光装置,将太阳光聚集到阴极背面的黑体吸热材料上,将阴极加热到1000℃,由于金刚石的良好导热性,小锥体的尖端温度也将接近1000℃,金刚石的能隙会因受热降低,电子也会因热振荡从价带跃迁至导带。在外加电场的作用下,会产生从阴极到阳极的电子流。Using a concentrating device, the sunlight is concentrated on the black body heat absorbing material on the back of the cathode, and the cathode is heated to 1000°C. Due to the good thermal conductivity of diamond, the temperature of the tip of the small cone will also be close to 1000°C, and the energy gap of diamond will increase. Electrons also transition from the valence band to the conduction band due to thermal oscillations due to the reduction in heat. Under the action of an applied electric field, a flow of electrons from the cathode to the anode is generated.
目前的晶体硅太阳能电池已经商品化,但具有难以克服的缺点,包括转换效率低、电池承受温度低以及抗空间辐射的能力低。The current crystalline silicon solar cells have been commercialized, but have insurmountable shortcomings, including low conversion efficiency, low cell temperature and low ability to withstand space radiation.
本发明涉及到的金刚石薄膜电池,光电转换效率可以提升至50%,而且金刚石可承受500℃以上的高温而不损坏,金刚石又是最耐空间辐射的材料,所以它在太空中使用时不会受到宇宙线的影响。除此之外,金刚石的硬度最高,所以不易磨损,它的散热也最快,可以把热能迅速扩散。这些优越性能使金刚石薄膜太阳能电池具有很好的发展前景。The photoelectric conversion efficiency of the diamond thin film battery involved in the present invention can be increased to 50%, and diamond can withstand high temperatures above 500°C without damage, and diamond is the most resistant to space radiation, so it will not be damaged when used in space affected by cosmic rays. In addition, diamond has the highest hardness, so it is not easy to wear, and it also has the fastest heat dissipation, which can quickly dissipate heat energy. These superior properties make diamond thin film solar cells have good development prospects.
金刚石太阳电池与目前的硅太阳电池最大的差异为前者使用“热电效应”,而后者为“光电效应”。前者可使用较低的太阳热量,所以其发电的效率较硅太阳电池高,另外,金刚石尖端也提供一个在真空中没有电阻的通路,因此电子流动会比硅半导体者畅通,产生的废热较小,这是它的能量效率可以提高的另一原因。The biggest difference between diamond solar cells and current silicon solar cells is that the former uses the "thermoelectric effect", while the latter uses the "photoelectric effect". The former can use lower solar heat, so its power generation efficiency is higher than that of silicon solar cells. In addition, the diamond tip also provides a path without resistance in vacuum, so the flow of electrons will be smoother than that of silicon semiconductors, and the waste heat generated is smaller. , which is another reason why its energy efficiency can be improved.
附图说明 Description of drawings
图1为太阳能电池阴极表面微观形貌图;Figure 1 is a microscopic topography diagram of the surface of the solar cell cathode;
图2为太阳能电池结构机工作原理示意图;Fig. 2 is a schematic diagram of the working principle of the solar cell structural machine;
图3为小锥体结构图。Fig. 3 is a small cone structure diagram.
具体实施方式 Detailed ways
本发明中的金刚石薄膜太阳能电池主要由阴极、阳极和阴极上的黑体吸热层组成,其中阳极和普通太阳能电池的阳极没有区别,而阴极是金属层上具有大量金字塔形小锥体的金刚石薄膜,在电场作用及高温下,小锥体尖端发射出大量电子,到达阳极,形成电流。The diamond thin-film solar cell in the present invention is mainly made up of the blackbody heat-absorbing layer on the cathode, the anode and the cathode, wherein the anode has no difference from the anode of a common solar cell, and the cathode is a diamond film with a large number of pyramid-shaped small cones on the metal layer , under the action of an electric field and high temperature, a large number of electrons are emitted from the tip of the small cone and reach the anode to form a current.
金刚石薄膜太阳能电池制作过程如下:The fabrication process of diamond thin film solar cells is as follows:
(1)利用化学刻蚀方法或者激光直写方法,在硅基底的表面加工出大量均匀分布的、直径约为5μm的小孔,孔深度为4~5μm,小孔在硅基底表面呈正方形排列,孔间距约为10μm,每cm2面积上的小孔数量在千万量级;(1) Using chemical etching method or laser direct writing method, a large number of uniformly distributed small holes with a diameter of about 5 μm are processed on the surface of the silicon substrate, and the hole depth is 4 to 5 μm. The small holes are arranged in a square on the surface of the silicon substrate , the hole spacing is about 10 μm, and the number of small holes per cm2 area is on the order of tens of millions;
(2)利用微波等离子体化学气相沉积方法(MPECVD),在硅基底上生长金刚石薄膜,工作气体为氢气(H2)、甲烷(CH4)和氧气(02);沉积参数为:基片温度1000℃,微波功率3.5kW,沉积室气压5kPa,氢气流量200sccm,甲烷流量8sccm,氧气流量1sccm。小孔内就会生长出金字塔形的金刚石小锥体,控制生长时间,可以改变小锥体的尺度,使锥体底边尺寸控制在3~4μm范围;(2) Using microwave plasma chemical vapor deposition (MPECVD) to grow a diamond film on a silicon substrate, the working gases are hydrogen (H 2 ), methane (CH 4 ) and oxygen (0 2 ); the deposition parameters are: substrate The temperature is 1000° C., the microwave power is 3.5 kW, the deposition chamber pressure is 5 kPa, the flow rate of hydrogen is 200 sccm, the flow rate of methane is 8 sccm, and the flow rate of oxygen is 1 sccm. A small pyramid-shaped diamond cone will grow in the small hole, and the scale of the small cone can be changed by controlling the growth time, so that the size of the bottom edge of the cone can be controlled within the range of 3-4 μm;
(3)在生长有金字塔形金刚石小锥体的硅基底背面加上金属层作为阴极,金属层上再加一层黑体吸热材料,和金属阳极组合,工作时在两极间加上电场,构成金刚石薄膜太阳能电池。(3) Add a metal layer on the back of the silicon substrate with pyramid-shaped diamond cones as the cathode, add a layer of black body heat-absorbing material on the metal layer, and combine it with the metal anode, and apply an electric field between the two poles during operation to form Diamond thin film solar cells.
利用聚光装置,将太阳光聚集到阴极背面的黑体吸热材料上,将阴极加热到1000℃,由于金刚石的良好导热性,小锥体的尖端温度也将接近1000℃,金刚石的能隙会因受热降低,电子也会因热振荡从价带跃迁至导带。在外加电场的作用下,会产生从阴极到阳极的电子流。Using a concentrating device, the sunlight is concentrated on the black body heat absorbing material on the back of the cathode, and the cathode is heated to 1000°C. Due to the good thermal conductivity of diamond, the temperature of the tip of the small cone will also be close to 1000°C, and the energy gap of diamond will be Electrons also transition from the valence band to the conduction band due to thermal oscillations due to the reduction in heat. Under the action of an applied electric field, a flow of electrons from the cathode to the anode is generated.
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CN107507873A (en) * | 2017-08-04 | 2017-12-22 | 南京理工大学 | A kind of vacuous solar energy electrooptical device |
CN108922931A (en) * | 2018-07-03 | 2018-11-30 | 中国科学院微电子研究所 | Gallium oxide-based ultraviolet detector and manufacturing method thereof |
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US6452091B1 (en) * | 1999-07-14 | 2002-09-17 | Canon Kabushiki Kaisha | Method of producing thin-film single-crystal device, solar cell module and method of producing the same |
CN1100163C (en) * | 2000-05-15 | 2003-01-29 | 北京工业大学 | Cold cathode structure of diamond film and its preparing process |
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CN107507873B (en) * | 2017-08-04 | 2019-06-25 | 南京理工大学 | A kind of vacuous solar energy electrooptical device |
CN108922931A (en) * | 2018-07-03 | 2018-11-30 | 中国科学院微电子研究所 | Gallium oxide-based ultraviolet detector and manufacturing method thereof |
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