CN101435466A - Porous gas static pressure thrust bearing - Google Patents
Porous gas static pressure thrust bearing Download PDFInfo
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- CN101435466A CN101435466A CNA2008102097928A CN200810209792A CN101435466A CN 101435466 A CN101435466 A CN 101435466A CN A2008102097928 A CNA2008102097928 A CN A2008102097928A CN 200810209792 A CN200810209792 A CN 200810209792A CN 101435466 A CN101435466 A CN 101435466A
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Abstract
一种多孔质气体静压止推轴承，它涉及一种气体静压止推轴承。针对气体静压支撑轴承采用小孔节流气体静压支撑轴承，承载能力低，稳定性差及采用整体多孔质气体静压支撑轴承，耗气量大，难以保证孔隙度均匀、渗透率一致、各向同性的多孔质材料问题。轴承基体的下端面上设有沉孔，轴承基体的上端面上设有四～八个与轴承基体的沉孔相通的节流孔，四～八个节流孔的中心均布设置在轴承基体二分之一半径处所在的圆周上，节流孔内装有一个与其内壁粘接的各向同性多孔质石墨柱塞，止推板设置在轴承基体的工作面上。本发明采用各向同性多孔质石墨柱塞，保证了孔隙度均匀、渗透率一致和各向同性，此外，本发明还具有承载能力大、稳定性高及静态刚度高的优点。
A porous gas static pressure thrust bearing relates to a gas static pressure thrust bearing. For gas static pressure support bearings, small hole throttling gas static pressure support bearings have low bearing capacity and poor stability, and the use of integral porous gas static pressure support bearings consumes a lot of gas, and it is difficult to ensure uniform porosity, uniform permeability, and all directions. homogeneous porous material problem. The lower end surface of the bearing base is provided with a counterbore, and the upper end surface of the bearing base is provided with four to eight throttling holes communicating with the counterbore of the bearing base, and the centers of the four to eight throttling holes are evenly arranged on the bearing base On the circumference where half the radius is located, an isotropic porous graphite plunger bonded to its inner wall is installed in the throttle hole, and the thrust plate is arranged on the working surface of the bearing base. The invention adopts the isotropic porous graphite plunger to ensure uniform porosity, uniform permeability and isotropy. In addition, the invention also has the advantages of large bearing capacity, high stability and high static rigidity.
Description
Technical field
The present invention relates to a kind of gas static pressure thrust bearing, relate in particular to the porous gas static pressure thrust bearing of a kind of high rigidity and high stability.
Background technique
Sophisticated technology such as Developing Defence Industry, microelectronics industry needs accurate and ultraprecise instrument and equipment, and precision instrument and equipment requires at a high speed, high-precision static pressure spring bearing.The gas-static spring bearing has tangible characteristics, and its pressure air film has leveling effect, thus vibrate little, the running accuracy height; The viscosity of gas is very low, so frictional loss is little, and the heating distortion is also little; Contact between no object is thought in theory and is not is not worn and torn, so the life-span is long; Therefore gas-static spring bearing environmentally safe need not to consider sealing problem.Based on above characteristics, the gas-static spring bearing is widely used in aerospace industry, semi-conductor industry and ultraprecise process equipment and the surveying instrument.
The bearing capacity of gas-static spring bearing is relevant with the form of physical dimension, supply gas pressure and the throttling of support with rigidity.The difference of throttling form directly influences the bearing capacity and the rigidity of spring bearing.The throttle style that the gas-static spring bearing adopts mainly is orifice restriction, slit throttling, surface throttle and the throttling of porous matter etc.At present, domestic and international throttle style to above-mentioned gas static pressure spring bearing all has in various degree research and application.The rigidity of widely used orifice restriction gas-static spring bearing is higher, but bearing capacity is lower, less stable.Whole porous gas static pressure spring bearing adopts porous material as its bearing surface and flow controller, the uniform small air vent of whole bearing surface, therefore improved its bearing capacity greatly, and damping characteristic is good, stability range is wide, but air consumption is big, and when supporting structure is big, be difficult to guarantee that porosity is even, permeability is consistent, isotropic porous material, this will have a strong impact on the performance of static pressure spring bearing.
Summary of the invention
The purpose of this invention is to provide a kind of porous gas static pressure thrust bearing, adopt orifice restriction gas-static spring bearing bearing capacity lower to solve the gas-static spring bearing, less stable and adopt whole porous gas static pressure spring bearing, air consumption is big, and when supporting structure is big, be difficult to guarantee that porosity is even, permeability is consistent, isotropic porous material, thereby have a strong impact on the problem of porous gas static pressure spring bearing performance.
The present invention solves the problems of the technologies described above the technological scheme of taking to be: bearing matrix and four～eight isotropy Porous Graphite plungers as the aerostatic bearing flow controller that static pressure thrust bearing of the present invention is made by thrust plate, stainless steel material are formed; The upper-end surface of described bearing matrix is the working surface through abrasive machining, the lower end surface of bearing matrix is provided with counterbore, the upper-end surface of bearing matrix is provided with four～eight throttle orifices that communicate with the counterbore of bearing matrix, the center of described four～eight throttle orifices is uniform be arranged on bearing matrix 1/2nd radius places circumference on, an isotropy Porous Graphite plunger bonding with its inwall is housed in each throttle orifice, described thrust plate is arranged on the working surface of bearing matrix, the radius of isotropy Porous Graphite plunger is 1.5～3.5mm, and the height of isotropy Porous Graphite plunger is 4～8mm.
The present invention has following beneficial effect: one, the present invention adopts the flow controller of isotropy Porous Graphite plunger as aerostatic bearing, has guaranteed that porosity is even, permeability one is made peace isotropy.Two, the present invention compares with traditional integral porous gas static pressure spring bearing, has both guaranteed advantages of high bearing capacity and advantages of higher stability, has improved static stiffness again, has reduced gas consumption simultaneously.Three, the present invention compares with orifice restriction gas-static spring bearing, owing to there is not the existence of air cavity, so be not prone to " pneumatic hammer " phenomenon, improves the stability that gas-static supports.Four, porous gas static pressure thrust bearing of the present invention obtains high bearing capacity and static stiffness easily in wide air-film thickness scope, and can obtain more excellent parameters combination by each parameter of height, radius and permeability thereof that changes isotropy Porous Graphite plunger, thereby obtain the porous gas static pressure thrust bearing of better performance.
Description of drawings
Fig. 1 is the main sectional view of porous gas static pressure thrust bearing of the present invention, Fig. 2 is the plan view (removing thrust plate 4) of Fig. 1, Fig. 3 is the working state figure of porous gas static pressure thrust bearing of the present invention, Fig. 4 is the bearing capacity experiment correlation curve figure of porous gas static pressure thrust bearing of the present invention and whole porous gas static pressure thrust bearing and orifice restriction gas-static spring bearing, Fig. 5 is the static stiffness experiment correlation curve figure of porous gas static pressure thrust bearing of the present invention and whole porous gas static pressure thrust bearing and orifice restriction gas-static spring bearing, and Fig. 6 is the stability experiment correlation curve figure of porous gas static pressure thrust bearing of the present invention and whole porous gas static pressure thrust bearing and orifice restriction gas-static spring bearing.△ among Fig. 4～Fig. 6 is whole porous gas static pressure thrust bearing curve; ◆ be porous gas static pressure thrust bearing curve of the present invention, the throttling hole count is 6; ◇ is a porous gas static pressure thrust bearing curve of the present invention, and the throttling hole count is 4;
Be orifice restriction gas-static spring bearing curve, the throttling hole count is 6;
Be orifice restriction gas-static spring bearing curve, the throttling hole count is 4.
Embodiment
Embodiment one: in conjunction with Fig. 1～Fig. 3 present embodiment is described, bearing matrix 3 and four～eight isotropy Porous Graphite plungers 1 as the aerostatic bearing flow controller that the static pressure thrust bearing of present embodiment is made by thrust plate 4, stainless steel material are formed; The upper-end surface of described bearing matrix 3 is the working surface 2 through abrasive machining, the lower end surface of bearing matrix 3 is provided with counterbore 5, the upper-end surface of bearing matrix 3 is provided with four～eight throttle orifices 6 that communicate with the counterbore 5 of bearing matrix 3, the center of described four～eight throttle orifices 6 is uniform be arranged on bearing matrix 1/3rd two radius place circumference on, an isotropy Porous Graphite plunger 1 bonding with its inwall is housed in each throttle orifice 6, described thrust plate 4 is arranged on the working surface 2 of bearing matrix 3, the radius of isotropy Porous Graphite plunger 1 is 1.5～3.5mm, and the height of isotropy Porous Graphite plunger 1 is 4～8mm.
The permeability of isotropy Porous Graphite plunger 1 on all directions in the present embodiment is identical, isotropy Porous Graphite plunger 1 adopts cold isobaric technological method preparation, after machining,, can guarantee that like this hole is not blocked through ultrasonic cleaning.Isotropy Porous Graphite plunger 1 in the present embodiment not only has the complete characteristic of general graphite, also has material structure simultaneously evenly and fine and close, characteristics such as mechanical strength is high, even pore distribution, oxidation resistance is strong, machinability is good.
Down, the varied in thickness scope of the air film 7 between the working surface 2 of bearing matrix 3 and the lower end surface of thrust plate 4 is 10～40 μ m to porous gas static pressure thrust bearing in the present embodiment in working order.
Embodiment two: present embodiment is described in conjunction with Fig. 1～Fig. 3, the difference of present embodiment and embodiment one is: the quantity of the isotropy Porous Graphite plunger 1 of present embodiment is four, the quantity of the throttle orifice 6 on the described bearing matrix 3 is four, the radius of isotropy Porous Graphite plunger 1 is 2.5mm, the height of isotropy Porous Graphite plunger 1 is 6mm, bearing capacity reduces with the increase of air film 7 thickness, and the scope of variation is 120～310N.The bearing static stiffness reduces with first the increase afterwards of air film 7 varied in thickness, and excursion is 1.6～8.4N/ μ m.
Embodiment three: present embodiment is described in conjunction with Fig. 1～Fig. 3, the difference of present embodiment and embodiment one is: the quantity of the isotropy Porous Graphite plunger 1 of present embodiment is six, the quantity of the throttle orifice 6 on the described bearing matrix 3 is six, the radius of isotropy Porous Graphite plunger 1 is 2.5mm, the height of isotropy Porous Graphite plunger 1 is 6mm, bearing capacity reduces with the increase of air film 7 thickness, and the scope of variation is 170～340N.The bearing static stiffness reduces with first the increase afterwards of air film 7 varied in thickness, and excursion is 2.1～7.8N/ μ m.
Embodiment four: present embodiment is described in conjunction with Fig. 1～Fig. 3, the difference of present embodiment and embodiment one is: the quantity of the isotropy Porous Graphite plunger 1 of present embodiment is six, the quantity of the throttle orifice 6 on the described bearing matrix 3 is six, the radius of isotropy Porous Graphite plunger 1 is 1.5mm, the height of isotropy Porous Graphite plunger 1 is 6mm, bearing capacity reduces with the increase of air film 7 thickness, and the scope of variation is 100～320N.The bearing static stiffness reduces with first the increase afterwards of air film 7 varied in thickness, and excursion is 3～10N/ μ m.
Embodiment five: present embodiment is described in conjunction with Fig. 1～Fig. 3, the difference of present embodiment and embodiment one is: the quantity of the isotropy Porous Graphite plunger 1 of present embodiment is six, the quantity of the throttle orifice 6 on the described bearing matrix 3 is six, the radius of isotropy Porous Graphite plunger 1 is 3.5mm, the height of isotropy Porous Graphite plunger 1 is 6mm, bearing capacity reduces with the increase of air film 7 thickness, and the scope of variation is 290～370N.The bearing static stiffness reduces with first the increase afterwards of air film 7 varied in thickness, and excursion is 0.5～5N/ μ m.
Embodiment six: present embodiment is described in conjunction with Fig. 1～Fig. 3, the difference of present embodiment and embodiment one is: the quantity of the isotropy Porous Graphite plunger 1 of present embodiment is eight, the quantity of the throttle orifice 6 on the described bearing matrix 3 is eight, the radius of isotropy Porous Graphite plunger 1 is 2.5mm, the height of isotropy Porous Graphite plunger 1 is 6mm, bearing capacity reduces with the increase of air film 7 thickness, and the scope of variation is 230～360N.The bearing static stiffness reduces with first the increase afterwards of air film 7 varied in thickness, and excursion is 0.5～7N/ μ m.
Embodiment seven: present embodiment is described in conjunction with Fig. 1～Fig. 3, the difference of present embodiment and embodiment one is: the quantity of the isotropy Porous Graphite plunger 1 of present embodiment is six, the quantity of the throttle orifice 6 on the described bearing matrix 3 is six, the radius of isotropy Porous Graphite plunger 1 is 2.5mm, the height of isotropy Porous Graphite plunger 1 is 4mm, bearing capacity reduces with the increase of air film 7 thickness, and the scope of variation is 190～350N.The bearing static stiffness reduces with first the increase afterwards of air film 7 varied in thickness, and excursion is 0.4～6.5N/ μ m.
Embodiment eight: present embodiment is described in conjunction with Fig. 1～Fig. 3, the difference of present embodiment and embodiment one is: the quantity of the isotropy Porous Graphite plunger 1 of present embodiment is six, the quantity of the throttle orifice 6 on the described bearing matrix 3 is six, the radius of isotropy Porous Graphite plunger 1 is 2.5mm, the height of isotropy Porous Graphite plunger 1 is 8mm, bearing capacity reduces with the increase of air film 7 thickness, and the scope of variation is 150～330N.The bearing static stiffness reduces with first the increase afterwards of air film 7 varied in thickness, and excursion is 0.2～9N/ μ m.
Isotropy Porous Graphite plunger height increases, and gas mobile resistance that is subjected in porous matter is strengthened, thereby make pressure fall increase, and the pressure in the air film reduces, and finally causes bearing capacity that certain reducing arranged.The increase of height is greatly improved static stiffness, and mass flow rate obtains very big reduction.
Isotropy Porous Graphite plunger radius reduces, the static stiffness of porous gas static pressure thrust bearing is greatly improved, but maximum static stiffness appears at about air-film thickness 15 μ m, owing to be subjected to the restriction of porous gas static pressure thrust bearing roughness and assembly precision, be difficult to the average air-film thickness of porous gas static pressure thrust bearing is chosen as less than 10 μ m, so it is too small that isotropy Porous Graphite plunger radius cannot be got, and is taken as 1.5～3mm usually.
Reducing of isotropy Porous Graphite number of plungers, make from the pressure between the isotropy Porous Graphite plunger and fall increase, bearing capacity obviously reduces, and isotropy Porous Graphite number of plungers neither be The more the better, it also is subjected to the restriction of porous gas static pressure thrust bearing static stiffness and assembly condition, and the number of isotropy Porous Graphite plunger gets 6 or 8 usually.
Embodiment nine: in conjunction with Fig. 1～Fig. 3 present embodiment is described, the isotropy Porous Graphite plunger 1 of present embodiment adopts the inwall of epoxy resin and throttle orifice 6 bonding, constitutes the gas static pressure thrust bearing of a kind of Local Porous matter throttling.Other is identical with arbitrary embodiment in the embodiment one to eight.
Embodiment ten: present embodiment is described in conjunction with Fig. 4, present embodiment is an embodiment of the bearing capacity experiment contrast of porous gas static pressure thrust bearing of the present invention and whole porous gas static pressure thrust bearing and orifice restriction gas-static spring bearing, as can be seen from Figure 4, the bearing capacity of porous gas static pressure thrust bearing of the present invention is higher than orifice restriction gas-static spring bearing, along with the increase of air-film thickness, bearing capacity reduces.Under the identical situation of throttling hole count, the bearing capacity of porous gas static pressure thrust bearing is 2～2.5 times of orifice restriction gas-static spring bearing bearing capacity.
Embodiment 11: present embodiment is described in conjunction with Fig. 5, present embodiment is an embodiment of the static stiffness experiment contrast of porous gas static pressure thrust bearing of the present invention and whole porous gas static pressure thrust bearing and orifice restriction gas-static spring bearing, as can be seen from Figure 5, in bearing air film operating range interval (air-film thickness greater than 10 μ m time), the static stiffness of porous gas static pressure thrust bearing is higher than orifice restriction gas-static spring bearing.Under the identical situation of throttling hole count, the static stiffness of porous gas static pressure thrust bearing is 1～3.5 times of orifice restriction gas-static spring bearing static stiffness.
Embodiment 12: present embodiment is described in conjunction with Fig. 6, present embodiment is an embodiment of the stability experiment contrast of porous gas static pressure thrust bearing of the present invention and whole porous gas static pressure thrust bearing and orifice restriction gas-static spring bearing, as can be seen from Figure 6, the stability of porous gas static pressure thrust bearing is than the good stability of orifice restriction gas-static spring bearing, and the theoretical value and the experimental value of porous gas static pressure thrust bearing stability are more identical.
Adopt porous gas static pressure thrust bearing to be easy in wide air-film thickness scope, obtain high bearing capacity and static stiffness, and it is a lot of to change the parameter of static characteristic curve.When one timing of porous gas static pressure thrust bearing size, under supply gas pressure, the external pressure situation the same with the throttle orifice number, porous gas static pressure thrust bearing can change static characteristic curve by height, radius and the permeability thereof that changes isotropy Porous Graphite plunger, in actual applications, can obtain more excellent parameters combination by comprehensive each parameter, thereby obtain the porous gas static pressure thrust bearing of better performance.Orifice restriction gas-static spring bearing then is not easy to change the bearer properties curve, can only be by changing the static characteristic that this parameter of hole diameter changes bearing.
Claims (9)
1, a kind of porous gas static pressure thrust bearing is characterized in that: bearing matrix (3) and four～eight isotropy Porous Graphite plungers (1) as the aerostatic bearing flow controller that described static pressure thrust bearing is made by thrust plate (4), stainless steel material are formed; The upper-end surface of described bearing matrix (3) is the working surface (2) through abrasive machining, the lower end surface of bearing matrix (3) is provided with counterbore (5), the upper-end surface of bearing matrix (3) is provided with four～eight throttle orifices (6) that communicate with the counterbore (5) of bearing matrix (3), the center of described four～eight throttle orifices (6) is uniform be arranged on bearing matrix (3) 1/2nd radius places circumference on, an isotropy Porous Graphite plunger (1) bonding with its inwall is housed in each throttle orifice (6), described thrust plate (4) is arranged on the working surface (2) of bearing matrix (3), the radius of isotropy Porous Graphite plunger (1) is 1.5～3.5mm, and the height of isotropy Porous Graphite plunger (1) is 4～8mm.
2, a kind of porous gas static pressure thrust bearing according to claim 1, it is characterized in that: the quantity of described isotropy Porous Graphite plunger (1) is four, the quantity of the throttle orifice (6) on the described bearing matrix (3) is four, the radius of isotropy Porous Graphite plunger (1) is 2.5mm, and the height of isotropy Porous Graphite plunger (1) is 6mm.
3, a kind of porous gas static pressure thrust bearing according to claim 1, it is characterized in that: the quantity of described isotropy Porous Graphite plunger (1) is six, the quantity of the throttle orifice (6) on the described bearing matrix (3) is six, the radius of isotropy Porous Graphite plunger (1) is 2.5mm, and the height of isotropy Porous Graphite plunger (1) is 6mm.
4, a kind of porous gas static pressure thrust bearing according to claim 1, it is characterized in that: the quantity of described isotropy Porous Graphite plunger (1) is six, the quantity of the throttle orifice (6) on the described bearing matrix (3) is six, the radius of isotropy Porous Graphite plunger (1) is 1.5mm, and the height of isotropy Porous Graphite plunger (1) is 6mm.
5, a kind of porous gas static pressure thrust bearing according to claim 1, it is characterized in that: the quantity of described isotropy Porous Graphite plunger (1) is six, the quantity of the throttle orifice (6) on the described bearing matrix (3) is six, the radius of isotropy Porous Graphite plunger (1) is 3.5mm, and the height of isotropy Porous Graphite plunger (1) is 6mm.
6, a kind of porous gas static pressure thrust bearing according to claim 1, it is characterized in that: the quantity of described isotropy Porous Graphite plunger (1) is eight, the quantity of the throttle orifice (6) on the described bearing matrix (3) is eight, the radius of isotropy Porous Graphite plunger (1) is 2.5mm, and the height of isotropy Porous Graphite plunger (1) is 6mm.
7, a kind of porous gas static pressure thrust bearing according to claim 1, it is characterized in that: the quantity of described isotropy Porous Graphite plunger (1) is six, the quantity of the throttle orifice (6) on the described bearing matrix (3) is six, the radius of isotropy Porous Graphite plunger (1) is 2.5mm, and the height of isotropy Porous Graphite plunger (1) is 4mm.
8, a kind of porous gas static pressure thrust bearing according to claim 1, it is characterized in that: the quantity of described isotropy Porous Graphite plunger (1) is six, the quantity of the throttle orifice (6) on the described bearing matrix (3) is six, the radius of isotropy Porous Graphite plunger (1) is 2.5mm, and the height of isotropy Porous Graphite plunger (1) is 8mm.
9, according to the described a kind of porous gas static pressure thrust bearing of arbitrary claim in the claim 1 to 8, it is characterized in that: described isotropy Porous Graphite plunger (1) adopts the inwall of epoxy resin and throttle orifice (6) bonding.
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| CNA2008102097928A CN101435466A (en) | 2008-12-25 | 2008-12-25 | Porous gas static pressure thrust bearing |
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| CNA2008102097928A CN101435466A (en) | 2008-12-25 | 2008-12-25 | Porous gas static pressure thrust bearing |
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| CN101818758A (en) * | 2010-04-13 | 2010-09-01 | 中国计量学院 | Parallel microchannel spray nozzle type layer flow static-pressure throttleer for anti-thrust |
| CN101825142A (en) * | 2010-06-01 | 2010-09-08 | 华中科技大学 | Gas bearing with single-cavity porous throttling structure |
| CN103056397A (en) * | 2012-12-31 | 2013-04-24 | 哈尔滨工业大学 | Large-diameter ultra-precise air static pressure rotating shafting |
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| CN101818758A (en) * | 2010-04-13 | 2010-09-01 | 中国计量学院 | Parallel microchannel spray nozzle type layer flow static-pressure throttleer for anti-thrust |
| CN101825142A (en) * | 2010-06-01 | 2010-09-08 | 华中科技大学 | Gas bearing with single-cavity porous throttling structure |
| CN101825142B (en) * | 2010-06-01 | 2012-01-25 | 华中科技大学 | Gas bearing with single-cavity porous throttling structure |
| CN103375488B (en) * | 2012-04-11 | 2016-08-10 | 哈米尔顿森德斯特兰德公司 | Air bearing for ram-air fan |
| CN103375488A (en) * | 2012-04-11 | 2013-10-30 | 哈米尔顿森德斯特兰德公司 | Air bearing shaft for ram air fan |
| CN103056397A (en) * | 2012-12-31 | 2013-04-24 | 哈尔滨工业大学 | Large-diameter ultra-precise air static pressure rotating shafting |
| CN103256304A (en) * | 2013-04-10 | 2013-08-21 | 中国计量学院 | Large-load-bearing high-rigidity static-pressure gas bearing |
| CN103256304B (en) * | 2013-04-10 | 2015-11-25 | 中国计量学院 | The high rigidity hydrostatic gas-lubricated bearing of a kind of large carrying |
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| CN105275992A (en) * | 2015-11-18 | 2016-01-27 | 中国计量学院 | Composite throttling type static-pressure gas bearing for vacuum environment and use method of composite throttling type static-pressure gas bearing |
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| CN106979227B (en) * | 2017-05-17 | 2023-06-02 | 西安工业大学 | Porous integrated throttling integral gas hydrostatic bearing |
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| CN114251361A (en) * | 2020-09-24 | 2022-03-29 | 武汉科技大学 | A kind of micro-nano porous throttling static pressure air-floating tapered bearing |
| CN113074188A (en) * | 2021-03-23 | 2021-07-06 | 哈尔滨工业大学 | Micro-seam air floatation unit and forming method thereof |
| CN114517809A (en) * | 2022-02-23 | 2022-05-20 | 中国工程物理研究院机械制造工艺研究所 | Aerostatic bearing based on lotus-root-shaped directional porous throttling |
| CN114517809B (en) * | 2022-02-23 | 2023-09-12 | 中国工程物理研究院机械制造工艺研究所 | Aerostatic bearing based on lotus root-shaped directional porous throttling |
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