CN101818758B - Parallel microchannel spray nozzle type layer flow static-pressure throttleer for anti-thrust - Google Patents

Abstract

The invention discloses a parallel micro-channel sprinkler type laminar flow gas static pressure restrictor for thrust. It is composed of a throttle body and a matching plug; there are more than 8 microchannels on the working surface where the throttle body and the matching plug are combined. The outlet section of the microchannel and the working surface form an acute angle of less than 45°. The micro-channels on the surface of the main body of the flow device are respectively connected with pressure equalization grooves, and the adjacent micro-channels are separated by a grid. The nozzle hole is connected with the air inlet hole of the restrictor body, and the nozzle hole and the matching plug are interference fit. , the working surface of the matching plug is a concave surface, and an orifice is opened in the center of the concave surface. Compared with the traditional throttling throttle, the air film of the static pressure system has higher rigidity; compared with the traditional thrust throttle, the gas film of the static pressure system has higher stability. The invention is applicable to a gas static pressure restrictor for thrust.

Description

Parallel microchannel nozzle type laminar flow type thrust gas static pressure restrictor

technical field

The invention relates to gas static pressure lubrication technology, in particular to a gas static pressure restrictor for parallel microchannel nozzle type laminar flow type thrust.

Background technique

With the development of my country's equipment manufacturing industry, there is a requirement for ultra-precision instruments and equipment to take the road of independent innovation. Among them, the accuracy of shafting and guide rails as basic components is one of the key "bottlenecks" that must be overcome in ultra-precision engineering technology.

For gas static pressure devices, the accuracy can be basically guaranteed when measuring with micron-level precision, but in the application of nanometer-level precision, large-scale (tens of nanometers) random vibrations are likely to occur between the moving pair when the gas film is formed , for ultra-precision instruments, machine tools and equipment, this vibration becomes the most important factor restricting its accuracy index. Therefore, how to reduce the micro-vibration of the static pressure system has become a hot issue in current research. In fact, the stability and stiffness of the air film are a pair of contradictions, and the current technology is still difficult to take care of both. The current urgent task is to study how to improve the stiffness and stability of the air film at the same time, and to find the balance between the two. When researching the basic theory of gas static pressure technology, the core problem is the research on the flow pattern of the restrictor micro-flow field. When the traditional restrictor adopts the principle of small hole throttling, sufficient air source pressure is required to meet the requirements of the carrying capacity, which causes the flow velocity at the outlet of the orifice to be too high to form a jet, which generates turbulence and micro-vortex in the lubricating air film, becoming The main source of vibration: when the principle of porous throttling is used, the direction of the airflow flowing out of the micropores is random due to the natural state of the microporous material, and local small turbulence will also be generated, which cannot be ignored. In addition, the manufacturing and installation accuracy of microporous gaskets are difficult to meet the requirements of nanoscale vibration; it is difficult to meet the requirements of ultra-stable and high rigidity of the system at the same time. The parallel micro-channel nozzle type low-turbulence thrust-type gas static pressure restrictor is designed by using multiple micro-channels for throttling, which can effectively reduce the gas film vibration and improve the stiffness and stability of the static pressure system.

Contents of the invention

In order to overcome the problems of large gas film vibration and low rigidity caused by traditional gas static pressure thrust restrictors, the object of the present invention is to provide a parallel microchannel nozzle type laminar flow thrust gas static pressure restrictor.

In order to achieve the above object, the technical scheme adopted in the present invention is:

The present invention consists of a throttle body and a matching plug; more than 8 microchannels are opened on the working surface where the throttle body and the matching plug are combined, and the outlet section of the microchannel forms an acute angle less than 45° with the working surface. The microchannels on the surface of the restrictor body are respectively connected with pressure equalization grooves, and the adjacent microchannels are separated by grids. Ying fit, the working surface of the mating plug is a concave surface, and an orifice is opened in the center of the concave surface.

The diameter of the throttle hole at the center of the concave curved surface of the mating plug is 0.05-0.2mm.

The width of each microchannel on the wall of the nozzle-type hole is 0.5-2mm, and the depth is 0.05-0.2mm.

The cross-section of the pressure equalizing groove is rectangular, its width is 0.5-2mm, and its depth is 0.05-0.2mm.

The beneficial effects that the present invention has are:

1. Compared with the traditional thrust restrictor, the gas film of the static pressure system of the present invention has greater rigidity.

2. The gas film stability of the static pressure system of the present invention is higher than that of the traditional thrust restrictor.

The invention is applicable to a gas static pressure restrictor for thrust.

Description of drawings

Figure 1 is a front view of a gas static pressure restrictor with a parallel microchannel nozzle.

Fig. 2 is a top view of a gas static pressure restrictor with a parallel microchannel nozzle.

Fig. 3 is a main body view of the restrictor.

Figure 4 is an enlarged schematic diagram of I.

Figure 5 is an enlarged schematic view of II.

Fig. 6 is an enlarged schematic diagram of III.

In the figure: 1. Throttle main body, 2. Fitting plug, 3. Air inlet, 4. Micro channel, 5. Grille, 6. Throttle hole, 7. Pressure equalizing groove.

Detailed ways

Embodiments of the present invention will be further described in detail below in conjunction with the accompanying drawings.

As shown in Fig. 1, Fig. 2, Fig. 3, Fig. 4, Fig. 5, and Fig. 6, there are more than 8 microchannels 4 on the working surface where the restrictor main body 1 of the present invention is combined with the mating plug 2. 4. An acute angle of less than 45° is formed between the outlet section and the working surface. The microchannel openings on the surface of the restrictor main body 1 are respectively connected with pressure equalization grooves 7, and the adjacent microchannels are separated by a grid 5. It communicates with the air intake hole of the restrictor main body 1, the nozzle hole and the matching plug 2 are interference fit, the working surface of the matching plug 2 is a concave surface, and a throttle hole is set in the center of the concave surface.

The diameter of the throttle hole at the center of the concave surface of the matching plug 2 is 0.05-0.2 mm.

The width of each microchannel 4 on the wall of the nozzle-type hole is 0.5-2mm, and the depth is 0.05-0.2mm.

The cross-section of the pressure equalizing groove is rectangular, its width is 0.5-2mm, and its depth is 0.05-0.2mm.

When working, the gas with a pressure of 0.4Mpa～0.6Mpa is sent into the gas static pressure restrictor through the air inlet 3, and the gas is sprayed through 12 microchannels 4 and orifices 6, so that the gas restrictor is suspended in its corresponding The working surface of the microchannel 4 can be used to realize air flotation movement, and the pressure equalization groove 7 is provided on the working surface of the microchannel 4 to help make the pressure distribution of the working surface even. Due to the throttling of multiple micro-channels, the stability and rigidity of the gas flow field are improved, and the low turbulence of the gas film flow field is realized.

Claims (4)

1. a parallel microchannel spray nozzle type layer flow static-pressure throttleer for anti-thrust is characterized in that: be made of flow controller main body (1) and cooperation plug (2); Have micro passage (4) on flow controller main body (1) and the working surface that cooperates plug (2) to combine more than 8, become acute angle between micro passage (4) outlet section and the working surface less than 45 °, micro passage mouth on flow controller main body (1) surface is connected with balancing slit (7) respectively, separate with barrier (5) between the adjacent micro passage, the spray nozzle type hole is communicated with flow controller main body (1) inlet hole, the spray nozzle type hole is interference fit with cooperating plug (2), cooperating plug (2) working surface is concave curved surface, offers throttle orifice at the concave curved surface center.

2. a kind of parallel microchannel spray nozzle type layer flow static-pressure throttleer for anti-thrust according to claim 1 is characterized in that: the throttle orifice at described cooperation plug (2) concave curved surface center, its diameter is 0.05～0.2mm.

3. a kind of parallel microchannel spray nozzle type layer flow static-pressure throttleer for anti-thrust according to claim 1 is characterized in that: the width of each micro passage (4) on the hole wall in described spray nozzle type hole is 0.5～2mm, and the degree of depth is 0.05～0.2mm.

4. a kind of parallel microchannel spray nozzle type layer flow static-pressure throttleer for anti-thrust according to claim 1 is characterized in that: described balancing slit cross section is a rectangle, and its width is 0.5～2mm, and the degree of depth is 0.05～0.2mm.

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