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CN101414620B - Electronic device, thin-film transistor structure, and flat panel display having the same - Google Patents

Electronic device, thin-film transistor structure, and flat panel display having the same Download PDF

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CN101414620B
CN101414620B CN2008101755624A CN200810175562A CN101414620B CN 101414620 B CN101414620 B CN 101414620B CN 2008101755624 A CN2008101755624 A CN 2008101755624A CN 200810175562 A CN200810175562 A CN 200810175562A CN 101414620 B CN101414620 B CN 101414620B
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conductive layer
tft
width
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length direction
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CN101414620A (en
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金恩雅
李正鲁
李树美
申奉周
李美真
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Samsung Display Co Ltd
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    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/136Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
    • G02F1/1362Active matrix addressed cells
    • G02F1/136204Arrangements to prevent high voltage or static electricity failures
    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/136Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
    • G02F1/1362Active matrix addressed cells
    • G02F1/136286Wiring, e.g. gate line, drain line
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D86/00Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates
    • H10D86/40Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates characterised by multiple TFTs
    • H10D86/441Interconnections, e.g. scanning lines
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D89/00Aspects of integrated devices not covered by groups H10D84/00 - H10D88/00
    • H10D89/60Integrated devices comprising arrangements for electrical or thermal protection, e.g. protection circuits against electrostatic discharge [ESD]
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K59/00Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
    • H10K59/10OLED displays
    • H10K59/12Active-matrix OLED [AMOLED] displays
    • H10K59/131Interconnections, e.g. wiring lines or terminals

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  • Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
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  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Electroluminescent Light Sources (AREA)
  • Devices For Indicating Variable Information By Combining Individual Elements (AREA)

Abstract

本发明涉及电子器件、薄膜晶体管结构和具有该结构的平板显示器。本发明提供了一种电子器件,用以避免或减少引起像素故障的静电释放。根据本发明原理制造的电子器件可以包含多个导电层以及接线片,多个导电层彼此交叉但不接触,其中至少一个导电层包含宽度变化部分,宽度变化部分的宽度沿着至少其中一个导电层的长度方向变化,接线片在不与相邻导电层交叉的区域连接到至少一个导电层上。可替代地,宽度变化部分的宽度可以沿着至少一个导电层的长度方向连续变化,并且也可以具有钝的拐角边缘。本发明还提供了包含这种电子器件的平板有机电致发光显示器(OELD)或LCD显示设备。

The present invention relates to electronic devices, thin film transistor structures and flat panel displays having the structures. The invention provides an electronic device for avoiding or reducing electrostatic discharge causing pixel failure. An electronic device manufactured according to the principles of the present invention may comprise a plurality of conductive layers intersecting but not in contact with each other, as well as tabs, wherein at least one of the conductive layers includes a width varying portion, the width of which varies along at least one of the conductive layers The lengthwise variation of the tabs is connected to at least one conductive layer in regions that do not intersect adjacent conductive layers. Alternatively, the width of the width varying portion may vary continuously along the length direction of the at least one conductive layer, and may also have blunt corner edges. The present invention also provides a flat-panel organic electroluminescent display (OELD) or LCD display device comprising such an electronic device.

Description

电子器件、薄膜晶体管结构和具有该结构的平板显示器Electronic device, thin film transistor structure and flat panel display having the same

本申请是针对申请日为2005年6月30日、申请号为200510080518.1、发明名称为“电子器件、薄膜晶体管结构和具有该结构的平板显示器”的发明专利申请的分案申请。  This application is a divisional application for an invention patent application with an application date of June 30, 2005, an application number of 200510080518.1, and an invention title of "Electronic Device, Thin Film Transistor Structure, and Flat Panel Display with the Structure". the

与相关申请的交叉引用  Cross-references to related applications

本申请要求2004年6月30日在韩国知识产权局申请的韩国专利申请10-2004-0050445和10-2004-0050446的优先权,在此将其公开全部引入作为参考。  This application claims priority to Korean Patent Applications 10-2004-0050445 and 10-2004-0050446 filed with the Korean Intellectual Property Office on June 30, 2004, the disclosures of which are incorporated herein by reference in their entirety. the

技术领域 technical field

本发明总地来说涉及如薄膜晶体管(TFT)的电子器件和具有该器件的平板显示设备。然而,本发明具体涉及其中避免或减少了由静电引起的静电破坏的电子器件和具有该电子器件的平板显示设备。  The present invention generally relates to electronic devices such as thin film transistors (TFTs) and flat panel display devices having the same. However, the present invention particularly relates to an electronic device in which electrostatic breakdown caused by static electricity is avoided or reduced and a flat panel display device having the same. the

背景技术 Background technique

有多种显示设备可以用来显示图像。最近,多种平板显示设备已经替代了阴极射线管(CRT)显示器。平板显示设备根据使用的发光类型可以分为发射型和非发射型。发射型显示设备包括平面CRT显示设备、等离子显示板设备、真空荧光显示设备、场发射显示设备和有机/无机电致发光显示设备,而非发射型显示设备包括液晶显示设备。平面发射型有机电致发光显示设备(OELD)由于是发射型的,而且不包括例如背光的发光设备并且能在低功耗和高效率下工作,因此备受关注。OELD设备具有工作电压低、重量轻、外形薄、视角宽和视频响应时间快等优点。  There are a variety of display devices that can be used to display images. Recently, a variety of flat panel display devices have replaced cathode ray tube (CRT) displays. Flat panel display devices can be classified into emissive type and non-emissive type according to the type of light emission used. Emissive display devices include flat CRT display devices, plasma display panel devices, vacuum fluorescent display devices, field emission display devices, and organic/inorganic electroluminescence display devices, while non-emissive display devices include liquid crystal display devices. A planar emission type organic electroluminescence display device (OELD) has attracted attention since it is an emission type, does not include a light emitting device such as a backlight, and can operate at low power consumption and high efficiency. OELD devices have the advantages of low operating voltage, light weight, thin profile, wide viewing angle and fast video response time. the

OELD设备常规的电致发光单元包括在基板上以层叠型形成的第一电极(阳极)、第二电极(阴极)和插在第一电极和第二电极之间的有机发光 层(薄膜)。在工作时,OELD设备通过由激子产生的能量发射具有特定波长的光,激子是由通过阳极和阴极注入的电子和空穴在有机薄膜中重新结合而形成的。电子传输层(ETL)可以设置在阴极和有机发光层之间。类似地,空穴传输层(HTL)可以设置在阳极和有机发光层之间。并且,可以在阳极和HTL之间设置空穴注入层(HIL)。此外,电子注入层(EIL)可以设置在阴极和ETL之间。  A conventional electroluminescence unit of an OELD device includes a first electrode (anode), a second electrode (cathode) formed in a stacked type on a substrate, and an organic light emitting layer (thin film) interposed between the first electrode and the second electrode. In operation, the OELD device emits light with a specific wavelength through energy generated by excitons, which are formed by the recombination of electrons and holes injected through the anode and cathode in the organic thin film. An electron transport layer (ETL) may be disposed between the cathode and the organic light emitting layer. Similarly, a hole transport layer (HTL) may be disposed between the anode and the organic light emitting layer. Also, a hole injection layer (HIL) may be provided between the anode and the HTL. In addition, an electron injection layer (EIL) may be disposed between the cathode and the ETL. the

无源矩阵(PM)OELD设备可以使用手工驱动方法,而主动矩阵(AM)型可以使用激活驱动方法。在PM OELD设备中,阳极按列布置,阴极按行布置。行驱动电路向阴极提供扫描信号,列驱动电路提供数据信号到每个像素。另一方面,AM OELD设备使用薄膜晶体管(TFT)控制输入到像素的信号。由于TFT的使用使AM OELD可以迅速地处理大量信号,因此AMOELD广泛用于执行激励。  A passive matrix (PM) OELD device can use a manual driving method, while an active matrix (AM) type can use an active driving method. In PM OELD devices, the anodes are arranged in columns and the cathodes are arranged in rows. The row driving circuit provides scanning signals to the cathode, and the column driving circuit provides data signals to each pixel. AM OLED devices, on the other hand, use thin-film transistors (TFTs) to control signals input to pixels. Because the use of TFT enables AMOELD to process a large number of signals quickly, AMOELD is widely used to perform excitation. the

常规AM OELD设备的缺点是在制造或使用设备时,由于静电的产生和/或释放在显示区可能会产生一个或多个错误的像素。  A disadvantage of conventional AM OELD devices is that one or more erroneous pixels may be generated in the display area due to the generation and/or discharge of static electricity during manufacture or use of the device. the

图1A是常规OELD设备的平面照片图,其中将错误的像素显示为亮点。图1B是图1A中记为A的正常像素的放大图,图1C是图1A中记为B的错误像素的放大图。图1B和图1C是图1A的常规OELD设备的底面视图。底面视图是透过基板的多层结构和安装在其上的不同的电子和电致发光元件而得到的。因此,图1B和图1C中,栅极线3a和3b出现在导电层5之上。  FIG. 1A is a planar photogram of a conventional OELD device showing erroneous pixels as bright spots. FIG. 1B is an enlarged view of a normal pixel marked as A in FIG. 1A , and FIG. 1C is an enlarged view of an error pixel marked as B in FIG. 1A . 1B and 1C are bottom views of the conventional OELD device of FIG. 1A. The bottom view is obtained through the multilayer structure of the substrate and the various electronic and electroluminescent components mounted on it. Therefore, in FIGS. 1B and 1C , the gate lines 3 a and 3 b appear above the conductive layer 5 . the

在图1B和图1C中,每个像素1a和1b都包括电致发光单元、栅电极(图1B的2a和图1C的2b)和发光薄膜晶体管(图1B的Ma和图1C的Mb),发光薄膜晶体管传送来自驱动TFT(未示出)的电信号至像素。发光TFT Ma和Mb的源电极经由导电层5电连接到驱动TFT(未示出)上。  In FIG. 1B and FIG. 1C, each pixel 1a and 1b includes an electroluminescence unit, a gate electrode (2a of FIG. 1B and 2b of FIG. 1C) and a light-emitting thin film transistor (Ma of FIG. 1B and Mb of FIG. 1C), The light emitting thin film transistor transmits an electrical signal from a driving TFT (not shown) to the pixel. The source electrodes of the light emitting TFTs Ma and Mb are electrically connected to a driving TFT (not shown) via a conductive layer 5 . the

图1D是图1C中记为B’的部分放大平面图。参见图1D,导电层5可以延伸穿过其它导电层。例如,在图1D放大的底面视图中,示出了导电层5穿过栅极线3a/3b。在示例的图中,栅极线3a/3b出现在导电层5之上。工作中,栅极线3a/3b起扫描线和/或扫描线延伸单元的作用,用于向薄膜晶体 管提供电信号。  Figure 1D is an enlarged plan view of a portion denoted B' in Figure 1C. Referring to Figure ID, the conductive layer 5 may extend through other conductive layers. For example, in the enlarged bottom view of FIG. 1D, the conductive layer 5 is shown passing through the gate lines 3a/3b. In the illustrated figure, the gate lines 3 a / 3 b appear above the conductive layer 5 . In operation, the gate lines 3a/3b function as scan lines and/or scan line extension units for providing electrical signals to the thin film transistors. the

为了满足设计规范,每个栅极线3a/3b的宽度可能沿着它的长度变化。例如,图1B、图1C和图1D所示的常规设计中,每个栅极线3a/3b的宽度在与导电层5交叉的部分发生变化。如图1D所示,栅极线3b较宽的部分可以是宽度改变部分Aw,栅极线3a/3b较窄的连接部分可以是交叉单元Ac。宽度改变部分Aw和交叉单元Ac可以与导电层5绝缘并且位于各自边界之内。因为电流趋向于在导体的尖端放电,所以静电释放(ESD)趋向于发生在图1D所示的宽度改变部分Aw的角部分Ad。在大多数情况下,ESD损坏相应的像素1a/1b,引起它过度发光(例如,出现诸如图1A中显示的亮点B的亮点)。由于静电集中在交叉部分,所以很容易诱导这样的ESD,因此,如果插入导电层之间的绝缘层受到破坏,交叉的导电层之间产生短路的可能性就会增加。如图1B和图1C所描述的,即使输入相同的电流信号至图1B中的像素1a和图1C中的像素1b,图1C中的像素1b也会出错,产生比图1B中正常像素有更大亮度的亮点。因为不同的导电层3b和导电层5之间的短路电流引起和使用多于期望的一个的不同电流信号,所以会出现更大的亮度。这种不希望的ESD可能会降低平面OELD的图像质量,而平面OELD在整个显示区要求很高的均匀度。  To meet design specifications, the width of each gate line 3a/3b may vary along its length. For example, in the conventional designs shown in FIG. 1B , FIG. 1C and FIG. 1D , the width of each gate line 3 a / 3 b changes at the portion where it intersects with the conductive layer 5 . As shown in FIG. 1D , the wider portion of the gate line 3b may be the width changing portion A w , and the narrower connecting portion of the gate line 3a/3b may be the cross unit Ac . The width changing portion Aw and the intersecting unit Ac may be insulated from the conductive layer 5 and located within respective boundaries. Electrostatic discharge (ESD) tends to occur at the corner portion Ad of the width changing portion Aw shown in FIG. 1D because current tends to discharge at the tip of the conductor. In most cases, ESD damages the corresponding pixel 1a/1b, causing it to emit excessive light (eg, a bright spot such as bright spot B shown in FIG. 1A appears). Such ESD is easily induced since static electricity is concentrated at the crossing portion, so if the insulating layer interposed between the conductive layers is damaged, the possibility of a short circuit between the crossing conductive layers increases. As described in FIG. 1B and FIG. 1C, even if the same current signal is input to the pixel 1a in FIG. 1B and the pixel 1b in FIG. 1C, the pixel 1b in FIG. Highlights of great brightness. A greater brightness occurs because the short-circuit currents between the different conductive layers 3b and 5 cause and use more than one desired different current signal. This unwanted ESD may degrade the image quality of planar OELDs, which require high uniformity across the entire display area.

发明内容Contents of the invention

本发明提供一种电子器件和一种TFT结构,其中减少或避免了导电层的静电破坏引起的错误像素的产生,并且提供一种具有该结构的平面发射型有机电致发光显示(OELD)设备。  The present invention provides an electronic device and a TFT structure, wherein the generation of wrong pixels caused by electrostatic damage of the conductive layer is reduced or avoided, and a planar emission type organic electroluminescent display (OELD) device having the structure is provided . the

本发明一方面提供一种电子器件,包括:第一导电层;和与所述第一导电层交叉的第二导电层,其中所述第一导电层不接触所述第二导电层,其中所述第一导电层在所述第一导电层与所述第二导电层交叉的区域中包括宽度变化部分,该宽度变化部分的宽度沿着所述第一导电层的长度方向变化,其中所述第二导电层的宽度在所述第一导电层与所述第二导电层交叉的区 域中为常数,并且其中连接位于宽度变化部分的外部线的同一平面上的两点的线段和与所述第一导电层的长度方向平行的线段之间的夹角小于90°。  One aspect of the present invention provides an electronic device, comprising: a first conductive layer; and a second conductive layer crossing the first conductive layer, wherein the first conductive layer does not contact the second conductive layer, wherein the The first conductive layer includes a width variation portion in a region where the first conductive layer intersects the second conductive layer, and the width of the width variation portion varies along the length direction of the first conductive layer, wherein the The width of the second conductive layer is constant in the region where the first conductive layer intersects with the second conductive layer, and wherein the sum of the line segment connecting two points on the same plane as the outer line of the width changing portion and the The included angle between the parallel line segments in the longitudinal direction of the first conductive layer is less than 90°. the

本发明一方面提供一种TFT结构,包括:第一导电层;和与所述第一导电层交叉的第二导电层,其中所述第一导电层不接触所述第二导电层,其中所述第一导电层在所述第一导电层与所述第二导电层交叉的区域中包括宽度变化部分,该宽度变化部分的宽度沿着所述第一导电层的长度方向变化,其中所述第二导电层的宽度在所述第一导电层与所述第二导电层交叉的区域中为常数,并且其中连接位于宽度变化部分的外部线的同一平面上的两点的线段和与所述第一导电层的长度方向平行的线段之间的夹角小于90°。  One aspect of the present invention provides a TFT structure, comprising: a first conductive layer; and a second conductive layer crossing the first conductive layer, wherein the first conductive layer does not contact the second conductive layer, wherein the The first conductive layer includes a width variation portion in a region where the first conductive layer intersects the second conductive layer, and the width of the width variation portion varies along the length direction of the first conductive layer, wherein the The width of the second conductive layer is constant in the region where the first conductive layer intersects with the second conductive layer, and wherein the line segment connecting two points on the same plane as the outer line of the width changing portion and the The included angle between the parallel line segments in the length direction of the first conductive layer is less than 90°. the

本发明一方面提供一种平板显示设备,包括:基板;形成于基板上的TFT层;和包括电连接到TFT层的不只一个像素的像素层,其中TFT层包括第一导电层和与所述第一导电层交叉的第二导电层,其中所述第一导电层不接触所述第二导电层,其中所述第一导电层在所述第一导电层与所述第二导电层交叉的区域中包括宽度变化部分,该宽度变化部分的宽度沿着所述第一导电层的长度方向变化,其中所述第二导电层的宽度在所述第一导电层与所述第二导电层交叉的区域中为常数,并且其中连接位于宽度变化部分的外部线的同一平面上的两点的线段和与所述第一导电层的长度方向平行的线段之间的夹角小于90°。  One aspect of the present invention provides a flat panel display device, comprising: a substrate; a TFT layer formed on the substrate; and a pixel layer including more than one pixel electrically connected to the TFT layer, wherein the TFT layer includes a first conductive layer and the A second conductive layer crossed by a first conductive layer, wherein the first conductive layer does not contact the second conductive layer, wherein the first conductive layer is intersected by the first conductive layer and the second conductive layer The area includes a width changing portion, the width of the width changing portion changes along the length direction of the first conductive layer, wherein the width of the second conductive layer is crossed by the first conductive layer and the second conductive layer is constant in the area of , and the angle between the line segment connecting two points located on the same plane as the outer line of the width changing portion and the line segment parallel to the length direction of the first conductive layer is less than 90°. the

本发明一方面提供一种电子器件,包括:第一导电层;和与所述第一导电层交叉的第二导电层,其中所述第一导电层不接触所述第二导电层,其中所述第一导电层包括剖面面积沿着所述第一导电层的长度方向变化的部分,该部分在所述第一导电层与所述第二导电层交叉的区域中,其中所述第二导电层的宽度在所述第一导电层与所述第二导电层交叉的区域中为常数,并且其中连接位于剖面面积变化的部分的外部线的同一平面上的两点的线段和与所述第一导电层的长度方向平行的线段之间的夹角小于90°。  One aspect of the present invention provides an electronic device, comprising: a first conductive layer; and a second conductive layer crossing the first conductive layer, wherein the first conductive layer does not contact the second conductive layer, wherein the The first conductive layer includes a part whose cross-sectional area changes along the length direction of the first conductive layer, and the part is in the crossing area of the first conductive layer and the second conductive layer, wherein the second conductive layer The width of the layer is constant in the region where the first conductive layer intersects with the second conductive layer, and wherein a line segment connecting two points on the same plane as an outer line of a portion where the cross-sectional area changes and the second The included angle between the parallel line segments in the longitudinal direction of a conductive layer is less than 90°. the

本发明一方面提供一种TFT结构,包括:第一导电层;和与所述第一导电层交叉的第二导电层,其中所述第一导电层不接触所述第二导电层,其中所述 第一导电层包括剖面面积沿着所述第一导电层的长度方向变化的部分,该部分在所述第一导电层与所述第二导电层交叉的区域中,其中所述第二导电层的宽度在所述第一导电层与所述第二导电层交叉的区域中为常数,并且其中连接位于剖面面积变化的部分的外部线的同一平面上的两点的线段和与所述第一导电层的长度方向平行的线段之间的夹角小于90°。  One aspect of the present invention provides a TFT structure, comprising: a first conductive layer; and a second conductive layer crossing the first conductive layer, wherein the first conductive layer does not contact the second conductive layer, wherein the The first conductive layer includes a part whose cross-sectional area changes along the length direction of the first conductive layer, and the part is in the crossing area of the first conductive layer and the second conductive layer, wherein the second conductive layer The width of the layer is constant in the region where the first conductive layer intersects with the second conductive layer, and wherein a line segment connecting two points on the same plane as an outer line of a portion where the cross-sectional area changes and the second The included angle between the parallel line segments in the longitudinal direction of a conductive layer is less than 90°. the

本发明一方面提供一种平板显示设备,包括:基板;形成于基板上的TFT层;和包括电连接到TFT层的多于一个像素的像素层,其中TFT层包括第一导电层和与所述第一导电层交叉的第二导电层,其中所述第一导电层不接触所述第二导电层,其中所述第一导电层包括剖面面积沿着所述第一导电层的长度方向变化的部分,该部分在所述第一导电层与所述第二导电层交叉的区域中,其中所述第二导电层的宽度在所述第一导电层与所述第二导电层交叉的区域中为常数,并且其中连接位于剖面面积变化的部分的外部线的同一平面上的两点的线段和与所述第一导电层的长度方向平行的线段之间的夹角小于90°。  One aspect of the present invention provides a flat panel display device, comprising: a substrate; a TFT layer formed on the substrate; and a pixel layer including more than one pixel electrically connected to the TFT layer, wherein the TFT layer includes a first conductive layer and is connected to the TFT layer. A second conductive layer intersecting the first conductive layer, wherein the first conductive layer does not contact the second conductive layer, wherein the first conductive layer includes a cross-sectional area that varies along the length direction of the first conductive layer part, which is in the region where the first conductive layer intersects the second conductive layer, wherein the width of the second conductive layer is in the region where the first conductive layer intersects the second conductive layer where is a constant, and wherein the angle between the line segment connecting two points located on the same plane as the outer line of the section with varying cross-sectional area and the line segment parallel to the length direction of the first conductive layer is less than 90°. the

本发明一方面提供一种电子器件,包括彼此交叉但不接触的多个导电层。其中至少一个导电层包括一个宽度变化部分,宽度变化部分的宽度沿着至少一个导电层的长度方向变化。电子器件进一步包括在远离导电层交叠区域的区域连接到至少一个导电层或相邻导电层的接线片。  One aspect of the present invention provides an electronic device comprising a plurality of conductive layers crossing but not in contact with each other. Wherein at least one conductive layer includes a width changing portion, and the width of the width changing portion changes along the length direction of the at least one conductive layer. The electronic device further includes a tab connected to at least one of the conductive layers or an adjacent conductive layer in a region remote from the overlapping region of the conductive layers. the

本发明另一方面提供一种TFT结构,包括彼此交叉但不接触的多个导电层。其中至少一个导电层包括一个宽度变化部分,宽度变化部分的宽度沿着至少一个导电层的长度方向变化。TFT结构进一步包括在远离导电层交叠区域的区域连接到至少一个导电层或相邻导电层的接线片。  Another aspect of the present invention provides a TFT structure including a plurality of conductive layers crossing but not in contact with each other. Wherein at least one conductive layer includes a width changing portion, and the width of the width changing portion changes along the length direction of the at least one conductive layer. The TFT structure further includes a tab connected to at least one of the conductive layers or an adjacent conductive layer in a region away from the overlapping region of the conductive layers. the

本发明另一方面提供一种平板显示设备包括基板、形成在基板上的TFT层、形成在TFT层上的至少一个绝缘层、以及像素层,该像素层包括通过形成在绝缘层的通孔电连接到TFT层的多于一个的像素。TFT层包括彼此交叉但不接触的多个导电层。至少一个导电层包括一个宽度变化部分,宽度变化部分的宽度沿着至少一个导电层的长度方向变化。平板显示设备进一步包括在远离导电层交叠区域的区域连接到至少一个导电层或相邻导电层的接线片。  Another aspect of the present invention provides a flat panel display device including a substrate, a TFT layer formed on the substrate, at least one insulating layer formed on the TFT layer, and a pixel layer, the pixel layer includes electrical connections through a through hole formed in the insulating layer. More than one pixel connected to the TFT layer. The TFT layer includes a plurality of conductive layers crossing but not in contact with each other. The at least one conductive layer includes a width varying portion, the width of which varies along the length of the at least one conductive layer. The flat panel display device further includes a tab connected to at least one conductive layer or an adjacent conductive layer at a region away from the overlapping region of the conductive layers. the

本发明另一方面提供一种电子器件,包括彼此交叉但不接触的多个导电层。至少一个导电层包括一个宽度变化部分,宽度变化部分的宽度沿着至少一个导电层的长度方向变化。电子器件进一步包括一个两个线段之间的小于90°的夹角,一条线段连接位于宽度变化部分的外部线的同一平面上的两点,另一条线段与至少一个导电层的长度方向平行。  Another aspect of the present invention provides an electronic device comprising a plurality of conductive layers intersecting but not in contact with each other. The at least one conductive layer includes a width varying portion, the width of which varies along the length of the at least one conductive layer. The electronic device further includes an angle less than 90° between two line segments, one line segment connecting two points on the same plane as the outer line of the width changing portion, and the other line segment being parallel to the lengthwise direction of the at least one conductive layer. the

本发明另一方面提供一种TFT结构,包括彼此交叉但不接触的多个导电层。至少一个导电层包括一个宽度变化部分,宽度变化部分的宽段沿着至少一个导电层的长度方向变化。TFT结构进一步包括一个两个线段之间的小于90°的夹角,一条线段连接位于宽度变化部分的外部线的同一平面上的两点,另一条线段与至少一个导电层的长度方向平行。  Another aspect of the present invention provides a TFT structure including a plurality of conductive layers crossing but not in contact with each other. The at least one conductive layer includes a width varying portion, the width of which varies along the length of the at least one conductive layer. The TFT structure further includes an included angle less than 90° between two line segments, one line segment connecting two points on the same plane as the outer line of the width changing portion, and the other line segment being parallel to the lengthwise direction of at least one conductive layer. the

本发明另一方面提供一种平面显示设备,包括基板、形成于基板上的TFT层、至少一个形成于TFT层之上的绝缘层、以及像素层,该像素层包括通过形成在绝缘层上的通孔电连接到TFT层的多于一个像素。TFT层包括彼此交叉但不接触的多个导电层。至少一个导电层包括一个宽度变化部分,宽度变化部分的宽度沿着至少一个导电层的长度方向变化。TFT层可以进一步包括一个两个线段之间的小于90°的夹角,一条线段连接位于宽度变化部分的外部线的同一平面上的两点,另一条线段与至少一个导电层的长度方向平行。  Another aspect of the present invention provides a flat display device, comprising a substrate, a TFT layer formed on the substrate, at least one insulating layer formed on the TFT layer, and a pixel layer, the pixel layer comprising The vias are electrically connected to more than one pixel of the TFT layer. The TFT layer includes a plurality of conductive layers crossing but not in contact with each other. The at least one conductive layer includes a width varying portion, the width of which varies along the length of the at least one conductive layer. The TFT layer may further include an included angle less than 90° between two line segments, one line segment connecting two points on the same plane as the outer line of the width changing portion, and the other line segment being parallel to the lengthwise direction of at least one conductive layer. the

本发明另一方面提供一种电子器件,包括彼此交叉但不接触的多个导电层,其中至少一个导电层包括剖面面积沿着至少一个导电层的长度方向变化的部分。电子器件可以进一步包括在远离导电层交叠区域的区域连接到至少一个导电层或相邻导电层的接线片。  Another aspect of the present invention provides an electronic device comprising a plurality of conductive layers intersecting but not in contact with each other, wherein at least one conductive layer includes a portion whose cross-sectional area varies along the length direction of the at least one conductive layer. The electronic device may further comprise a tab connected to at least one conductive layer or an adjacent conductive layer at a region away from the overlapping region of the conductive layers. the

本发明另一方面提供一种TFT结构,包括彼此交叉但不接触的多个导电层,其中至少一个导电层包括剖面面积沿着至少一个导电层的长度方向变化的部分。TFT结构可以进一步包括在远离导电层交叠区域的区域连接到至少一个导电层或相邻导电层的接线片。  Another aspect of the present invention provides a TFT structure, including a plurality of conductive layers intersecting but not in contact with each other, wherein at least one conductive layer includes a portion whose cross-sectional area varies along the length direction of the at least one conductive layer. The TFT structure may further include a tab connected to at least one conductive layer or an adjacent conductive layer at a region away from the conductive layer overlapping region. the

本发明另一方面提供一种平板显示设备,包括基板、形成于基板上的TFT层、至少一个形成于TFT层之上的绝缘层、以及像素层,该像素层包括通过形 成在绝缘层上的通孔电连接到TFT层的多于一个像素。TFT层包括彼此交叉但不接触的多个导电层。至少一个导电层包括剖面面积沿着至少一个导电层的长度方向变化的部分。平板显示设备可以进一步包括在远离导电层交叠区域的区域连接到至少一个导电层或相邻导电层的接线片。  Another aspect of the present invention provides a flat panel display device, comprising a substrate, a TFT layer formed on the substrate, at least one insulating layer formed on the TFT layer, and a pixel layer, the pixel layer comprising The vias are electrically connected to more than one pixel of the TFT layer. The TFT layer includes a plurality of conductive layers crossing but not in contact with each other. The at least one conductive layer includes portions that vary in cross-sectional area along the length of the at least one conductive layer. The flat panel display device may further include a tab connected to at least one conductive layer or an adjacent conductive layer at a region away from the overlapping region of the conductive layers. the

本发明另一方面提供一种电子器件,包括彼此交叉但不接触的多个导电层,其中至少一个导电层包括剖面面积沿着至少一个导电层的长度方向变化的部分。连接位于宽度变化部分的外部线的同一平面上的两点的线段和与至少一个导电层的长度方向平行的线段之间的夹角小于90°。  Another aspect of the present invention provides an electronic device comprising a plurality of conductive layers intersecting but not in contact with each other, wherein at least one conductive layer includes a portion whose cross-sectional area varies along the length direction of the at least one conductive layer. An angle between a line segment connecting two points on the same plane as the outer line of the width changing portion and a line segment parallel to the length direction of the at least one conductive layer is less than 90°. the

本发明另一方面提供一种TFT结构,包括彼此交叉但不接触的多个导电层,其中至少一个导电层包括剖面面积沿着至少一个导电层的长度方向变化的部分。连接位于宽度变化部分的外部线的同一平面上的两点的线段和与至少一个导电层的长度方向平行的线段之间的夹角小于90°。  Another aspect of the present invention provides a TFT structure, including a plurality of conductive layers intersecting but not in contact with each other, wherein at least one conductive layer includes a portion whose cross-sectional area varies along the length direction of the at least one conductive layer. An angle between a line segment connecting two points on the same plane as the outer line of the width changing portion and a line segment parallel to the length direction of the at least one conductive layer is less than 90°. the

本发明另一方面提供一种平板显示设备,包括基板、形成于基板上的TFT层、至少一个形成于TFT层之上的绝缘层、以及像素层,该像素层包括通过形成在绝缘层上的通孔电连接到TFT层的多于一个像素。TFT层包括彼此交叉但不接触的多个导电层。至少一个导电层包括剖面面积沿着至少一个导电层的长度方向变化的部分。连接位于宽度变化部分的外部线的同一平面上的两点的线段和与至少一个导电层的长度方向平行的线段之间的夹角小于90°。  Another aspect of the present invention provides a flat panel display device, comprising a substrate, a TFT layer formed on the substrate, at least one insulating layer formed on the TFT layer, and a pixel layer, the pixel layer comprising The vias are electrically connected to more than one pixel of the TFT layer. The TFT layer includes a plurality of conductive layers crossing but not in contact with each other. The at least one conductive layer includes portions that vary in cross-sectional area along the length of the at least one conductive layer. An angle between a line segment connecting two points on the same plane as the outer line of the width changing portion and a line segment parallel to the length direction of the at least one conductive layer is less than 90°. the

附图说明Description of drawings

通过参照附图详细地描述示例性的实施例,本发明的以上和其它特征和优点将更加明显。  The above and other features and advantages of the present invention will be more apparent by describing the exemplary embodiments in detail with reference to the accompanying drawings. the

图1A是常规有机电致发光显示设备的显示区的照片;  Fig. 1 A is the photo of the display area of conventional organic electroluminescence display device;

图1B是图1A中记为A的正常像素的部分放大照片;  Figure 1B is a partial enlarged photo of the normal pixel marked as A in Figure 1A;

图1C是图1A中记为B的错误像素的部分放大照片;  Figure 1C is a partially enlarged photo of the wrong pixel marked as B in Figure 1A;

图1D是图1C中记为B’的像素的一部分的放大底面视图;  Figure 1D is an enlarged bottom view of a portion of the pixel denoted B' in Figure 1C;

图1E是图1C中记为B’的像素的一部分的剖面照片;  Figure 1E is a cross-sectional photo of a part of the pixel denoted as B' in Figure 1C;

图2A是根据本发明一个实施例的有机电致发光显示设备的平面示意图;  2A is a schematic plan view of an organic electroluminescent display device according to an embodiment of the present invention;

图2B是图2A中记为C的OELD设备的像素的电路示意图;  Fig. 2B is the schematic circuit diagram of the pixel of the OELD device denoted as C in Fig. 2A;

图2C是根据本发明一个实施例的图2A中记为C的像素的部分剖面图;  2C is a partial cross-sectional view of a pixel denoted C in FIG. 2A according to one embodiment of the present invention;

图2D是显示在图2C中的一部分的修改实施例的部分平面图;  Figure 2D is a partial plan view of a modified embodiment of a part shown in Figure 2C;

图2E是图2C中像素的部分放大照片;  Figure 2E is a partially enlarged photo of the pixel in Figure 2C;

图3A是根据本发明另一个实施例的图2A中记为C的像素的部分剖面图;  3A is a partial cross-sectional view of a pixel marked C in FIG. 2A according to another embodiment of the present invention;

图3B是根据本发明一个实施例的图3A中记为D的部分的放大图;  Figure 3B is an enlarged view of a portion denoted D in Figure 3A according to an embodiment of the present invention;

图3C是显示在图3A中的像素的部分放大照片。  FIG. 3C is a partially enlarged photograph of the pixel shown in FIG. 3A. the

具体实施方式Detailed ways

下面参照其中显示了本发明示例性实施例的附图更加充分地描述本发明。  The present invention will be described more fully hereinafter with reference to the accompanying drawings, in which exemplary embodiments of the invention are shown. the

图2A是根据本发明的原理制造的有机电致发光显示(OELD)设备的平面示意图。参照图2A,基板110包括其上布置了诸如有机电致发光显示设备的发光设备的显示区200,沿着显示区200的边缘封接基板110与密封基板(未示出)的密封部分800,以及其上布置多种端子的端子区700。然而,本发明并不限于此,它可以具体化为多种不同的形式。例如,可以包含起密封部分作用的密封层。  Figure 2A is a schematic plan view of an organic electroluminescent display (OELD) device fabricated in accordance with the principles of the present invention. Referring to FIG. 2A, the substrate 110 includes a display area 200 on which a light emitting device such as an organic electroluminescent display device is disposed, and a sealing portion 800 of the substrate 110 is sealed with a sealing substrate (not shown) along the edge of the display area 200, And a terminal area 700 on which various terminals are arranged. However, the present invention is not limited thereto, and it may be embodied in various forms. For example, a sealing layer may be included which functions as a sealing portion. the

用于提供电源到显示区200的驱动电源供给线300可以布置在显示区200和密封部分800之间。图2A示出了本发明的驱动电源供给线的示例,但是本发明并不限于此。为了确保显示区200的均匀亮度,驱动电源供给线300可以围绕显示区200,以提供均匀的驱动电源给整个显示区200。  A driving power supply line 300 for supplying power to the display area 200 may be disposed between the display area 200 and the sealing part 800 . FIG. 2A shows an example of driving power supply lines of the present invention, but the present invention is not limited thereto. In order to ensure uniform brightness of the display area 200 , the driving power supply line 300 may surround the display area 200 to provide uniform driving power to the entire display area 200 . the

驱动电源供给线300可以与驱动电源线310相连,驱动电源线310可以跨越显示区200布置,并且电连接到布置在保护层180(图2C中所示)下面的源电极170a(图2C中所示)。  The driving power supply line 300 may be connected to a driving power line 310, which may be arranged across the display area 200, and electrically connected to the source electrode 170a (shown in FIG. 2C ) arranged under the protective layer 180 (shown in FIG. 2C ). Show). the

此外,在显示区200的边界外可以布置垂直和水平的驱动电路单元500和600。垂直电路单元500可以是施加扫描信号到显示区200的扫描驱动电路单元,水平驱动电路单元600可以是施加数据信号到显示区200的数据驱动电路单元。垂直和水平的驱动电路单元500和600可以作为外部集成电路(IC)或玻璃上芯片(COG)单元布置在密封区边界的外面。  In addition, vertical and horizontal driving circuit units 500 and 600 may be arranged outside the boundary of the display area 200 . The vertical circuit unit 500 may be a scan driving circuit unit applying scan signals to the display area 200 , and the horizontal driving circuit unit 600 may be a data driving circuit unit applying data signals to the display area 200 . The vertical and horizontal driving circuit units 500 and 600 may be disposed outside the boundary of the sealing area as external integrated circuit (IC) or chip-on-glass (COG) units. the

提供电极电源到显示区200的电极电源供给线410可以布置在显示区200的边界外,并且通过电极电源供给线410和第二电极层之间形成的绝缘层中的通孔430电连接到第二电极层,第二电极层是在显示区200的上部上形成的。  The electrode power supply line 410 supplying the electrode power supply to the display area 200 may be arranged outside the boundary of the display area 200, and electrically connected to the first through hole 430 in the insulating layer formed between the electrode power supply line 410 and the second electrode layer. Two electrode layers, the second electrode layer is formed on the upper portion of the display area 200 . the

驱动电源供给线300、电极电源供给线410以及垂直的和水平的驱动电路单元500和600分别包括端子320、420、520和620,并通过引线与布置在密封区边界外的端子区700电连接。  The drive power supply line 300, the electrode power supply line 410, and the vertical and horizontal drive circuit units 500 and 600 include terminals 320, 420, 520 and 620, respectively, and are electrically connected to the terminal area 700 arranged outside the boundary of the sealing area by lead wires . the

显示区200包含多个像素,下面将参照图2B和图2C对此加以描述。图2B是一个像素的电路示意图,该像素位于图2A中记为C的本发明实施例的OELD设备的第n列和第m行。  The display area 200 includes a plurality of pixels, which will be described below with reference to FIGS. 2B and 2C. FIG. 2B is a schematic circuit diagram of a pixel located at the nth column and the mth row of the OELD device denoted as C in FIG. 2A according to the embodiment of the present invention. the

如图2B所示,像素包含五个晶体管和两个电容器,并且每个晶体管被描述为PMOS TFT,但是本发明并不限于此。  As shown in FIG. 2B, a pixel includes five transistors and two capacitors, and each transistor is described as a PMOS TFT, but the present invention is not limited thereto. the

使用时,第一扫描信号和第二扫描信号分别通过多条第一扫描线和第二扫描线从垂直电路单元500输入至显示区200(参见图2A)。第一扫描信号S[n]和S[n-1]以及第二扫描信号E[n]通过第一扫描线和第二扫描线输入,并且作为数据信号的数据电压Vdata[m]通过数据线输入到图2A中记为C的处于第n列和第m行的像素中。  In use, the first scan signal and the second scan signal are input from the vertical circuit unit 500 to the display area 200 through a plurality of first scan lines and second scan lines respectively (see FIG. 2A ). The first scan signals S[n] and S[n-1] and the second scan signal E[n] are input through the first scan line and the second scan line, and the data voltage V data[m] as a data signal is passed through the data The line input is in the pixel at column n and row m, denoted C in FIG. 2A.

第一TFT M1将对应于通过第二TFT M2施加到第一TFT M1的数据电压的电流提供给有机发光二极管(OLED)。  The first TFT M1 supplies a current corresponding to a data voltage applied to the first TFT M1 through the second TFT M2 to an organic light emitting diode (OLED). the

第二TFT M2响应于第一扫描线提供的第n个选择信号S[n],转换施加到数据线的数据电压。  The second TFT M2 switches the data voltage applied to the data line in response to the nth selection signal S[n] supplied from the first scan line. the

第三TFT M3响应于施加到第一扫描线的第(n-1)个选择信号S[n-1], 二极管连接第一TFT M1。  The third TFT M3 is diode-connected to the first TFT M1 in response to the (n-1)th selection signal S[n-1] applied to the first scan line. the

第四TFT M4响应于施加到第一扫描线的第(n-1)个选择信号S[n-1],为第一电容器C1的一端提供固定电压。  The fourth TFT M4 supplies a fixed voltage to one end of the first capacitor C1 in response to the (n-1)th selection signal S[n-1] applied to the first scan line. the

第五TFT M5响应于施加到第二扫描线的发光信号E[n],将第一TFTM1提供的电流传送给OLED。  The fifth TFT M5 transfers the current supplied from the first TFT M1 to the OLED in response to the light emission signal E[n] applied to the second scan line. the

第一电容器C1保持第一TFT M1的栅极和源极之间的电压的一部分至少一帧的时间,第二电容器C2将作为补偿的阈值电压的数据电压施加到第一TFT M1的栅极。  The first capacitor C1 maintains a portion of the voltage between the gate and source of the first TFT M1 for at least one frame, and the second capacitor C2 applies the data voltage as a compensated threshold voltage to the gate of the first TFT M1. the

下面描述包含本实施例的TFT层和像素层的OELD设备的操作。TFT层可以包含至少一个TFT和例如电容器的其它电子元件。TFT层可以看作是像素电路单元。  The operation of the OELD device including the TFT layer and the pixel layer of this embodiment will be described below. The TFT layer may contain at least one TFT and other electronic components such as capacitors. The TFT layer can be regarded as a pixel circuit unit. the

当第(n-1)个选择信号S[n-1]激发时,第三TFT M3导通,接着,第一TFT M1,也即是驱动薄膜晶体管,进入二极管连接状态,并且由于第五TFT M5断开,第一TFT M1的阈值电压存储在第二电容器C2中。  When the (n-1)th selection signal S[n-1] is activated, the third TFT M3 is turned on, and then the first TFT M1, that is, the driving thin film transistor, enters a diode-connected state, and since the fifth TFT M5 is turned off, and the threshold voltage of the first TFT M1 is stored in the second capacitor C2. the

如果在第三TFT M3响应于第(n-1)个选择信号S[n-1]断开并且第一TFT M1响应于第n个选择信号S[n]接通之后输入数据电压,那么将补偿阈值电压的经校正的数据电压被施加到第一TFT M1的栅极。  If the data voltage is input after the third TFT M3 is turned off in response to the (n-1)th selection signal S[n-1] and the first TFT M1 is turned on in response to the nth selection signal S[n], then the The corrected data voltage compensating for the threshold voltage is applied to the gate of the first TFT M1. the

同时,如果第五TFT M5响应于第n个发光信号E[n]导通,那么通过第五TFT M5将电流信号传送至OLED,OLED发光,这个电流信号是经过施加到第一TFT M1的栅极的电压调整过的。  At the same time, if the fifth TFT M5 is turned on in response to the nth light-emitting signal E[n], the current signal is transmitted to the OLED through the fifth TFT M5, and the OLED emits light. This current signal is applied to the gate of the first TFT M1. Pole voltage is adjusted. the

图2C是OELD的部分剖面图,OELD包括像素层RP和TFT层RT,也就是电致发光单元和像素层,像素层包括第一TFT M1和第五TFT M5,第一TFT M1是驱动薄膜晶体管,第五TFT M5是为像素层提供电信号的开关薄膜晶体管。  Fig. 2C is a partial cross-sectional view of OELD, OELD includes pixel layer R P and TFT layer R T , that is, electroluminescence unit and pixel layer, pixel layer includes first TFT M1 and fifth TFT M5, first TFT M1 is a driver The thin film transistor, the fifth TFT M5 is a switching thin film transistor that provides electrical signals for the pixel layer.

参见图2C,例如第一TFT M1的TFT层形成在基板110的一部分上。第一TFT M1的半导体有源层130形成在缓冲层120的上表面的一部分上,缓冲层120形成在基板110的表面上。半导体有源层130可以是非晶硅层或 者是多晶硅层。尽管未详细描述,半导体有源层130包括掺有P型或N型掺杂剂的源区和漏区以及沟道区。然而,包括半导体有源层130的薄膜晶体管可以按多种不同的方式构成。  Referring to FIG. 2C , a TFT layer such as a first TFT M1 is formed on a portion of the substrate 110. The semiconductor active layer 130 of the first TFT M1 is formed on a portion of the upper surface of the buffer layer 120 formed on the surface of the substrate 110. The semiconductor active layer 130 may be an amorphous silicon layer or a polysilicon layer. Although not described in detail, the semiconductor active layer 130 includes source and drain regions doped with P-type or N-type dopants and a channel region. However, the thin film transistor including the semiconductor active layer 130 can be constructed in various ways. the

第一TFT M1的栅电极150可以布置在半导体有源层130的一部分之上。鉴于与相邻层接触、叠层的表面光滑度和处理能力,栅电极150较佳地由例如MoW和Al的材料组成,但并不局限于此。  The gate electrode 150 of the first TFT M1 may be disposed on a portion of the semiconductor active layer 130. The gate electrode 150 is preferably composed of materials such as MoW and Al in view of contact with adjacent layers, surface smoothness of the stack, and processability, but is not limited thereto. the

用于从半导体有源层130绝缘栅电极150的栅绝缘层140布置在二者之间。作为绝缘层的中间层160是单层或多层并且形成在栅电极150和栅绝缘层140上。第一TFT M1的源电极和漏电极170a和170b形成在中间层160上。源电极和漏电极170a和170b可以由诸如MoW的金属形成,并且在形成之后热处理,以便与半导体有源层130光滑地欧姆接触。  A gate insulating layer 140 for insulating the gate electrode 150 from the semiconductor active layer 130 is disposed therebetween. The intermediate layer 160 as an insulating layer is a single layer or multiple layers and is formed on the gate electrode 150 and the gate insulating layer 140 . Source and drain electrodes 170a and 170b of the first TFT M1 are formed on the intermediate layer 160. The source and drain electrodes 170 a and 170 b may be formed of metal such as MoW, and heat-treated after being formed so as to make smooth ohmic contact with the semiconductor active layer 130 . the

保护层180是绝缘层,可以由钝化层和/或平整层组成,用于保护和/或平整更低的层,并且形成在源电极和漏电极170a和170b上。如图2C所描述,保护层180可以是单层,由诸如SiNx的无机材料组成或例如苯并环丁烯或丙烯基的有机材料组成,也可以是多层的叠层。  The protective layer 180 is an insulating layer, which may consist of a passivation layer and/or a planarization layer, for protecting and/or leveling lower layers, and is formed on the source and drain electrodes 170a and 170b. As shown in FIG. 2C , the protection layer 180 can be a single layer composed of inorganic materials such as SiNx or organic materials such as benzocyclobutene or acrylic, or a multilayer stack.

第一TFT M1通过漏电极170b的延伸单元170c电连接到起开关TFT作用的第五TFT M5。第五TFT M5的第五半导体有源层230形成在缓冲层120上,缓冲层120形成在基板110的表面上。第五半导体绝缘层230可以与第二扫描线和/或第五栅电极250绝缘,第五栅电极250形成在栅绝缘层140的上面。中间层160和第五源/漏电极270a和270b可以形成在第五栅电极的表面上。第五源电极和漏电极270a和270b以及第五半导体有源层230可以通过形成在中间层160和栅绝缘层140中的接触孔电连接。至少一个起绝缘层作用的保护层180可以形成在第五源电极和漏电极270a和270b上,包括顺序层叠的第一电极层290、电致发光单元292和第二电极层400的像素层RP可以形成在保护层180上。  The first TFT M1 is electrically connected to the fifth TFT M5 functioning as a switching TFT through the extension unit 170c of the drain electrode 170b. The fifth semiconductor active layer 230 of the fifth TFT M5 is formed on the buffer layer 120 formed on the surface of the substrate 110 . The fifth semiconductor insulating layer 230 may be insulated from the second scan line and/or the fifth gate electrode 250 formed on the gate insulating layer 140 . The intermediate layer 160 and fifth source/drain electrodes 270a and 270b may be formed on the surface of the fifth gate electrode. The fifth source and drain electrodes 270 a and 270 b and the fifth semiconductor active layer 230 may be electrically connected through contact holes formed in the interlayer 160 and the gate insulating layer 140 . At least one protective layer 180 functioning as an insulating layer may be formed on the fifth source and drain electrodes 270a and 270b, including the pixel layer R of the first electrode layer 290, the electroluminescence unit 292, and the second electrode layer 400 stacked in sequence. P may be formed on the protective layer 180 .

下面描述形成像素层RP的方法。首先,在形成第一电极层290之后,像素限定层291可以形成在像素开放区294外的保护层180的上面。包括发 光层的电致发光单元292可以布置在像素开放区294的第一电极层290的表面上,第二电极层400可以形成在合成品的整个表面。  A method of forming the pixel layer R P is described below. First, after the first electrode layer 290 is formed, the pixel defining layer 291 may be formed on the protective layer 180 outside the pixel open area 294 . The electroluminescence unit 292 including a light emitting layer may be disposed on the surface of the first electrode layer 290 of the pixel open area 294, and the second electrode layer 400 may be formed on the entire surface of the composite.

电致发光单元292可以由低分子或聚合物有机膜组成。如果电致发光单元292由低分子有机膜组成,那么HIL、HTL、EML、ETL和EIL可以层叠为单个结构或复合结构,并且可以使用的低分子有机材料包括铜酞菁(CuPc)、N,N’-Di(萘-1-基)-N,N’-二苯基-联苯胺(NPB),或三-8-羟基喹啉铝(Alq3)。低分子有机膜可以使用蒸发法形成。  The electroluminescence unit 292 may be composed of a low molecular or polymer organic film. If the electroluminescent unit 292 is composed of a low-molecular organic film, the HIL, HTL, EML, ETL, and EIL can be laminated into a single structure or a composite structure, and low-molecular organic materials that can be used include copper phthalocyanine (CuPc), N, N'-Di(naphthalen-1-yl)-N,N'-diphenyl-benzidine (NPB), or aluminum tris-8-hydroxyquinolate (Alq3). A low-molecular organic film can be formed using an evaporation method. the

如果电致发光单元292由聚合物有机膜组成,那么它可以包括HTL和EML。HTL可以由PEDOT组成,而EML可以由聚-1,2-亚乙烯基苯基(PPV)和聚芴形成。聚合物有机膜可以通过各种方法形成,包括但不限于丝网印刷方法和喷墨印刷方法。  If the electroluminescence unit 292 is composed of a polymer organic film, it may include HTL and EML. HTL can be composed of PEDOT, while EML can be formed of poly-1,2-vinylidenephenyl (PPV) and polyfluorene. The polymeric organic film can be formed by various methods including, but not limited to, screen printing methods and inkjet printing methods. the

第二电极层400起阴极的作用,并可以沉积在电致发光单元292的整个上表面上。第二电极层400并不限于沉积在整个上表面上。它可以由如Al/Ca、ITO或Mg-Ag材料形成。第二电极层400可以由例如多层的多种不同的形式形成,并可以进一步包括碱氟化或碱土氟化层,如LiF层。  The second electrode layer 400 functions as a cathode, and may be deposited on the entire upper surface of the electroluminescence unit 292 . The second electrode layer 400 is not limited to be deposited on the entire upper surface. It can be formed of materials such as Al/Ca, ITO or Mg-Ag. The second electrode layer 400 may be formed in various forms such as multiple layers, and may further include an alkali-fluorinated or alkaline-earth fluorinated layer, such as a LiF layer. the

第一扫描线和/或扫描线延伸单元240(下文称为第一扫描线)可以形成在第一TFT M1和第五TFT M5之间。第一扫描线240可以无接触地穿过第一TFT M1的漏电极170b的延伸单元170c。如图2B所示,第一扫描线240可以是一个导电层,第(n-1)个选择信号S[n-1]通过该导电层被传送到第三和第四TFT M3和M4,并且第一扫描线240包含宽度变化部分Aw,其由于TFT具有不同的设计规范而在第一扫描线的长度方向上宽度有所变化。  A first scan line and/or a scan line extension unit 240 (hereinafter referred to as a first scan line) may be formed between the first TFT M1 and the fifth TFT M5. The first scan line 240 may pass through the extension unit 170c of the drain electrode 170b of the first TFT M1 without contact. As shown in FIG. 2B, the first scan line 240 may be a conductive layer through which the (n-1)th selection signal S[n-1] is transmitted to the third and fourth TFTs M3 and M4, and The first scan line 240 includes a width varying portion A w , whose width varies along the length direction of the first scan line due to different design specifications of the TFTs.

也就是,如图2C所示的部分平面图,第一扫描线240可以形成为具有交叉区Ac的导电层,在交叉区Ac第一扫描线至少穿过但不接触延伸单元170c。第一扫描线240可以布置在从漏电极170b延伸出来的延伸单元170c下面。第一扫描线240包括宽度变化部分Aw,它的宽度从第一宽度Wc变化到第二宽度Ww,或者从第二宽度Ww变化到第一宽度Wc。第一宽度Wc和第二宽度Ww彼此不同,而且宽度Wc可以比宽度Ww宽。第一扫描线240 的宽度变化部分Aw也可以限定为这样的一部分:它的剖面面积在第一扫描线240的长度方向上变化。  That is, as shown in a partial plan view of FIG . 2C , the first scan line 240 may be formed as a conductive layer having an intersection area Ac where the first scan line at least passes through but does not contact the extension unit 170c. The first scan line 240 may be disposed under the extension unit 170c extended from the drain electrode 170b. The first scan line 240 includes a width changing portion A w whose width changes from the first width W c to the second width W w , or from the second width W w to the first width W c . The first width W c and the second width W w are different from each other, and the width W c may be wider than the width W w . The width variation portion A w of the first scan line 240 may also be defined as a portion whose cross-sectional area varies along the length direction of the first scan line 240 .

第一扫描线240可以在不与相邻导电层170c交叉的区域包括一个接线片241。由于充电集中在接线片241而不是宽度变化部分Aw,就可以避免由于静电释放宽度变化部分Aw的短路电流的产生。  The first scan line 240 may include one tab 241 at a region that does not cross the adjacent conductive layer 170c. Since the charge is concentrated on the tab 241 rather than the width changing portion Aw , the generation of short circuit current in the width changing portion Aw due to electrostatic discharge can be avoided.

接线片241的有效宽度Ws和接线片241的有效长度Wd的比值可以小于第二宽度Ww和第一宽度Wc的比值,以便静电集中在接线片241中。也就是,Ws/Wd<Ww/Wc<1。这里,第一宽度Wc可以是宽度变化部分最大宽度的测量值,而第二宽度Ww可以是宽度变化部分最小宽度的测量值。  The ratio of the effective width W s of the tab 241 to the effective length W d of the tab 241 may be smaller than the ratio of the second width W w to the first width W c so that static electricity is concentrated in the tab 241 . That is, W s /W d <W w /W c <1. Here, the first width W c may be a measure of the maximum width of the width change portion, and the second width W w may be a measure of the minimum width of the width change portion.

在本实施例中,第一扫描线240可以是导电层,包括接线片241,并起栅电极或栅极线的作用。然而,这是本发明的示例性实施例,本发明不局限于此。  In this embodiment, the first scan line 240 may be a conductive layer, including the tab 241, and function as a gate electrode or a gate line. However, this is an exemplary embodiment of the present invention, and the present invention is not limited thereto. the

如图2C所示,接线片241可以形成在向第一TFT M1延伸的第一扫描线240(或第一扫描线的延伸部分即导电层)上。然而,接线片241可以形成多种不同的形式,只要接线片241不穿过相邻导电层。这样,连接在接线片241的导电层可以形成在源电极和漏电极的同一层。接线片241也可以以相对于第一TFT M1的方向延伸。可替代地,如图2D所示,接线片241可以形成在包含宽度变化部分Aw的导电层和/或相邻导电层上。  As shown in FIG. 2C , the tab 241 may be formed on the first scan line 240 (or the extended portion of the first scan line, that is, the conductive layer) extending toward the first TFT M1 . However, the tab 241 may be formed in many different forms as long as the tab 241 does not pass through adjacent conductive layers. In this way, the conductive layer connected to the tab 241 can be formed on the same layer of the source electrode and the drain electrode. The tab 241 may also extend in a direction relative to the first TFT M1. Alternatively, as shown in FIG. 2D , the tab 241 may be formed on the conductive layer including the width variation portion A w and/or on the adjacent conductive layer.

图2E是显示在图2C中的像素的部分放大照片的平面图。在图2E中,接线片241接触导电层区。为了避免和/或减少静电释放,接线片241接触导电层的区域远离导电层重叠的区域。由于静电释放不发生在宽度变化部分Aw而是发生在不与导电层交叉的接线片241,这个结构可以避免或减少对TFT层的导电层的静电破坏。这样,交叠的导电层和/或像素之间的短路电流故障就可以避免或减少。  FIG. 2E is a plan view of a partially enlarged photograph of the pixel shown in FIG. 2C. In FIG. 2E, tab 241 contacts the conductive layer region. In order to avoid and/or reduce electrostatic discharge, the area where the contact piece 241 contacts the conductive layer is far away from the area where the conductive layer overlaps. This structure can avoid or reduce electrostatic damage to the conductive layer of the TFT layer because the electrostatic discharge does not occur at the width changing portion Aw but occurs at the tab 241 that does not intersect the conductive layer. In this way, short-circuit current faults between overlapping conductive layers and/or pixels can be avoided or reduced.

图3A、3B和3C示出了根据本发明的原理制造的OELD设备的像素。第一扫描线和/或扫描线延伸单元240(下文称为第一扫描线)形成在第一TFT M1和第五TFT M5之间。第一扫描线240穿过但不接触第一TFT M1 的漏电极170b的延伸单元170c。如图2B所示,第一扫描线240是第(n-1)个选择信号S[n-1]被传送至此的导电层,传送第(n-1)个扫描信号S[n-1]指第三和第四TFT M3和M4。第一扫描线240可以包含宽度变化部分Aw,其宽度在第一扫描线240的长度方向上变化。也就是,如图3A所示的部分平面图所示,第一扫描线240可以形成为具有交叉区Ac的导电层,交叉区穿过但不接触至少从漏电极170b延伸出来的延伸单元170c的一部分。第一扫描线可以布置在延伸单元170c下面。第一扫描线240可以包括在第一扫描线240的长度方向上的宽度变化部分Aw,并且宽度变化部分Aw的宽度可以从Wc到Ww连续变化。  Figures 3A, 3B and 3C illustrate pixels of an OELD device fabricated in accordance with the principles of the present invention. A first scan line and/or a scan line extension unit 240 (hereinafter referred to as a first scan line) is formed between the first TFT M1 and the fifth TFT M5. The first scan line 240 passes through but does not contact the extension unit 170c of the drain electrode 170b of the first TFT M1. As shown in FIG. 2B, the first scan line 240 is a conductive layer to which the (n-1)th selection signal S[n-1] is transmitted, and the (n-1)th scan signal S[n-1] is transmitted. Refers to the third and fourth TFTs M3 and M4. The first scan line 240 may include a width varying portion A w whose width varies in the length direction of the first scan line 240 . That is, as shown in the partial plan view shown in FIG. 3A , the first scan line 240 may be formed as a conductive layer having an intersection region Ac passing through but not contacting at least the extension unit 170c extending from the drain electrode 170b. part. The first scan line may be disposed under the extension unit 170c. The first scan line 240 may include a width varying portion Aw in the length direction of the first scan line 240, and the width of the width varying portion Aw may continuously vary from Wc to Ww .

如图3A所示,如果相应的宽度变化部分包含尖端,记为参考数字的P1和P2(参见图2B)的位于相邻导电层交叉区的点很容易被静电释放所损坏。然而,在本发明的实施例中,宽度变化部分Aw不包含任何可能导致静电释放的尖锐的拐角边缘。相反,宽度变化部分Aw的宽度沿着第一扫描线240连续地变化,以至于宽度变化部分包含弯曲的和不是90°角的拐角边缘。因此,引起静电释放的电荷不集中在宽度变化部分Aw,从而避免或减少了对像素的静电破坏。  As shown in FIG. 3A, points denoted by reference numerals P1 and P2 (see FIG. 2B) located at the intersection of adjacent conductive layers are easily damaged by electrostatic discharge if the corresponding width-varying portions include sharp ends. However, in an embodiment of the present invention, the width variation portion A w does not contain any sharp corner edges that may cause electrostatic discharge. In contrast, the width of the width varying portion A w continuously varies along the first scan line 240 such that the width varying portion includes corner edges that are curved and are not at a 90° angle. Therefore, the charges causing electrostatic discharge are not concentrated in the width changing portion A w , thereby avoiding or reducing electrostatic damage to the pixel.

宽度变化部分Aw的拐角较佳地可以具有钝角并且是圆形的。图3B是图3A中部分D的放大图。参见图3B,角θ形成于线段O1O2和线段O1O3之间,线段O1O2从点O1延伸到点O2,这两个点位于彼此交叉但不接触的宽度变化部分Aw的同一平面上,线段O1O3从点O1延伸到点O3,点O3位于第一扫描线240的长度方向上。为了避免电荷集中在第一扫描线240的边缘,两条线段之间的角θ可以小于45°。  The corners of the width changing portion A w may preferably have obtuse angles and be rounded. Fig. 3B is an enlarged view of part D in Fig. 3A. Referring to Figure 3B, the angle θ is formed between the line segment O 1 O 2 and the line segment O 1 O 3 , the line segment O 1 O 2 extending from the point O 1 to the point O 2 , the two points at the width change that intersect each other but do not touch On the same plane of the part Aw , the line segment O 1 O 3 extends from the point O 1 to the point O 3 , and the point O 3 is located in the length direction of the first scanning line 240 . In order to avoid charge concentration on the edge of the first scan line 240, the angle θ between two line segments may be smaller than 45°.

图3C是显示在图3A中像素的部分放大照片。参见图3C,由于穿过至少一个相邻导电层的导电层的宽度变化部分Aw的宽度由于钝角而平滑变化,可以避免对薄膜晶体管的导电层的静电破坏和/或相邻导电层之间的短路电流,因此可以避免错误像素的产生。  FIG. 3C is a partially enlarged photograph of the pixel shown in FIG. 3A. Referring to FIG. 3C, since the width of the width variation portion A w of the conductive layer passing through at least one adjacent conductive layer changes smoothly due to an obtuse angle, electrostatic damage to the conductive layer of the thin film transistor and/or the gap between adjacent conductive layers can be avoided. Short-circuit current, so the generation of wrong pixels can be avoided.

上述的实施例是示例性的,本发明并不局限于此。也就是,上述实施例 描述了关于形成于漏电极和扫描线之间的延伸部分的导电层,但是本发明可以适用于其它导电层。同时,本发明描述了具有五个上栅极型晶体管和两个电容器的TFT结构,和包含TFT结构的OELD设备。然而,本发明可以进行多种形式的修改,只要具有宽度变化部分的导电层在不穿过相邻导电层的导电层区域连接在接线片241上。此外,连接宽度变化部分的拐角的线段和平行于具有宽度变化部分的导电层延伸的方向的线段之间的角度可以小于90°。本发明的原理可以不管晶体管的类型而应用于OELD设备和LCD设备。进一步地,本发明也可以适用于具有多个彼此交叉但不接触的导电层的电子器件。  The above-mentioned embodiments are exemplary, and the present invention is not limited thereto. That is, the above-mentioned embodiments have been described with respect to the conductive layer formed in the extension portion between the drain electrode and the scan line, but the present invention can be applied to other conductive layers. Meanwhile, the present invention describes a TFT structure having five upper gate type transistors and two capacitors, and an OELD device including the TFT structure. However, the present invention can be modified in various forms as long as the conductive layer having the width changing portion is connected to the tab 241 at the conductive layer region not passing through the adjacent conductive layer. In addition, an angle between a line segment connecting corners of the width changing portion and a line segment parallel to the direction in which the conductive layer having the width changing portion extends may be smaller than 90°. The principles of the present invention can be applied to OELD devices and LCD devices regardless of the type of transistors. Further, the present invention can also be applied to electronic devices having a plurality of conductive layers crossing but not touching each other. the

本发明可以提供下述的一些或全部优点。首先,包括在不穿过相邻导电层的导电层区的接线片241以及在至少一个TFT中使用本发明的接线片式的导电层,可以避免和/或减少在制造和/或使用TFT时产生的静电对形成于导电层之间的绝缘层的静电释放损坏。  The present invention may provide some or all of the advantages described below. First of all, including the tab 241 in the conductive layer region that does not pass through the adjacent conductive layer and using the tab-type conductive layer of the present invention in at least one TFT can avoid and/or reduce the time required for manufacturing and/or using the TFT. The generated static electricity damages the electrostatic discharge of the insulating layer formed between the conductive layers. the

其次,在例如包含一个TFT层的OELD的平板显示设备中,其中TFT层包含多个导电层,接线片241是连接到不穿过相邻导电层的导电层区,接线片241连接到至少一个具有宽度变化部分的导电层,或者连接到相邻导电层,该相邻导电层能避免由接线片241提供的静电释放所引起的错误像素的产生。这样的结构可以提高图像质量。  Secondly, in a flat panel display device such as an OELD including a TFT layer, wherein the TFT layer includes a plurality of conductive layers, the tab 241 is connected to a conductive layer region that does not pass through an adjacent conductive layer, and the tab 241 is connected to at least one The conductive layer with the width varying portion, or connected to the adjacent conductive layer, which can avoid the generation of false pixels caused by the electrostatic discharge provided by the tab 241 . Such a structure can improve image quality. the

第三,包含不只一个TFT的导电层可以包含其中的穿过但是不接触相邻导电层的一部分。导电层可以包含宽度变化部分,形成这部分用以充分交叠交叉区。宽度变化部分的宽度可以连续地变化,以便宽度变化部分的拐角是钝角。因为没有尖锐的拐角边缘出现以集中静电电荷,所以对导电层之间形成的绝缘层的由于静电释放的损坏可以被避免和/或减少,因此避免产品故障。  Third, a conductive layer containing more than one TFT may contain a portion thereof passing through but not touching an adjacent conductive layer. The conductive layer may include a width varying portion formed to substantially overlap the intersection region. The width of the width changing portion may be continuously changed so that corners of the width changing portion are obtuse angles. Since no sharp corner edges are present to concentrate electrostatic charges, damage to insulating layers formed between conductive layers due to electrostatic discharge can be avoided and/or reduced, thus avoiding product failure. the

第四,在例如包含一个TFT层的OELD的平板显示设备中,具有交叉但不接触相邻导电层的区域的导电层可以包含一个宽度变化部分。因此,通过在宽度变化部分避免静电的集中可以减少或排除错误像素产生的可能性, 错误像素的产生是由于在生产或操作TFT过程中产生静电。这可以通过连续地改变宽度变化部分的宽度和使其中的拐角变圆而取得。这样的结构可以避免或减少静电电荷在宽度变化部分的产生,从而提高了图像质量。  Fourth, in a flat panel display device such as an OELD comprising one TFT layer, a conductive layer having a region crossing but not contacting an adjacent conductive layer may contain a width varying portion. Therefore, by avoiding the concentration of static electricity in the width variation portion, it is possible to reduce or eliminate the possibility of false pixel generation due to static electricity generated during the production or operation of the TFT. This can be achieved by continuously varying the width of the width varying portion and rounding the corners therein. Such a structure can avoid or reduce the generation of electrostatic charge in the width changing part, thereby improving the image quality. the

以上参照其中的示例性实施例示出和描述了本发明,本领域技术人员应该理解形式和细节上的各种变化都不脱离以下权利要求限定的本发明的精神和范围。  While the present invention has been shown and described with reference to exemplary embodiments thereof, those skilled in the art will understand that various changes in form and details do not depart from the spirit and scope of the invention as defined in the following claims. the

Claims (22)

1.一种电子器件,包括:1. An electronic device, comprising: 第一导电层;和the first conductive layer; and 与所述第一导电层交叉的第二导电层,a second conductive layer intersecting the first conductive layer, 其中所述第一导电层不接触所述第二导电层,wherein the first conductive layer does not contact the second conductive layer, 其中所述第一导电层在所述第一导电层与所述第二导电层交叉的区域中包括宽度变化部分,该宽度变化部分的宽度沿着所述第一导电层的长度方向变化,wherein the first conductive layer includes a width variation portion in a region where the first conductive layer intersects the second conductive layer, and the width of the width variation portion varies along the length direction of the first conductive layer, 其中所述第二导电层的宽度在所述第一导电层与所述第二导电层交叉的区域中为常数,并且wherein the width of the second conductive layer is constant in the region where the first conductive layer intersects the second conductive layer, and 其中连接位于所述宽度变化部分的外部线的同一平面上的两点的线段和与所述第一导电层的长度方向平行的线段之间的夹角小于90°,该宽度变化部分的宽度沿着所述第一导电层的长度方向连续变化,并且所述宽度变化部分的拐角是钝角并且是圆形的。wherein the angle between the line segment connecting two points on the same plane as the outer line of the width changing portion and the line segment parallel to the length direction of the first conductive layer is less than 90°, and the width of the width changing portion is along the The lengthwise direction of the first conductive layer changes continuously, and corners of the width changing portion are obtuse and rounded. 2.根据权利要求1所述的电子器件,其中所述第一导电层是TFT的栅电极或TFT栅电极的延伸部分。2. The electronic device according to claim 1, wherein the first conductive layer is a gate electrode of a TFT or an extension of a gate electrode of a TFT. 3.根据权利要求1所述的电子器件,其中所述第一导电层是TFT的源电极或漏电极,或者是TFT的源电极或漏电极的延伸部分。3. The electronic device according to claim 1, wherein the first conductive layer is a source electrode or a drain electrode of a TFT, or is an extension of a source electrode or a drain electrode of a TFT. 4.一种TFT结构,包括:4. A TFT structure, comprising: 第一导电层;和the first conductive layer; and 与所述第一导电层交叉的第二导电层,a second conductive layer intersecting the first conductive layer, 其中所述第一导电层不接触所述第二导电层,wherein the first conductive layer does not contact the second conductive layer, 其中所述第一导电层在所述第一导电层与所述第二导电层交叉的区域中包括宽度变化部分,该宽度变化部分的宽度沿着所述第一导电层的长度方向变化,wherein the first conductive layer includes a width variation portion in a region where the first conductive layer intersects the second conductive layer, and the width of the width variation portion varies along the length direction of the first conductive layer, 其中所述第二导电层的宽度在所述第一导电层与所述第二导电层交叉的区域中为常数,并且wherein the width of the second conductive layer is constant in the region where the first conductive layer intersects the second conductive layer, and 其中连接位于所述宽度变化部分的外部线的同一平面上的两点的线段和与所述第一导电层的长度方向平行的线段之间的夹角小于90°,该宽度变化部分的宽度沿着所述第一导电层的长度方向连续变化,并且所述宽度变化部分的拐角是钝角并且是圆形的。wherein the angle between the line segment connecting two points on the same plane as the outer line of the width changing portion and the line segment parallel to the length direction of the first conductive layer is less than 90°, and the width of the width changing portion is along the The lengthwise direction of the first conductive layer changes continuously, and corners of the width changing portion are obtuse and rounded. 5.根据权利要求4所述的TFT结构,其中所述第一导电层是TFT的栅电极或栅电极的延伸部分。5. The TFT structure of claim 4, wherein the first conductive layer is a gate electrode of a TFT or an extension of the gate electrode. 6.根据权利要求4所述的TFT结构,其中所述第一导电层是TFT的源电极或漏电极,或者是TFT的源电极或漏电极的延伸部分。6. The TFT structure according to claim 4, wherein the first conductive layer is a source electrode or a drain electrode of a TFT, or is an extension of a source electrode or a drain electrode of a TFT. 7.一种平板显示设备,包括:7. A flat panel display device, comprising: 基板;Substrate; 形成于基板上的TFT层;和a TFT layer formed on the substrate; and 包括电连接到TFT层的不只一个像素的像素层,a pixel layer comprising more than one pixel electrically connected to the TFT layer, 其中TFT层包括第一导电层和与所述第一导电层交叉的第二导电层,Wherein the TFT layer includes a first conductive layer and a second conductive layer crossing the first conductive layer, 其中所述第一导电层不接触所述第二导电层,wherein the first conductive layer does not contact the second conductive layer, 其中所述第一导电层在所述第一导电层与所述第二导电层交叉的区域中包括宽度变化部分,该宽度变化部分的宽度沿着所述第一导电层的长度方向变化,wherein the first conductive layer includes a width variation portion in a region where the first conductive layer intersects the second conductive layer, and the width of the width variation portion varies along the length direction of the first conductive layer, 其中所述第二导电层的宽度在所述第一导电层与所述第二导电层交叉的区域中为常数,并且wherein the width of the second conductive layer is constant in the region where the first conductive layer intersects the second conductive layer, and 其中连接位于宽度变化部分的外部线的同一平面上的两点的线段和与所述第一导电层的长度方向平行的线段之间的夹角小于90°,该宽度变化部分的宽度沿着所述第一导电层的长度方向连续变化,并且所述宽度变化部分的拐角是钝角并且是圆形的。Wherein the angle between the line segment connecting two points on the same plane of the outer line of the width changing part and the line segment parallel to the length direction of the first conductive layer is less than 90°, the width of the width changing part is along the width of the width changing part The length direction of the first conductive layer changes continuously, and the corners of the width changing portion are obtuse and rounded. 8.根据权利要求7所述的平板显示设备,其中所述第一导电层是栅电极。8. The flat panel display device according to claim 7, wherein the first conductive layer is a gate electrode. 9.根据权利要求7所述的平板显示设备,其中所述第一导电层是源电极或漏电极。9. The flat panel display device according to claim 7, wherein the first conductive layer is a source electrode or a drain electrode. 10.根据权利要求7所述的平板显示设备,其中像素层包括:10. The flat panel display device according to claim 7, wherein the pixel layer comprises: 第一电极;first electrode; 形成于第一电极上的电致发光单元;和an electroluminescent cell formed on the first electrode; and 形成于电致发光单元上的第二电极。The second electrode is formed on the electroluminescence unit. 11.根据权利要求7所述的平板显示设备,进一步包括形成于TFT层之上的至少一个绝缘层,其中像素层的像素通过形成于至少一个绝缘层的接触孔电连接到TFT层。11. The flat panel display device of claim 7, further comprising at least one insulating layer formed on the TFT layer, wherein pixels of the pixel layer are electrically connected to the TFT layer through contact holes formed in the at least one insulating layer. 12.一种电子器件,包括:12. An electronic device comprising: 第一导电层;和the first conductive layer; and 与所述第一导电层交叉的第二导电层,a second conductive layer intersecting the first conductive layer, 其中所述第一导电层不接触所述第二导电层,wherein the first conductive layer does not contact the second conductive layer, 其中所述第一导电层包括剖面面积沿着所述第一导电层的长度方向变化的部分,该部分在所述第一导电层与所述第二导电层交叉的区域中,Wherein the first conductive layer includes a part whose cross-sectional area changes along the length direction of the first conductive layer, and the part is in a region where the first conductive layer intersects with the second conductive layer, 其中所述第二导电层的宽度在所述第一导电层与所述第二导电层交叉的区域中为常数,并且wherein the width of the second conductive layer is constant in the region where the first conductive layer intersects the second conductive layer, and 其中连接位于所述剖面面积的外部线的同一平面上的两点的线段和与所述第一导电层的长度方向平行的线段之间的夹角小于90°,该剖面面积的宽度沿着所述第一导电层的长度方向连续变化,并且所述剖面面积的拐角是钝角并且是圆形的。Wherein the angle between the line segment connecting two points located on the same plane as the outer line of the cross-sectional area and the line segment parallel to the length direction of the first conductive layer is less than 90°, the width of the cross-sectional area is along the The length direction of the first conductive layer changes continuously, and the corners of the cross-sectional area are obtuse and rounded. 13.根据权利要求12所述的电子器件,其中所述第一导电层是TFT的栅电极或TFT栅电极的延伸部分。13. The electronic device according to claim 12, wherein the first conductive layer is a gate electrode of a TFT or an extension of a gate electrode of a TFT. 14.根据权利要求12所述的电子器件,其中所述第一导电层是TFT的源电极或漏电极,或者是TFT源电极或漏电极的延伸部分。14. The electronic device according to claim 12, wherein the first conductive layer is a source electrode or a drain electrode of a TFT, or an extension of a source electrode or a drain electrode of a TFT. 15.一种TFT结构,包括:15. A TFT structure comprising: 第一导电层;和the first conductive layer; and 与所述第一导电层交叉的第二导电层,a second conductive layer intersecting the first conductive layer, 其中所述第一导电层不接触所述第二导电层,wherein the first conductive layer does not contact the second conductive layer, 其中所述第一导电层包括剖面面积沿着所述第一导电层的长度方向变化的部分,该部分在所述第一导电层与所述第二导电层交叉的区域中,Wherein the first conductive layer includes a part whose cross-sectional area changes along the length direction of the first conductive layer, and the part is in a region where the first conductive layer intersects with the second conductive layer, 其中所述第二导电层的宽度在所述第一导电层与所述第二导电层交叉的区域中为常数,并且wherein the width of the second conductive layer is constant in the region where the first conductive layer intersects the second conductive layer, and 其中连接位于所述剖面面积的外部线的同一平面上的两点的线段和与所述第一导电层的长度方向平行的线段之间的夹角小于90°,该剖面面积的宽度沿着所述第一导电层的长度方向连续变化,并且所述剖面面积的拐角是钝角并且是圆形的。Wherein the angle between the line segment connecting two points located on the same plane as the outer line of the cross-sectional area and the line segment parallel to the length direction of the first conductive layer is less than 90°, the width of the cross-sectional area is along the The length direction of the first conductive layer changes continuously, and the corners of the cross-sectional area are obtuse and rounded. 16.根据权利要求15所述的TFT结构,其中所述第一导电层是TFT的栅电极或TFT栅电极的延伸部分。16. The TFT structure of claim 15, wherein the first conductive layer is a gate electrode of a TFT or an extension of a gate electrode of a TFT. 17.根据权利要求15所述的TFT结构,其中所述第一导电层是TFT的源电极或漏电极,或者是TFT源电极或漏电极的延伸部分。17. The TFT structure according to claim 15, wherein the first conductive layer is a source electrode or a drain electrode of a TFT, or an extension of a source electrode or a drain electrode of a TFT. 18.一种平板显示设备,包括:18. A flat panel display device comprising: 基板;Substrate; 形成于基板上的TFT层;和a TFT layer formed on the substrate; and 包括电连接到TFT层的多于一个像素的像素层,a pixel layer comprising more than one pixel electrically connected to the TFT layer, 其中TFT层包括第一导电层和与所述第一导电层交叉的第二导电层,Wherein the TFT layer includes a first conductive layer and a second conductive layer crossing the first conductive layer, 其中所述第一导电层不接触所述第二导电层,其中所述第一导电层包括剖面面积沿着所述第一导电层的长度方向变化的部分,该部分在所述第一导电层与所述第二导电层交叉的区域中,Wherein the first conductive layer does not contact the second conductive layer, wherein the first conductive layer includes a portion whose cross-sectional area changes along the length direction of the first conductive layer, the portion is in the first conductive layer In the region intersecting with the second conductive layer, 其中所述第二导电层的宽度在所述第一导电层与所述第二导电层交叉的区域中为常数,并且wherein the width of the second conductive layer is constant in the region where the first conductive layer intersects the second conductive layer, and 其中连接位于所述剖面面积的外部线的同一平面上的两点的线段和与所述第一导电层的长度方向平行的线段之间的夹角小于90°,该剖面面积的宽度沿着所述第一导电层的长度方向连续变化,并且所述剖面面积的拐角是钝角并且是圆形的。Wherein the angle between the line segment connecting two points located on the same plane as the outer line of the cross-sectional area and the line segment parallel to the length direction of the first conductive layer is less than 90°, the width of the cross-sectional area is along the The length direction of the first conductive layer changes continuously, and the corners of the cross-sectional area are obtuse and rounded. 19.根据权利要求18所述的平板显示设备,其中所述第一导电层是栅电极。19. The flat panel display device of claim 18, wherein the first conductive layer is a gate electrode. 20.根据权利要求18所述的平板显示设备,其中所述第一导电层是源电极或漏电极。20. The flat panel display device of claim 18, wherein the first conductive layer is a source electrode or a drain electrode. 21.根据权利要求18所述的平板显示设备,其中像素层包括:21. The flat panel display device of claim 18, wherein the pixel layer comprises: 第一电极;first electrode; 形成于第一电极之上的电致发光单元;和an electroluminescent cell formed over the first electrode; and 形成于电致发光单元之上的第二电极。A second electrode is formed on the electroluminescence unit. 22.根据权利要求18所述的平板显示设备,进一步包括形成于TFT层之上的至少一个绝缘层,其中像素层的像素通过形成于至少一个绝缘层的接触孔电连接到TFT层。22. The flat panel display device of claim 18, further comprising at least one insulating layer formed on the TFT layer, wherein pixels of the pixel layer are electrically connected to the TFT layer through contact holes formed in the at least one insulating layer.
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