CN101323396A - Substrate absorbing apparatus, substrate conveying apparatus and exterior inspection apparatus - Google Patents
Substrate absorbing apparatus, substrate conveying apparatus and exterior inspection apparatus Download PDFInfo
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- CN101323396A CN101323396A CNA2008101089197A CN200810108919A CN101323396A CN 101323396 A CN101323396 A CN 101323396A CN A2008101089197 A CNA2008101089197 A CN A2008101089197A CN 200810108919 A CN200810108919 A CN 200810108919A CN 101323396 A CN101323396 A CN 101323396A
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- 239000000758 substrate Substances 0.000 title claims abstract description 313
- 238000007689 inspection Methods 0.000 title claims abstract description 20
- 238000010521 absorption reaction Methods 0.000 claims abstract description 121
- 238000001179 sorption measurement Methods 0.000 claims description 257
- 230000007246 mechanism Effects 0.000 claims description 30
- 238000012790 confirmation Methods 0.000 claims description 18
- 238000007667 floating Methods 0.000 claims description 15
- 238000012423 maintenance Methods 0.000 claims description 14
- 230000003287 optical effect Effects 0.000 claims description 4
- 230000000630 rising effect Effects 0.000 claims description 2
- 239000011521 glass Substances 0.000 abstract description 206
- 239000002184 metal Substances 0.000 abstract description 7
- 229910052751 metal Inorganic materials 0.000 abstract description 7
- 238000004519 manufacturing process Methods 0.000 description 6
- 238000003825 pressing Methods 0.000 description 6
- 238000005339 levitation Methods 0.000 description 5
- 230000015572 biosynthetic process Effects 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- 238000012546 transfer Methods 0.000 description 3
- 230000037303 wrinkles Effects 0.000 description 3
- 230000033228 biological regulation Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000004973 liquid crystal related substance Substances 0.000 description 2
- 239000012528 membrane Substances 0.000 description 2
- 238000012806 monitoring device Methods 0.000 description 2
- 230000002093 peripheral effect Effects 0.000 description 2
- 239000011347 resin Substances 0.000 description 2
- 229920005989 resin Polymers 0.000 description 2
- 230000009183 running Effects 0.000 description 2
- 241000252254 Catostomidae Species 0.000 description 1
- 238000005299 abrasion Methods 0.000 description 1
- 230000003042 antagnostic effect Effects 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 230000008030 elimination Effects 0.000 description 1
- 238000003379 elimination reaction Methods 0.000 description 1
- 229920006351 engineering plastic Polymers 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000001815 facial effect Effects 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000003384 imaging method Methods 0.000 description 1
- 230000014759 maintenance of location Effects 0.000 description 1
- 238000007726 management method Methods 0.000 description 1
- 238000013508 migration Methods 0.000 description 1
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- 238000012545 processing Methods 0.000 description 1
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- 239000007921 spray Substances 0.000 description 1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
- G01N2021/0106—General arrangement of respective parts
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N2021/9513—Liquid crystal panels
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Abstract
The invention provides substrate absorption means, substrate conveying means and appearance inspection means, wherein the appearance inspection means includes three absorption groups fixed on a metal plate as the substrate absorption means. The absorption groups are arrayed along the conveying direction of a glass substrate, and each of the absorption groups has three absorption parts which are capable of adsorbed on the back of the glass substrate. Each absorption part is provided with a suction cup capable of performing inclined action. A press part is arranged on the upper part of the absorption part of the middlemost absorption group to descend a bracket panel and press the glass substrate on the absorption part. Accordingly, the stress applied on the substrate can be suppressed and the substrate can be reliably adsorbed and kept.
Description
Technical field
The appearance inspection device on the base board delivery device of the substrate absorption device that the present invention relates to substrate is adsorbed, the substrate that conveyance has been adsorbed and the substrate of conveyance on one side observation side substrate surface.
The application advocates preceence 2007-153922 number to the Japanese patent application of submitting on June 11st, 2007, and quotes its content here.
Background technology
In recent years, Liquid Crystal Display (LCD)), (PlasmaDisplay Panel: (Flat Panel Display: flat-panel monitor) there is the tendency that maximizes in the female glass substrate that carries out many chamferings to FPD to PDP, makes its dress manufacturing apparatus and is also maximizing plasma display) etc. to LCD (Liquid Crystal Display:.On female glass substrate that FPD uses, through repeatedly on substrate surface, be formed with a lot of pixels and driving circuit etc. based on photolithographic Fabrication procedure.In the inspecting substrate line of this Fabrication procedure, use following base board delivery device: it uses air that large-scale glass substrate is floated, and absorption keeps the periphery of this glass substrate to come it is carried out conveyance.
The glass substrate that is positioned the reference position is being adsorbed when keeping the known sucker that has on use is connected to substrate from downside the back side.But smooth glass substrate sometimes also can be owing to through film formation process or heat treatment step twists and warpage before manufacturing.For example, when forming metallic membrane etc. on the surface at glass substrate,, on glass substrate, produce sometimes and reverse and warpage owing to the coefficient of thermal expansion of glass substrate and the different stress that produce of coefficient of thermal expansion of metallic membrane.This reversing with warpage is easy to along with the maximization of glass substrate take place, and its torsional capacity and amount of warpage (warpage angle) also increase.Therefore, glass substrate is difficult to absorption because of reversing to become with warpage, and the absorption mistake takes place sometimes.
In order to prevent this absorption mistake, in existing base board delivery device, a pressing component is set respectively above each sucker, push substrate with pressing component from upside, with substrate by on sucker, adsorbing (for example, with reference to patent documentation 1).
Patent documentation 1: TOHKEMY 2006-188313 communique
When one side along glass substrate as patent documentation 1 is provided with a lot of suckers, and with a plurality of pressing components push simultaneously exist reverse or the substrate of warpage when being pressed in it on sucker, the flexing conditions because of glass substrate produces big stress on glass substrate sometimes.For example, keep under the situation of the both sides of glass substrate, in absorption at first at the middle body retention flex of glass substrate.When pushing the middle body of glass substrate with pressing component under this state, the deflection of glass substrate can not discharge laterally, therefore produces big stress on glass substrate.
Summary of the invention
The present invention finishes in view of this problem, and its main purpose is, can be suppressed at the stress that applies on the substrate and can adsorb the maintenance substrate reliably.
The present invention who addresses the above problem is a kind of substrate absorption device, and this substrate absorption device possesses: the mounting portion of mounting substrate; To being positioned in a plurality of adsorption sections that substrate in the above-mentioned mounting portion adsorbs maintenance; And above-mentioned a plurality of adsorption sections are controlled to be the control part that can carry out vacuum suction respectively at different time, above-mentioned control part is controlled in the following manner: the above-mentioned adsorption section with adsorbable ground contact substrate in above-mentioned a plurality of adsorption sections is a basic point, adsorbs successively on the direction of leaving from this basic point.
This substrate absorption device exists in a plurality of adsorption sections in the time of can not adsorbing the adsorption section of substrate, and control part is controlled so that substrate also can be adsorbed in the adsorption section that can not adsorb.At this moment, be basic point with the part that is adsorbed, on the direction of leaving from the part that becomes basic point, for example adsorb substrate successively towards the end, thereby the warpage of substrate and the stress that reverses are to the substrate end release from central authorities.
According to the present invention, owing to adsorb substrate successively, so while can make the warpage of substrate and reverse the stress that is produced and adsorb the maintenance substrate to the substrate end release towards the direction of leaving from the part that is adsorbed of substrate.Even under the situation that has warpage on the substrate and reverse, also can keep reliably.
Description of drawings
Fig. 1 is the birds-eye view of formation of the base board delivery device that comprises substrate absorption device, the appearance inspection device of expression embodiments of the present invention.
Fig. 2 is the figure that observes from the A direction of Fig. 1.
Fig. 3 is the figure that observes from the B direction of Fig. 1.
Fig. 4 is the figure of the state behind the expression mounting substrate.
Fig. 5 is the figure that observes from the C direction of Fig. 4.
Fig. 6 is the block scheme that expression attracts the path.
Fig. 7 be with the press section with substrate by the figure on sucker.
Fig. 8 is the figure of the different formation of the configuration of illustration press section.
Fig. 9 is the figure that possesses the travel mechanism that makes adsorption section group rotation.
Figure 10 be drive travel mechanism and with substrate by the figure that is pressed on the sucker.
Figure 11 is that expression uses roller to be used as the figure of the example of press section.
Figure 12 is the lateral plan of Figure 11.
Figure 13 is the figure that expression possesses the example of the travel mechanism that makes the adsorption section lifting.
Figure 14 be with travel mechanism make on the adsorption section rise and with sucker by the figure that is pressed on the substrate.
Figure 15 is to use pressure sensor to be used as adsorbing the figure of the example of confirmation unit.
Figure 16 is that expression possesses the figure that camera head is used as adsorbing the example of confirmation unit.
Figure 17 is the lateral plan of Figure 16.
The specific embodiment
Describe in detail with reference to accompanying drawing and to be used to implement best mode of the present invention.In each embodiment, identical inscape is marked with same label.In addition, the repetitive description thereof will be omitted.
(first embodiment)
In Fig. 1 and Fig. 2, show the formation of the appearance inspection device that possesses base board delivery device of this embodiment.Though substrate can use various substrates, the glass substrate W that uses for FPD below.Have, top (surface) of glass substrate W forms face W1 for the element that is used to form patterns such as circuit component and Wiring pattern again, and following (back side) of glass substrate W forms face W2 for the NOT element that does not form pattern.
Move into to take out of at substrate and be equipped with a plurality of lift pins 20 in the space 4.The leading section of lift pin 20 becomes the side-prominent spherical shape that makes progress.This lift pin 20 is supported by not shown lifting mechanism, with respect to haunting freely above the substrate floating platform 3.In Fig. 1, near lift pin 20 cooresponding position and be provided with five altogether with four jiaos of glass substrate W with central authorities cooresponding positions, but the quantity of lift pin 20 and configuration are not limited thereto.
In addition, base portion 2 along on the two sides of directions X, be equipped with line slideway 11 in the mode parallel respectively, on each line slideway 11, a maintenance moving part 12 that moves back and forth freely be set respectively on directions X with the directions X of the conveyance direction that becomes glass substrate W.This a pair of maintenance moving part 12 is same moved further by control part 41 drive controlling.
As shown in Figures 2 and 3, keep moving part 12 to have the slide mass 13 that is installed in sliding freely on the line slideway 11.In slide mass 13, be built-in with mechanisms such as linear motor, be used to make maintenance moving part 12 to move back and forth along line slideway 11 as substrate absorption device.Support portion 14 can be installed in the lateral surface of slide mass 13 movably on the Z direction.14 the top in the support portion is fixed with adsorption section group 16A, 16B, 16C via the metal sheet 15 of L font.
As shown in Figure 1, each adsorption section group 16A～16C keeps moving part 12 with respect to one and dispose each three with predetermined configuration space on directions X.Specifically, be arranged near with the side edge part of the directions X of glass substrate W two jiaos and this cooresponding position, three places of central authorities.Have again, in each adsorption section group 16A～16C, on directions X, be arranged with three adsorption section 18A, 18B, 18C.The configuration space of adsorption section 18A～18C becomes identical distance in each adsorption section group 16A～16C.
Shown in amplifying among Fig. 4 and Fig. 5, adsorption section 18A～18C has the adsorption section main body 21 that is fixed on the metal sheet 15, on adsorption section main body 21 among the hole 21A of the facial circle that forms, can tilt and can on above-below direction, be provided with sucker 22 movably in either direction.Sucker 22 makes top peripheral residual and become the adsorption plane 22A of the rectangle of depression.In the central authorities of adsorption plane 22A, be formed with the attraction hole 23 that is used to attract glass substrate W.Attract hole 23 to connect in the sucker 22, and connect via the pipeline 25 that attracts usefulness, this pipeline 25 is provided with the pipe of the accordion-like that is formed by elastic bodys such as rubber.In the bottom of sucker 22, be formed with the hollow circuit cylinder portion in the hole 21A that inserts adsorption section main body 21.The curved face part 22B of the outside of this hollow circuit cylinder portion for protruding, the internal diameter of the external diameter of curved face part 22B and the hole 21A of the circle that forms on adsorption section main body 21 about equally.Sucker 22 is not damaged the resin manufacture of glass substrate W and excellent in wear resistance by engineering plastics etc.Flexibly support sucker 22 with pipeline 25 with wrinkle.Sucker 22 utilizes the curved face part 22B of sucker 22, the pipeline 25 of accordion-like and the wall portion of adsorption section main body 21 to constitute leaning device.But, also can be travel mechanism and leaning device in addition.When sucker 22 be close to glass substrate W below go forward side by side when vacuum adsorbed, for the pipeline 25 of accordion-like, its wrinkle part is shunk because of negative pressure, as shown in Figure 7, drops to the position that is resisted against on the adsorption section main body 21 below the sucker 22.
As shown in Figure 2, the lateral surface in the support portion 14 that keeps moving part 12 is fixed with support frame 31.This support frame 31 by than the end face of glass substrate W more in the outer part the position and extend upward.In the installed inside of support frame 31 metal sheet 32 of L font is arranged, be hung with press section 33 here.Press section 33 has cylinder 34, can make the vertical down advance and retreat of piston rod 34A.Bracket panel 35 as pressing component is installed in the lower end of piston rod 34A.Press section 33 respectively disposes one with respect to each adsorption section group 16A～16C.For each press section 33, among the adsorption section group 16A of left end, press section 33 is configured in the top near the adsorption section 18C of the rightmost side of central authorities in Fig. 3.In the group 16B of the adsorption section of central authorities, press section 33 is configured in the top of the adsorption section 18B of central authorities.In the group 16C of the adsorption section of right-hand member, press section 33 is configured in the top near the adsorption section 18A of the leftmost side of central authorities.
Have again, come the attraction path of adsorption section group 16A and press section 33 is described with reference to Fig. 6. Adsorption section group 16B, 16C and press section 33 for other also are formed with same attraction path.
As shown in Figure 6, pipe arrangement is connected on the air compressor 37 cylinder 34 of press section 33 via valve 36.The adsorption section 18A of adsorption section group 16A via pressure sensor 38A and valve 39A and pipe arrangement be connected on the attraction sources 40 such as vacuum pump.Pressure sensor 38A is the absorption confirmation unit that detects the pressure of adsorption section 18A.Its output signal line is connected to control part 41.Equally, adsorption section 18B and adsorption section 18C are respectively via as absorption pressure sensor 38B, the 38C of confirmation unit and valve 39B, 39C and pipe arrangement is connected on the attraction source 40.And then its output signal line all is connected on the control part 41.Be input to valve 36,39A～39C, air compressor 37, attraction source 40 from the signal of control part 41 outputs.In other adsorption section group 16B, 16C, also be connected to the shared control part 41 of adsorption section group 16A on.
Appearance inspection devices such as the control 1 single-piece control of the control in the attraction path that control part 41 management are shown in Figure 6, the control of substrate floating platform 3, the control that keeps moving part 12, inspection portion 5.
Secondly, the effect to this embodiment describes.Keep moving part 12 to move at substrate in advance and take out of space 4 standbies, each adsorption section 18A～18C more descends and standby metal sheet 15 by the mode of downside to be positioned at above it than substrate floating height.
When carrying out the inspection of glass substrate W, substrate transfer robot 6 will receive on the carrying arm 6A from the glass substrate W that other operation is taken out of, and the substrate that makes carrying arm 6A move to appearance inspection device 1 is moved into the top of taking out of space 4.Here, remove the absorption of carrying arm 6A, and use to move into and take out of the lift pin 20 that rises in space 4 glass substrate W is lifted from carrying arm 6A from substrate to glass substrate W.When carrying arm 6A was retreated, glass substrate W was handed off on the lift pin 20.Here, because substrate floating platform 3 is from airport 10 ejection air, so when lift pin 20 is descended, make glass substrate W float position above on than substrate floating platform 3, leaning on slightly by air.
After glass substrate W is floated, by by pad with glass substrate W by be pressed in X with reference pins and Y with the reference position that is positioned to float platform 3 on the reference pins.Risen in the support portion 14 that keeps moving part 12, and shift each adsorption section 18 of each adsorption section group 16A～16C onto can form the side edge part of face W2 position from the NOT element that downside is connected to glass substrate W.Control part 41 makes air compressor 37 runnings, to drive six press sections 33.Specifically, by will opening with each cylinder 34 bonded assembly valve 36 and supply with pressurized airs to each cylinder 34, thereby the piston rod 34A of each cylinder 34 is outstanding.Its result, the bracket panel 35 of each press section 33 descends, and pushes the side edge part of glass substrate W from upside.By pushing of this bracket panel 35, the side edge part of glass substrate W is pressed on the sucker 22 of adsorption section 18.
For example, Fig. 5 represents the state before bracket panel 35 descends.When moving into the end and make progress the glass substrate W of warpage, sometimes in the group 16C of adsorption section with respect to the adsorption section 18A of left end, other two adsorption section 18B, 18C float from glass substrate W.Under this situation, as shown in Figure 7, drive press section 33, bracket panel 35 is descended.Press section 33 is pushed glass substrate W and be close on the sucker 22 of adsorption section 18A.Control part 41 is opened valve 39A under the state that makes 40 runnings of attraction source, adsorb glass substrate W by adsorption section 18A.Pressure sensor 38A detects the pressure of adsorption section 18A, and to control part 41 outputs.
When beginning to adsorb under adsorption section 18A is close to state on the glass substrate W, become negative pressure in the pipeline 25, the wrinkle of adsorption section 18A partly shrink and sucker 22 are left behind.This sucker 22 is resisted against the top of adsorption section main body 21 and stops, and glass substrate W is limited in predefined levitation height.In the adsorption section 18B of identical adsorption section group 16C, by near the adsorption section 18A of glass substrate W central authorities, the side edge part of the glass substrate W that floats is upward retracted downwards.Sucker 22 is along the inclination of the glass substrate W that is retracted downwards by adsorption section 18A and tilt, adsorption section 18B is close on the glass substrate W thus, therefore, the path if control part 41 is opened valve 39B with adsorption section 18B vacuumizes, then adsorption section 18B absorption glass substrate W.
By making second absorption glass substrate of adsorption section 18B W, thereby the side edge part of glass substrate W descends to adjacent adsorption section 18C.Equally, when under the tilting action by adsorption section 18C is close to state on the glass substrate W, attracting, can adsorb glass substrate W.
That is, be basic point with the adsorption section 18A that utilizes press section 33 to adsorb at first near central authorities, adsorb glass substrate W successively at adsorption section 18B, the 18C that the lateral direction of leaving gradually from this basic point disposes.
In the group 16B of the adsorption section of central authorities, when same driving press section 33, glass substrate W pushes and is close on the adsorption section 18B of three central authorities among the 18A～18C of adsorption section.Therefore, if open with the adsorption section 18B bonded assembly valve 39B that pushes by press section 33 at first and vacuumize, adsorption section 18B absorption glass substrate W then.Thus, the side edge part of the glass substrate W that will float upward by the absorption of adsorption section 18B retracts downwards.Each sucker 22 is along the inclination of the glass substrate W that is retracted downwards by adsorption section 18B and tilt, and thus, the adsorption section 18A and the adsorption section 18C that are positioned at 18B both sides, this adsorption section are close on the glass substrate W.If be close at glass substrate W and open valve 39A, 39C under the state of two adsorption section 18A, 18C and vacuumize, then adsorption section 18A, 18C absorption glass substrate W.Also can after the 18B of the adsorption section of central authorities, adsorb, then adsorb with remaining adsorption section 18A, 18C with adsorption section 18A, a 18C.
In the group 16A of the adsorption section of left end, when driving press section 33, glass substrate W is close to and is adsorbed on the adsorption section 18C near the right-hand member of central authorities.Then, same with above-mentioned adsorption section group 16C, adsorb glass substrate W according to the order of adsorption section 18B, adsorption section 18A toward the outer side.
With adsorption section group 16A～16C is that the order of unit absorption glass substrate W can at random be set.But, when first adsorption section group 16B with central authorities adsorbs glass substrate, when second adsorption section group 16A, 16C with two ends adsorbs glass substrate W, the warpage of glass substrate W corrected toward the outer side from the central portion of glass substrate W.Under this situation, the order that each adsorption section 18A～18C is vacuumized is, first is with the adsorption section 18B of adsorption section group 16B, second two adsorption section 18A, 18C with adsorption section group 16B, the 3rd with the adsorption section 18C of adsorption section group 16A and the adsorption section 18A of adsorption section group 16C, the 4th with the adsorption section 18B of adsorption section group 16A and the adsorption section 18B of adsorption section group 16C, and the 5th with the adsorption section 18A of adsorption section group 16A and the adsorption section 18C of adsorption section group 16C, adsorbs glass substrate W.By beginning absorption toward the outer side successively from the central authorities of glass substrate W like this, warpage and the deflection of the glass substrate of direction elimination laterally W on one side is Yi Bian adsorb glass substrate W.Also can enough orders in addition adsorb glass substrate W.
Like this, after absorption kept glass substrate W on the adsorption section 18, a pair of maintenance moving part 12 synchronously began to move towards the other end of base portion 2 (conveyance direction X).The defective that becomes the object of observation on the control part 41 acquisition glass substrate W or the coordinate data of pattern, move control according to this coordinate data and keep moving part 12, microscope 46, make the optical axis and the object of observation position alignment of microscope 46, then, obtain the enlarged image of pattern with microscope 46, export to monitoring device.Behind the enlarged image of obtaining predetermined whole observation places, make respectively to keep moving part 12 to retreat, make glass substrate W get back to substrate and move into and take out of space 4.And then, remove the absorption that adsorption section 18 is carried out, and lift glass substrate W with lift pin 20, afterwards, take out of glass substrate W with substrate transfer robot 6.
According to this embodiment, owing to utilize adsorption section group 16A, 16C absorption glass substrate W toward the outer side from the adsorption section group 16B of central authorities, even so in Fabrication procedure, on glass substrate W, produce not expection reverse with warpage the time, also can adsorb glass substrate W reliably.Especially,, can make the warpage of glass substrate W and reverse to be discharged into the substrate end, can further remain glass substrate W plane by adsorb towards the end interimly from the central authorities of glass substrate W.In addition, can be not to glass substrate W application of stress.
Owing to press section 33 is set accordingly with the adsorption section 18A～18C of initial absorption glass substrate W among each adsorption section group 16A～16C, so can adsorb glass substrate W reliably with initial adsorption section 18A～18C, then, other adsorption section 18A～18C is easy to find the beginning of absorption glass substrate W.By finding such beginning, thereby will adsorb glass substrate W reliably as basic point.
Because adsorption section 18A～18C possesses leaning device and telescoping mechanism, so sucker 22 is tilted.Therefore, sucker 22 is close on the glass substrate W reliably, is difficult to produce the absorption mistake.Even under the situation that leaning device only is set, also can obtain same effect.
Possess in the base board delivery device of the maintenance moving part 12 that comprises adsorption section group 16A～16C and substrate floating platform 3 and the appearance inspection device 1 that base board delivery device is provided with inspection portion 5, mistake can not adsorbed and conveyance glass substrate W reliably, can check under the state that absorption keeps reliably at oriented glass substrate non-migration, therefore can improve operating efficiency and check precision.
As shown in Figure 8, press section 33 also can only be configured in the top of adsorption section 18A of the left end of each adsorption section group 16A～16C.In addition, though not shown, also can only be configured in the top of each adsorption section 18C of right-hand member.Also can be according to each adsorption section group 16A～16C and in different position configuration press sections 33.In either case, can both be by press section 33 glass substrate W be adsorbed on be disposed at this press section 33 under the adsorption section on, also utilize other adsorption section absorption glass substrate W as the beginning.Control part 41 is basic point with the order of absorption for the left part with the adsorption section group 16A of left end, controls towards the mode of substrate center, right part.
(second embodiment)
When the absorption of beginning glass substrate W, use the absorption confirmation unit to confirm the absorption of glass substrate W.The absorption confirmation unit also can be used any of above-mentioned embodiment.When having the adsorption section (being adsorption section 18B and adsorption section 18C in the example at Fig. 9) that to adsorb glass substrate W, keep to the adsorption section 18A former state that can adsorb adsorbed state, control part 41 drives travel mechanism 71, and moving axis 72 rotates so that adsorption section group 16C rotates.As shown in figure 10, the distance that can not adsorb adsorption section 18B, the 18C of glass substrate W and glass substrate W shortens and can adsorb glass substrate W.Thus, be basic point with adsorption section 18A, and on the direction of leaving from here, begin absorption successively.That is, adsorb glass substrate W according to the order of adsorption section 18B, adsorption section 18C.
Behind absorption glass substrate W, drive travel mechanism 71 once more, make adsorption section group 16C get back to conveyance glass substrate W after the level.
When glass substrate W went up warpage to the right, the adsorption plane of each adsorption section 18A, 18B of adsorption section group 16C, each sucker 22 of 18C was that the center makes adsorption section group 16C around rotating counterclockwise in the mode of the warpage of imitation glass substrate W with turning cylinder 72.Under the situation of adsorbing at first, travel mechanism 71 is adsorbed successively around cw and left-hand revolution by the adsorption section 18B of central authorities.For other adsorption section group 16A, 16B, adsorb glass substrate W similarly.
In control part 41, utilize the adsorption section group 16B absorption glass substrate W of central authorities, then, utilize adsorption section group 16A, the 16C absorption glass substrate W of end side.By with from the central authorities of glass substrate W toward the outer side successively the mode of absorption control, can make the warpage of glass substrate W and reverse towards the substrate end release, can further remain glass substrate W plane.
In this embodiment, by travel mechanism 71 being set on the group 16A～16C of adsorption section and the position of adsorption section 18A～18C mechanically being moved, thereby in turn absorption keeps glass substrate W, therefore, even also can adsorb reliably when on glass substrate W, having warpage or deflection.
In identical adsorption section group 16A～16C, also can be provided with and make each adsorption section 18A～18C lifting travel mechanism freely.Under this situation, carry out lifting control and attract control in a plurality of adsorption section 18A～18C adsorb glass substrate W successively from the central authorities of glass substrate W towards the end mode.In addition, also can be with the travel mechanism 71 of each adsorption section group 16A～16C as travel mechanism towards the conveyance direction.
(the 3rd embodiment)
For Figure 11 and the maintenance moving part 12 as substrate absorption device shown in Figure 12, each adsorption section group 16A～16C possesses three adsorption section 18A～18C on the conveyance direction.Have again, above group 16B both sides, adsorption section, dispose press section 81.Press section 81 disposes near the top of the adsorption section 18B of central authorities, and has the pair of rolls 82 of arranging on the conveyance direction.The S. A. 83 of roller 82 is configured to and conveyance direction quadrature and and horizontal direction parallel.Though the outer peripheral face utilization of roller 82 possesses the hardness of the degree that can push glass substrate W but can the wounded substrate surface and resin of abrasion test etc. and makes.
When absorption glass substrate W,, push glass substrate W from the top and begin attraction by pair of rolls 82 in the both sides of the adsorption section 18B that is positioned at adsorption section group 16B central authorities.Meanwhile, move to the two ends of glass substrate W on glass substrate W while pair of rolls 82 is rolled, with glass substrate W by being pressed on the sucker 22.
In this embodiment, glass substrate W interimly is close on the 18A～18C of adsorption section fully from central authorities, is adsorbed reliably.
Because roller 82 moves towards the end from the central authorities of glass substrate W, so each adsorption section 18A～18C adsorbs glass substrate W successively from central authorities.Thus, can make glass substrate W warpage and reverse to the substrate end release, can further remain glass substrate W plane.
(the 4th embodiment)
As shown in figure 13, the maintenance moving part 12 as substrate absorption device is equipped with metal sheet 15 on slide mass 13 via support portion 91.Support portion 91 constitutes and can make each adsorption section group 16A～16C lifting on the Z direction.Though preferably constitute each lifting independently of each adsorption section group 16A～16C, also can be the structure that makes each adsorption section group 16A～16C lifting integratedly.
When absorption glass substrate W, the attraction path of each adsorption section 18A～18C is attracted, and with the absorption of absorption confirmation unit affirmation glass substrate W.When having the adsorption section 18A that can not adsorb～18C, the adsorption section 18A～18C that adsorb is keeping driving support portion 91 under the state of absorption, makes adsorption section group 16A～16C rising.As shown in figure 14, because sucker 22 is pressed and is close on the glass substrate W of warpage upwards, so if under this state, begin to attract then can adsorb glass substrate W.Control part 41 makes the adsorption section group 16B that is positioned at central authorities rise at first, the back side that makes the sucker of each adsorption section 18A, 18B, 18C push and be adsorbed on glass substrate W.Similarly, so that adsorption section group 16A, 16C rise the mode of adsorbing on the end of the conveyance direction of glass substrate W control.After the absorption of each adsorption section 18A～18C in confirming whole adsorption section group 16A～16C, make support portion 91 get back to the position of glass substrate W for the levitation height of regulation.Rise by making on the levitation height position of support portion 91 than glass substrate W, by the back side that is pressed in glass substrate W, at the antagonistic force that acts on the glass substrate W sucker 22 is close on the glass substrate W in sucker 22 thereby utilize.That is, move to the position of more leaning on the top than the levitation height of regulation, lift glass substrate W, thereby the sucker of each adsorption section is close on the glass substrate W reliably by making each adsorption section group 16A～16C.By according to the order of adsorption section group 16A, the 16C in the outside being risen in support portion 91 from the adsorption section group 16B that is positioned at glass substrate W central authorities, thereby can make glass substrate W warpage and reverse to the substrate end release, it is plane glass substrate W to be remained.Behind absorption glass substrate W, make support portion 91 drop to the levitation height position of glass substrate, conveyance glass substrate W then.
In this embodiment, by making adsorption section group 16A～16C lifting with support portion 91, thereby be basic point and on the direction of leaving from here, adsorb glass substrate W can adsorb part at first interimly, therefore, can adsorb maintenance reliably.Keep glass substrate W even also can adsorb when the arbitrary adsorption section 18A～18C in position can not adsorb glass substrate W in the early stage.
(the 5th embodiment)
When absorption glass substrate W, open each adsorption section 18A, 18B, 18C, 18D ... the attraction path valve 39A, 39B, 39C, 39D ..., begin together to attract.Control part 41 check each pressure sensor 38A, 38B, 38C, 38D ... value, select degree of vacuum the highest or arrive in a plurality of pressure sensors of predetermined vacuum level one, selection pressure sensor 38B in the example of Figure 15 at first.Then, only open the valve 39B in the attraction path of the pressure sensor 38B that has selected, and close other valve 39A, 39C that attracts the path, 39D ...Its result, only the adsorption section 18B in the valve attraction path of opening attracts glass substrate W, and the glass substrate W of this part is adsorbed.By the absorption of adsorption section 18B, the glass substrate W of warpage is retracted downwards by the absorption of adsorption section 18B upward.Then, valve 39A, the 39C in the attraction path of second adsorption section 18A, 18C that opens the adsorption section 18B next door in the attraction adsorb glass substrate W.Then, the 3rd valve 39D that opens adsorption section 18D adsorbs glass substrate W.The absorption of adsorption section 18A, the 18C on the adsorption section 18B next door in the attraction can not carried out simultaneously yet.
In this embodiment, arrange a lot of adsorption sections along glass substrate W in advance, do not pre-determine the order of absorption glass substrate W, the most close place that can adsorb the central authorities of glass substrate W is a basic point during with actual absorption, the point that increases absorption on one side on the direction of leaving from here adsorbs glass substrate W on one side interimly, therefore, even under the situation that has warpage and deflection on arbitrary position of glass substrate W, also can adsorb reliably.The adsorption section that becomes the basic point of absorption beginning is not limited to one, and also can select continuously and confirm a plurality of adsorption sections of adsorbing, be the beginning basic point of absorption with the adsorption section of its both sides.
In the present embodiment, though with arbitrary adsorption section 18A, 18B, 18C, 18D ... adsorbable glass substrate W is a prerequisite, but also can and use with the absorption auxiliary part (for example bracket panel 35 and roller 82 etc.) that absorption is assisted of other embodiment.Under this situation, control part 41 moves the absorption auxiliary part in the configuration of the adsorption section of the central authorities of glass substrate W to adsorb glass substrate W.Control part 41 is controlled in the following manner: with this adsorption section basic point and open the valve of adsorption section successively to start with, and adsorb on the direction of leaving from here as basic point with the position of initial absorption interimly.Can reduce the warpage of glass substrate W and reverse the stress that is produced, and can further remain glass substrate W plane.
(the 6th embodiment)
As Figure 16 and shown in Figure 17, be provided with camera head 61 as the absorption confirmation units as the maintenance moving part 12 of substrate absorption device.Camera head 61 is can be installed on the appearance inspection device 1 with the mode that the conveyance direction moves abreast by not shown travel mechanism.The moving range of camera head 61 is the scopes that can take each adsorption section 18A～18N and glass substrate W.As not shown travel mechanism, can enumerate the structure of the slide mass that possesses the track laid abreast with the conveyance direction and removable in orbit and mounting camera head 61.In this embodiment, from the end of the conveyance direction front side of glass substrate W to the end of conveyance direction rear side successively with uniformly-spaced dispose adsorption section 18A, adsorption section 18B, adsorption section 18C ..., adsorption section 18N.Camera head 61 is provided with one or more in the mode of the absorption that can confirm whole adsorption sections.
In this embodiment, camera head 61 is set is used as adsorbing confirmation unit, the position that can adsorb glass substrate W when investigating actual absorption, as basic point, on the direction of leaving from basic point, move the point of absorption on one side interimly, adsorb glass substrate W on one side, therefore, even under the situation that has warpage and deflection on the glass substrate W, also can adsorb reliably.The adsorption section that becomes the basic point of absorption beginning is not limited to one, and also can select continuously and confirm a plurality of adsorption sections of adsorbing, be the beginning basic point of absorption with the adsorption section of the both sides that constitute this group.
In the present embodiment, though with arbitrary adsorption section 18A, 18B, 18C ... can adsorb glass substrate W is prerequisite, but also can and use with the absorption auxiliary part (for example bracket panel 35 and roller 82 etc.) that absorption is assisted of other embodiment.Under this situation, control part 41 moves the absorption auxiliary part in the configuration of the adsorption section of the central authorities of glass substrate W to adsorb glass substrate W.Control part 41 is controlled in the following manner: with this adsorption section to start with basic point open valve successively, on the direction of leaving from here, adsorb as basic point with the position of initial absorption interimly.Can reduce the warpage of glass substrate W and reverse the stress that is produced, can further remain glass substrate W plane.
The present invention is not limited to the respective embodiments described above, can use widely.
For example, also can form the pressing component of each embodiment and any structure that combines of absorption confirmation unit, travel mechanism.
Can be the device that only carries out the absorption of glass substrate W, also can be the device that adsorbs with conveyance.It can be the device that adsorbs and check.
Mobile maintaining part 12 also can be provided with along laying line slideway 11 on the side of the directions X of base portion and moving back and forth on directions X freely.
Claims (13)
1. a substrate absorption device is characterized in that, this substrate absorption device possesses:
The mounting portion of mounting substrate;
To being positioned in a plurality of adsorption sections that substrate in the above-mentioned mounting portion adsorbs maintenance; And
Above-mentioned a plurality of adsorption sections are controlled to be the control part that can carry out vacuum suction at different time respectively,
Above-mentioned control part is controlled in the following manner: the above-mentioned adsorption section with adsorbable ground contact substrate in above-mentioned a plurality of adsorption sections is a basic point, adsorbs successively on the direction of leaving from this basic point.
2. substrate absorption device according to claim 1 is characterized in that,
This substrate absorption device possesses the press section, and described press section is pushed substrate in the mode of adsorbable ground contact substrate from the top.
3. substrate absorption device according to claim 2 is characterized in that,
Form the adsorption section group by above-mentioned a plurality of adsorption sections, above-mentioned press section is configured in respectively in the group of a plurality of above-mentioned adsorption sections, and is configured in the top of the above-mentioned adsorption section that disposes near substrate center in the group of above-mentioned adsorption section.
4. according to claim 2 or 3 described substrate absorption devices, it is characterized in that,
Above-mentioned press section has roller, and described roller has the S. A. parallel with real estate.
5. substrate absorption device according to claim 1 is characterized in that,
At least one of above-mentioned a plurality of adsorption sections constitutes and can rise towards substrate.
6. according to each the described substrate absorption device in the claim 1～3, it is characterized in that,
Substrate absorption device possesses the absorption confirmation unit, and described absorption confirmation unit detects the situation of adsorbable ground, above-mentioned adsorption section contact substrate.
7. substrate absorption device according to claim 6 is characterized in that,
Above-mentioned absorption confirmation unit comprises pressure sensor, and described pressure sensor is arranged between above-mentioned adsorption section and the attraction source at each above-mentioned adsorption section, and the pressure that attracts the path is detected.
8. substrate absorption device according to claim 6 is characterized in that,
Above-mentioned absorption confirmation unit comprises the camera head that is provided with at each above-mentioned adsorption section group.
9. substrate absorption device according to claim 6 is characterized in that,
Described substrate absorption device possesses travel mechanism, and described travel mechanism makes at least one rising of above-mentioned adsorption section when not confirmed absorption by above-mentioned absorption confirmation unit.
10. substrate absorption device according to claim 6 is characterized in that,
Described substrate absorption device possesses travel mechanism, when existence did not confirm the above-mentioned adsorption section of absorption by above-mentioned absorption confirmation unit, described travel mechanism made the integral inclination of the above-mentioned adsorption section that forms the above-mentioned adsorption section group that comprises this above-mentioned adsorption section or moves in the orientation of above-mentioned adsorption section.
11. substrate absorption device according to claim 1 is characterized in that,
Above-mentioned adsorption section possesses the telescoping mechanism of leaning device or above-below direction.
12. a base board delivery device is characterized in that,
This base board delivery device has the air pressure utilized makes the mechanism of substrate floating be used as above-mentioned mounting portion, and constitutes the described aforesaid substrate adsorption plant of the claim 1 that the substrate that floats is adsorbed movably.
13. an appearance inspection device is characterized in that,
This appearance inspection device is provided with viewing optical system, and described viewing optical system is observed the surface of substrate in the path that utilizes the described base board delivery device conveyance of claim 12 substrate.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2007153922A JP2008302487A (en) | 2007-06-11 | 2007-06-11 | Substrate sucking device, substrate transporting device, and outside appearance inspecting device |
| JP2007153922 | 2007-06-11 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN101323396A true CN101323396A (en) | 2008-12-17 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNA2008101089197A Pending CN101323396A (en) | 2007-06-11 | 2008-06-06 | Substrate absorbing apparatus, substrate conveying apparatus and exterior inspection apparatus |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP2008302487A (en) |
| KR (1) | KR20080108904A (en) |
| CN (1) | CN101323396A (en) |
| TW (1) | TW200906695A (en) |
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN102666323A (en) * | 2009-11-26 | 2012-09-12 | 株式会社尼康 | Substrate processing apparatus and method for manufacturing display element |
| TWI480216B (en) * | 2011-11-14 | 2015-04-11 | Kawasaki Heavy Ind Ltd | Sheet conveyance system |
| CN105091779A (en) * | 2014-04-30 | 2015-11-25 | 平田机工株式会社 | Workpiece shape measurement system and control method |
| CN106927258A (en) * | 2017-01-26 | 2017-07-07 | 江苏东旭亿泰智能装备有限公司 | A kind of conveyer and its transfer approach for glass substrate |
| CN108136596A (en) * | 2015-08-26 | 2018-06-08 | 伯克希尔格雷股份有限公司 | The system and method that vacuum valve module for end effector is provided |
| CN108202339A (en) * | 2016-12-20 | 2018-06-26 | 亚智科技股份有限公司 | Method for sucking substrate and sucking device |
| CN108238447A (en) * | 2018-01-16 | 2018-07-03 | 京东方科技集团股份有限公司 | Transmission system |
| CN109071129A (en) * | 2016-03-31 | 2018-12-21 | 科福罗有限公司 | Transportation system with vacuum wheel |
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| TWI327986B (en) * | 2003-05-06 | 2010-08-01 | Olympus Corp | Substrate absorption device |
-
2007
- 2007-06-11 JP JP2007153922A patent/JP2008302487A/en active Pending
-
2008
- 2008-06-04 KR KR1020080052407A patent/KR20080108904A/en not_active Withdrawn
- 2008-06-06 CN CNA2008101089197A patent/CN101323396A/en active Pending
- 2008-06-10 TW TW097121524A patent/TW200906695A/en unknown
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| CN102666323A (en) * | 2009-11-26 | 2012-09-12 | 株式会社尼康 | Substrate processing apparatus and method for manufacturing display element |
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Also Published As
| Publication number | Publication date |
|---|---|
| JP2008302487A (en) | 2008-12-18 |
| KR20080108904A (en) | 2008-12-16 |
| TW200906695A (en) | 2009-02-16 |
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Application publication date: 20081217 |