CN101144920A - Substrate detecting device - Google Patents
Substrate detecting device Download PDFInfo
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- CN101144920A CN101144920A CNA2007101492516A CN200710149251A CN101144920A CN 101144920 A CN101144920 A CN 101144920A CN A2007101492516 A CNA2007101492516 A CN A2007101492516A CN 200710149251 A CN200710149251 A CN 200710149251A CN 101144920 A CN101144920 A CN 101144920A
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- substrate
- carrying
- absorption
- trucking department
- platform
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
- G01N2021/0106—General arrangement of respective parts
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- Analytical Chemistry (AREA)
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- General Health & Medical Sciences (AREA)
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- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Liquid Crystal (AREA)
Abstract
A substrate detecting device is provided in the present invention comprising: flying pads (1A, 2A, 3A) for carrying sheet-like substrate (4) as object to be detected; and adsorption carrying parts (5, 6, 7) arranged at any side of the flying pads and orthogonal direction to the carrying direction, keeping the end of the substrate (4) and applying force to the substrate (4), the substrate detecting device processes to carrying the substrate (4) by distributing the substrate (4) between the adsorption carrying parts in turn. According to the substrate detecting device of the present invention, even the carrying path is long, it can not lead the substrate to deform, and it can carry the substrate with good precision.
Description
Technical field
The present invention relates to base board checking device.For example relate to the such laminal substrate such as level carrying liquid crystal glass base and the base board checking device of look-up table planar defect.
The application requires the right of priority of Japanese patent application 2006-245739 number of on September 11st, 2006 application, and quotes its content at this.
Background technology
Followed the maximization of LCD in recent years, it is large-scale that liquid crystal glass base also becomes.Thereby, the base board checking device of checking the surface imperfection of this laminal substrate will be in substrate transfer in the manufacturing process mostly and float to gas on the carrying platform such as platform, maintenance etc. is for example adsorbed in end to substrate, it is transported to inspection portion, by moving horizontally substrate, carry out the inspection of substrate surface in inspection portion.Reduced the destruction that the time, energy loss and the carrying that are used for substrate and move cause substrate thus.
For example in TOHKEMY 2004-279335 communique, put down in writing a kind of substrate transfer apparatus, this substrate transfer apparatus have blow out air upwards make substrate floating float that piece and absorption remain on the two ends of floating the substrate that floats on the piece and to the board carrying portion (with reference to TOHKEMY 2004-279335 communique Fig. 1) of a direction carrying substrate.
In addition, in TOHKEMY 2000-9661 communique, put down in writing a kind of dull and stereotyped testing fixture, this flat board testing fixture is provided with the Y objective table at the one-sided of roller trucking department along the carrying direction, controls one-sided carrying the (with reference to TOHKEMY 2000-9661 communique Fig. 1～3) of substrate on thickness direction by handle sturcture.
But there are the following problems for existing base board checking device as described above.
In the described technology of TOHKEMY 2004-279335 communique, keep the two ends of substrate to carry by adsorbing along the both sides configured in parallel board carrying portion in board carrying path.Therefore, because the both sides of substrate are by the constraint of a pair of board carrying portion, therefore, because of the imbalance of the depth of parallelism of board carrying portion etc., the glass substrate on the thin plate is pushed and easy deformation from both sides, because substrate is crooked, can influence the inspection precision.
And in the described base board checking device of TOHKEMY 2004-279335 communique, though be provided with common board carrying portion with respect to floating piece.But, on the manufacturing line of flat board,, arrange and a plurality ofly float piece and form the carrying path of growing up according to the carrying layout in path and the quantity of inspection portion etc.In this carrying path, dispose a plurality of manufacturing installations or testing fixture.Under these circumstances, float piece and each device the board carrying portion that common two ends keep is set a plurality of, need make configuration precision each other is high precision, therefore can increase the work that is provided with and the assembly cost of base board checking device.Particularly in order to cut off the vibration from the outside, base board checking device is placed on and removes on the platform that shakes.Be to be placed on like this under the situation of removing the device on the platform that shakes, be accompanied by moving of substrate, being placed on the upper surface that floats piece that removes on the platform that shakes can tilt, or owing to the motion of carrying out complexity from the vibration of outside, thereby common board carrying portion can't be set.
For fear of a back problem, can consider to cut apart the board carrying portion that is provided with, but this need be used for changing from the board carrying portion of upstream side the conveying robot etc. of the board carrying portion that is downloaded to the downstream according to floating piece, this makes apparatus structure become complicated.
In the described technology of TOHKEMY 2000-9661 communique, under the situation of the trucking department of substrate delivery/reception being given the downstream, need to decontrol substrate once in addition.At this moment, because substrate is not restrained in the horizontal direction, thereby can diminish the positioning states that is positioned at the substrate on the reference position.So exist in the problem that handing-over must position adjustment afterwards once more.
Summary of the invention
The present invention finishes in view of the above problems, even its purpose is to provide a kind of carrying path length, substrate is deformed, and can be with the base board checking device of good precision carrying substrate.
In order to solve above-mentioned problem, base board checking device of the present invention has: be used to carry the carrying platform as the laminal substrate of subject; And a plurality of one-sided trucking departments, they be configured in the carrying platform, with the direction of carrying direction quadrature in any side, their keep the end of substrate, and substrate is applied carrying capacity, this base board checking device carries out the carrying of substrate by join substrate successively between a plurality of one-sided trucking departments.
According to base board checking device of the present invention, because the handing-over substrate is carried between a plurality of one-sided trucking departments, so even the carrying path length can not make substrate deform yet, and can be with good precision carrying substrate.
Description of drawings
Fig. 1 is the vertical view of summary structure of the base board checking device of expression first embodiment of the present invention.
Fig. 2 A is the partial enlarged drawing of the A portion among Fig. 1.
Fig. 2 B is the front elevation that the arrow B direction in Fig. 2 A is observed.
Fig. 3 is the vertical view of action of the base board checking device of explanation first embodiment of the present invention.
Fig. 4 is the vertical view of action of the base board checking device of explanation first embodiment of the present invention.
Fig. 5 is the vertical view of summary structure of base board checking device of the variation of expression first embodiment of the present invention.
Fig. 6 is the vertical view of summary structure of the base board checking device of expression second embodiment of the present invention.
Fig. 7 is the vertical view of summary structure of the base board checking device of expression the 3rd embodiment of the present invention.
Fig. 8 is the vertical view of summary structure of the base board checking device of expression the 4th embodiment of the present invention.
Embodiment
Embodiments of the present invention are described with reference to the accompanying drawings.In institute's drawings attached,, and omit common explanation even under the different situation of embodiment, also be marked with identical label for identical or suitable parts.
[first embodiment]
The base board checking device of first embodiment of the invention is described.
Fig. 1 is the vertical view of summary structure of the base board checking device of expression first embodiment of the present invention.Fig. 2 A is the partial enlarged drawing of the A portion among Fig. 1.Fig. 2 B is the front elevation that the arrow B direction in Fig. 2 A is observed.
Present embodiment is the embodiment that is applied to base board checking device 100, the laminal substrate 4 that this base board checking device 100 will be for example be made of liquid crystal glass base etc. is as subject, along continuous straight runs is carried it when substrate 4 is floated, and checks the surface of substrate 4.
As shown in Figure 1, the summary structure of base board checking device 100 is to constitute to dispose substrate successively along the carrying direction of substrate 4 and move into portion 1, inspection portion 2 and substrate and take out of portion 3.
The plan view shape of substrate 4 with the length of carrying direction be L, with the width of the direction (being designated hereinafter simply as the carrying Width) of carrying direction quadrature be that the rectangular shape of W describes.
Substrate is moved into portion 1 and is for example used the next substrates 4 of carrying such as conveying robot by the lifter with a plurality of jacking pins from installing outside reception, and it is positioned in floats on the platform 1A, substrate is moved into portion 1 and is had substrate positioning mechanism, this substrate positioning mechanism constitutes by reference pins 8a, 8a, 8b with by pad 8c, 8c, this substrate positioning mechanism is to positioning on carrying direction and carrying Width in surface level floating the substrate 4 that floats on the platform 1A, and substrate is moved into portion 1 and is also had the platform of floating 1A and absorption trucking department 5 (one-sided trucking department).
The size of floating platform 1A is set the carrying direction length L of the length of carrying direction greater than substrate 4 for, and the width of carrying Width is slightly less than the width W of substrate 4.
In addition, because Fig. 1 be synoptic diagram, thereby size etc. has been carried out exaggeration handled, its result depicts the position that reference pins 8b and slider guide 9 be in mutual interference as to concern.But reference pins 8b is arranged on the position that separates slightly with slider guide 9, and constitutes and can keep out of the way descending behind the location of substrate 4 not on the position of interfering with absorption trucking department 5 described later, so that do not interfere with slide block 10.
By pad 8c is to be used to push substrate 4 to its pressing component to the reference pins 8a that is arranged at the reference position, 8a, the 8b side application of force, the carrying direction upstream side that it is arranged on left side (upside among Fig. 1, be designated hereinafter simply as carrying direction left side) and floats platform 1A towards the carrying direction of floating platform 1A, and be arranged to and can move towards substrate 4.
In addition, reference pins 8a, 8b, by pad 8c so long as not the end of wounded substrate 4 carry out the fastening parts of butt, then be not limited to pin shape parts, for example also can be block parts.And pressing component also can wait covering surfaces with padded coaming.
Shown in Fig. 2 A, Fig. 2 B, the summary structure of absorption trucking department 5 is made of slider guide 9, slide block 10, elevating mechanism 11, lifting base 12, absorption pedestal 13 and Attraction block 14.
As shown in Figure 1, the slider guide 9 of absorption trucking department 5 is along the carrying direction right side configuration of floating platform 1A, and it is from floating the benchmark locating area P on the platform 1A
1Pars intermedia extend to the substrate delivery/reception zone P of the upstream side that floats platform 2A
2Pars intermedia.
Elevating mechanism 11 is fixed on the slide block 10, and when carrying substrate 4, elevating mechanism 11 rises absorption pedestal 13, joins substrate 4 then, when return-to-home position, absorption pedestal 13 is descended so that it is not interfered with substrate 4.
The support component of the rectangular shape of the absorption carrying direction length L that pedestal 13 is provided with for a plurality of Attraction blocks 14 are fixed on upper surface side, length is slightly less than substrate 4.This absorption pedestal 13 is fixed on the lifting base 12 with the length direction state parallel with the end face that floats platform 1A.
As the structure of Attraction block 14, for example can adopt the adsorption plane of overlooking to rectangular shape to be provided with recess 14a, and be provided with the structure of carrying out the SS 14b of vacuum draw by suction source in the central authorities of this recess 14a.
As shown in Figure 1, the slider guide 9 of inspection portion 2 disposes along the carrying direction left side of floating platform 2A, and from floating the substrate delivery/reception zone P of platform 2A
2Pars intermedia extend to substrate delivery/reception zone (inspection area) P
3Pars intermedia.The length of this slider guide 9 is so long as at two adjacent substrate delivery/reception zone P
2, P
3The interior length that slide block 10 is moved back and forth in the scope of the carrying direction length of floating platform 2A gets final product, and also can be the length with the carrying direction same length of floating platform 2A.
Therefore, when overlooking, the slider guide 9 of absorption trucking department 5 is opposed in parallel with each other across floating platform 2A with the slider guide 9 of absorption trucking department 6.As long as the absorption trucking department of arranged opposite 5,6 can be at substrate delivery/reception zone P
2Handing-over substrate 4, then slide block 10 can one be positioned substrate delivery/reception zone P
2Centre (L/2) locate, but carried out the substrate of location for carrying correctly and stably, as long as make each slide block 10 move to substrate delivery/reception zone P
2Centre (L/2) get final product.
In the present embodiment, being set at can be at the substrate delivery/reception zone P that floats on the platform 2A
2Giving absorption trucking department 6 by substrate 4 handing-over of absorption trucking department 5 adsorbed carryings.Shown in Fig. 2 A and Fig. 2 B, because each Attraction block 14 of each Attraction block 14 that can be by absorption trucking department 5 and absorption trucking department 6 adsorbs the end integral body on the carrying Width that keeps substrate 4.Because the Mobility Center of absorption board carrying portion 5,6 is the substantial middle of the length L of substrate 4, the moving range of therefore adsorbing the slide block 10 of trucking department 5 is set at the benchmark locating area P identical with the length of substrate 4
1With substrate delivery/reception zone P
2Centre position separately.
Similarly, the moving range of the slide block 10 of absorption trucking department 6 is set in substrate delivery/reception zone P
2, P
3Centre position separately.
Substrate is taken out of portion 3 and for example is used for taking out of the parts of auto levelizer outside by will the be through with substrate 4 of inspection of inspection portion 2 of conveying robot, and it has the platform of floating 3A and absorption trucking department 7.
Floating platform 3A and absorption trucking department 7 has respectively and floats the 1A of portion and adsorb the identical structure of trucking department 5.Absorption trucking department 7 is along the carrying direction right side configuration of floating platform 3A of the opposition side of absorption trucking department 6.The slider guide 9 of this absorption trucking department 7 is from the substrate delivery/reception zone P in the downstream of floating platform 2A
3Pars intermedia extends to the substrate that floats platform 3A and takes out of regional P
4Pars intermedia.
Like this, in the base board checking device 100 of present embodiment, float platform 1A, 2A, 3A and on the carrying direction, be adjacent to successively extend, the trucking department 5,6,7 of absorption is arranged in the both sides of this carrying direction indentation alternate configurations.Therefore constituting can be at substrate delivery/reception zone P
2, P
3In, the substrate 4 that will carry out the location is respectively successively from absorption trucking department 5 transiting transportations to absorption trucking department 6 and from adsorbing trucking department 6 transiting transportations to absorption trucking department 7.
Carrying action with substrate 4 is the action of the base board checking device 100 of center explanation present embodiment below.
Fig. 3, Fig. 4 are the vertical views of action of the base board checking device of explanation first embodiment of the present invention.
At first shown in the diagram left end side of Fig. 1, make the slide block 10 of absorption trucking department 5 move to the benchmark locating area P that becomes carrying beginning side
1The centre position.At this moment, adjust the height of elevating mechanism 11, make the upper surface of Attraction block 14 become the state of the levitation height at the back side that is lower than substrate 4.
Move then and press pad 8c, 8c, the substrate under the float state 4 is pressed against on reference pins 8a, 8a, the 8b, so that substrate 4 is positioned on the reference position.
By these actions, to float in the both sides of floating the substrate 4 on the platform 1A and be pressed against on reference pins 8a, 8a, the 8b, the position when overlooking thus is positioned with respect to the reference position of carrying Width, carrying direction respectively.Under this state, drive elevating mechanism 11, make Attraction block 14 rise to the height at the back side of substrate 4, thereby vacuum suction is positioned the substrate 4 of reference position.
After vacuum suction is finished, reference pins 8b is descended, and make by pad 8c and keep out of the way to the direction of leaving substrate 4.
Then, move the slide block 10 that adsorbs trucking department 5 along the carrying direction and move to substrate delivery/reception zone P
2The centre position, substrate 4 is transported to the substrate delivery/reception zone P of inspection portion 2
2
At this moment, the slide block 10 of absorption trucking department 6 descends elevating mechanism 11, make the upper surface of Attraction block 14 be lower than the back side height of substrate 4, and slide block 10 moves to the substrate delivery/reception zone P that floats platform 1A
2Standby.
As shown in Figure 3, its result is to move to the substrate delivery/reception zone P that floats on the platform 2A
2The lower surface of substrate 4, each slide block 10 of absorption trucking department 5,6 is configured on the position opposite each other.Under this state, make elevating mechanism 11 rise to the upper surface of the Attraction block 14 that adsorbs trucking department 6 and the back side butt of substrate 4.Kept under the state of substrate 4 in Attraction block 14 absorption then, carried out vacuum suction by absorption trucking department 6 with absorption trucking department 5.At this moment, substrate 4 with carrying Width opposed both ends respectively each Attraction block 14 by absorption trucking department 5,6 in the scope of total length roughly, be adsorbed maintenance.
Finish to remove the absorption of absorption trucking department 5 after the absorption, the elevating mechanism 11 of absorption trucking department 5 is descended.Absorption trucking department 5 moves to the substrate orientation zone P that substrate is moved into portion 1
1On, return to the state of above-mentioned carrying when beginning, prepare next piece substrate 4 of carrying.
Thus, the substrate 4 that has been undertaken locating by substrate positioning mechanism is given the absorption trucking department 6 of carrying the direction left side from the absorption trucking department 5 on carrying direction right side by handing-over under the state that is positioned.
Like this, by adsorbing with absorption trucking department 6 under the state of maintenance by the opposition side of the substrate 4 of absorption trucking department 5 carryings, remove the absorption of absorption trucking department 5, the reference position of the in-plane of substrate 4 is constant, and substrate 4 can be given the absorption trucking department 6 on opposite by handing-over under the state of having kept the reference position by substrate positioning mechanism.
Next, the slide block 10 with absorption trucking department 6 moves to inspection area P
3, floating on the platform 2A to floating platform 3A side carrying substrate 4 (with reference to Fig. 4).At this moment,, perhaps have predetermined velocity variations to carry, perhaps carry out preposition and move and carry with according to the inspection needs of inspection portion 2 and predefined constant speed is carried.In the present embodiment, according to the coordinate data of each defective on the substrate 4, carrying substrate 4 also it is stopped so that specific defective is consistent with the inspection line of checking a 2b, and moves an inspection 2b so that check that the optical axis of a 2b is consistent with defective along stand 2a.By making substrate 4 and checking that a 2b relatively carries out XY and moves, can check the optional position of substrate 4 like this.
At this moment, the slide block 10 of absorption trucking department 7 descends elevating mechanism 11, make the upper surface of Attraction block 14 be lower than the back side height of substrate 4, and this slide block 10 moves to the substrate delivery/reception zone P that floats platform 2A
3Standby.
Then, when substrate 4 moved on the end of the carrying direction of floating platform 2A, the slide block 10 of absorption trucking department 6,7 was in the lower surface arranged opposite of substrate 4.Under this state, drive the elevating mechanism 11 of absorption trucking department 7, make elevating mechanism 11 rise to the upper surface of the Attraction block 14 that adsorbs trucking department 7 and the back side butt of substrate 4.Kept under the state of substrate 4 in Attraction block 14 absorption then, used absorption trucking department 7 to carry out vacuum suction by absorption trucking department 6.This moment substrate 4 with carrying Width opposed both ends respectively each Attraction block 14 by absorption trucking department 6,7 in the scope of total length roughly, be adsorbed maintenance.
Finish to remove the absorption of absorption trucking department 6 after the absorption of absorption trucking department 7, the elevating mechanism 11 of absorption trucking department 6 is descended.Absorption trucking department 6 moves to substrate delivery/reception zone P
2, the state when returning to the aforesaid substrate reception prepares to receive next piece substrate 4.
Then, move the slide block 10 of absorption trucking department 7, substrate 4 is transported to floats on the platform 3A.Give not shown conveying robot etc. with substrate 4 handing-over then, and remove the absorption of absorption trucking department 7,, make the slide block 10 of absorption trucking department 7 return to substrate delivery/reception zone P in order to receive next piece substrate 4
3
So just be through with substrate 4 income, check and take out of.
Like this, according to the base board checking device 100 of present embodiment,, carrying substrate 4 successively can floated on platform 1A, 2A, the 3A by absorption trucking department 5,6,7 end that alternately keeps the carrying Width of substrate 4.Carry out a carrying by such maintenance substrate 4 one-sided, become free state by another ends of absorption trucking department 5,6,7 absorption substrate supported 4, so like that substrate 4 is exerted pressure under the situation that can as in the past, not keep both sides to carry.Keep the one-sided of substrate 4 by so only adsorbing, flatly carrying substrate 4, can prevent from the inspection precision of substrate 4 is reduced.
But also the configuration precision that can relax each one-sided trucking department, or switch the carrying direction according to each carrying platform as required.
And, by at substrate delivery/reception zone P
2, P
3Utilize absorption trucking department 5,6 and absorption trucking department 6,7 to adsorb the both ends that keep the carrying Width, in handing-over substrate 4, carry under the situation of state that can be after keeping the location.Can save the trouble that position adjustment etc. the time is carried out in each handing-over thus, can simplify the adjusting mechanism of base board checking device 100, and can improve procuratorial work efficient.
And owing under the situation of the positioning states of keeping substrate 4, it is transported to substrate and takes out of regional P
4So, can give conveying robot substrate 4 correct handing-over.So conveying robot when being inserted into substrate 4 in the box body, can with substrate 4 can not run into box body sidewall mode and under the situation that need not to readjust, substrate 4 is transported in the box body.
The following describes modified embodiment of the present embodiment.
Fig. 5 is the vertical view of summary structure of base board checking device of the variation of expression first embodiment of the present invention.
As shown in Figure 5, the base board checking device 110 of this variation has absorption trucking department 15 (one-sided trucking department), with the absorption trucking department 5,7 of the base board checking device 100 that replaces above-mentioned first embodiment.Be that the center describes with difference below with above-mentioned first embodiment.
The slider guide 9 that absorption trucking department 15 will adsorb trucking department 5 changes the slider guide 16 of the position that extends to the slider guide 9 of adsorbing trucking department 7 into, and replace the slide block 10 of absorption trucking department 5, on slider guide 16, can be provided with movably by two slide block 10A, 10B constituting with spline structure.
And shown in Fig. 2 B, have elevating mechanism 11, lifting base 12, absorption pedestal 13 and Attraction block 14 on the top of slide block 10A, 10B.
That is, be equivalent to each slider guide 9 with the absorption trucking department 5,7 shown in above-mentioned first embodiment and couple together the structure that forms.
According to the base board checking device 110 of this variation,, can carry out identical action by replace the slide block 10 of the absorption trucking department 5,7 of above-mentioned first embodiment respectively with slide block 10A, the 10B of absorption trucking department 15.Therefore possess and the identical action effect of above-mentioned first embodiment.
And, be integrally formed as absorption trucking department 15 owing to will adsorb trucking department 5,7, so can reduce number of components according to this variation.And owing to slide block 10A, 10B can move on the optional position of floating platform 2A side, so have such advantage:, and can easily change the substrate delivery/reception zone P that floats platform 2A even under the situation that the length L of substrate 4 changes, also can easily tackle
2, P
3The position.
[second embodiment]
The base board checking device of second embodiment of the invention is described.
Fig. 6 is the vertical view of summary structure of the base board checking device of expression second embodiment of the present invention.
As shown in Figure 6, the base board checking device 120 of present embodiment has absorption trucking department 17,19 (one-sided trucking department), with the absorption trucking department 5,6 of the base board checking device 100 that replaces above-mentioned first embodiment, and has deleted absorption trucking department 7.Be that the center describes with difference below with above-mentioned first embodiment.
The slider guide 9 that absorption trucking department 19 will adsorb trucking department 6 extends to the substrate that floats platform 3A and takes out of regional P
4, and make substrate 4 float platform 2A and to float between the platform 3A mobile.
By such structure, can be by absorption trucking department 17 carrying substrate 4 and by absorption trucking department 19 carrying substrate 4 in inspection portion 2 and substrate are taken out of the scope of portion 3 in substrate is moved into the scope of portion 1 and inspection portion 2.And, can the carrying scope of absorption trucking department 17,19 for total optional position of floating on the platform 2A on, give absorption trucking department 19 from absorption trucking department 17 with substrate 4 handing-over.That is, can be as required floating floating platform 1A side, floating the delivery position of selecting on platform 3A side or their optional positions such as centre position to float on the platform 2A of platform 2A.
Like this, present embodiment is such example: by with respect to three carrying platforms two one-sided trucking departments being set, realized the structure that the handing-over substrate is carried between each one-sided trucking department.This is a structure example of using minimal one-sided trucking department in the present invention with respect to three carrying platforms.
According to present embodiment, compare the quantity that can reduce one-sided trucking department with first embodiment.
And, in the present embodiment, because the total carrying scopes of floating the roughly total length of platform 2A on the carrying direction of absorption trucking department 17,19, so rotate the end of adsorbed maintenance about can be in inspection portion 2.Therefore, even for example hinder in the inspection of checking, for example make as shown in Figure 1 and check that a 2b is under the carrying Width scan condition of substrate 4 at Attraction block 14, when checking that a 2b and absorption have kept the Attraction block 14 of a side of substrate 4 to produce interference, take over maintenance substrate 4 by the Attraction block 14 of opposition side, also can carry out inspection in each end.
[the 3rd embodiment]
The base board checking device of third embodiment of the invention is described.
Fig. 7 is the vertical view of summary structure of the base board checking device of expression the 3rd embodiment of the present invention.
As shown in Figure 7, the base board checking device 130 of present embodiment has a plurality of inspection 2a of portion, 2b, inspection portion 2 with the base board checking device 100 that replaces above-mentioned first embodiment, and have a plurality of absorption trucking department 6a, 6b (one-sided trucking department) accordingly, and between each 2a of inspection portion, 2b, increased absorption trucking department 70 (one-sided trucking department) with replacement absorption trucking department 6.Be that the center describes with difference below with above-mentioned first embodiment.
The 2a of inspection portion, 2b are used to carry out inspections such as pattern inspection, check, macro check, though do not illustrate especially, have different inspection parts corresponding to various inspections.The 2a of inspection portion has the platform of floating 2A and absorption trucking department 6a, and the 2b of inspection portion has the platform of floating 2A and absorption trucking department 6b.
And move between portion 1 and the 2a of inspection portion at substrate, dispose absorption trucking department 5 with the position relation identical with first embodiment.
And the slider guide 90 of absorption trucking department 70 extends to the adjacent inspection area P of the 2a of inspection portion, 2b
3With substrate delivery/reception zone P
2Pars intermedia separately.In the structure of absorption trucking department 70, have only the length difference of slider guide 90, all the other structures are identical with absorption trucking department 7.
And between 2b of inspection portion and board carrying portion 3, dispose absorption trucking department 7 with the position relation identical with first embodiment.
By this structure, the same with first embodiment, can carry out substrate 4 handing-over of location to absorption trucking department 6a with move into portion 1 at substrate.And, after the 2a of inspection portion has carried out checking, can be between absorption trucking department 6a and absorption trucking department 70, at the total inspection area P that floats platform 2A of carrying scope
3In, give absorption trucking department 70 with substrate 4 handing-over.
The substrate 4 that is adsorbed trucking department 70 adsorbed maintenances similarly is moved to the substrate delivery/reception zone P of the adjacent 2b of inspection portion
2, and substrate delivery/reception can be given absorption trucking department 6b.
And will be transported to the substrate delivery/reception zone P in downstream by the be through with substrate 4 checked of the 2b of inspection portion by absorption trucking department 6a
3, at this substrate delivery/reception zone P
3Substrate 4 handing-over can be given absorption trucking department 7, and the absorption trucking department 7 of taking out of portion 3 by substrate is transported to substrate with it and takes out of regional P
4, pass through not shown conveying robot then with board carrying auto levelizer outside.
Present embodiment is the example that is provided with under the situation of a plurality of inspection portion.Like this, in the present invention, can move into portion 1 and substrate at substrate and take out of and set up a plurality of inspection portion 2 between the portion 3.
Therefore, even it is short respectively to carry the transport distance of platform, one-sided trucking department, also can prolong whole transport distance by they are adjacent to line up.
[the 4th embodiment]
The base board checking device of four embodiment of the invention is described.
Fig. 8 is the vertical view of summary structure of the base board checking device of expression the 4th embodiment of the present invention.
As shown in Figure 8, the base board checking device 140 of present embodiment has rotter table 1B, 2B, 3B (carrying platform), floats platform 1A, 2A, 3A with the base board checking device 100 that replaces above-mentioned first embodiment.Be that the center describes with difference below with above-mentioned first embodiment.
Rotter table 1B, 2B, 3B be when overlooking respectively with the table top of the rectangular shape that floats platform 1A, 2A, the identical size of 3A on, with appropriate intervals arrange a plurality of at constant altitude along continuous straight runs carrying substrate 4 carrying roller 30 and constitute.
As carrying roller 30, for example can adopt to be supported in the surface level of rotter table 1B, 2B, 3B the cylinder roller that can rotate freely to 360 degree directions or spherical roller etc.
According to this structure, except substrate 4 being carried by roller this point on the carrying roller 30, can carry out and the identical action of above-mentioned first embodiment, thereby have and the identical action effect of above-mentioned first embodiment.
And, though the example of the situation by being adjacent to have disposed a plurality of carrying platforms is illustrated in the above description, but also can constitute, on the carrying direction, extend a carrying platform is set, with the direction of carrying direction quadrature on any side dispose a plurality of one-sided trucking departments, and the handing-over substrate is carried between these a plurality of one-sided trucking departments.For example in the respective embodiments described above, variation, also can constitute to make and float the carrying platform that platform 1A, 2A, 3A or rotter table 1B, 2B, 3B etc. are deformed into one respectively.
At this moment, owing to can on the carrying direction, will determine that the one-sided trucking department of board carrying precision is divided into a plurality of, so for example by partly cutting apart one-sided trucking department by the inspection of each requirement carrying precision, compare with a situation of carrying out the one-sided trucking department of high precision carrying in carrying overall pathway length scope is set thus, can constitute simple and inexpensive structure.
And in the above description, be divided under a plurality of situations at the carrying platform, the example of situation that the delivery position by substrate is positioned at an end side of adjacent carrying platform is illustrated.But under the enough little situation of difference in height of carrying platform, also can be shown in Fig. 5,6, constitute and on adjacent carrying platform two sides' of substrate leap position, join substrate.
And in the above description, be arranged at and on the delivery position of substrate, be illustrated across the opposed locational example of carrying platform with a plurality of one-sided trucking departments.As long as but can join substrate, also can with a plurality of one-sided trucking departments the side of the equidirectional side of carrying platform be arranged on can with the opposed position of direction that is orthogonal to the carrying direction on.
In addition in the above description, remove on the platform that shakes, also can as required certain carrying platform, one-sided trucking department are configured in and remove on the platform that shakes though preferably inspection portion 2 is remained on.According to the present invention,, easy advantage is set so it has device because this platform that shakes that removes can be provided with by each carrying platform, each one-sided trucking department respectively.
And,, just can in technological thought scope of the present invention, appropriate combination implement as long as can realize technically for each textural element of the respective embodiments described above, variation.
Preferred implementation of the present invention more than has been described, but has the invention is not restricted to these embodiment.Can in the scope that does not break away from purport of the present invention, carry out increase, omission, displacement and other changes of structure.The invention is not restricted to above-mentioned explanation, and only limit by the scope of claims.
Claims (4)
1. base board checking device, this base board checking device has:
Be used to carry carrying platform as the laminal substrate of subject; And
A plurality of one-sided trucking departments, they be configured in the carrying platform, with the direction of carrying direction quadrature in any side, their keep the end of substrate, and substrate is applied carrying capacity,
This base board checking device carries out the carrying of substrate by join substrate successively between a plurality of one-sided trucking departments.
2. base board checking device according to claim 1 is characterized in that,
On the carrying direction, be adjacent to dispose a plurality of carrying platforms,
A plurality of one-sided trucking departments are configured to, on the adjacent position of each carrying platform, be arranged at substrate under the state on either party's the end of adjacent carrying platform, an one-sided trucking department in a plurality of one-sided trucking departments can be given substrate delivery/reception another the one-sided trucking department in a plurality of one-sided trucking departments.
3. base board checking device according to claim 2 is characterized in that,
An one-sided trucking department in a plurality of one-sided trucking departments and another the one-sided trucking department in a plurality of one-sided trucking department be located on the delivery position of substrate on carrying platform opposed position.
4. according to each the described base board checking device in the claim 1 to 3, it is characterized in that,
The carrying platform floats platform and constitutes by spray the gas that makes substrate floating by gas.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2006245739A JP5265099B2 (en) | 2006-09-11 | 2006-09-11 | Board inspection equipment |
| JP2006245739 | 2006-09-11 | ||
| JP2006-245739 | 2006-09-11 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN101144920A true CN101144920A (en) | 2008-03-19 |
| CN101144920B CN101144920B (en) | 2011-11-09 |
Family
ID=39207522
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2007101492516A Expired - Fee Related CN101144920B (en) | 2006-09-11 | 2007-09-07 | Substrate detecting device |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP5265099B2 (en) |
| KR (1) | KR101424017B1 (en) |
| CN (1) | CN101144920B (en) |
| TW (1) | TWI416095B (en) |
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN102033067A (en) * | 2009-09-24 | 2011-04-27 | 株式会社日立高新技术 | Inspection apparatus for glass substrate |
| WO2012162914A1 (en) * | 2011-06-03 | 2012-12-06 | 深圳市华星光电技术有限公司 | Substrate transfer system and substrate transfer method |
| CN104787579A (en) * | 2014-01-22 | 2015-07-22 | 由田新技股份有限公司 | Detection device |
| CN108974943A (en) * | 2013-02-26 | 2018-12-11 | 株式会社Ihi | Handling device |
| CN109926792A (en) * | 2019-04-25 | 2019-06-25 | 大族激光科技产业集团股份有限公司 | A kind of laser cutting microscope carrier |
| CN110267893A (en) * | 2017-02-09 | 2019-09-20 | 玻璃技术公司 | The system and correlation technique of optical characteristics for on-line measurement glass plate |
| CN112595722A (en) * | 2021-03-02 | 2021-04-02 | 苏州天准科技股份有限公司 | Sectional type air flotation platform, platform module and detection equipment |
| CN113330273A (en) * | 2019-01-24 | 2021-08-31 | 株式会社高迎科技 | Transfer mechanism for inspection device, and method for inspecting object using same |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5317618B2 (en) * | 2008-10-06 | 2013-10-16 | 株式会社日立ハイテクノロジーズ | Display panel module assembly apparatus and substrate transfer apparatus |
| JP5683333B2 (en) * | 2011-03-10 | 2015-03-11 | 東レエンジニアリング株式会社 | Substrate inspection apparatus and method |
| KR102140869B1 (en) * | 2018-09-14 | 2020-08-03 | 양승현 | PCB board conveying device |
Family Cites Families (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2000009661A (en) * | 1998-06-26 | 2000-01-14 | Ntn Corp | Flat panel inspection device |
| IL131282A (en) * | 1999-08-05 | 2009-02-11 | Orbotech Ltd | Apparatus and methods for inspection of objects |
| JP2005010221A (en) * | 2003-06-16 | 2005-01-13 | Kowa:Kk | Glass substrate heat treatment equipment |
| JP4426276B2 (en) * | 2003-10-06 | 2010-03-03 | 住友重機械工業株式会社 | Conveying device, coating system, and inspection system |
| KR101023729B1 (en) * | 2004-06-30 | 2011-03-25 | 엘지디스플레이 주식회사 | Shuttle and conveying method for conveying large substrates |
| KR20060007187A (en) * | 2004-07-19 | 2006-01-24 | 삼성전자주식회사 | Substrate Processing Method and Processing Apparatus |
| TW200614412A (en) * | 2004-09-27 | 2006-05-01 | Olympus Corp | Macroscopic inspection apparatus and macroscopic inspection method |
| JP4579670B2 (en) * | 2004-12-16 | 2010-11-10 | 芝浦メカトロニクス株式会社 | Parts crimping apparatus and crimping method |
| JP4378301B2 (en) * | 2005-02-28 | 2009-12-02 | 東京エレクトロン株式会社 | Substrate processing apparatus, substrate processing method, and substrate processing program |
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2006
- 2006-09-11 JP JP2006245739A patent/JP5265099B2/en not_active Expired - Fee Related
-
2007
- 2007-09-07 CN CN2007101492516A patent/CN101144920B/en not_active Expired - Fee Related
- 2007-09-07 TW TW096133454A patent/TWI416095B/en not_active IP Right Cessation
- 2007-09-10 KR KR1020070091423A patent/KR101424017B1/en not_active Expired - Fee Related
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN102033067A (en) * | 2009-09-24 | 2011-04-27 | 株式会社日立高新技术 | Inspection apparatus for glass substrate |
| WO2012162914A1 (en) * | 2011-06-03 | 2012-12-06 | 深圳市华星光电技术有限公司 | Substrate transfer system and substrate transfer method |
| US9087865B2 (en) | 2011-06-03 | 2015-07-21 | Shenzhen China Star Optoelectronics Technology Co., Ltd. | Substrate transferring system and substrate transferring method |
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| CN110267893A (en) * | 2017-02-09 | 2019-09-20 | 玻璃技术公司 | The system and correlation technique of optical characteristics for on-line measurement glass plate |
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| CN109926792B (en) * | 2019-04-25 | 2021-04-06 | 大族激光科技产业集团股份有限公司 | Laser cutting microscope carrier |
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Also Published As
| Publication number | Publication date |
|---|---|
| TW200819734A (en) | 2008-05-01 |
| TWI416095B (en) | 2013-11-21 |
| KR101424017B1 (en) | 2014-07-28 |
| JP2008063130A (en) | 2008-03-21 |
| JP5265099B2 (en) | 2013-08-14 |
| CN101144920B (en) | 2011-11-09 |
| KR20080023647A (en) | 2008-03-14 |
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