CN101241125B - Piezoelectric sensor for liquid phase measuring and encapsulation method - Google Patents
Piezoelectric sensor for liquid phase measuring and encapsulation method Download PDFInfo
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- CN101241125B CN101241125B CN 200810065779 CN200810065779A CN101241125B CN 101241125 B CN101241125 B CN 101241125B CN 200810065779 CN200810065779 CN 200810065779 CN 200810065779 A CN200810065779 A CN 200810065779A CN 101241125 B CN101241125 B CN 101241125B
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Abstract
The invention provides a liquid-phase measurement piezoelectric sensor, wherein the encapsulation of a structure and the electrical connection of the structure are integrated. The piezoelectric sensor comprises an insulating plate with the surface thereof provided with a metal film circuit, piezoelectric sensitive members and a circuit module. The invention is characterized in that the insulating plate with one surface thereof provided with a metal film circuit is connected to at least one piezoelectric sensitive member. The edge of the piezoelectric sensitive member is sealed and fixed to the bottom of a through hole on the insulating plate, so that only the working side of the piezoelectric sensitive member is in contact with the liquid to be measured. The metal electrode of the piezoelectric sensitive member is connected with the circuit module through the metal film circuit on the insulating plate. The circuit module comprises a drive part, a measurement part, a calculation part and a display circuit, wherein the four parts are integrated as a whole on the insulating plate for being encapsulated. The sensor has the advantages of simple structure, convenient use, low cost and high reliability. Meanwhile, the sensor can be made into a disposable sensor or a sensor array for being applied to various liquid phase measurements, including medical diagnose, biochemistry molecule detecting and environment detecting fields.
Description
Technical field
The invention belongs to electronic measuring technology field, particularly a kind of piezoelectric sensor and method for packing that is suitable for liquid phase measuring.
Background technology
Piezoelectric sensor based on QCM (Quartz Crystal Microbalance) (QCM, Quartz crystal microbalance) principle has been widely used in the biological chemistry measurement of various gas phases and liquid phase.The piezoelectric sensitivity device of qcm sensor is usually cut quartz crystal slice by AT and is consisted of with the one group of electrode that is distributed in the crystal wafer two sides.Because the piezoelectric effect of quartz crystal applies alternating voltage and can produce the highdensity plywood ripple that through-thickness is propagated at crystals on the electrode.When this Sensitive Apparatus surface contacted with liquid or adsorbs Tiny Mass, the oscillation frequency of shearing wave or amplitude can change in the device, thereby can reflect fluid to be measured or adsorption qualitative change.
Yet there is larger difficulty in the piezoelectric sensor of traditional structure in liquid phase measuring.This mainly is to be caused by following two reasons:
1, liquid phase measuring needs piezoelectric sensitivity device single face to contact with fluid to be measured, namely needs Sensitive Apparatus is encapsulated in liquid phase detection cell or the probe to contact with liquid with the inoperative surface of avoiding device.Here the surface that contacts with fluid to be measured of piezoelectric sensitivity device is called working surface, and the surface that does not contact with fluid to be measured is called the inoperative surface.Two distribution of electrodes of the piezoelectric sensitivity device of traditional structure are in the two sides of crystal wafer, and the lead-in wire of the electrode that contacts with liquid produces with the encapsulation of crystal wafer and conflicts, and cause that crystal package is very difficult and cost is higher.
2, the liquid-packing method of the piezoelectric sensor of report mainly contains bonding and the pressure-tight mode of rubber ring at present.Dual mode all needs piezoelectric crystal plate is installed to a bottom, liquid detecting pond of being made by insulating material, is connected with external circuit with wire or the bus electrode with the piezoelectric sensitivity device simultaneously.Because in these method for packing, the insulating material of implementation structure encapsulation is separate with wire or the bus of realizing electrical connection, the two is separate with the interlock circuit module of piezoelectric sensor again simultaneously, causes the encapsulating structure of piezoelectric sensor complicated, and cost is high and the electrical connection reliability is low.These deficiencies are particularly outstanding when the multicrystal piezoelectric sensor array of structure.
For solving piezoelectric sensor liquid phase measuring problem, in the design that the piezoelectric sensitivity device that some are new and method for packing are applied to sensor, for example there is report to adopt at crystal on side face evaporation metal film crystal working surface electrode is guided to the mode on inoperative surface, the mode that adopts at two electrodes of piezoelectric crystal single face evaporation is also arranged.But these new device architectures all can not solve the piezoelectric sensor encapsulation difficulty greatly and the high problem of cost fully.
Summary of the invention
The object of the invention is to overcome the deficiency of existing piezoelectric sensor liquid phase measuring, propose a kind of structure set encapsulation and be electrically connected novel sensor and the method for packing that is integrated.As required, the interlock circuit module of the piezoelectric sensor that the present invention proposes comprises that driving and metering circuit, calculating, demonstration and memory circuit etc. can directly be integrated into the insulcrete for encapsulation.Sensor and method for packing that the present invention proposes are not only simple in structure, easy to use, and cost is low, and reliability is high.Device can also make disposable sensor or sensor array is applied in the various liquid phase measurings, comprises the fields such as medical diagnosis, biochemical molecule mensuration and environment pollution detection.
The technical scheme that the present invention proposes comprises:
1, a kind of piezoelectric sensor and method for packing for liquid phase measuring is characterized in that the insulcrete that adopts a surface to have the adhesion metal film links to each other with at least one piezoelectric sensitivity device, realizes integrated construction packages and electrical connection.Wherein the via bottoms that is fixed on the insulcrete of the edge seal of piezoelectric sensitivity device contacts with fluid to be measured to realize piezoelectric sensitivity device single face, and the metal electrode of piezoelectric sensitivity device then is connected with driving or metering circuit by the metal film cabling on the insulcrete.Here, the fixing mode of piezoelectric sensitivity device sealing comprises bonding, rubber ring pressure seal and other encapsulating method.
2, the insulcrete in the piezoelectric sensor of the present invention's proposition is made by the insulating material with excellent machinability and corrosion resistant single component or composite insulating material, comprises plastics, nylon or resin etc.The adhesion metal film then is made of such as copper by the metal material of thickness less than the good conductivity of 0.5mm usually, adopt plating, evaporation, pressing, the method such as bonding to be fixed in described insulcrete surface or through-hole wall, and to adopt chemical corrosion or alternate manner to be processed into flat shape and the size of designing requirement.As required, the direct interlock circuit module of design and installation piezoelectric sensor on the insulcrete comprises driving various circuit such as measuring, calculate demonstration.Owing to can realize the construction packages of piezoelectric sensor, electrical connection and interlock circuit module integrated, the reliability of sensor and other performance improve greatly.
3, the piezoelectric sensitivity device in the piezoelectric sensor of the present invention's proposition comprises a metal electrode that has certain tangential piezoelectric crystal plate and be distributed in crystal wafer single face or two sides.Wherein metal electrode is connected with external drive or metering circuit, be used for exciting the shearing sound wave of piezoelectric crystal plate, and piezoelectric crystal plate is made by the piezoelectric crystal material of any support thickness shear wave mode, comprises the piezoelectric of quartz, lithium niobate, lithium tantalate and gallium lanthanum row etc.
4, normally center thickness is at the crystal microchip of 0.01mm to circle, rectangle or other any shape of 2mm for the piezoelectric crystal plate in the piezoelectric sensor of the present invention's proposition, and its section configuration has biplane, biconvex and flat-various structures such as convex surface.Crystalline electrode is that gold, silver or other any metal material that is not easy to oxidation and corrosion are made.
5, the through-hole diameter on the insulcrete in the piezoelectric sensor that proposes of the present invention is less than the crystal wafer diameter of piezoelectric sensitivity device, and greater than the diameter of piezoelectric sensitivity device surface electrode.Fix (as bonding) during to the bottom of the through hole of insulcrete when the piezoelectric sensitivity device, point of fixity keeps relative larger distance with the electrode of crystal, the impact of not fixed with the performance of assurance piezoelectric sensor.
6, the electrode of the piezoelectric sensitivity device in the piezoelectric sensor of the present invention's proposition directly bonds on metal film corresponding to insulcrete by conducting resinl, or bonds on metal film corresponding to insulcrete by one section metal short-term or metal short-movie.Because in the existing circuit trace of making according to design of insulcrete, the electrode of piezoelectric sensitivity device can be connected with external circuit easily.Because the thickness of adhesion metal film is very little, can not produce to the encapsulation of crystal any adverse effect simultaneously.
7, the method for packing of the present invention's proposition not only can be used for the encapsulation of single piezoelectric sensor, also can be advantageously used in the encapsulation of two and two above piezoelectric sensor arrays.In this case, on larger in advance insulcrete wiring and that have a plurality of through holes, the piezoelectric sensitivity device is fixed (as bonding) to the bottom of each through hole with resin, being connected of the metal film on realizing piezoelectric sensitivity device electrode and be attached to insulcrete with conducting resinl.This piezoelectric sensor array can be realized the signal compensation of sensor, detects when also can realize the same index of a plurality of samples or detects when a plurality of index of same sample.
8, the insulcrete with adhesion metal film in the piezoelectric sensor of the present invention's proposition comprises the printed circuit board (PCB) of various materials, such as glass or flexible printed circuit board etc.Can adopt the known method Design and manufacture to have the printed circuit board (PCB) of through hole and special metal film cabling, the piezoelectric sensitivity device is installed on the liquid detecting pond that can directly consist of sensor after the via bottoms of printed circuit board (PCB).In some application such as biomolecule are measured, can be on printed circuit board (PCB) evaporation or apply the material modified biocompatibility that improves the PCB detecting pond such as Parylene.
Because the printed circuit board (PCB) daily use is very extensive, have very ripe design software and manufacturing process, cost is very low, and the present invention can make disposable liquid phase piezoelectric sensor, enlarge range of application, also can be used as can duplicate measurements sensor use as online viscosity sensor etc.
In the practical application, the piezoelectric sensor that the present invention proposes need to connect piezoelectric sensitivity device and external drive or testing circuit by the adhesion metal film on the insulcrete, and consist of the piezoelectric sensor measuring system with data acquisition and display circuit part, reflect the variation of detected object by the variation of measuring piezoelectric sensitivity device resonant parameter such as frequency, amplitude and phase place.In addition, all circuit modules of measuring system also can be integrated on the insulcrete, between piezoelectric sensitivity device and the circuit module and the connection between the different circuit module can realize by adhesion metal film on the insulcrete.This integrated piezoelectric sensor can be installed in the liquid measure system of various complexity, such as on-line measurement system, flow injection system etc. as a standard module.
When the piezoelectric sensor of the present invention's proposition was used for biomolecule detection, step and method comprised:
1. the surface cure biological or chemical sensitive membrane that contacts with liquid at sensor is in order to detect different samples.
2. the record sensor is at airborne output parameter such as frequency or the amplitude etc. of drying.
3. add a certain amount of sample in the liquid detecting pond, if sample is positive, the resonant parameter of sensor output such as oscillation frequency or amplitude can change.The output of record sensor can be determined the test result of sample.
4. question response finishes, and the output parameter of sensor no longer changes, with the surface of deionized water cleaning sensor.Then the aerial output parameter of survey sensor after the sensor drying.Relatively aerial parameter changes before and after the sensor response, further the demonstration test result.This step also can make separately to measure sample with the step that (3) are described.
Description of drawings
Below in conjunction with accompanying drawing invention is described in further detail.
Accompanying drawing 2 is for having the piezoelectric sensitivity device structural representation of single-side electrode lead-in wire;
Accompanying drawing 3 is the encapsulating structure front schematic view of the piezoelectric sensor of the present invention's proposition;
Accompanying drawing 4 is the encapsulating structure sectional schematic diagram of Fig. 3;
Accompanying drawing 5 is the structural representation of the piezoelectric sensor of the integrated interlock circuit module of the present invention's proposition;
Accompanying drawing 7 is the second encapsulating structure schematic diagram of the piezoelectric sensor with single-side electrode lead-in wire of the present invention's proposition;
Accompanying drawing 9 is the encapsulating structure schematic diagram of the piezoelectric sensor array Application Example of the present invention's proposition
Front and section structure schematic diagram that the piezoelectric sensor that accompanying drawing 3 and accompanying drawing 4 propose for the present invention encapsulates.As shown in the figure, the adhesion metal film 5 and 8 that through hole is arranged on the insulcrete 6 and have design shape and size.Piezoelectric crystal plate 1 usefulness resin glue bonds to the via bottoms of insulcrete 6, the crystalline electrode 3 that contacts with fluid to be measured directly links to each other with adhesion metal film 5 by conducting resinl, and the electrode 2 on the inoperative surface that contacts with air passes through wire or conductive metal sheet 7 and links to each other with metal film 8 on the insulcrete.
Accompanying drawing 5 is the structural representation of the piezoelectric sensor of the integrated interlock circuit module of the present invention's proposition.Be designed with the relevant circuit module 12 of piezoelectric sensor on the insulcrete 9 among the figure, comprise all and part driving, measurement, calculating, demonstration and memory circuit.The electrode of piezoelectric sensor links to each other with 11 circuit modules direct and on the insulcrete that coexists by the metal film 10 that adheres on the insulcrete.
The piezoelectric sensor array example structure schematic diagram that accompanying drawing 8 proposes for the present invention.As seen, 4 piezoelectric sensitivity devices are installed on the insulcrete 22 among the figure, adhesion metal film cabling 24 corresponding on the electrode of each device and the insulcrete 22 links to each other, and is unified edge line bank 23 places that guide to insulcrete 22.In the practical application, this piezoelectric sensor array is connected with outside gated sweep circuit, crystal-driven circuit by line bank 23, under the control of single chip circuit, can finish the measurement of each piezoelectric sensor in the pair array.
The piezoelectric sensor array application mode embodiment that accompanying drawing 9 proposes for the present invention.As shown in the figure, the insulcrete 26 that is fixed with two piezoelectric sensitivity devices is installed on the bottom in a flow injection pond 25.One of them piezoelectric sensitivity device surface fixed biologically or chemical-sensitive film, another piezoelectric sensitivity device as a reference, any sensitive membrane is not fixed on the surface.Sample enters flow injection pond 25 and flows out from outlet 28 from injection port 27.Contain in the sample measured matter can with piezoelectric sensor surface-sensitive film reaction, cause the variation of piezoelectric sensor resonant parameter such as frequency, thereby can realize measuring continuously in real time of sample.
Embodiment
Embodiment 1: the sensor and the method for packing that use the present invention to propose, can finish the piezoelectric sensitivity device single face encapsulation to any electrode structure.Fig. 3 shows the method for packing to the piezoelectric sensor with traditional circular configuration, and Fig. 5 and Fig. 6 then show two kinds to the encapsulation of piezoelectric sensor with single face electrode leading structure.
Embodiment 2: the sensor and the method for packing that use the present invention to propose, can make disposable single piezoelectric sensor.As shown in Figure 3, adopt traditional circular piezoelectric quartz crystal Sensitive Apparatus, centre frequency is 5MHz, and the strand DNA on Surface of Quartz crystal electrode adopts silver electrode.Insulcrete adopts the printed circuit board (PCB) that contains the glass material, adopts known processes to go out through hole and metallic copper cabling on the printed circuit board (PCB).Quartz crystal is adhered to the via bottoms of printed circuit board (PCB) with resin glue, its electrode is introduced to the edge of printed circuit board (PCB) by the metal routing on the printed circuit board (PCB).In the practical application, the surface of quartz crystal Sensitive Apparatus is fixing sensitive membrane in advance, then will be bonded with the printed circuit board (PCB) of quartz crystal and corresponding circuit and connect, and adds sample in the liquid detecting pond that the through hole of printed circuit board (PCB) forms, and measures.After test is finished, take off the sensor and the printed circuit board (PCB) that use and put into special-purpose garbage reclaiming barrel, can take out the new printed circuit board (PCB) that quartz crystal is arranged of a slice next time when measuring and use.
Embodiment 3: the sensor and the method for packing that use the present invention to propose, can make disposable hyperchannel piezoelectric sensor array.As shown in Figure 8, adopt traditional circular quartz crystal Sensitive Apparatus, centre frequency is 5MHz, and surface electrode adopts silver electrode.Insulcrete adopts the printed circuit board (PCB) that contains the glass material, adopts known processes to go out a plurality of through holes and metallic copper cabling on it.Quartz crystal is adhered to the via bottoms of printed circuit board (PCB) with resin glue, its electrode is guided to the edge of printed circuit board (PCB) by the metal routing on the printed circuit board (PCB).In the practical application, a Sensitive Apparatus is as the reference crystal in the piezoelectric sensor array, and any sensitive membrane is not fixed on the surface, and identical or different sensitive membrane is fixed on the surface of other Sensitive Apparatus in advance.During use sensor array is connected with corresponding circuit, in the liquid detecting pond that the through hole of printed circuit board (PCB) forms, add sample.Depend on the fixing sensitive membrane in Sensitive Apparatus surface, this sensor array can detect the same measured matter in the different samples, also can detect the different measured matters in the same sample.
Embodiment 4: the specific bond of antigen and antibody has been widely used in the every field such as medical diagnosis, food hygiene detection and environmental pollution monitoring.Although the kit method that extensively adopts at present has advantages of accuracy height and good reproducibility, also exists detection time long, the deficiency that complicated operation and cost are higher.The sensor and the method for packing that use the present invention to propose can be made disposable Piezoelectric immunosensor array.Adopt tradition silver-plated piezoelectric quartz crystal Sensitive Apparatus and printed circuit board (PCB), make hyperchannel such as 16 or 24 passage piezoelectric sensor arrays.At each strand DNA on Surface of Quartz crystal immobilized antigen or antibody, adopt the measuring method identical with embodiment 3, just can make the Piezoelectric immunosensor array of measuring simultaneously a plurality of samples.
Embodiment 5: the sensor and the method for packing that use the present invention to propose, can make the piezoelectric sensor systems of continuous coverage.As shown in Figure 9, adopt printed circuit board (PCB) two piezoelectric quartz crystal Sensitive Apparatuses of encapsulation and being installed in the flow detection pond with injection port and outlet.Here detection cell is made by material such as the Polyvinylchloride of good biocompatibility, and its injection port is connected with the micro-sampling pump, realizes sample continuous flow.The piezoelectric crystal that the surface is fixed with sensitive membrane is connected with outer detecting circuit, and the variation of measuring the output signal of piezoelectric sensor can be measured tested molecule in the sample that flows or the variation of material concentration.
Claims (10)
1. a piezoelectric sensor that is used for liquid phase measuring is characterized in that, the insulcrete that adopts a surface to have the adhesion metal film links to each other with at least one piezoelectric sensitivity device, realizes integrated construction packages and electrical connection; Wherein, the edge seal of described piezoelectric sensitivity device is fixed to the via bottoms on the insulcrete, contacts with fluid to be measured to realize piezoelectric sensitivity device single face; The metal electrode of described piezoelectric sensitivity device then is connected with driving or metering circuit by the adhesion metal film cabling on the insulcrete.
2. piezoelectric sensor according to claim 1 is characterized in that, described piezoelectric sensitivity device comprises a metal electrode that has certain tangential piezoelectric crystal plate and be distributed in crystal wafer single face or two sides; Wherein, described metal electrode is connected with external drive or metering circuit, is used for exciting the shearing sound wave of piezoelectric crystal plate.
3. piezoelectric sensor according to claim 1 is characterized in that, described insulcrete is made by insulating material or the composite insulating material of single component.
4. piezoelectric sensor according to claim 1, it is characterized in that, adhesion metal film on the described insulcrete at first adopts plating, evaporation, pressing, adhering method to be fixed on described insulcrete surface or the through-hole wall, then adopts the processing mode of machinery or chemical corrosion to make its flat shape that becomes designing requirement and size.
5. piezoelectric sensor according to claim 1 is characterized in that, described surface has the interlock circuit module that on the insulcrete of adhesion metal film piezoelectric sensor can be installed directly, comprises driving the metering circuit module and calculating display circuit module.
6. piezoelectric sensor according to claim 1 is characterized in that, the through-hole diameter on the described insulcrete is less than the crystal wafer diameter of piezoelectric sensitivity device, greater than the diameter of piezoelectric sensitivity device surface electrode.
7. piezoelectric sensor according to claim 1, it is characterized in that, the metal electrode of described piezoelectric sensitivity device directly bonds on the metal film corresponding on the described insulcrete by conducting resinl, or bonds on the metal film corresponding on the described insulcrete by one section metal short-term or metal short-movie.
8. the method for packing of piezoelectric sensor according to claim 1 is characterized in that, described method for packing comprises:
A) single piezoelectric sensitivity device is packaged on the insulcrete with adhesion metal film;
B) two or more piezoelectric sensitivity devices are packaged on the insulcrete with adhesion metal film, and the same index that is used for a plurality of samples detects or a plurality of indexs of same sample detect.
9. piezoelectric sensor according to claim 1 is characterized in that, described insulcrete with adhesion metal film comprises the printed circuit board (PCB) of various materials.
10. piezoelectric sensor according to claim 9 is characterized in that, on the described printed circuit board (PCB) evaporation or apply material modified, to improve the biocompatibility in PCB detecting pond.
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| CN 200810065779 CN101241125B (en) | 2008-03-10 | 2008-03-10 | Piezoelectric sensor for liquid phase measuring and encapsulation method |
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| CN102466489A (en) * | 2010-11-15 | 2012-05-23 | 中国科学院微电子研究所 | Multi-piezoelectric sensor lattice system and multi-piezoelectric sensor array system |
| CN102980826A (en) * | 2011-09-03 | 2013-03-20 | 崔学晨 | Quartz crystal microbalance detection cell |
| CN102692513A (en) * | 2012-06-26 | 2012-09-26 | 长沙理工大学 | Piezoelectric immunosensing chip and device for detecting oncogene C-myc recombinant protein |
| CN106253875B (en) * | 2016-10-09 | 2019-12-27 | 湖南农业大学 | High-flux piezoelectric resonance chip and measuring system |
| US20200025601A1 (en) * | 2017-02-13 | 2020-01-23 | Advanced Wave Sensors, S.L. | Measuring cell |
| CN108878251B (en) * | 2018-06-20 | 2022-01-25 | 中国科学院高能物理研究所 | Microchannel plate assembly |
| IT201900006274A1 (en) * | 2019-04-23 | 2020-10-23 | Nuovo Pignone Tecnologie Srl | Arrangement with sensor and method for measuring fouling or erosion or corrosion as well as machine monitoring fouling or erosion or corrosion |
| CN110174704B (en) * | 2019-06-24 | 2023-06-16 | 青岛科技大学 | Ocean electric field sensor based on TRIZ theory |
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| US6321588B1 (en) * | 1998-09-11 | 2001-11-27 | Femtometrics, Inc. | Chemical sensor array |
| CN1099036C (en) * | 1999-11-10 | 2003-01-15 | 重庆西南医院 | Combination target gene automatic tester |
| IL138229A (en) * | 2000-09-04 | 2005-03-20 | Yissum Res Dev Co | Method and system for detecting nucleic acids |
| JP2003240695A (en) * | 2002-02-19 | 2003-08-27 | Canon Inc | Reflection diffusion structure for micro mass measuring device |
| CN2556645Y (en) * | 2002-04-19 | 2003-06-18 | 中国嘉陵工业股份有限公司（集团） | Piezoelectric chip packaging device for biological detector |
| CN2579901Y (en) * | 2002-06-19 | 2003-10-15 | 重庆西南医院 | Peptide nucleic acid piezoelectric gene sensor chip |
| CN100495008C (en) * | 2003-06-18 | 2009-06-03 | 中山市泰威技术开发有限公司 | Piezo-electric acoustic wave sensor passive array and its biological chip |
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