CN112191284A - Laboratory analysis platform on microfluidic ultrasonic electrochemical chip - Google Patents

Abstract

The invention discloses a laboratory analysis platform on a microfluidic ultrasonic electrochemical chip, which comprises: the micro-flow channel assembly is arranged on the micro-flow channel assembly, a cavity with an open top end and an open bottom end is formed by the wall of the through hole, the cavity is communicated with the outside of a laboratory analysis platform on the micro-flow ultrasonic electrochemical chip, so that liquid to be detected can be discharged into and out of the cavity, and the liquid to be detected in the cavity can be contacted with three electrodes of the electrochemical sensor chip and a vibration area of the micro-ultrasonic device. The invention realizes the combined use of the micro ultrasonic device and the electrochemical sensor chip, effectively improves the electrochemical sensing sensitivity, and the liquid inlet and the liquid outlet are opened in the vertical direction of the micro flow channel component, thereby being applicable to the design of a laboratory on the micro flow channel with small thickness.

Description

Microfluidic Ultrasonic Electrochemical Lab-on-a-Chip Analysis Platform

technical field

The invention belongs to the technical field of microfluidic electrochemical analysis, and in particular relates to a microfluidic ultrasonic electrochemical on-chip laboratory analysis platform.

Background technique

Microfluidic lab on a chip integrates basic operation units such as micro sample preparation, reaction, separation, detection, waste liquid recovery, etc. into one chip to realize automatic analysis and avoid potential cross-contamination and artificial The influence of operating errors is widely used in the fields of chemical, biological, and medical analysis. In the microfluidic lab-on-a-chip, the liquid flows in the microfluidic channel, and the size of the microfluidic channel perpendicular to the liquid flow direction usually needs to be less than 1 mm.

Electrochemical sensor chips (working, contrast, and reference electrodes on the same substrate) have the advantages of small size, low energy consumption, low price, fast analysis speed, good selectivity, wide measurement range, and easy integration. The microfluidic on-chip laboratory of the sensor chip (microfluidic electrochemical on-chip laboratory, as shown in Figure 1) is widely used in the fields of in situ rapid detection of water quality and food safety, and diagnosis of human diseases.

However, factors such as the extremely small sample volume (usually on the order of microliters or even nanoliters) and limited mass transfer (difficult liquid convection within the microchamber) in microfluidic lab-on-a-chip limit the detection sensitivity of electrochemical sensor chips.

The introduction of ultrasound into the electrochemical analysis process can yield many advantages, including that ultrasonic radiation greatly accelerates the mass transfer of electroactive species and products near the electrode surface, and reduces the adsorption of intrinsic components in solution and components involved in electrochemical reactions on the electrode surface. , Activated electrode surface, etc. (Zhang Chengxiao. Ultrasonic electrochemistry and its research progress [J]. Journal of Shaanxi Normal University (Natural Science Edition), 2001, 29(2): 103-109).

However, ultrasonic emission devices such as ultrasonic baths and ultrasonic amplitude rods commonly used in ultrasonic electrochemical devices are large in size and are not suitable for microfluidic electrochemical on-chip laboratory detection platforms (Timothy J. Mason, Verónica Sáez Bernal, An Introduction to Sono-electrochemistry , in book Power Ultrasound in Electrochemistry [M], Editor: Bruno G. Pollet, 2012, Wiley).

In recent years, surface acoustic wave and thin-film bulk acoustic wave resonators have been developed by Micro-Electronics-Mechanical System (MEMS) technology. There are new applications in the field of chemical analysis. The ultrasonic waves emitted by surface acoustic waves and thin-film bulk acoustic wave resonators can generate strong acoustic flow effects in the liquid, which can significantly promote the mass transfer of electrochemically active substances in the liquid to the electrode surface, and improve the detection sensitivity ([1]. Kaplan E, Surface Acoustic Wave Enhanced Electroanalytical Sensors[D],University of Glasgow,2015;[2].Sakamoto Hiroaki et al,Development of a High Sensitive Electrochemical Detector with Micro-stirrer Driven by Surface Acoustic Waves[J],Sensors and Actuators B:Chemical,2018,26,705 -709;[3].Zheng Tengfei et al,Focusing Surface Acoustic WavesAssisted Electrochemical Detector in Microfluidics[J],Electrophoresis,2020,doi:10.1002/elps.201900315;[4].Zheng Zongwei et al,Miniature GigahertzAcoustic Resonator and On -Chip Electrochemical Sensor: An Emerging Combination for Electroanalytical Microsystems[J],Analytical Chemistry,2019,91(24):15959-15966;[5].Wang Xiaohe et al,Miniature Acoustic Resonator for Enhanced Lab-on-a-Chip Electroanalysis [C], 2019 IEEE SENSORS, doi:10.1109/SENSORS43011.2019.8956499]).

However, current micro-ultrasonic emission devices and electrochemical sensor chips based on surface acoustic wave (Fig. 2) and solid-state assembled acoustic wave (Fig. 3) resonators are not suitable for integration into microfluidic lab-on-a-chip systems.

Specifically, as shown in Figure 2, the surface acoustic wave of the miniature surface acoustic wave device is generated by applying alternating current to the interdigitated electrodes deposited on the surface of the piezoelectric substrate, and the way of integrating it with the electrochemical sensor chip is mainly through two Various schemes: 1. Deposition of electrochemical sensor electrodes on micro surface acoustic wave devices (Figure 2(A) and (C)), which greatly limits the selection of materials, structural design, processing and molding of electrochemical sensor electrodes. , while the piezoelectric substrate (usually lithium niobate LiNbO ₃ ) is very expensive, increasing the cost; 2. Bonding the electrochemical sensor chip to the surface of the SAW device (Figure 2(B) and (D)), This greatly increases the selection range of electrochemical sensor chips. However, the acoustic wave emitted by the surface acoustic wave device propagates on the surface of the solid (substrate), which has higher requirements for the solid surface on the acoustic wave propagation channel. Simple bonding between devices is difficult to achieve the conditions of acoustic wave propagation (Kaplan E, Surface Acoustic WaveEnhanced Electroanalytical Sensors [D], University of Glasgow, 2015). In addition, the size of the surface acoustic wave device suitable for electrochemical sensing is relatively large, and the mechanism for enhancing the electrochemical analysis performance is that the sound wave propagates on the surface of the elastic material, and after encountering the liquid, part of it enters the liquid, causing the promotion of liquid flow (acoustic flow). , which makes the ultrasonic energy utilization rate low and energy consumption high. Furthermore, for electrochemical sensor chips based on flexible film substrates such as PI and PET, the integration with surface acoustic wave devices and energy utilization will be more difficult. Therefore, the integration capability and usability of the miniature surface acoustic wave device and the electrochemical sensor chip are limited.

The size of the solid-state assembled acoustic resonator is very small (up to 100 μm or less), which is comparable to the size of the microfluidic channel, and its propagation and dissipation in the liquid can cause violent liquid motion (acoustic flow), which significantly improves the electrochemical sensor. Analytical capability (Zheng Zongwei et al, Miniature Gigahertz Acoustic Resonator and On-Chip Electrochemical Sensor: An Emerging Combination for Electroanalytical Microsystems [J], Analytical Chemistry, 2019, 91(24): 15959-15966). Figure 3a shows the currently developed sonoelectrochemical platform based on the solid-state assembled resonator smr. It includes a liquid storage platform (Fig. 3c), a solid-state assembled resonator smr (Fig. 3f), upper and lower cover plates (Fig. 3e), an electrochemical sensor chip (Fig. 3d), and each component is fastened by bolts as shown in Fig. 3b structure. However, due to some reasons, the detection chamber of the currently developed miniature ultrasonic electrochemical detection platform based on solid-state assembled resonator smr is larger (diameter 6mm and thickness 5mm), which is much larger than the microfluidic channel in the commonly used microfluidic-on-a-chip laboratory. The size requirement range (the size of the microchannel perpendicular to the liquid flow direction usually needs to be less than 1mm). The reason why the detection chamber is large is shown in Figure 3c. The liquid inlet and outlet of the existing platform are realized by cutting through holes in the middle of the thickness direction of the PMMA-based liquid storage platform. Due to the limitation of processing difficulty, the diameter of the hole usually cannot be smaller than 1mm, and the outer diameter of the catheter currently existing in the market is greater than 1mm, so the thickness of the liquid storage platform based on this liquid entry and exit scheme is difficult to reach below 2mm, which is not compatible with the microfluidic on-chip laboratory. In addition, the micro ultrasonic electrochemical platform is fastened by bolts (as shown in Figure 3b). This fastening method has limited ability to closely fit the components, and there will still be liquid leakage between the components. Usually, it is necessary to store the liquid. Rubber gaskets are placed at the upper and lower openings of the detection chamber of the platform to achieve sealing. The thickness of the rubber gasket is usually about 1mm, the rubber gasket will be deformed by extrusion, and the thickness will change uncontrollably (the error caused by one rubber ring is 0.25mm, and the two are 0.5mm. When the height of the detection chamber is set to 1mm , then the relative error may reach 50%), this incalculable error brings a large relative error to the thickness direction of the laboratory chamber on the microfluidic chip. Therefore, the above-mentioned sonoelectrochemical platforms are not suitable for integration into microfluidic electrochemical on-chip laboratories.

To sum up, there is currently no microfluidic electrochemical on-chip laboratory analysis platform integrated with ultrasonic emission devices, and relevant solutions are needed.

SUMMARY OF THE INVENTION

In view of the deficiencies of the prior art, the purpose of the present invention is to provide a microfluidic ultrasonic electrochemical on-chip laboratory analysis platform, which integrates micro-ultrasound on the microfluidic on-chip laboratory Emitting devices and electrochemical sensor chips.

The purpose of the present invention is achieved through the following technical solutions.

A microfluidic ultrasonic electrochemical on-chip laboratory analysis platform, comprising: an electrochemical sensor chip, a microfluidic channel component and a supporting substrate arranged in parallel, the electrochemical sensor chip, the microfluidic channel component and the supporting substrate from above They are arranged in sequence from the bottom, wherein a micro ultrasonic device is arranged on the top surface of the support substrate, a through hole is formed on the micro flow channel component, and the hole wall of the through hole encloses a top end and a bottom end that are open. The cavity is in communication with the outside of the microfluidic ultrasonic electrochemical on-chip laboratory analysis platform, so that the liquid to be tested can be discharged into and discharged from the cavity, and the liquid to be tested in the cavity can interact with the electrochemical The three electrodes of the sensor chip are in contact with the vibration area of the micro ultrasonic device.

In the above technical solution, a liquid inlet cavity and a liquid outlet cavity are formed in the microfluidic assembly, the liquid inlet cavity is communicated with the cavity through a first channel, and the liquid outlet cavity is connected to the cavity through a second channel. The cavity is communicated with the outside of the microfluidic ultrasonic electrochemical on-chip laboratory analysis platform through a liquid inlet cavity and a liquid outlet cavity.

In the above technical solution, the height of the through hole is 10 μm˜10 mm, and the width of the through hole is 1 mm˜10 mm.

In the above technical solution, the liquid inlet cavity, the liquid outlet cavity, the cavity, the first channel and the second channel together form a micro-flow channel, and the width of the first channel and the second channel are respectively 10 μm to 1 mm. The lengths of the first channel and the second channel are respectively 2mm-2cm, and the liquid inlet cavity and the liquid outlet cavity are located on two sides or the same side of the cavity.

In the above technical solution, the liquid inlet cavity and the liquid outlet cavity have the same structure, the first channel and the second channel have the same structure, and the sum of the lengths of the liquid inlet cavity and the first channel is 2.5mm-2.5cm.

In the above technical solution, the length of the electrochemical sensor chip is 1.5 cm-5 cm.

In the above technical solution, the microfluidic component is polydimethylsiloxane PDMS, polymethylmethacrylate PMMA or paper.

In the above technical solution, the length of the micro ultrasonic device is 100um～10mm, and the length of the vibration region of the micro ultrasonic device is 10μm～10mm.

In the above technical solution, it further includes: an electrochemical sensor area defining component parallel to the microfluidic component, a first opening is formed on the electrochemical sensor area defining component, the electrochemical sensor chip and the micro The ultrasonic device is arranged in parallel or in a non-parallel arrangement, wherein, when it is arranged in parallel, the liquid to be tested can pass through the first opening to contact the sensing area of the three electrodes; when it is arranged in a non-parallel arrangement, the The electrochemical sensor chip is in contact with the liquid to be measured through the first opening.

In the above technical solution, when the electrochemical sensor chip and the micro ultrasonic device are arranged non-parallel, the electrochemical sensor chip is fixed on the electrochemical sensor area defining component and the electrochemical sensor chip is The sensing area of the three electrodes passes through the first opening and can be in contact with the liquid to be tested.

In the above technical solution, when the electrochemical sensor chip and the micro ultrasonic device are arranged non-parallel, the first opening is a slit; when the electrochemical sensor chip and the micro ultrasonic device are parallel When set, the size of the first opening is greater than or equal to the size of the sensing area of the three electrodes and less than or equal to the size of the cross section of the through hole.

In the above technical solution, it further includes: a top cover located above the electrochemical sensor chip, the top cover is formed with a first through hole for inputting the liquid to be tested into the liquid inlet chamber and a discharge liquid chamber The second through hole of the liquid to be measured inside, when the electrochemical sensor chip and the micro ultrasonic device are arranged non-parallel, a third opening is also formed on the top cover for passing through the electrochemical sensor chip.

In the above technical solution, when the electrochemical sensor chip and the micro ultrasonic device are arranged in parallel, the electrochemical sensor chip and/or the electrochemical sensor area defining component and the first through hole and the second through hole A hole is formed at the opposite position of the hole; when the electrochemical sensor chip and the micro ultrasonic device are not arranged in parallel, the position of the electrochemical sensor area defining component is opposite to the first through hole and the second through hole A hole is formed so that the first through hole can pass into the liquid inlet cavity and the second through hole can pass into the liquid outlet cavity.

In the above technical solution, it further includes: a micro-channel lower bottom plate disposed between the micro-channel component and the supporting substrate, a second opening is formed on the micro-channel lower bottom plate, and the liquid to be tested can be The second opening is in contact with the vibration area of the micro ultrasonic device, and the bottom surfaces of the liquid inlet cavity, the first channel, the liquid outlet cavity and the second channel are open and sealed by the top surface of the lower bottom plate of the micro flow channel .

In the above technical solution, it further includes: a bottom cover located under the supporting substrate.

In the above technical solution, the liquid inlet cavity and the liquid outlet cavity are located on two sides or the same side of the cavity.

In the above technical solution, the thickness of the supporting substrate is 0.1 mm˜2 mm.

In the above technical solution, the thickness of the lower bottom plate of the micro-channel is 0.0125 mm to 1 mm.

In the above technical solution, the thickness of the electrochemical sensor area defining component is 0.0125 mm˜1 mm.

In the above technical solution, the microfluidic ultrasonic electrochemical on-chip laboratory analysis platform is fastened, glued or magnetically attracted by means of bolts.

In the above technical solution, the lower surface of the electrochemical sensor area defining component has adhesiveness.

In the above technical solution, the upper surface of the lower bottom plate of the microfluidic channel has adhesiveness.

In the above technical solution, the upper surface of the electrochemical sensor area defining component has adhesiveness.

In the above technical solution, the lower surface of the lower bottom plate of the microfluidic channel has adhesiveness.

In the above technical solution, the material of the electrochemical sensor area defining component is polydimethylsiloxane PDMS, polymethyl methacrylate PMMA or polyethylene terephthalate PET.

In the above technical solution, the length of the electrochemical sensor area defining component is 1 cm˜10 cm.

In the above technical solution, the size of the second opening is greater than or equal to the size of the vibration region of the micro ultrasonic device and less than or equal to the size of the cross section of the through hole.

The beneficial effects of the present invention are as follows:

1. The present invention realizes the combined use of a micro ultrasonic device and an electrochemical sensor chip, and effectively improves the sensitivity of electrochemical sensing.

2. The liquid inlet and outlet of the present invention are opened in the vertical direction of the microfluidic component, which will not affect the thickness design, and can be used for the design of the microfluidic on-chip laboratory with small thickness.

3. The present invention can not only use bolts to fasten and seal with rubber gaskets, but also can make the electrochemical sensor area limiting component and the bottom plate of the micro-channel have adhesiveness, so that the tightness and sealing between components are better. Thickness control is more precise and suitable for laboratory analysis on microfluidic chips.

4. The present invention is composed of multiple independent components, and the characteristics of each component, including component shape, device type, material properties, etc., can be flexibly changed according to detection requirements.

Description of drawings

Figure 1 is a schematic structural diagram of a typical microfluidic electrochemical on-chip laboratory platform;

Figure 2 is a schematic diagram of the integrated structure of a surface acoustic wave device and an electrochemical sensor chip, wherein (A) is a schematic diagram of the structure, (B) is a schematic diagram of the structure, (C) is a physical diagram, and (D) is a physical diagram;

3 is a schematic diagram of the integrated structure of a solid-state assembled acoustic resonator-type ultrasonic device and an electrochemical sensor chip;

4 is a schematic structural diagram of the microfluidic ultrasonic electrochemical on-chip laboratory analysis platform of the present invention (the electrochemical sensor chip and the micro ultrasonic device are arranged in parallel);

Fig. 5 is the structural schematic diagram of the microfluidic channel of the present invention;

6 is a schematic structural diagram of a micro ultrasonic device, wherein a is a schematic cross-sectional structure of the micro ultrasonic device, b is the shape of the vibration region of the micro ultrasonic device, and c is a top view of the micro ultrasonic device;

7 is a schematic structural diagram of an electrochemical sensor chip, wherein a is the sensing area configuration of the electrochemical sensor chip, b is the sensing area configuration of the electrochemical sensor chip, and c is the sensing area configuration of the electrochemical sensor chip type, d is the overall structure of the electrochemical sensor chip;

8 is a schematic structural diagram of the electrochemical sensor area defining assembly, wherein a is a top view of the electrochemical sensor area defining assembly, b is the shape of the first opening, and c is a schematic diagram of the projection of the first opening onto the electrochemical sensor chip;

9 is a schematic structural diagram of a micro-channel and a cavity of the present invention, wherein a is a micro-channel, b is a micro-channel, c is a micro-channel, d is a micro-channel, and e is the cross-sectional shape of the cavity;

10 is a cyclic voltammetry curve using the present invention;

Figure 11 is a cyclic voltammetry curve;

Figure 12 is a cyclic voltammetry curve;

Figure 13 is a square wave anode stripping voltammetry curve;

FIG. 14 is a schematic structural diagram of the microfluidic ultrasonic electrochemical on-chip laboratory analysis platform of the present invention (the electrochemical sensor chip and the micro ultrasonic device are arranged non-parallel).

in,

1: Bottom cover, 2: Support substrate, 2-1: Micro ultrasonic device, 3: Bottom bottom plate of microchannel, 3-1: Second opening, 4: Microchannel assembly, 4-1: Liquid inlet chamber, 4-2: Liquid outlet chamber, 4-3: Chamber, 4-4: First channel, 4-5: Second channel, 5: Electrochemical sensor area defining assembly, 5-1: First opening, 6: Electrochemical sensor chip, 7: top cover, 7-1: first through hole, 7-2: second through hole, 7-3: third opening.

Detailed ways

The microfluidic ultrasonic electrochemical on-chip laboratory analysis platform of the present invention is further described below with reference to specific embodiments.

The combination of the ultrasonic acoustic flow stirring effect of the micro ultrasonic device 2-1 and the electrochemical sensor chip 6 can effectively improve the electrochemical detection sensitivity, and it is difficult to miniaturize the traditional ultrasonic electrochemical analysis platform. The microfluidic ultrasonic electrochemical on-chip laboratory platform of the invention realizes the combination of ultrasonic electrochemistry and a small microfluidic detection platform, and can be widely used for high-sensitivity detection of trace reagents.

Example 1

As shown in Figures 4 and 14, a microfluidic ultrasonic electrochemical on-chip laboratory analysis platform includes: an electrochemical sensor chip 6, a parallel microfluidic channel assembly 4 and a supporting substrate 2, an electrochemical sensor chip 6, The microchannel assembly 4 and the support substrate 2 are arranged in sequence from top to bottom, wherein a micro ultrasonic device 2-1 is arranged on the top surface of the support substrate 2, and a through hole is formed on the microchannel assembly 4, and the height of the through hole is is 10 μm to 10 mm, and the width of the through hole is 1 mm to 10 mm. The hole wall of the through hole surrounds a cavity 4-3 with open top and bottom ends (that is, the upper and lower ends are transparent), the cavity 4-3 is used for ultrasonic electrochemical detection, and the cavity 4-3 is connected to the microfluidic ultrasonic The electrochemical laboratory-on-a-chip analysis platform communicates with the outside, so that the liquid to be tested can be discharged into and discharged from the cavity 4-3, and the liquid to be tested in the cavity 4-3 can be connected with the three electrodes and the micro-electrode of the electrochemical sensor chip 6. The vibration area of the ultrasonic device 2-1 is in contact. The ultrasonic wave generated by the micro ultrasonic device 2-1 propagates and attenuates in the liquid to be measured in the cavity 4-3, causing violent convective movement of the liquid to be measured, enhancing the mass transfer efficiency of the substance to the surface of the three electrodes of the electrochemical sensor chip 6, Improve the detection sensitivity of electrochemical sensors.

The microfluidic channel component 4 is polydimethylsiloxane PDMS, polymethyl methacrylate PMMA or paper or the like.

As shown in Figure 7d, the electrochemical sensor chip 6 is a working electrode, a contrast electrode and a reference electrode (ie three electrodes) integrated on one substrate, which can be a commercialized electrochemical sensor chip, or can be designed according to needs. Construction, the shape and layout of the three electrodes are based on the general rules of electrochemical sensor chips, which can be but not limited to the structure shown in Figure 7. The materials of the working electrode and the reference electrode include carbon, gold, platinum metal, etc. The reference electrode can be combined with the working electrode. The material of the reference electrode is the same, and it can also be a classic reference electrode such as silver/silver chloride Ag/AgCl. The substrate of the electrochemical sensor chip can be a flexible material such as PET and PI, or a hard material such as glass. The length of the electrochemical sensor chip 6 is 1.5 cm to 5 cm. In terms of the horizontal and vertical directions, the overall working area of the three electrodes of the electrochemical sensor chip 6, the working electrode, the contrast electrode and the reference electrode, has a one-way length between 10 μm and 10 mm. .

The micro ultrasonic device 2-1 is manufactured by a MEMS process, and may be a thin-film bulk acoustic resonator FBAR, a solid-state assembled resonator smr, a micromachined piezoelectric ultrasonic transducer pMUT, and the like. As shown in Figures 6a and 6a, the main body is in a sandwich structure of electrode/piezoelectric layer/electrode, and the micro ultrasonic device 2-1 is arranged on a supporting substrate. The thickness of the supporting substrate 2 is 0.1 mm to 2 mm. It is a rigid or flexible substrate, for example, the supporting substrate can be a silicon substrate, a polyimide film substrate, or the like. Based on the inverse piezoelectric effect, when an alternating signal is applied to the micro ultrasonic device, the piezoelectric layer generates mechanical vibration and emits ultrasonic waves. The material of the piezoelectric layer can be aluminum nitride, zinc oxide, piezoelectric ceramic PZT, lithium niobate, quartz crystal, organic flexible material polyvinylidene fluoride PVDF, and the like.

As shown in Fig. 6b, the vibration area of the micro ultrasonic device 2-1 can be in various shapes such as circle, ellipse, quadrilateral, pentagon, hexagon, etc. The vibration area can be one vibration source or multiple In the array of vibration sources, the vibration area of the micro ultrasonic device 2-1 containing multiple vibration sources includes spaced areas between different vibration sources, and the length of the vibration area of the micro ultrasonic device 2-1 is 10 μm˜10 mm. The micro ultrasonic device is usually rectangular or square, including the signal connection line and the support pad. The length of the micro ultrasonic device 2-1 is 100um ~ 10mm, and the signal connection line can be very long. connected to an external circuit.

Example 2

On the basis of Example 1, as shown in FIG. 5 , a liquid inlet chamber 4-1 and a liquid outlet chamber 4-2 are formed in the microfluidic channel assembly 4, and the liquid inlet chamber 4-1 passes through a first channel 4-4 It communicates with the cavity 4-3, the liquid outlet cavity 4-2 communicates with the cavity 4-3 through a second channel 4-5, and the cavity 4-3 communicates with the cavity 4-3 through the liquid inlet cavity 4-1 and the liquid outlet cavity 4-2. The microfluidic ultrasonic electrochemical on-chip laboratory analysis platform communicates with the outside.

The liquid inlet cavity 4-1, the liquid outlet cavity 4-2, the cavity 4-3, the first channel 4-4 and the second channel 4-5 together form a micro-channel, the first channel 4-4 and the second channel 4 The width of -5 is 10μm～1mm respectively, the length of the first channel 4-4 and the second channel 4-5 are 2mm-2cm respectively, the liquid inlet chamber 4-1 and the liquid outlet chamber 4-2 are located in the chamber 4-3 on both sides (as shown in Figures 9a, c and d) or on the same side (as shown in Figure 9b). The structures of the liquid inlet chamber 4-1 and the liquid outlet chamber 4-2 are the same, the structures of the first channel 4-4 and the second channel 4-5 are the same, and the lengths of the liquid inlet chamber 4-1 and the first channel 4-4 are the same as 2.5mm～2.5cm.

The cross-section of the through hole can be circular, square, oval or special-shaped, etc., as shown in Figure 9e, as shown in the last figure in Figure 9e, if the first channel 4-4 and the second channel 4-5 are connected with the cavity When there is a protruding structure between the bodies 4-3, the protruding structure can be set as an arc surface.

Example 3

On the basis of Embodiment 2, the method further includes: an electrochemical sensor area defining component 5 parallel to the microfluidic component 4 , a first opening 5-1 is formed on the electrochemical sensor area defining component 5, and the first opening 5-1 Opposite to the sensing area of the three electrodes, the electrochemical sensor chip 6 and the micro ultrasonic device 2-1 are arranged in parallel or non-parallel, wherein:

When arranged in parallel, the electrochemical sensor area defining component 5 can determine the area of the sensing area of the three electrodes exposed in the cavity 4-3, and the liquid to be tested can pass through the first opening 5-1 and the transmission of the three electrodes. The sensing area is in contact, and the size of the first opening 5-1 is greater than or equal to the size of the sensing area of the three electrodes and less than or equal to the size of the cross section of the through hole. As shown in FIG. 8 , the shape of the first opening 5-1 can be a circle shape, pentagon or hexagon, etc.

When the non-parallel arrangement is used, as shown in FIG. 14 , the first opening 5-1 is a slit, and the electrochemical sensor chip 6 passes through the first opening 5-1 to contact the liquid to be measured, and the electrochemical sensor chip 6 passes through the first opening 5-1. The part that passes through the first opening 5 - 1 and can be in contact with the liquid to be tested is a sensing area with three electrodes, and the electrochemical sensor chip 6 is fixed on the electrochemical sensor area defining component 5 .

The material of the electrochemical sensor area limiting component 5 is polydimethylsiloxane PDMS, polymethyl methacrylate PMMA or polyethylene terephthalate PET, and the thinner the thickness, the better. The thickness of the area defining component 5 is 0.0125 mm˜1 mm, and the length of the electrochemical sensor area defining component 5 is 1 cm˜10 cm.

The structure of the three-electrode sensing area can be structure 1, structure 2 or structure 3. Structure 1 is shown in Figure 7a, and its shape is three rectangular structures arranged at intervals and parallel to each other; Structure 2 is shown in Figure 7b, including A rectangular structure, a long rectangular structure and a folded structure, the folded structure is a structure formed after a rectangular structure is bent by 90°, and the long rectangular structure and the folded structure are arranged at intervals and enclose a rectangle with one side open. , the rectangular structure is located in the rectangle and is spaced from the elongated rectangular structure and the folded structure; structure 3, as shown in Figure 7c, includes a circular structure, a rectangular structure and an arc-shaped structure that are spaced apart from each other, and the rectangular structure and the arc-shaped structure are The structure surrounds the circular structure.

Example 4

On the basis of Embodiment 3, it also includes: a top cover 7 located above the electrochemical sensor chip 6 and a bottom cover 1 located below the support substrate 2, and the top cover 7 is formed with an input for feeding into the liquid inlet chamber 4-1. The first through hole 7-1 of the liquid to be measured and the second through hole 7-2 of the liquid to be measured in the discharge chamber 4-2, when the electrochemical sensor chip 6 and the micro ultrasonic device 2-1 are arranged non-parallel , a third opening 7-3 is also formed on the top cover 7 for passing through the electrochemical sensor chip 6, as shown in FIG. 14 .

When the electrochemical sensor chip 6 and the micro ultrasonic device 2-1 are arranged in parallel, the electrochemical sensor chip 6 and/or the electrochemical sensor area defining component 5 are opposite to the first through hole 7-1 and the second through hole 7-2. Holes are formed at positions so that the first through hole 7-1 can pass into the liquid inlet chamber 4-1 and the second through hole 7-2 can pass into the liquid outlet chamber 4-2.

When the electrochemical sensor chip 6 and the micro ultrasonic device 2-1 are not arranged in parallel, holes are formed in the position of the electrochemical sensor region defining component 5 opposite to the first through hole 7-1 and the second through hole 7-2, so that the The first through hole 7-1 can pass into the liquid inlet cavity 4-1 and the second through hole 7-2 can pass into the liquid outlet cavity 4-2.

The top cover and bottom cover can further fasten the microfluidic ultrasonic electrochemical on-chip laboratory analysis platform. In terms of material selection, the top cover and bottom cover can be made of tape, polydimethylsiloxane PDMS, polymethacrylic acid For materials such as methyl ester PMMA or hard materials, from the perspective of the fastening method of the top cover and bottom cover to the microfluidic ultrasonic electrochemical on-chip laboratory analysis platform, the top cover and bottom cover can be fastened by bolts, magnetic suction bonding and gluing, etc.

Example 5

On the basis of Embodiment 4, the method further includes: a micro-channel lower bottom plate 3 arranged between the micro-channel component 4 and the supporting substrate 2, the thickness of the micro-channel lower bottom plate 3 is 0.0125 mm to 1 mm, and the micro-channel lower plate 3 has a thickness of 0.0125 mm to 1 mm. A second opening 3-1 is formed on the lower bottom plate 3, and the liquid to be tested can contact the vibration area of the micro ultrasonic device 2-1 through the second opening 3-1. The liquid inlet cavity 4-1, the first channel 4-4, The bottom surfaces of the liquid outlet chamber 4-2 and the second channel 4-5 are open and sealed by the top surface of the lower bottom plate 3 of the microchannel. The size of the second opening 3-1 is designed as long as it does not affect the liquid to be tested and the micro ultrasonic device. The vibration area of 2-1 only needs to be in contact. Preferably, the size of the second opening 3-1 is greater than or equal to the size of the vibration area of the micro ultrasonic device 2-1 and less than or equal to the size of the cross section of the through hole.

The lower surface and the upper surface of the electrochemical sensor area defining component 5 have adhesiveness, and the lower surface and upper surface of the microchannel lower bottom plate 3 have adhesiveness. The adhesiveness between the two sides of the electrochemical sensor area defining component 5 and the lower bottom plate 3 of the microfluidic channel can realize the fastening of the microfluidic ultrasonic electrochemical on-chip laboratory analysis platform, and can realize the reduction of microfluidic control while realizing the fastening. Thickness of the sonoelectrochemical on-chip laboratory analysis platform.

The microfluidic ultrasonic electrochemical on-chip laboratory analysis platform obtained in Example 5 was tested. During the test, the micro ultrasonic device 2-1 was connected to the power amplifier, the power amplifier was connected to the signal generator, and the electrochemical sensor chip 6 was connected to the electrochemical device. workstation. Specifically, the products of the microfluidic ultrasonic electrochemical on-chip laboratory analysis platform obtained in Example 5 are as follows:

Product 1:

The electrochemical sensor chip 6 is arranged in parallel with the micro ultrasonic device 2-1. The material of the top cover 7 and the bottom cover 1 is polymethyl methacrylate PMMA, and the fastening method of the top cover 7 and the bottom cover 1 is glue bonding. The micro ultrasonic device 2-1 is an smr (solidly mounted resonator (smr)). The supporting substrate is an evb board (electrical valuation board (evb)), and the thickness of the supporting substrate is 2 mm. The vibration area of the micro ultrasonic device 2-1 is the pentagonal area shown in Fig. 6c, and the side length of the pentagon is 100um. The length of the micro ultrasonic device 2-1 is several hundreds of micrometers.

The diameter of the second opening 3-1 on the lower bottom plate 3 of the microchannel is 5 mm, and the thickness of the lower bottom plate 3 of the microchannel is 0.5 mm.

The material of the micro-channel component 4 is polymethyl methacrylate PMMA, and the thickness is 3 mm. The shape of the microchannel adopts Fig. 9d, the liquid inlet chamber 4-1 and the liquid outlet chamber 4-2 are located on both sides of the chamber 4-3, the first channel 4-4 and the second channel 4-5 are located on the same straight line, and through the center of the cavity. The cross section of the through hole is a circle with a diameter of 5mm and a height of 3mm. The width of the first channel 4-4 and the second channel 4-5 is 0.8 mm. The length of the first channel 4-4 and the second channel 4-5 is 1 cm. The sum of the lengths of the liquid inlet chamber 4-1 and the first channel 4-4 is 1.2 cm.

The shape of the first opening 5-1 of the electrochemical sensor area defining assembly 5 is a circle as shown in FIG. 8b. The material of the electrochemical sensor area defining component 5 is polyethylene terephthalate PET, the thickness of which is 0.5 mm, and the length of the electrochemical sensor area defining component 5 is 3 cm. The diameter of the first opening 5-1 is 3 mm.

The length of the electrochemical sensor chip is 2.5 cm, the structure of the sensing area of the electrochemical sensor chip 6 is the structure shown in FIG. 7c, and the working electrode is a circular structure. The working electrode of the electrochemical sensor chip 6 is an Au electrode, the reference electrode is a Pt electrode, and the reference electrode is an Ag/AgCl electrode, and the diameter of the working electrode is 1.2 mm. The substrate of the electrochemical sensor chip is polyethylene terephthalate PET. The size of the overall working area of the working electrode, the reference electrode and the reference electrode of the electrochemical sensor chip 6 is about 6 mm ² , and the unidirectional length of the overall working area is 3 mm.

The signal generator and power amplifier do not add any signal to the miniature ultrasonic devices in the above products. The liquid to be tested is a 1mM ferrocene methanol solution, and the cyclic voltammetry curve of the liquid to be tested is measured by the electrochemical workstation.

Product 2:

The same as product 1, the difference is only in the test environment: the signal generator applies a working frequency of 2.56 GHz to the micro ultrasonic device smr, and the power amplifier device applies 0.7W of power to the micro ultrasonic device smr.

Product 3:

The same as product 1, the difference is only in the test environment: the signal generator and the power amplifier apply 2.56GHz operating frequency and 1W power to the miniature ultrasonic device smr of this product.

Product 4:

It is basically the same as product 1, and the difference of product 4 is only that: the thickness of the microfluidic channel component 4 is 1 mm (the height of the through hole is 1 mm). The signal generator and the power amplifier device apply an operating frequency of 2.56GHz and a power of 1W to the miniature ultrasonic device smr of the above product.

Product 5:

It is basically the same as Product 1, and the difference of Product 5 is only that the thickness of the microfluidic channel component 4 is 5 mm (the height of the through hole is 5 mm). The signal generator and the power amplifier device apply an operating frequency of 2.56GHz and a power of 1W to the miniature ultrasonic device smr of the above product.

Product 6:

Basically the same as product 1, the only difference of product 6 is: the diameter of the second opening 3-1 on the bottom plate 3 of the microchannel is 3mm, the cross section of the through hole is a circle with a diameter of 3mm, the signal generator and the power amplifier The device applies an operating frequency of 2.56GHz and a power of 0.7W to the miniature ultrasonic device smr of the above product.

Product 7:

It is basically the same as product 1, the only difference of product 7 is: the diameter of the second opening 3-1 on the bottom plate 3 of the microchannel is 8mm, the cross-section of the through hole is a circle with a diameter of 8mm, the signal generator and the power amplifier The device applies an operating frequency of 2.56GHz and a power of 0.7W to the miniature ultrasonic device smr of the above product.

Product 8:

It is basically the same as the product 1, the only difference is that the electrochemical sensor chip 6 and the micro ultrasonic device 2-1 are arranged vertically (non-parallel arrangement), and the shape of the first opening 5-1 of the electrochemical sensor region defining component 5 is The slit (long strip), the length of the slit is 4mm and the width is 0.5mm, the size of the slit is just enough for the electrochemical sensor chip to be inserted from the first opening 5-1 perpendicular to the electrochemical sensor area defining component 5.

Product 9:

The same as Product 8, the difference is only in the test environment: the signal generator and the power amplifier device apply a working frequency of 2.56GHz and a power of 0.3W to the miniature ultrasonic device smr of the product.

Product 10:

Basically the same as product 1, the only difference of product 10 is that a low-frequency micro-ultrasonic device pMUT is used in the product, and the signal generator and power amplifier device apply 2.5MHz operating frequency and 0.7W power to the product's micro-ultrasonic device pMUT.

Product 11:

It is basically the same as product 1, and the difference between product 11 is only that the working electrode of the electrochemical sensor chip 6 used in the product is a graphene electrode, the electrode morphology is shown in Figure 7a, the working electrode is a rectangular structure, and its size is 0.5 mm×2mm, the signal generator and the power amplifier device apply a working frequency of 2.56GHz and a power of 0.5W to the miniature ultrasonic device smr of the product.

Product 12:

It is basically the same as the product 11, except that the size of the working electrode of the electrochemical sensor chip 6 is 1 mm×2 mm.

Product 13:

It is basically the same as product 1, the only difference is that the liquid to be tested used in the product is an aqueous solution of heavy metal ions Cu ²⁺ with a concentration of 100ppb, which contains 0.1M sodium acetate as a buffer. The electrochemical method adopts square wave anodic stripping voltammetry, the deposition potential is -0.5V, the deposition time is 60s, and the stripping potential is -0.5～0.6V.

Product 14:

The same as product 13, the difference is only in the test environment: the signal generator and the power amplifier device apply the working frequency of 2.56GHz and the power of 0.5W to the micro ultrasonic device smr of the product.

Product 15:

It is basically the same as product 1, the only difference is: the micro-channel shape of the micro-channel component 4 adopts Fig. 9a, the signal generator and the power amplifier part apply the working frequency of 2.56GHz to the micro ultrasonic device smr of the above product, 0.7W power.

Product 16:

It is basically the same as product 1, the only difference is: the micro-channel shape of the micro-channel component 4 adopts Fig. 9b, the signal generator and the power amplifier part apply the working frequency of 2.56GHz to the micro ultrasonic device smr of the above product, 0.7W power.

Product 17:

Basically the same as product 1, the only difference is: the micro-channel shape of the micro-channel component 4 adopts Fig. 9c, the signal generator and the power amplifier part apply the working frequency of 2.56GHz to the micro ultrasonic device smr of the above product, 0.7W power.

After testing products 1 to 17, the following conclusions were obtained:

1. Ultrasound stimulation has a significant impact on the sensitivity of electrochemical detection. Product 1, Product 2, and Product 3 were added with 0W, 0.7W, and 1W of power, respectively. Figure 10 is the cyclic voltammetry curve. The limiting currents are 18uA and 24uA, respectively, and the anode peak current of product 1 is about 7uA. It can be seen that the limiting currents of product 2 and product 3 are about 2.6 times and 3.4 times the peak current of product 1, respectively. It can be seen that the ultrasonic stimulation causes the liquid to be detected to flow, which enhances the material transfer process and significantly improves the sensitivity of electrochemical sensing.

2. The relative distance between the electrochemical sensor chip and the micro ultrasonic device affects the effect of ultrasonic stimulation on enhancing the sensitivity of electrochemical detection. In product 3, product 4, and product 5, the relative distance between the electrochemical sensor chip and the micro ultrasonic device is 3mm, 1mm, and 5mm, respectively, and the added power is 1W. The relative distance of product 1 is 3mm, and the added power is 0W, as shown in Figure 11. Antu, the anode peak current of product 1 is 7uA, and the limit currents of product 3, product 4, and product 5 are about 22uA, 24uA, and 33uA, respectively. It can be seen that the limit current of product 4, product 3 and product 5 is about 4.7 times, 3.4 times and 3.1 times of the peak current of product 1 respectively. It can be seen that the relative distance between the electrochemical sensor chip and the micro ultrasonic device affects the sensitivity of electrochemical sensing. The smaller the distance, the higher the detection sensitivity.

3. To study the influence of the cavity size used to detect the liquid to be tested on the ultrasonic electrochemical detection sensitivity, the cavity diameters of product 6, product 2, and product 7 are 3mm, 5mm, and 8mm, respectively. The added power is all 0.7W, and the obtained cyclic voltammetry curve shows that the limiting current of product 6, product 2, and product 7 is basically the same, about 18uA. It can be seen that the cavity diameter has little effect on the detection results.

4. The working plane of the micro ultrasonic device and the working plane of the electrochemical sensor chip can be combined at various angles, and the product 1 is combined in a parallel manner. Product 8 and Product 9 are combined in a mutually perpendicular manner. Product 8 does not add power, and Product 9 adds 0.3W of power. As shown in the cyclic voltammetry curve of Fig. 12, the anode peak current 44uA of product 9 is slightly larger than the peak current 40uA of product 8. It can be seen that when the working plane of the micro ultrasonic device and the working plane of the electrochemical sensor chip are combined in a mutually perpendicular manner, ultrasonic stimulation can enhance the sensitivity of electrochemical sensing. In practical applications, the two working planes can be flexibly changed according to application requirements. combination angle.

5. The invention can meet the application of micro ultrasonic devices in various frequency bands. Product 2 uses a high-frequency micro ultrasonic device smr, its operating frequency is 2.58GHz, and the added power is 0.7W. Product 10 uses a low-frequency micro ultrasonic device. The pMUT, which operates at 2.5MHz, adds 0.7W of power. In the cyclic voltammetry curve, the limit current of product 10 is about 13uA, it can be seen that the limit current of product 2 and product 10 is 2.6 times and 1.9 times of the peak current of product 1, respectively. It can be seen that, in the present invention, the micro ultrasonic device can be flexibly changed according to application requirements.

6. The present invention can use a variety of electrochemical sensor chips. Product 11 and Product 12 use graphene material electrodes that are different from other products. The electrodes are elongated in shape and have dimensions of 0.5mm×2mm and 1mm×2mm respectively. The limit current of product 11 is about 16uA, the limit current of product 12 is about 31uA, and the peak current of product 12 is about 1.9 times that of product 11. It can be seen that, in the present invention, the material, shape and size of the electrochemical sensor chip can be flexibly changed according to application requirements.

7. Using the present invention to detect the heavy metal ion Cu ²⁺ solution with a concentration of 100ppb, no power is added to product 13, and 0.5W power is added to product 14. The electrochemical detection method adopts square wave anode stripping voltammetry, as shown in Figure 13. The square wave anode stripping voltammetry curve shows that the stripping current of product 13 is about 9uA, the stripping current of product 14 is about 78uA, and the measured stripping current of product 14 is about 8.7 times that of product 13. It can be seen that ultrasonic stimulation significantly improves the sensitivity of heavy metal ion Cu ²⁺ detection.

8. The shape of the micro-channel of the micro-channel component 4 of the present invention is relatively flexible, and can be combined in various ways. Product 15, Product 16, Product 17, and Product 2 use the micro-channel shapes shown in Figure 9a, Figure 9b, Figure 9c, and Figure 9d, respectively, and add 0.7W. The experimental results show that Product 15, Product 16, Product 17, and Product 2 obtained Similar reversible cyclic voltammetry curves, it can be seen that the four microchannel shapes have less influence on electrochemical detection.

The thicknesses of the above products are as follows:

serial number Product 1 Product 2 Product 3 Product 4 Product 5 Product 6 Thickness(mm) 8 8 8 6 10 8 serial number Product 7 Product 8 Product 9 Product 10 Product 11 Product 12 Thickness(mm) 8 8 8 8 8 8 serial number Product 13 Product 14 Product 15 Product 16 Product 17 - Thickness(mm) 8 8 8 8 8 -

The present invention has been exemplarily described above. It should be noted that, without departing from the core of the present invention, any simple deformation, modification or other equivalent replacements that can be performed by those skilled in the art without creative effort fall into the scope of the present invention. the scope of protection of the invention.

Claims (10)

1. A laboratory analysis platform on microfluidic ultrasonic electrochemical chip is characterized by comprising: an electrochemical sensor chip (6), a micro-channel component (4) and a supporting substrate (2) which are arranged in parallel, the electrochemical sensor chip (6), the micro-channel component (4) and the supporting substrate (2) are arranged from top to bottom in sequence, wherein the top surface of the supporting substrate (2) is provided with a micro ultrasonic device (2-1), a through hole is formed on the micro-channel component (4), the hole wall of the through hole is enclosed into a cavity (4-3) with the top end and the bottom end open, the cavity (4-3) is communicated with the outside of a laboratory analysis platform on the microfluidic ultrasonic electrochemical chip, so that the liquid to be measured can be discharged into and out of the cavity (4-3), and the liquid to be measured in the cavity (4-3) can be contacted with the three electrodes of the electrochemical sensor chip (6) and the vibration area of the miniature ultrasonic device (2-1).

2. The microfluidic ultrasonic electrochemical on-chip laboratory analysis platform according to claim 1, wherein a liquid inlet chamber (4-1) and a liquid outlet chamber (4-2) are formed in the microchannel assembly (4), the liquid inlet chamber (4-1) is communicated with the chamber (4-3) through a first channel (4-4), the liquid outlet chamber (4-2) is communicated with the chamber (4-3) through a second channel (4-5), and the chamber (4-3) is communicated with the outside of the microfluidic ultrasonic electrochemical on-chip laboratory analysis platform through the liquid inlet chamber (4-1) and the liquid outlet chamber (4-2).

3. The microfluidic ultrasonic-electrochemical on-chip laboratory analysis platform of claim 2, wherein the height of the through hole is 10 μm to 10mm, and the width of the through hole is 1mm to 10 mm.

4. The microfluidic ultrasonic-electrochemical on-chip laboratory analysis platform according to claim 3, wherein the liquid inlet chamber (4-1), the liquid outlet chamber (4-2), the chamber body (4-3), the first channel (4-4) and the second channel (4-5) together form a microchannel, the widths of the first channel (4-4) and the second channel (4-5) are respectively 10 μm to 1mm, the lengths of the first channel (4-4) and the second channel (4-5) are respectively 2mm to 2cm, and the liquid inlet chamber (4-1) and the liquid outlet chamber (4-2) are located on two sides or the same side of the chamber body (4-3).

5. The microfluidic ultrasonic-electrochemical on-chip laboratory analysis platform according to claim 4, wherein the structures of the liquid inlet cavity (4-1) and the liquid outlet cavity (4-2) are consistent, the structures of the first channel (4-4) and the second channel (4-5) are consistent, and the sum of the lengths of the liquid inlet cavity (4-1) and the first channel (4-4) is 2.5 mm-2.5 cm;

the length of the electrochemical sensor chip (6) is 1.5 cm-5 cm.

6. The microfluidic sonoelectrochemical on-chip laboratory analytical platform of claim 5, wherein the micro flow channel component (4) is Polydimethylsiloxane (PDMS), Polymethylmethacrylate (PMMA), or paper;

the length of the micro ultrasonic device (2-1) is 100 um-10 mm, and the length of the vibration area of the micro ultrasonic device (2-1) is 10 mu m-10 mm.

7. The microfluidic sonoelectrochemical on-chip laboratory analysis platform of claim 6, further comprising: an electrochemical sensor area defining component (5) parallel to the micro flow channel component (4), wherein a first opening (5-1) is formed on the electrochemical sensor area defining component (5), the electrochemical sensor chip (6) and the micro ultrasonic device (2-1) are arranged in parallel or not, and when the electrochemical sensor chip and the micro ultrasonic device are arranged in parallel, the liquid to be measured can pass through the first opening (5-1) to be in contact with the sensing area of the three electrodes; when the sensor chip is arranged in a non-parallel mode, the electrochemical sensor chip (6) penetrates through the first opening (5-1) to be in contact with the liquid to be measured.

8. The microfluidic ultrasonic-electrochemical on-chip laboratory analysis platform according to claim 7, wherein when the electrochemical sensor chip (6) and the micro-ultrasonic device (2-1) are disposed in a non-parallel manner, the electrochemical sensor chip (6) is fixed on the electrochemical sensor area defining assembly (5) and the sensing area of the three electrodes of the electrochemical sensor chip (6) passes through the first opening (5-1) and can be contacted with the liquid to be measured;

when the electrochemical sensor chip (6) and the micro ultrasonic device (2-1) are arranged in a non-parallel mode, the first opening (5-1) is a slit; when the electrochemical sensor chip (6) and the micro ultrasonic device (2-1) are arranged in parallel, the size of the first opening (5-1) is larger than or equal to that of a sensing area of the three electrodes and smaller than or equal to that of the cross section of the through hole.

9. The microfluidic sonoelectrochemical lab-on-a-chip analysis platform of claim 8, further comprising: the electrochemical sensor chip comprises a top cover (7) and is located above an electrochemical sensor chip (6), wherein a first through hole (7-1) for inputting liquid to be detected into a liquid inlet cavity (4-1) and a second through hole (7-2) for discharging the liquid to be detected from a liquid outlet cavity (4-2) are formed in the top cover (7), and when the electrochemical sensor chip (6) and the miniature ultrasonic device (2-1) are arranged in a non-parallel mode, a third opening (7-3) is formed in the top cover (7) and is used for penetrating through the electrochemical sensor chip (6).

10. The microfluidic ultrasonic-electrochemical on-chip laboratory analysis platform according to claim 9, wherein when the electrochemical sensor chip (6) and the micro-ultrasonic device (2-1) are arranged in parallel, the electrochemical sensor chip (6) and/or the electrochemical sensor area defining assembly (5) is formed with holes at positions opposite to the first through hole (7-1) and the second through hole (7-2); when the electrochemical sensor chip (6) and the micro ultrasonic device (2-1) are arranged in a non-parallel mode, holes are formed in the electrochemical sensor area limiting assembly (5) at positions opposite to the first through hole (7-1) and the second through hole (7-2), so that the first through hole (7-1) can be communicated with the liquid inlet cavity (4-1) and the second through hole (7-2) can be communicated with the liquid outlet cavity (4-2);

further comprising: the micro-channel lower bottom plate (3) is arranged between the micro-channel assembly (4) and the supporting substrate (2), a second opening (3-1) is formed in the micro-channel lower bottom plate (3), the liquid to be detected can be in contact with a vibration area of the micro-ultrasonic device (2-1) through the second opening (3-1), and the bottom surfaces of the liquid inlet cavity (4-1), the first channel (4-4), the liquid outlet cavity (4-2) and the second channel (4-5) are open and sealed by the top surface of the micro-channel lower bottom plate (3);

in the above technical solution, the method further comprises: a bottom cover (1) located below the support substrate (2);

in the technical scheme, the liquid inlet cavity (4-1) and the liquid outlet cavity (4-2) are positioned at two sides or the same side of the cavity (4-3);

the thickness of the supporting substrate (2) is 0.1 mm-2 mm;

the thickness of the lower bottom plate (3) of the micro-channel is 0.0125 mm-1 mm;

the thickness of the electrochemical sensor area limiting assembly (5) is 0.0125 mm-1 mm;

the laboratory analysis platform on the microfluidic ultrasonic electrochemical chip is fastened and glued by a bolt or attracted by magnetic force;

the lower surface of the electrochemical sensor area defining component (5) has adhesive property;

the upper surface of the lower micro-channel bottom plate (3) has adhesiveness;

the upper surface of the electrochemical sensor area limiting component (5) has adhesive property;

the lower surface of the lower micro-channel bottom plate (3) has adhesiveness;

the material of the electrochemical sensor area limiting component (5) is polydimethylsiloxane PDMS, polymethyl methacrylate PMMA or polyethylene terephthalate PET;

the length of the electrochemical sensor area limiting assembly (5) is 1 cm-10 cm;

the size of the second opening (3-1) is larger than or equal to that of a vibration area of the micro ultrasonic device (2-1) and smaller than or equal to that of the cross section of the through hole.

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