CN101118377B - Pneumatic semi-suspended two-degree-of-freedom common-base motion table - Google Patents
Pneumatic semi-suspended two-degree-of-freedom common-base motion table Download PDFInfo
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- CN101118377B CN101118377B CN200710018229A CN200710018229A CN101118377B CN 101118377 B CN101118377 B CN 101118377B CN 200710018229 A CN200710018229 A CN 200710018229A CN 200710018229 A CN200710018229 A CN 200710018229A CN 101118377 B CN101118377 B CN 101118377B
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- 230000033001 locomotion Effects 0.000 title claims abstract description 110
- 239000000725 suspension Substances 0.000 claims abstract description 21
- 238000001514 detection method Methods 0.000 claims abstract 3
- 230000008878 coupling Effects 0.000 claims description 7
- 238000010168 coupling process Methods 0.000 claims description 7
- 238000005859 coupling reaction Methods 0.000 claims description 7
- 230000036316 preload Effects 0.000 claims 3
- 230000000694 effects Effects 0.000 claims 1
- 238000005259 measurement Methods 0.000 abstract description 4
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 description 24
- 239000000969 carrier Substances 0.000 description 10
- 238000000034 method Methods 0.000 description 7
- 238000010586 diagram Methods 0.000 description 6
- 238000006073 displacement reaction Methods 0.000 description 5
- 238000004519 manufacturing process Methods 0.000 description 5
- 230000002146 bilateral effect Effects 0.000 description 3
- 238000009826 distribution Methods 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- 238000005339 levitation Methods 0.000 description 3
- 238000001259 photo etching Methods 0.000 description 3
- 230000011664 signaling Effects 0.000 description 3
- 238000010276 construction Methods 0.000 description 2
- 230000003252 repetitive effect Effects 0.000 description 2
- 238000005096 rolling process Methods 0.000 description 2
- 238000004381 surface treatment Methods 0.000 description 2
- 230000001133 acceleration Effects 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 230000009193 crawling Effects 0.000 description 1
- 238000004049 embossing Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 238000005188 flotation Methods 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
- 230000002459 sustained effect Effects 0.000 description 1
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Abstract
本发明公开了一种高速大行程的气压半悬浮二自由度共基面运动工作台，包括基座、X轴运动模块、Y轴运动模块和X、Y位置检测装置。Y轴运动模块由Y向旋转电机通过Y向丝杠螺母驱动，并由直线导轨导向，直线导轨固定于基座之上。X轴运动模块位于Y轴运动模块之内，由X向旋转电机通过X向丝杠螺母驱动，工作台底面紧贴基座。其Y轴运动模块和X轴运动模块安装在同一基座之上，组成工作台与两运动轴等高的二自由度共基面的运动工作台。X、Y运动模块运用精密的直线光栅实时回馈运动工作台在二维平面内的位置信号，实现定位系统的全闭循环位置控制，可用于半导体与超精密加工的光刻技术、微制造、表面形貌测量及超精密坐标测量等方面。
The invention discloses a high-speed and large-stroke pneumatic semi-suspension two-degree-of-freedom common-base motion workbench, which comprises a base, an X-axis motion module, a Y-axis motion module, and X and Y position detection devices. The Y-axis motion module is driven by the Y-direction rotating motor through the Y-direction screw nut, and is guided by a linear guide rail, which is fixed on the base. The X-axis motion module is located inside the Y-axis motion module, driven by the X-direction rotating motor through the X-direction screw nut, and the bottom surface of the table is close to the base. The Y-axis motion module and the X-axis motion module are installed on the same base to form a two-degree-of-freedom common-base motion table with the same height as the table and the two motion axes. The X and Y motion modules use precise linear gratings to feed back the position signals of the motion table in the two-dimensional plane in real time to realize the full-closed cycle position control of the positioning system. Shape measurement and ultra-precision coordinate measurement.
Description
Technical field
The invention belongs to technical field of micro-nano manufacture, relate to a kind of two degrees of freedom displacement work table, a kind of Pneumatic semi-suspension two-freedom co-baseplane motion workbench of high speed and large stroke particularly, this motion workbench can be realized planar direction wide region, accurate displacement location, is mainly used in micro-nano embossing device, integrated circuit (IC) etching machine, precision measurement scanister etc.
Background technology
In fields such as integrated circuit (IC), MEMS (micro electro mechanical system) (MEMS) manufacturings, the demand of positioning system that movement executing mechanism is had characteristics such as system accuracy height, movement velocity are fast, stable working is urgent day by day.At present, the fine-limit work platform mainly adopts versions such as linear electric motors, ball-screw and magnetic levitation to realize precision positioning in field of micro-Na manufacture.Yet directly use the linear motor driving mode, it is simple in structure, but needs accurate linear electric motors, and control is also very complicated, and that is that all right is ripe for magnetic levitation technology, and commercial Application also needs to solve many problems.In commercial Application, extensively adopt precision ball screw to cooperate the version of high-resolution gration chi to realize the displacement precision positioning, and right-angled intersection superimposed type structure is mainly adopted in the precision positioning of utilization ball-screw realization X, Y two-dimensional directional, this structure is equal to cantilever beam structure, exist Z to amount of deflection, directly cause the inhomogeneity of micro-nano photoetching impression micro/nano level characteristic dimension figure.Along with Gas Bearing Technology is increasingly mature, air-flotation workbench also begins to be applied in every field gradually, air-float guide rail is a kind of application form of gas bearing, half levitation gas guide rail is a kind of special shape of air-float guide rail, it has characteristics such as speed is fast, precision is high, rigidity is big, rubbing wear is little, friction force is constant, now uses widely abroad.
Summary of the invention
At the inhomogeneity of the micro/nano level characteristic dimension figure of micro-nano photoetching coining pattern and existing right-angled intersection superimposed type ball-screw displacement location structure Z problem to amount of deflection, the objective of the invention is to, a kind of Pneumatic semi-suspension two-freedom co-baseplane motion workbench of high speed and large stroke is provided, to have right-angled intersection superimposed type ball-screw displacement location structure now and improve design, make that the spigot surface of worktable and two kinematic axiss is the sustained height plane, do not exist Z to amount of deflection, and in the position probing process, do not produce Abbe error.
In order to realize above-mentioned task, the present invention takes following technical solution:
A kind of Pneumatic semi-suspension two-freedom co-baseplane motion workbench of high speed and large stroke, comprise pedestal, it is characterized in that: X-axis motion module, Y-axis motion module and X, Y are installed to position detecting device on pedestal, wherein, the X-axis motion module is positioned within the Y-axis motion module;
The Y-axis motion module is driven to electric rotating machine by Y, and by the line slideway guiding that is fixed on the pedestal; The X-axis motion module is driven to electric rotating machine by X, and Y-axis motion module and X-axis motion module are inside and outside two-layer distribution, same plane of movement; X, Y are used for respectively the position signalling of control X-axis motion module and Y-axis motion module in real time to position detecting device; And by separately travel switch controlled motion block motion scope;
Described X-axis motion module is mainly by the flexible hinge web joint, web joint, nut, leading screw support carriers, the leading screw hold-down support, shaft coupling, X-axis electric rotating machine, ball-screw, motor fixed rack, pre-compressed spring, worktable, right baffle plate, right baffle-plate, air admission hole, negative pressure cavity, air film chamber, first travel switch, top board, base plate constitutes; The X-axis electric rotating machine is fixed by the motor fixed rack that is installed on the Y-axis left slider frame, and the X-axis ball-screw adopts an end to fix the end supporting way that moves about by leading screw hold-down support, leading screw support carriers and is fixed on the Y-axis motion module; Pre-compressed spring one end is fixed on the left slider frame, on the other end stationary work-table;
The Y-axis motion module is mainly by the right slider frame of Y-axis, bogie side frame outside the Y-axis left slider frame, guide rail, bogie side frame in the guide rail, left line slideway, right line slideway, pre-compressed spring, Y-axis electric rotating machine, motor fixed rack, shaft coupling, leading screw support carriers, leading screw hold-down support, the Y-axis ball-screw, nut, web joint, second travel switch, X-axis left side rail plate, the right rail plate of X-axis constitutes; Electric rotating machine is installed on the pedestal by motor fixed rack; The Y-axis ball-screw adopts an end to fix the end supporting way that moves about by leading screw hold-down support, leading screw support carriers and is fixed on the pedestal;
X, Y to position detecting device mainly by X to the grating chi, X is to grating reading head, Y is to the grating chi, Y constitutes to grating reading head; Wherein, Y is fixed on the pedestal to the grating chi, and Y is fixed in the right slider frame downside of Y-axis to grating reading head; X is fixed in the guide rail on the bogie side frame to the grating chi, and Y is to grating reading head stationary work-table left side;
Described first travel switch is fixed on the both sides of the outer bogie side frame of guide rail; Worktable and pedestal adopt big basal plane as the workplace that partly suspends, and form one deck air film between worktable base plate and the pedestal, to reduce the pressure of load to pedestal;
Described second travel switch is fixed on the both sides of pedestal; The bogie side frame inboard is mounted with right rail plate of X-axis and X-axis left side rail plate respectively in outer bogie side frame of guide rail and the guide rail, and pre-compressed spring one end is fixed on the pedestal, and the other end is fixed on the outer bogie side frame of guide rail, with the issuable gap of leading screw in the cancellation module motion process.
The Pneumatic semi-suspension two-freedom co-baseplane motion workbench of high speed and large stroke of the present invention adopt respectively electric rotating machine and ball-screw driven in synchronism X, Y-axis motion module realize two coordinates accurately location and precise motion.This worktable can be used for the aspects such as photoetching technique, little manufacturing, measuring surface form and ultraprecise measurement of coordinates of semiconductor and ultraprecise processing.Its range can arrive 250mm * 250mm, and bearing accuracy can reach 5 μ m, and repetitive positioning accuracy can reach 1 μ m, and maximal rate is 0.25m/s.
The Pneumatic semi-suspension two-freedom co-baseplane worktable of high speed and large stroke disclosed by the invention, its Y-axis motion module adopt monolateral feed screw nut to drive, the driven in synchronism control consistency problem of avoiding bilateral driving to cause.And adopt high-accuracy rolling guide mechanism.Reduce mechanism gap and wriggling error.The X-axis motion module adopts traditional rail plate guiding, the stainless steel bar that grinds with high precision is as rail plate, slidingsurface at guide rail carries out surface treatment, and the film of compound one deck low-friction coefficient reduces force of sliding friction, to eliminate the issuable crawling exercises of mechanism's low-speed motion.
The Pneumatic semi-suspension two-freedom co-baseplane worktable of high speed and large stroke disclosed by the invention, its X-axis motion module adopts the Pneumatic semi-suspension guide rail structure, and worktable is carrying out surface treatment with the pedestal contact interface, reduces friction factor between contact interface.Worktable and pedestal adopt big basal plane as the workplace that partly suspends, and the worktable base plate has air admission hole, negative pressure cavity, the air film chamber, by control air pressure, flow worktable load is unloaded, thereby reduce force of sliding friction and deformation extent between the interface, improve load-bearing capacity and rigidity.
The Pneumatic semi-suspension two-freedom co-baseplane motion workbench of high speed and large stroke disclosed by the invention, adopt cobasis face structure, make worktable and two kinematic axis equal altitudes, greatly reduce the influence of X, Y two Abbe error in the position probing process, the Z that has eliminated original right-angled intersection superimposed type structure existence is to amount of deflection.Adopt the big flat guide structure of Pneumatic semi-suspension to effectively raise the rigidity and the load-bearing capacity of worktable.The position signalling of the accurate real-time feedback worktable of linear grating is realized the full cut-off circulation position control of positioning system.This Workbench base adopts the grouan manufacturing, has that wearing quality is strong, elastic modulus big, good rigidity, and characteristics such as linear expansion coefficient is little, good anti-vibration are suitable as the propping material of precision stage very much.
Description of drawings
Accompanying drawing 1～Fig. 6 (a, b) is a Pneumatic semi-suspension precision stage structural representation.Wherein:
Fig. 1 is the one-piece construction synoptic diagram of precision stage of the present invention.
Fig. 2 is the vertical view of worktable of the present invention.
Fig. 3 is the A-A view of Fig. 2.
Fig. 4 a is an I view among Fig. 3---Pneumatic semi-suspension guide rail partial enlarged view.
Fig. 4 b is a J view among Fig. 3---Y-axis motion module position detecting device partial enlarged view.
Fig. 4 c is an X-axis motion module flexible hinge web joint synoptic diagram.
Fig. 5 is the B-B view of Fig. 2.
Fig. 6 a is an X-axis motion module rail plate synoptic diagram.
Fig. 6 b is a H view among Fig. 5, i.e. X-axis motion module position detecting device partial enlarged view.
Symbol in the accompanying drawing is represented respectively:
1.X the axle motion module, 101. flexible hinge web joints, 102. web joints, 103. nuts, 104a. the leading screw support carriers, 104b. leading screw hold-down support, 104c. deep groove ball bearing, 104d. taper roll bearing, 105. shaft coupling, 106.X axle electric rotating machine, 107. ball-screws, 108. motor fixed rack, 109. pre-compressed springs, 110. worktable, 111a. right baffle plate, 111b. right baffle-plate, 112a. air admission hole 112b. negative pressure cavity 112c. air film chamber, 113. travel switch, 114. top boards, 115. base plates;
2.Y the axle motion module, the right slider frame of 201.Y axle, 202.Y axle left slider frame, 203. the outer bogie side frame of guide rail, 204. bogie side frame in the guide rail, 205a. left side line slideway, the right line slideway of 205b., 205c. right slide block, 205b. left slider, 206. pre-compressed springs, 207.Y axle electric rotating machine, 208. motor fixed rack, 209. shaft coupling, 210a leading screw support carriers, 210b. leading screw hold-down support, 211.Y axle ball-screw, 212. nut, 213. web joints, 214. travel switches, 215a. left rail plate, the right rail plate of 215b.;
3. pedestal; 4a.X to the grating chi, 4b.X is to grating reading head, 4c.Y is to the grating chi, and 4d.Y is to grating reading head.
Further describe in detail of the present invention below in conjunction with accompanying drawing.
Embodiment
Referring to accompanying drawing.Fig. 1 is the one-piece construction synoptic diagram of precision stage, Fig. 2 is the vertical view of worktable, Fig. 3 is the A-A view of Fig. 2, Fig. 4 a is an I view among Fig. 3---Pneumatic semi-suspension guide rail partial enlarged view, Fig. 4 b is a J view among Fig. 3---Y-axis motion module position detecting device partial enlarged view, Fig. 4 c is an X-axis motion module flexible hinge web joint synoptic diagram, Fig. 5 is the B-B view of Fig. 2, Fig. 6 a is an X-axis motion module rail plate synoptic diagram, Fig. 6 b is an X-axis motion module position detecting device partial enlarged view.
The Pneumatic semi-suspension two-freedom co-baseplane worktable of high speed and large stroke of the present invention, its Y-axis motion module 2 and X-axis motion module 1 are installed on the same pedestal 3, form the contour two-degrees-of-freedom plane motion worktable of two kinematic axiss.Its Y-axis motion module 2 adopts monolateral feed screw nut to drive, the driven in synchronism control consistency problem of avoiding bilateral driving to cause.X-axis motion module 1 adopts traditional rail plate and Pneumatic semi-suspension guide rail structure combining, reduces the force of sliding friction between frictional interface, eliminates the low speed jerking motion phenomenon, improves the load-bearing capacity and the rigidity of worktable.This worktable is inside and outside two-layer, and the contour structure of worktable and kinematic axis has better dynamic performance, higher bearing accuracy.
The basic functional principle of this worktable is: X to electric rotating machine 106 with Y to electric rotating machine 207 respectively as the diaxon driver, the energising back is controlled its motion respectively according to motion control card.Electric rotating machine transmits moment of torsion and gives leading screw, and leading screw drives the precompressed nut that connects with X, Y-axis motion module respectively, and then controls two motion module and move in movement travel; The X that X, Y are provided with in position detecting device 4 is to grating chi 4a, X to grating reading head 4b and Y to grating chi 4c, Y is to the grating reading head 4d position signalling of control X-axis motion module 1 and Y-axis motion module 2 respectively in real time, the big stroke of realization system, at a high speed, high acceleration micron precision location.
Referring to shown in Figure 1: the present invention is a kind of Pneumatic semi-suspension two-freedom co-baseplane motion workbench of high speed and large stroke, comprises that pedestal 3, X-axis motion module 1, Y-axis motion module 2 and X, Y are to position detecting device 4.Y-axis motion module 2 is driven to feed screw nut by Y to electric rotating machine by Y, and by the line slideway guiding, line slideway is fixed on the pedestal 3.X-axis motion module 1 is positioned within the Y-axis motion module 2, is driven to feed screw nut by X to electric rotating machine by X, and pedestal 3 is close in the bottom surface of worktable 110.Two motion module are inside and outside two-layer distribution, same plane of movement.
Shown in Fig. 2, Fig. 4 b, Fig. 5, Fig. 6 a: the Y-axis motion module is mainly by the right slider frame 201 of Y-axis, Y-axis left slider frame 202, the outer bogie side frame 203 of guide rail, bogie side frame 204 in the guide rail, left line slideway 205a, right line slideway 205b, pre-compressed spring 206, Y-axis electric rotating machine 207, motor fixed rack 208, shaft coupling 209, leading screw support carriers 210a, leading screw hold-down support 210b, Y-axis ball-screw 211, nut 212, web joint 213, travel switch 214, X-axis left side rail plate 215a, the right rail plate 215b of X-axis constitutes.Electric rotating machine 207 is installed on the pedestal 3 by motor fixed rack 208, and Y-axis ball-screw 211 adopts an end to fix the end supporting way that moves about by leading screw hold-down support 210b, leading screw support carriers 210a and is fixed on the pedestal 3.Y is fixed on the pedestal 3 to grating chi 4c, and Y is fixed in right slider frame 201 downsides of Y-axis to grating reading head 4d.Travel switch 214 is fixed on the both sides of pedestal 3.Pre-compressed spring 206 1 ends are fixed on the pedestal 3, and an end is fixed in the outer bogie side frame 203 of guide rail, is mainly used in the issuable gap of leading screw in the cancellation module motion process.The outer bogie side frame 203 of guide rail, bogie side frame 204 inboards are mounted with the right rail plate 215b of X-axis, X-axis left side rail plate 215a respectively in the guide rail.The Y-axis motion module is controlled Y to movement position by Y in real time to grating chi 4c, read head 4d, and limits its largest motion scope by travel switch 214.
Shown in Fig. 3, Fig. 4 a, Fig. 4 c, Fig. 5, Fig. 6 b, X-axis motion module 1 is mainly by flexible hinge web joint 101, web joint 102, nut 103, leading screw support carriers 104a, leading screw hold-down support 104b, shaft coupling 105, X-axis electric rotating machine 106, ball-screw 107, motor fixed rack 108, pre-compressed spring 109, worktable 110, right baffle plate 111a, right baffle-plate 111b, air admission hole 112a, negative pressure cavity 112b, air film chamber 112c, travel switch 113, top board 114, base plate 115 constitutes.X-axis electric rotating machine 106 is fixing by the motor fixed rack 108 that is installed on the Y-axis left slider frame 202, and X-axis ball-screw 107 adopts an end to fix the end supporting way that moves about by leading screw hold-down support 104b, leading screw support carriers 104a and is fixed on the Y-axis motion module.Pre-compressed spring 109 1 ends are fixed on the left slider frame 202, on the end stationary work-table 110, are mainly used in and eliminate the issuable gap of leading screw in the working table movement process.X is fixed in the guide rail on the bogie side frame 204 to grating chi 4a, and X is to grating reading head 4b stationary work-table 110 left sides.Travel switch 113 is fixed on the both sides of the outer bogie side frame 203 of guide rail.Worktable 110 adopts big basal plane as the workplace that partly suspends with pedestal 3, worktable base plate 115 has air admission hole 112a, negative pressure cavity 112b, air film chamber 112c can unload worktable load by control air pressure, flow in the working table movement process, can close air admission hole 112a when worktable is static, open negative pressure cavity 112b, make to form negative pressure in the air film chamber, make worktable enter locking state, stop the issuable crawl of worktable.The right baffle plate 111a of worktable 110 bases wherein, right baffle-plate 111b, top board 114, base plate 115 connects and composes in turn.Pass through flexible hinge web joint 101 by worktable 110, web joint 102 and ball-screw 107, precompressed nut 103 links.Flexible hinge web joint 101 is square crossing and axle intensity high shaft flexible hinge longitudinally, be characterized in the longitudinal strength height, and other two directions are flexible strong, and this has promptly effectively been avoided issuable error in leading screw installation, the motion, has guaranteed the longitudinal leadscrew precision again.The X-axis motion module is in real time controlled X to movement position to grating chi 4a, X to grating reading head 4b by X, and limits its largest motion scope by travel switch 113.
The Pneumatic semi-suspension two-freedom co-baseplane worktable of high speed and large stroke of the present invention, its Y-axis motion module adopt monolateral feed screw nut to drive, the driven in synchronism control consistency problem of avoiding bilateral driving to cause.And adopt high-accuracy rolling guide mechanism, reduce mechanism gap and wriggling error.The X-axis motion module adopts traditional rail plate and Pneumatic semi-suspension guide rail structure combining, reduces the force of sliding friction between frictional interface, eliminates the low speed jerking motion phenomenon, improves the load-bearing capacity and the rigidity of worktable.The worktable range can arrive 250mm * 250mm, and bearing accuracy can reach 5 μ m, and repetitive positioning accuracy can reach 1 μ m, and maximal rate is 0.25m/s.The inside and outside two-layer distribution of this worktable makes the contour structure of worktable and kinematic axis have better dynamic performance, higher bearing accuracy.
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| CN200710018229A CN101118377B (en) | 2007-10-26 | 2007-10-26 | Pneumatic semi-suspended two-degree-of-freedom common-base motion table |
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| CN200710018229A CN101118377B (en) | 2007-10-26 | 2007-10-26 | Pneumatic semi-suspended two-degree-of-freedom common-base motion table |
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