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CN100550583C - 平面平台 - Google Patents

平面平台 Download PDF

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Publication number
CN100550583C
CN100550583C CNB2005101267519A CN200510126751A CN100550583C CN 100550583 C CN100550583 C CN 100550583C CN B2005101267519 A CNB2005101267519 A CN B2005101267519A CN 200510126751 A CN200510126751 A CN 200510126751A CN 100550583 C CN100550583 C CN 100550583C
Authority
CN
China
Prior art keywords
mover
moving body
magnetic pole
rotation
moving
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CNB2005101267519A
Other languages
English (en)
Chinese (zh)
Other versions
CN1777003A (zh
Inventor
佐野直人
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ushio Denki KK
Original Assignee
Ushio Denki KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ushio Denki KK filed Critical Ushio Denki KK
Publication of CN1777003A publication Critical patent/CN1777003A/zh
Application granted granted Critical
Publication of CN100550583C publication Critical patent/CN100550583C/zh
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/956—Inspecting patterns on the surface of objects
    • G01N21/95692—Patterns showing hole parts, e.g. honeycomb filtering structures
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N35/00—Automatic analysis not limited to methods or materials provided for in any single one of groups G01N1/00 - G01N33/00; Handling materials therefor
    • G01N35/10—Devices for transferring samples or any liquids to, in, or from, the analysis apparatus, e.g. suction devices, injection devices
    • G01N35/1009—Characterised by arrangements for controlling the aspiration or dispense of liquids
    • G01N35/1011—Control of the position or alignment of the transfer device
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C2202/00—Solid materials defined by their properties
    • F16C2202/30—Electric properties; Magnetic properties
    • F16C2202/40—Magnetic
    • F16C2202/42—Magnetic soft-magnetic, ferromagnetic
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/26—Scanned objects
    • G01N2291/269—Various geometry objects
    • G01N2291/2696—Wheels, Gears, Bearings

Landscapes

  • Immunology (AREA)
  • Pathology (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Linear Motors (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Details Of Measuring And Other Instruments (AREA)
  • Control Of Linear Motors (AREA)
  • Machine Tool Units (AREA)
CNB2005101267519A 2004-11-18 2005-11-18 平面平台 Expired - Fee Related CN100550583C (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP334238/2004 2004-11-18
JP2004334238A JP4581641B2 (ja) 2004-11-18 2004-11-18 平面ステージ

Publications (2)

Publication Number Publication Date
CN1777003A CN1777003A (zh) 2006-05-24
CN100550583C true CN100550583C (zh) 2009-10-14

Family

ID=36628096

Family Applications (1)

Application Number Title Priority Date Filing Date
CNB2005101267519A Expired - Fee Related CN100550583C (zh) 2004-11-18 2005-11-18 平面平台

Country Status (4)

Country Link
JP (1) JP4581641B2 (ja)
KR (1) KR100904345B1 (ja)
CN (1) CN100550583C (ja)
TW (1) TW200616752A (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102998909A (zh) * 2011-09-16 2013-03-27 优志旺电机株式会社 曝光装置

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008145140A (ja) * 2006-12-06 2008-06-26 Ushio Inc 磁束センサおよび磁束センサを備えた平面ステージ
NL2008379A (en) * 2011-03-30 2012-10-02 Asml Netherlands Bv Planar motor and lithographic apparatus comprising such planar motor.
WO2012160600A1 (en) * 2011-05-24 2012-11-29 Three Eye Co., Ltd. Stator coreless reciprocating transverse flux machine
JP7192518B2 (ja) 2019-01-22 2022-12-20 ウシオ電機株式会社 平面ステージ装置

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0824437B2 (ja) * 1990-02-20 1996-03-06 松下電工株式会社 位置決め装置
JP2001203140A (ja) * 2000-01-20 2001-07-27 Nikon Corp ステージ装置、露光装置及びデバイス製造方法
KR100383579B1 (ko) * 2000-12-12 2003-05-14 한국전기연구원 자기력을 이용한 소형 이동자의 3차원 위치 제어 시스템
JP2002354865A (ja) * 2001-05-22 2002-12-06 Yokogawa Electric Corp 位置決め装置
KR100589647B1 (ko) * 2004-06-04 2006-06-14 광주과학기술원 초소형 구동스테이지와 그 구동방법

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102998909A (zh) * 2011-09-16 2013-03-27 优志旺电机株式会社 曝光装置
CN102998909B (zh) * 2011-09-16 2016-08-31 优志旺电机株式会社 曝光装置

Also Published As

Publication number Publication date
KR100904345B1 (ko) 2009-06-23
JP2006149051A (ja) 2006-06-08
JP4581641B2 (ja) 2010-11-17
CN1777003A (zh) 2006-05-24
KR20060055306A (ko) 2006-05-23
TWI330118B (ja) 2010-09-11
TW200616752A (en) 2006-06-01

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Legal Events

Date Code Title Description
C06 Publication
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
C14 Grant of patent or utility model
GR01 Patent grant
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20091014

Termination date: 20201118

CF01 Termination of patent right due to non-payment of annual fee