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TW200616752A - Planar stage - Google Patents

Planar stage

Info

Publication number
TW200616752A
TW200616752A TW094124140A TW94124140A TW200616752A TW 200616752 A TW200616752 A TW 200616752A TW 094124140 A TW094124140 A TW 094124140A TW 94124140 A TW94124140 A TW 94124140A TW 200616752 A TW200616752 A TW 200616752A
Authority
TW
Taiwan
Prior art keywords
moving body
movers
moving
planar stage
moved
Prior art date
Application number
TW094124140A
Other languages
Chinese (zh)
Other versions
TWI330118B (en
Inventor
Naoto Sano
Original Assignee
Ushio Electric Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ushio Electric Inc filed Critical Ushio Electric Inc
Publication of TW200616752A publication Critical patent/TW200616752A/en
Application granted granted Critical
Publication of TWI330118B publication Critical patent/TWI330118B/zh

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/956—Inspecting patterns on the surface of objects
    • G01N21/95692—Patterns showing hole parts, e.g. honeycomb filtering structures
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N35/00—Automatic analysis not limited to methods or materials provided for in any single one of groups G01N1/00 - G01N33/00; Handling materials therefor
    • G01N35/10—Devices for transferring samples or any liquids to, in, or from, the analysis apparatus, e.g. suction devices, injection devices
    • G01N35/1009—Characterised by arrangements for controlling the aspiration or dispense of liquids
    • G01N35/1011—Control of the position or alignment of the transfer device
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C2202/00—Solid materials defined by their properties
    • F16C2202/30—Electric properties; Magnetic properties
    • F16C2202/40—Magnetic
    • F16C2202/42—Magnetic soft-magnetic, ferromagnetic
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/26—Scanned objects
    • G01N2291/269—Various geometry objects
    • G01N2291/2696—Wheels, Gears, Bearings

Landscapes

  • Immunology (AREA)
  • Pathology (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Linear Motors (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Details Of Measuring And Other Instruments (AREA)
  • Control Of Linear Motors (AREA)
  • Machine Tool Units (AREA)

Abstract

This invention is to provide a moving body in the planar stage to linearly move in XY directions while it is in a state of rotation. The moving body is moving on the planar stage' platen, on which salient poles are arranged in a grid pattern. The movers 20c, 20d moving in the Y direction are mounted, via rotating bearings 24, on the X-axis of the moving body 30 at two positions, and the movers 20a, 20b moving in the X-direction are attached to a plate 25 and mounted, via a rotating bearing 26, to the moving body 30. In order to move the moving body 30 in the X or Y direction, the movers 20a, 20b or 20c, 20d are moved in the same direction. To rotate the moving body 30, the movers 20c, 20d are moved in the opposite direction, and meanwhile the magnetic poles of the movers 20a to 20d are rotated towards the salient poles of the platen 10 so that the moving body 30 can be moved simultaneously in the XY directions.
TW094124140A 2004-11-18 2005-07-15 Planar stage TW200616752A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2004334238A JP4581641B2 (en) 2004-11-18 2004-11-18 Plane stage

Publications (2)

Publication Number Publication Date
TW200616752A true TW200616752A (en) 2006-06-01
TWI330118B TWI330118B (en) 2010-09-11

Family

ID=36628096

Family Applications (1)

Application Number Title Priority Date Filing Date
TW094124140A TW200616752A (en) 2004-11-18 2005-07-15 Planar stage

Country Status (4)

Country Link
JP (1) JP4581641B2 (en)
KR (1) KR100904345B1 (en)
CN (1) CN100550583C (en)
TW (1) TW200616752A (en)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008145140A (en) * 2006-12-06 2008-06-26 Ushio Inc Planar stage with magnetic flux sensor and magnetic flux sensor
NL2008379A (en) * 2011-03-30 2012-10-02 Asml Netherlands Bv Planar motor and lithographic apparatus comprising such planar motor.
WO2012160600A1 (en) * 2011-05-24 2012-11-29 Three Eye Co., Ltd. Stator coreless reciprocating transverse flux machine
JP5556774B2 (en) 2011-09-16 2014-07-23 ウシオ電機株式会社 Exposure equipment
JP7192518B2 (en) 2019-01-22 2022-12-20 ウシオ電機株式会社 Flat stage equipment

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0824437B2 (en) * 1990-02-20 1996-03-06 松下電工株式会社 Positioning device
JP2001203140A (en) * 2000-01-20 2001-07-27 Nikon Corp Stage device, aligner and device manufacturing method
KR100383579B1 (en) * 2000-12-12 2003-05-14 한국전기연구원 3-dimensional position control system for small mover using magnetic force
JP2002354865A (en) * 2001-05-22 2002-12-06 Yokogawa Electric Corp Positioning device
KR100589647B1 (en) * 2004-06-04 2006-06-14 광주과학기술원 Ultra-compact drive stage and its driving method

Also Published As

Publication number Publication date
KR100904345B1 (en) 2009-06-23
JP2006149051A (en) 2006-06-08
CN100550583C (en) 2009-10-14
JP4581641B2 (en) 2010-11-17
CN1777003A (en) 2006-05-24
KR20060055306A (en) 2006-05-23
TWI330118B (en) 2010-09-11

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Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees