CN100523754C - Optical fibre pressure intensity sensor based on beam of constant strength - Google Patents
Optical fibre pressure intensity sensor based on beam of constant strength Download PDFInfo
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Abstract
一种基于等强度梁的光纤压强传感器,包括:一支撑筒,为一筒体,为光纤压强传感器的主体,其下壁面相对的位置开有两圆孔;一膜片固定在支撑筒的下端;一端盖安装在支撑筒的上端,用于密封支撑筒;一等强度梁为一L形,该等强度梁的一面固定在支撑筒内的侧壁上,另一面与膜片之间有一间隙,该等强度梁与膜片中心处之间有一凸台,该凸台用于传递膜片的形变;一光纤光栅固定在等强度梁与膜片之间的底面上,该光纤光栅两端的尾纤分别从支撑筒上的两圆孔引出;一温度补偿光纤光栅固定在端盖的内面上,该温度补偿光纤光栅一端的尾纤从支撑筒上的一圆孔引出。
An optical fiber pressure sensor based on an equal-intensity beam, comprising: a support cylinder, which is a cylinder body, which is the main body of the optical fiber pressure sensor, and two circular holes are opened at opposite positions on the lower wall surface; a diaphragm is fixed on the lower end of the support cylinder ; One end cover is installed on the upper end of the support tube to seal the support tube; the first-class strength beam is L-shaped, one side of the equal-strength beam is fixed on the side wall inside the support tube, and there is a gap between the other side and the diaphragm , there is a boss between the equal-intensity beam and the center of the diaphragm, which is used to transmit the deformation of the diaphragm; a fiber grating is fixed on the bottom surface between the equal-intensity beam and the diaphragm, and the tails at both ends of the fiber grating The fibers are respectively led out from two round holes on the support tube; a temperature compensation fiber grating is fixed on the inner surface of the end cover, and the pigtail at one end of the temperature compensation fiber grating is led out from a round hole on the support tube.
Description
技术领域 technical field
本发明涉及光纤传感器技术领域,尤其涉及一种基于等强度梁的光纤压强传感器。The invention relates to the technical field of optical fiber sensors, in particular to an optical fiber pressure sensor based on equal-intensity beams.
背景技术 Background technique
光纤传感器与对应的常规传感器相比,在灵敏度、动态范围、可靠性等方面具有明显的优势,在建筑、石油、军事应用领域显得尤为突出。Compared with the corresponding conventional sensors, optical fiber sensors have obvious advantages in terms of sensitivity, dynamic range, reliability, etc., especially in the fields of construction, petroleum, and military applications.
光纤压强传感器是利用光纤的传光特性以及它与周围环境相互作用产生的种种调制效应,探测周围环境压强的仪器。它与传统的压强传感器相比,有以下主要优势:压强灵敏度高、不受电磁干扰、重量轻、耐高温、结构小巧、可靠型高,以及兼具信息传感及光信息传输于一身等优点。The optical fiber pressure sensor is an instrument that detects the pressure of the surrounding environment by using the light transmission characteristics of the optical fiber and various modulation effects generated by its interaction with the surrounding environment. Compared with traditional pressure sensors, it has the following main advantages: high pressure sensitivity, no electromagnetic interference, light weight, high temperature resistance, compact structure, high reliability, and the advantages of both information sensing and optical information transmission. .
鉴于光纤压强传感器的如上技术优势,可满足各发达国家在石油、军事等领域的要求,目前已经在此方面积极展开研究。In view of the above technical advantages of optical fiber pressure sensors, they can meet the requirements of various developed countries in the fields of petroleum and military affairs, and research has been actively carried out in this area.
在常见的强度调制型、数字式、光纤光栅式光纤压强传感器中,光纤光栅式光纤压强传感器是目前的主要研究方向。Among the common intensity-modulated, digital, and fiber-optic grating-type fiber-optic pressure sensors, the fiber-optic grating-type fiber-optic pressure sensor is the main research direction at present.
傅海威和傅君眉等人报道了一种光纤光栅压力传感器,是采用在将光纤光栅的一端粘接在线形膜片上进行增敏的办法,通过圆膜片在法线方向的位移来带动光纤光栅产生应变,从而检测压强。这样制作的光纤压强传感器要求预应力粘接光纤,并且采用点式粘接,工艺复杂,线性膜片较薄,对于大压强难于测量,并且对于温度的变化较为敏感。Fu Haiwei and Fu Junmei et al. reported a fiber grating pressure sensor, which uses the method of bonding one end of the fiber grating to the linear diaphragm for sensitization, and drives the fiber grating to generate pressure through the displacement of the circular diaphragm in the normal direction. strain to detect pressure. The optical fiber pressure sensor produced in this way requires prestressed bonding of optical fibers, and adopts point bonding, the process is complicated, the linear diaphragm is thin, it is difficult to measure high pressure, and it is sensitive to temperature changes.
因此,如何简化工艺,提高传感器的压强测量范围,同时消除温度敏感是光纤压强传感器走向实用化必需解决的重要技术之一。Therefore, how to simplify the process, increase the pressure measurement range of the sensor, and eliminate temperature sensitivity is one of the important technologies that must be solved for the practical application of optical fiber pressure sensors.
发明内容 Contents of the invention
要解决的技术问题technical problem to be solved
有鉴于此,本发明的主要目的在于提供一种光纤压强传感器,以减小光纤压强传感器的封装工艺难度,提高传感器的压强测量范围,并进行温度补偿。In view of this, the main purpose of the present invention is to provide an optical fiber pressure sensor to reduce the difficulty of the packaging process of the optical fiber pressure sensor, increase the pressure measurement range of the sensor, and perform temperature compensation.
本发明的技术方案Technical scheme of the present invention
为达到上述目的,本发明的技术方案是这样实现的:In order to achieve the above object, technical solution of the present invention is achieved in that way:
本发明一种基于等强度梁的光纤压强传感器,其特征在于,包括:An optical fiber pressure sensor based on an equal-intensity beam of the present invention is characterized in that it comprises:
一支撑筒,为一筒体,该支撑筒为光纤压强传感器的主体,该支撑筒的下壁面相对的位置开有两圆孔;A support cylinder, which is a cylinder, the support cylinder is the main body of the optical fiber pressure sensor, and the lower wall of the support cylinder is opposite to each other with two round holes;
一膜片,该膜片固定在支撑筒的下端;A diaphragm, the diaphragm is fixed on the lower end of the support cylinder;
一端盖,该端盖安装在支撑筒的上端,用于密封支撑筒;an end cover, which is installed on the upper end of the support tube and used to seal the support tube;
一等强度梁,该等强度梁为一L形,该等强度梁的一面固定在支撑筒内的侧壁上,该等强度梁的另一面与膜片之间有一间隙,该等强度梁与膜片中心处之间有一凸台,该凸台用于传递膜片的形变;First-class strength beams, these strength beams are L-shaped, one side of these strength beams is fixed on the side wall inside the support tube, there is a gap between the other side of these strength beams and the diaphragm, and these strength beams and There is a boss between the center of the diaphragm, which is used to transmit the deformation of the diaphragm;
一光纤光栅,该光纤光栅固定在等强度梁与膜片之间的底面上,该光纤光栅两端的尾纤分别从支撑筒上的两圆孔引出;A fiber grating, the fiber grating is fixed on the bottom surface between the equal-intensity beam and the diaphragm, and the pigtails at both ends of the fiber grating are led out from two circular holes on the support cylinder;
一温度补偿光纤光栅,该温度补偿光纤光栅固定在端盖的内面上,该温度补偿光纤光栅一端的尾纤从支撑筒上的一圆孔引出。A temperature compensation fiber grating, the temperature compensation fiber grating is fixed on the inner surface of the end cover, and the tail fiber at one end of the temperature compensation fiber grating is led out from a circular hole on the support cylinder.
其中所述的膜片与支撑筒为分体结构或为一体结构。Wherein the diaphragm and the supporting cylinder are of a separate structure or an integrated structure.
其中所述的膜片为中心厚、边缘渐薄的结构。The diaphragm described herein is thick in the center and gradually thinner at the edges.
其中所述的等强度梁是通过螺栓或者粘接的方式固定在支撑筒的内壁上。The constant-strength beams are fixed on the inner wall of the support cylinder by means of bolts or bonding.
其中所述的光纤光栅和温度补偿光纤光栅的固定方式是粘接固定。The fiber grating and temperature compensation fiber grating are fixed by bonding.
其中所述的凸台与等强度梁接触的一端开有一槽,用于穿过光纤光栅的尾纤。The end of the boss in contact with the equal-intensity beam has a groove for passing through the pigtail of the fiber grating.
其中所述的支撑筒侧壁的圆孔内进一步安装有圆柱型接头,用于固定引出的光纤光栅与温度补偿光纤光栅的尾纤。The circular hole on the side wall of the support cylinder is further equipped with a cylindrical connector for fixing the fiber grating and the tail fiber of the temperature compensation fiber grating.
其中所述的支撑筒与端盖联接处以及圆柱型接头内涂有高强度密封胶,使支撑筒内部构成密闭的空气腔。Wherein the connection between the support cylinder and the end cover and the inside of the cylindrical joint are coated with high-strength sealant, so that the inside of the support cylinder forms a closed air cavity.
其中所述的端盖与支撑筒材料的热膨胀系数相同。The thermal expansion coefficient of the material of the end cap and the support cylinder is the same.
有益效果Beneficial effect
从上述技术方案可以看出,本发明具有以下有益效果:As can be seen from the foregoing technical solutions, the present invention has the following beneficial effects:
1、工艺简单。通过将光纤光栅粘接于金属表面进行压强检测和温度补偿,减小了工艺难度,使得工艺一致性易于保证。1. The process is simple. By bonding the fiber grating to the metal surface for pressure detection and temperature compensation, the difficulty of the process is reduced, and the consistency of the process is easy to ensure.
2、声压灵敏度便于控制。可以通过调节等强度梁40的厚度、膜片20的厚度、半径等几何参数或者弹性模量等材料参数等来调节光纤压强传感器的灵敏度。2. The sound pressure sensitivity is easy to control. The sensitivity of the optical fiber pressure sensor can be adjusted by adjusting the thickness of the equal-intensity beam 40 , the thickness of the
3、消除了外界温度变化的影响。通过温度补偿光纤光栅60进行了温度补偿,使传感器因外界温度变化引起的偏差被剔除掉。3. Eliminate the influence of external temperature changes. The temperature compensation is performed by the temperature
附图说明 Description of drawings
为使本发明的目的、技术方案和优点更加清楚明白,以下结合具体实施例,并参照附图,对本发明进一步详细说明,其中:In order to make the purpose, technical solutions and advantages of the present invention clearer, the present invention will be further described in detail below in conjunction with specific embodiments and with reference to the accompanying drawings, wherein:
图1为本发明提供的光纤压强传感器的结构剖面示意图。Fig. 1 is a schematic cross-sectional view of the structure of the optical fiber pressure sensor provided by the present invention.
图2为图1中凸台41的示意图。FIG. 2 is a schematic diagram of the
具体实施方式 Detailed ways
如图1所示,图1为本发明提供的基于等强度梁的光纤压强传感器的结构剖面示意图。该光纤压强传感器包括:一支撑筒10,为一筒体,该支撑筒10为光纤压强传感器的主体,该支撑筒10的下壁面相对的位置开有两圆孔11、12;一膜片20,该膜片20固定在支撑筒10的下端,用于感受外界压强;一端盖30,该端盖30安装在支撑筒10的上端,用于密封支撑筒10;一等强度梁40,该等强度梁40为一L形,该等强度梁40的一面固定在支撑筒10内的侧壁上,该等强度梁40的另一面与膜片20之间有一间隙,该等强度梁40与膜片20中心处之间有一凸台41,该凸台41用于将膜片20的形变传递到等强度梁的端部;一光纤光栅50,该光纤光栅50固定在等强度梁40与膜片20之间的底面上,用于感受等强度梁上的应变,该光纤光栅50两端的尾纤分别从支撑筒10上的两圆孔11、12引出;一温度补偿光纤光栅60,该温度补偿光纤光栅60固定在端盖30的内面上,用于感受温度变化,进行温度补偿,该温度补偿光纤光栅60一端的尾纤从支撑筒10上的一圆孔11引出。As shown in FIG. 1 , FIG. 1 is a schematic structural cross-sectional view of an optical fiber pressure sensor based on an equal-intensity beam provided by the present invention. The optical fiber pressure sensor includes: a
膜片20与支撑筒10可以采用不同的加工制作方式使之成为分体结构或为一体结构。并且膜片20为中心厚、边缘渐薄的结构,这样在同样的压强作用下,将会产生更大的变形。The
等强度梁40是通过螺栓或者粘接的方式固定在支撑筒10的内壁上。The equal-strength beam 40 is fixed on the inner wall of the
光纤光栅50和温度补偿光纤光栅60的固定方式是粘接固定。The fiber grating 50 and the temperature compensating
凸台41与等强度梁40接触的一端开有一槽42(图2中),用于穿过光纤光栅50的尾纤。A groove 42 (in FIG. 2 ) is opened at the end of the
支撑筒10侧壁的圆孔11、12内进一步安装有圆柱型接头13、14,用于固定引出的光纤光栅50与温度补偿光纤光栅60的尾纤。
支撑筒10与端盖30联接处以及圆柱型接头13、14内涂有高强度密封胶,使支撑筒10内部构成密闭的空气腔。端盖30与支撑筒10的侧壁具有足够的刚度抵抗外界的压强,而膜片20的厚度一般远远小于支撑筒10侧壁的厚度,因而对外界压强敏感,作为传感元件。The connection between the
当外界有压强作用于传感器上时,膜片20发生形变,向内弯曲,其中心的挠度量通过凸台41传递到等强度梁40的端部,使等强度梁发生弯曲。对于等强度梁,其表面的应变是均匀的,这样就带动粘接在等强度梁40上的光纤光栅50产生均匀的拉应变,从而引起光纤光栅反射波长的变化。对于光纤光栅,其反射波长的变化量与所受应变成正比,故通过检测波长的变化量可以得到外界压强的大小。When external pressure acts on the sensor, the
端盖30与支撑筒10采用热膨胀系数相同的材料制作,当外界的温度发生变化时,由于温度变化引起的光纤光栅反射波长的变化对于传感光栅50和温度补偿光纤光栅60是相同的,故可以通过将其波长的漂移量相减的方法消除温度变化的影响。The
同时,该光纤压强传感器的灵敏度与多项结构和材料参数有关。比如可以通过调节等强度梁40的厚度和使用的材料的弹性模量来改变该光纤压强传感器的灵敏度。再比如可以通过改变膜片20的厚度、半径等几何参数或者膜片20使用的材料的弹性模量等材料参数等来调节该光纤压强传感器的灵敏度。At the same time, the sensitivity of the optical fiber pressure sensor is related to multiple structure and material parameters. For example, the sensitivity of the optical fiber pressure sensor can be changed by adjusting the thickness of the constant intensity beam 40 and the elastic modulus of the material used. For another example, the sensitivity of the optical fiber pressure sensor can be adjusted by changing geometric parameters such as the thickness and radius of the
并且,可以将该光纤压强传感器的光纤光栅50和温度补偿光纤光栅60的尾纤分别与另一光纤压强传感器的传感光纤和温度补偿光纤串联起来,进行多点测量。In addition, the optical fiber grating 50 of the optical fiber pressure sensor and the pigtail fiber of the temperature compensation optical fiber grating 60 can be respectively connected in series with the sensing optical fiber and temperature compensation optical fiber of another optical fiber pressure sensor to perform multi-point measurement.
以上所述的具体实施例,对本发明的目的、技术方案和有益效果进行了进一步详细说明,所应理解的是,以上所述仅为本发明的具体实施例而已,并不用于限制本发明,凡在本发明的精神和原则之内,所做的任何修改、等同替换、改进等,均应包含在本发明的保护范围之内。The specific embodiments described above have further described the purpose, technical solutions and beneficial effects of the present invention in detail. It should be understood that the above descriptions are only specific embodiments of the present invention and are not intended to limit the present invention. Any modifications, equivalent replacements, improvements, etc. made within the spirit and principles of the present invention shall be included within the protection scope of the present invention.
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Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102072787A (en) * | 2010-10-29 | 2011-05-25 | 中国科学院上海光学精密机械研究所 | Temperature self-compensation fiber grating tension sensor |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB2465397C (en) * | 2008-11-17 | 2013-04-10 | Messier Dowty Ltd | Load indicator |
CN101893492A (en) * | 2010-04-06 | 2010-11-24 | 中国地震局地壳应力研究所 | Mutually-clamped optical fiber grating temperature sensor |
CN104567706A (en) * | 2014-12-24 | 2015-04-29 | 北京交通大学 | Method used for detecting stress strain of engineering structure |
CN105509957B (en) * | 2016-01-06 | 2019-03-12 | 中国石油天然气股份有限公司 | Fiber grating pressure sensor |
CN107014299B (en) * | 2017-06-01 | 2019-06-11 | 哈尔滨工业大学 | Fiber Bragg Grating Interlayer Relative Horizontal Displacement Sensor for Road |
CN115046661A (en) * | 2022-05-13 | 2022-09-13 | 中国地质调查局水文地质环境地质调查中心 | Small-size super weak fiber grating pressure sensor |
Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6181851B1 (en) * | 1997-05-29 | 2001-01-30 | E-Tek Dynamics, Inc. | Temperature-compensated optical fiber package |
US6276215B1 (en) * | 1997-12-05 | 2001-08-21 | Optoplan As | Sensor for measuring strain |
US6337932B1 (en) * | 1999-09-09 | 2002-01-08 | Agere Systems Guardian Corp. | Apparatus and method for thermostatic compensation of temperature sensitive devices |
CN1341208A (en) * | 1999-02-24 | 2002-03-20 | 西门子公司 | Bragg grating device for measuring mechanical force, utilization of said device and method for operating the same |
CN2748890Y (en) * | 2004-11-17 | 2005-12-28 | 周智 | Fiber grating ice pressure sensor |
CN1244827C (en) * | 2001-05-29 | 2006-03-08 | 瑞兴科技股份有限公司 | Optical fiber grating temperature compensation device and manufacturing method thereof |
CN1287135C (en) * | 2004-05-19 | 2006-11-29 | 南开大学 | Temperature automaticcompensating optical fiber grating force sensor |
-
2006
- 2006-12-28 CN CNB2006101697530A patent/CN100523754C/en not_active Expired - Fee Related
Patent Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6181851B1 (en) * | 1997-05-29 | 2001-01-30 | E-Tek Dynamics, Inc. | Temperature-compensated optical fiber package |
US6276215B1 (en) * | 1997-12-05 | 2001-08-21 | Optoplan As | Sensor for measuring strain |
CN1341208A (en) * | 1999-02-24 | 2002-03-20 | 西门子公司 | Bragg grating device for measuring mechanical force, utilization of said device and method for operating the same |
US6337932B1 (en) * | 1999-09-09 | 2002-01-08 | Agere Systems Guardian Corp. | Apparatus and method for thermostatic compensation of temperature sensitive devices |
CN1244827C (en) * | 2001-05-29 | 2006-03-08 | 瑞兴科技股份有限公司 | Optical fiber grating temperature compensation device and manufacturing method thereof |
CN1287135C (en) * | 2004-05-19 | 2006-11-29 | 南开大学 | Temperature automaticcompensating optical fiber grating force sensor |
CN2748890Y (en) * | 2004-11-17 | 2005-12-28 | 周智 | Fiber grating ice pressure sensor |
Non-Patent Citations (2)
Title |
---|
温度补偿的悬臂梁光纤光栅力传感研究. 范文龙等.光子学报,第30卷第11期. 2001 * |
高灵敏度的光纤光栅压强传感器. 傅海威等.光学学报,第24卷第2期. 2004 * |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102072787A (en) * | 2010-10-29 | 2011-05-25 | 中国科学院上海光学精密机械研究所 | Temperature self-compensation fiber grating tension sensor |
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