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CN100353253C - Preparation method of lithium niobate crystal micro-region periodic domain structure - Google Patents

Preparation method of lithium niobate crystal micro-region periodic domain structure Download PDF

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CN100353253C
CN100353253C CNB2005101115959A CN200510111595A CN100353253C CN 100353253 C CN100353253 C CN 100353253C CN B2005101115959 A CNB2005101115959 A CN B2005101115959A CN 200510111595 A CN200510111595 A CN 200510111595A CN 100353253 C CN100353253 C CN 100353253C
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reflective mirror
total reflective
wafer
femtosecond laser
light beam
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CN1786804A (en
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朋汉林
潘守夔
姜本学
林礼煌
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Shanghai Institute of Optics and Fine Mechanics of CAS
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Shanghai Institute of Optics and Fine Mechanics of CAS
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Abstract

一种铌酸锂晶体微区周期性畴结构的制备方法,该方法的步骤是:对LiNbO3单晶进行定向,垂直于晶轴方向为面切割成长方体晶片,晶片表面抛光,光洁度优于Ⅲ级;将所述的LiNbO3晶片置于相干飞秒激光装置的相干场靶位上,使相干的飞秒激光垂直所述的LiNbO3晶片的C轴入射辐照,入射能量在100~500mw,辐照时间超过30秒。利用本发明方法可在铌酸锂晶体中制备出微区周期性畴结构。

Figure 200510111595

A method for preparing a micro-region periodic domain structure of a lithium niobate crystal, the method comprising the following steps: orienting a LiNbO3 single crystal, cutting the surface perpendicular to the crystal axis into a rectangular parallelepiped wafer, polishing the wafer surface, and having a finish better than grade III; placing the LiNbO3 wafer on a coherent field target of a coherent femtosecond laser device, and irradiating the coherent femtosecond laser perpendicular to the C axis of the LiNbO3 wafer, with an incident energy of 100 to 500 mw and an irradiation time of more than 30 seconds. The method of the invention can prepare a micro-region periodic domain structure in a lithium niobate crystal.

Figure 200510111595

Description

The preparation method of micro area periodicity domain structure of lithium columbate crystal
Technical field
The present invention relates to lithium columbate crystal, is a kind of preparation method of micro area periodicity domain structure of lithium columbate crystal.Utilize relevant femtosecond laser and lithium columbate crystal to interact and make the existing electricdomain of lithium columbate crystal be modulated into the periodically domain structure of microcell of frequency inverted performance.
Background technology
1962, people such as Bloembergen propose accurate phase matching (Quasi Phase Matching, be called for short QPM) theory: the periodic modulation of the non-linear susceptibility by crystal remedies because first-harmonic that dispersion of refractive index causes and the position phase mismatch between the harmonic wave, with the enhancing of acquisition nonlinear optical effect.Replace homogeneous material with fine structure material, the enhancing with QPM realizes the laser freuqency doubling transition effects have very big attractive force technically, so the preparation of periodically domain structure is the focus that people study always.Formerly in the technology, the M.Yamada of Sony Corporation etc. utilizes extra electric field polarization method (referring to M.Yamada etc., Appl.Phys.Lett, 62 volumes, 435-436 page or leaf, 1993) to realize lithium niobate domain structure counter-rotating first.Though the method has many good qualities, also there are some shortcomings:
1. owing to the coercive field in the lithium columbate crystal under the room temperature is very big, greater than the voltage breakdown of lithium niobate, extra electric field requires very high;
2. the farmland returing cycle and the dutycycle that make are wayward, and the cycle has any problem when littler development;
3. the cycle is difficult to accomplish very little, can only reach micron dimension.Mainly be to be subjected to the electrode mask to make the restriction of precision.
For this reason, developed a lot of new preparation methods in recent years again, (referring to Chen Yunlin etc., Optics Communications.188 volume, 359-364 page or leaf, calendar year 2001) are of greatest concern with induced with laser extra electric field polarization method.But also just reduced the coercive field of lithium columbate crystal,, still had above shortcoming owing to also be to use extra electric field.
Summary of the invention
The purpose of this invention is to provide a kind of method for preparing micro area periodicity domain structure of lithium columbate crystal.
The method that the present invention is used to prepare micro area periodicity domain structure of lithium columbate crystal is actually in the lithium columbate crystal single domain, and the femtosecond laser that interferes with each other by two bundles makes existing electricdomain property performance period polarization reversal in the crystal at the modulation highfield that the C direction forms.
Technical solution of the present invention is as follows:
A kind of preparation method of micro area periodicity domain structure of lithium columbate crystal is characterized in that this method comprises the following steps:
1. to LiNbO 3Monocrystalline carries out orientation, is that face cuts into rectangular body wafer perpendicular to crystalline axis direction, the wafer surface polishing, and smooth finish is better than the III level;
2. with described LiNbO 3Wafer places on the coherent field target position of relevant femtosecond laser device, makes the vertical described LiNbO of relevant femtosecond laser 3The C axle incident irradiation of wafer, projectile energy is at 100~500mw, and exposure time was above 30 seconds.
Described femtosecond laser is that pulsewidth is 60fs, and centre wavelength is 800nm, and frequency is the femtosecond laser of mixing the output of titanium sapphire laser of 1000Hz.
The formation of employed femtosecond laser coherent device is among the preparation method of described micro area periodicity domain structure of lithium columbate crystal: comprise a femto-second laser, on the light path of advancing of the femtosecond laser that this femto-second laser is exported, be first total reflective mirror successively, first aperture, second aperture, second total reflective mirror and first spectroscope, forming folded light beam and transmitted light beam through this first spectroscope, is first half-wave plate successively on the light path of described transmitted light beam, first polaroid, the 3rd total reflective mirror, the 4th total reflective mirror, first corner cube mirror of forming by the 5th total reflective mirror and the 6th total reflective mirror, first lens and second spectroscope; Second corner cube mirror, the 11 total reflective mirror, the 12 total reflective mirror, second lens and second spectroscope that are second half-wave plate, second polaroid, the 7th total reflective mirror, the 8th total reflective mirror successively on the light path of described folded light beam, form by the 9th total reflective mirror and the tenth total reflective mirror, after this second spectroscope and the common focus zone of first lens and second lens be LiNbO 3The crystal target position that wafer is provided with, described first corner cube mirror or second corner cube mirror are positioned on the guide rail and can move along this guide rail, with the optical path difference of accommodation reflex light beam and transmitted light beam.
Basic thought of the present invention is to realize that with the powerful moment electric field that the femtosecond laser of interfering produces the microcell periodicity domain structure in the lithium columbate crystal prepares, because femtosecond laser enough overcomes the coercive field in the lithium columbate crystal under the room temperature because of powerful moment electric field that photoelectric effect produces, reach the condition of farmland counter-rotating, so need not extra electric field.
Advantage of the present invention is:
1. need not extra electric field, simple to operate, the precision height;
2. the domain structure returing cycle and the dutycycle that make are controlled easily, because the interference pattern of laser beam can intuitively be observed and be regulated before focusing on, monitor with instrument easily after the focusing;
Cycle can accomplish very little, can be less than as required the micron magnitude, application is good.
Description of drawings
Fig. 1 is the employed femtosecond laser coherent device of a inventive method synoptic diagram.
Among the figure:
1-first total reflective mirror, 2-first aperture, 3-second aperture, 4-second total reflective mirror, 5-first spectroscope, 6-first half-wave plate, 7-first polaroid, 8-the 3rd total reflective mirror, 9-the 4th total reflective mirror, 10-the 5th total reflective mirror, 11-the 6th total reflective mirror, 12-first lens, 13-second half-wave plate, 14-second polaroid, 15-the 7th total reflective mirror, 16-the 8th total reflective mirror, 17-the 9th total reflective mirror, 18-the tenth total reflective mirror, 19-the 11 total reflective mirror, 20-the 12 total reflective mirror, 21-second lens, 22-second spectroscope.
Fig. 2 is the interference light pattern of this method embodiment output.
Embodiment
Fig. 1 is the employed femtosecond laser coherent device of a inventive method synoptic diagram.Adopt device as Fig. 1, centre wavelength is that the femtosecond laser light beam of titanium-doped sapphire laser output of 800nm is through first total reflective mirror 1, first aperture 2, second aperture 3, second total reflective mirror 4 arrives first spectroscope 5, behind this first spectroscope 5, form folded light beam and transmitted light beam, described transmitted light beam reaches LiNbO at last through first half-wave plate 6, first polaroid 7, the 3rd total reflective mirror 8, the 4th total reflective mirror 9, by first corner cube mirror, first lens 12 and second spectroscope 22 that the 5th total reflective mirror 10 and the 6th total reflective mirror 11 are formed 3Wafer; Described folded light beam reaches LiNbO at last through second half-wave plate 13, second polaroid 14, the 7th total reflective mirror 15, the 8th total reflective mirror 16, by second corner cube mirror, the 11 total reflective mirror the 19, the 12 total reflective mirror 20, second lens 21 and second spectroscope 22 that the 9th total reflective mirror 17 and the tenth total reflective mirror 18 are formed 3Wafer is not put LiNbO 3The crystal target position of wafer reaches the common focus zone of first lens 12 and second lens 21 after this second spectroscope 22, the i.e. relevant zone of two light beams, described first corner cube mirror or second corner cube mirror are positioned on the guide rail and can move along this guide rail, with the optical path difference of fine adjustment folded light beam and transmitted light beam.The number of interference fringe and spacing all can be controlled by regulating light path.Diverse location can be prepared the different microcell domain structures that require near lithium columbate crystal was placed on lens focus as required.Described first aperture 2 and second aperture 3 are that range of adjustment is the iris of 1~15mm.First spectroscope 5 and second spectroscope 22 are that surface of the used optical maser wavelength of embodiment is coated with the parallel flat that semi-transparent semi-reflecting deielectric-coating, another surface are coated with anti-reflection film.First half-wave plate 6 and second half-wave plate 13 are that thickness is the glass plate of used laser half-wavelength integral multiple.First lens 12 and second lens 21 are that focal length is the focusing convex lens of 80cm.
The concrete technological process that the inventive method is implemented is:
1) earlier with LiNbO 3Monocrystalline carries out orientation, is that face cuts into certain thickness perpendicular to crystalline axis direction, and thickness direction is perpendicular to the C direction of principal axis, also is incident laser direction, the rectangular parallelepiped sample of mm magnitude, and the plane of crystal polishing, smooth finish is better than the III level.
2) with the about 60fs of pulsewidth, centre wavelength 800nm, the titanium jewel femtosecond light laser (the about 500mw of peak power output) of frequency 1000Hz is adjusted to the laser output of interference as shown in Figure 2 by the experimental provision of Fig. 1.
3) according to the needs (mainly being the microcell size of domain structure and the spacing on farmland) of micro area periodicity domain structure of lithium columbate crystal preparation, the periodically preparation of domain structure of microcell is carried out in the appropriate location, target area that lithium columbate crystal is positioned over experimental provision.Be focused into the big surface of the rectangular parallelepiped that is mapped to crystal (also promptly perpendicular to the incident of crystal C axle), projectile energy is at 100~500mw, and exposure time surpasses 30 seconds, prepares the periodically domain structure of needed microcell.

Claims (3)

1, a kind of preparation method of micro area periodicity domain structure of lithium columbate crystal is characterized in that this method comprises the following steps:
(1) to LiNbO 3Monocrystalline carries out orientation, is that face cuts into rectangular body wafer perpendicular to crystalline axis direction, the wafer surface polishing, and smooth finish is better than the III level;
(2) with described LiNbO 3Wafer places on the coherent field target position of relevant femtosecond laser device, makes the vertical described LiNbO of relevant femtosecond laser 3The C axle incident irradiation of wafer, projectile energy is at 100~500mw, and exposure time was above 30 seconds.
2, the preparation method of micro area periodicity domain structure of lithium columbate crystal according to claim 1 is characterized in that described femtosecond laser is that pulsewidth is 60fs, and centre wavelength is 800nm, and frequency is the femtosecond laser of mixing the output of titanium sapphire laser of 1000Hz.
3, the preparation method of micro area periodicity domain structure of lithium columbate crystal according to claim 1, the formation that it is characterized in that described femtosecond laser coherent device is: comprise a femto-second laser, on the light path of advancing of the femtosecond laser that this femto-second laser is exported, be first total reflective mirror (1) successively, first aperture (2), second aperture (3), second total reflective mirror (4) and first spectroscope (5), forming folded light beam and transmitted light beam through this first spectroscope (5), is first half-wave plate (6) successively on the light path of described transmitted light beam, first polaroid (7), the 3rd total reflective mirror (8), the 4th total reflective mirror (9), first corner cube mirror of forming by the 5th total reflective mirror (10) and the 6th total reflective mirror (11), first lens (12) and second spectroscope (22); Be second half-wave plate (13), second polaroid (14), the 7th total reflective mirror (15), the 8th total reflective mirror (16) successively on the light path of described folded light beam, by second corner cube mirror, the 11 total reflective mirror (19), the 12 total reflective mirror (20), second lens (21) and second spectroscope (22) that the 9th total reflective mirror (17) and the tenth total reflective mirror (18) are formed, the common focus zone that reaches first lens (12) and second lens (21) at this second spectroscope (22) afterwards is LiNbO 3The crystal target position that wafer is provided with, described first corner cube mirror or second corner cube mirror are positioned on the guide rail and can move along this guide rail, with the optical path difference of accommodation reflex light beam and transmitted light beam.
CNB2005101115959A 2005-12-16 2005-12-16 Preparation method of lithium niobate crystal micro-region periodic domain structure Expired - Fee Related CN100353253C (en)

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CN101887203A (en) * 2010-06-23 2010-11-17 中国科学院上海光学精密机械研究所 Device for Inducing Periodic Domain Reversal in Ferroelectric Crystals by Laser Interference
CN102162132A (en) * 2011-02-24 2011-08-24 华东理工大学 Method for inducing and separating out orientation controllable lithium niobate single crystal in glass by using femtosecond laser
CN109406411B (en) * 2017-08-15 2022-02-15 台湾超微光学股份有限公司 Light source device
CN110568694B (en) * 2019-08-05 2021-01-22 山东大学 Frequency converter based on ridge-type lithium niobate single crystal thin film waveguide integrated periodic domain inversion structure and preparation method thereof
CN118711622B (en) * 2024-08-29 2024-12-31 深圳大学 Photonic quantum storage system and photonic quantum crystal storage method based on lithium niobate crystal

Citations (3)

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Publication number Priority date Publication date Assignee Title
JP2002099010A (en) * 1992-03-03 2002-04-05 Fuji Photo Film Co Ltd Method for forming domain inversion structure of ferroelectric substance
JP2003057422A (en) * 2001-08-17 2003-02-26 Japan Science & Technology Corp Method for forming cyclic microstructure by femtosecond laser irradiation
CN1595274A (en) * 2004-06-30 2005-03-16 中国科学院上海光学精密机械研究所 Realization of LiNbO3Method for crystal domain inversion

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002099010A (en) * 1992-03-03 2002-04-05 Fuji Photo Film Co Ltd Method for forming domain inversion structure of ferroelectric substance
JP2003057422A (en) * 2001-08-17 2003-02-26 Japan Science & Technology Corp Method for forming cyclic microstructure by femtosecond laser irradiation
CN1595274A (en) * 2004-06-30 2005-03-16 中国科学院上海光学精密机械研究所 Realization of LiNbO3Method for crystal domain inversion

Non-Patent Citations (2)

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Title
周期性极化铌酸锂两种主要制备方法的比较 奚庆新,刘德安,刘立人.激光与光电子学进展,第42卷第6期 2005 *
外加电场极化法制备LiNbO3周期性畴反转的工艺研究 陈云琳,许京军,等.光学学报,第21卷第5期 2001 *

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