BRPI0812099A2 - Dispositivo apresentado uma estrutura em membrana para detenção de radiação térmica, método de produção e uso do dispositivo. - Google Patents

Dispositivo apresentado uma estrutura em membrana para detenção de radiação térmica, método de produção e uso do dispositivo.

Info

Publication number: BRPI0812099A2
Authority: BR; Brazil
Prior art keywords: production; thermal radiation; membrane structure; presented; detention
Prior art date: 2007-05-29

Application number

Other languages

English (en)

Inventor

Carsten Giebeler

Matthias Schreiter

Christian Paulus

Original Assignee

Pyreos Ltd

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

2007-05-29

Filing date

2008-05-28

Publication date

2014-11-25

2008-05-28 Application filed by Pyreos Ltd filed Critical Pyreos Ltd

2014-11-25 Publication of BRPI0812099A2 publication Critical patent/BRPI0812099A2/pt

2018-06-19 Publication of BRPI0812099B1 publication Critical patent/BRPI0812099B1/pt

Classifications

- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
- G01J5/02—Constructional details
- G01J5/04—Casings
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
- G01J5/02—Constructional details
- G01J5/0205—Mechanical elements; Supports for optical elements
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
- G01J5/02—Constructional details
- G01J5/0225—Shape of the cavity itself or of elements contained in or suspended over the cavity
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
- G01J5/02—Constructional details
- G01J5/0225—Shape of the cavity itself or of elements contained in or suspended over the cavity
- G01J5/023—Particular leg structure or construction or shape; Nanotubes
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
- G01J5/02—Constructional details
- G01J5/04—Casings
- G01J5/041—Mountings in enclosures or in a particular environment
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
- G01J5/02—Constructional details
- G01J5/04—Casings
- G01J5/041—Mountings in enclosures or in a particular environment
- G01J5/045—Sealings; Vacuum enclosures; Encapsulated packages; Wafer bonding structures; Getter arrangements
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
- G01J5/10—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
- G01J5/10—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors
- G01J5/12—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors using thermoelectric elements, e.g. thermocouples
- G01J5/14—Electrical features thereof
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
- G01J5/10—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors
- G01J5/20—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors using resistors, thermistors or semiconductors sensitive to radiation, e.g. photoconductive devices
- G01J5/22—Electrical features thereof
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
- G01J5/10—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors
- G01J5/34—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors using capacitors, e.g. pyroelectric capacitors
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D99/00—Subject matter not provided for in other groups of this subclass
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
- G01J2005/0077—Imaging
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
- G01J5/10—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors
- G01J5/20—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors using resistors, thermistors or semiconductors sensitive to radiation, e.g. photoconductive devices
- G01J2005/202—Arrays
- G01J2005/204—Arrays prepared by semiconductor processing, e.g. VLSI
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
- G01N2021/0106—General arrangement of respective parts
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
- H10F39/011—Manufacture or treatment of image sensors covered by group H10F39/12
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
- H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
- H10N30/2047—Membrane type
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T156/00—Adhesive bonding and miscellaneous chemical manufacture
- Y10T156/10—Methods of surface bonding and/or assembly therefor

Landscapes

Physics & Mathematics (AREA)
General Physics & Mathematics (AREA)
Spectroscopy & Molecular Physics (AREA)
Engineering & Computer Science (AREA)
Power Engineering (AREA)
Chemical & Material Sciences (AREA)
Nanotechnology (AREA)
Photometry And Measurement Of Optical Pulse Characteristics (AREA)
Radiation Pyrometers (AREA)
Micromachines (AREA)

BRPI0812099-4A 2007-05-29 2008-05-28 Dispositivo apresentado uma estrutura em membrana para detecção de radiação térmica, método de produção e uso do dispositivo. BRPI0812099B1 (pt)

Applications Claiming Priority (3)

Application Number	Priority Date	Filing Date	Title
DE200710024902 DE102007024902B8 (de)	2007-05-29	2007-05-29	Vorrichtung mit Membranstruktur zur Detektion von Wärmestrahlung, Verfahren zum Herstellen und Verwendung der Vorrichtung
DE102007024902.2		2007-05-29
PCT/EP2008/004246 WO2008145353A1 (de)	2007-05-29	2008-05-28	Vorrichtung mit membranstruktur zur detektion von wärmestrahlung, verfahren zum herstellen und verwendung der vorrichtung

Publications (2)

Publication Number	Publication Date
BRPI0812099A2 true BRPI0812099A2 (pt)	2014-11-25
BRPI0812099B1 BRPI0812099B1 (pt)	2018-06-19

Family

ID=39708794

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
BRPI0812099-4A BRPI0812099B1 (pt)	2007-05-29	2008-05-28	Dispositivo apresentado uma estrutura em membrana para detecção de radiação térmica, método de produção e uso do dispositivo.

Country Status (10)

Country	Link
US (1)	US9279730B2 (pt)
EP (1)	EP2153187B1 (pt)
JP (1)	JP2010528300A (pt)
KR (1)	KR101612400B1 (pt)
CN (1)	CN101688810B (pt)
AU (1)	AU2008256413B2 (pt)
BR (1)	BRPI0812099B1 (pt)
DE (1)	DE102007024902B8 (pt)
RU (1)	RU2468346C2 (pt)
WO (1)	WO2008145353A1 (pt)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
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DE102009017845B4 (de)	2009-04-17	2011-07-21	Pyreos Ltd.	Infrarotlichtsensor mit hoher Signalspannung und hohem Signal-Rausch-Verhältnis, sowie Infrarotlichtdetektor mit dem Infrarotlichtsensor
DE102009060217B3 (de) *	2009-12-23	2011-06-22	Pyreos Ltd.	Verfahren zum Herstellen eines Infrarotlichtdetektors
DE102010012701B4 (de)	2010-03-24	2013-10-17	Bundesrepublik Deutschland, vertr.d.d. Bundesministerium für Wirtschaft und Technologie, d.vertr.d.d. Präsidenten der Physikalisch-Technischen Bundesanstalt	Mikrokraftsensor
DE102012216618A1 (de)	2012-09-18	2014-03-20	Robert Bosch Gmbh	Anordnung von mindestens zwei Wafern zum Detektieren von elektromagnetischer Strahlung und Verfahren zum Herstellen der Anordnung
DE102012217881A1 (de) *	2012-10-01	2014-04-03	Siemens Aktiengesellschaft	Sensoranordnung und Herstellungsverfahren
DE102013204763A1 (de) *	2013-03-19	2014-09-25	Robert Bosch Gmbh	Mikromechanische Sensorvorrichtung und entsprechendes Herstellungsverfahren
CN107771272B (zh) *	2015-06-01	2021-04-27	首尔伟傲世有限公司	光检测元件以及电子装置
CN108827676B (zh) *	2018-04-25	2020-12-11	合肥美的电冰箱有限公司	散热测量系统及其方法、控制装置

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2007
- 2007-05-29 DE DE200710024902 patent/DE102007024902B8/de not_active Expired - Fee Related
2008
- 2008-05-28 EP EP20080758829 patent/EP2153187B1/de not_active Not-in-force
- 2008-05-28 US US12/601,556 patent/US9279730B2/en not_active Expired - Fee Related
- 2008-05-28 JP JP2010509728A patent/JP2010528300A/ja active Pending
- 2008-05-28 BR BRPI0812099-4A patent/BRPI0812099B1/pt not_active IP Right Cessation
- 2008-05-28 AU AU2008256413A patent/AU2008256413B2/en not_active Ceased
- 2008-05-28 RU RU2009144001/28A patent/RU2468346C2/ru not_active IP Right Cessation
- 2008-05-28 KR KR1020097027210A patent/KR101612400B1/ko not_active Expired - Fee Related
- 2008-05-28 CN CN2008800235048A patent/CN101688810B/zh not_active Expired - Fee Related
- 2008-05-28 WO PCT/EP2008/004246 patent/WO2008145353A1/de active Application Filing

Also Published As

Publication number	Publication date
DE102007024902A1 (de)	2008-12-11
DE102007024902B4 (de)	2010-08-26
EP2153187A1 (de)	2010-02-17
US20110006211A1 (en)	2011-01-13
CN101688810B (zh)	2013-09-18
DE102007024902B8 (de)	2010-12-30
BRPI0812099B1 (pt)	2018-06-19
RU2468346C2 (ru)	2012-11-27
RU2009144001A (ru)	2011-07-10
WO2008145353A1 (de)	2008-12-04
AU2008256413B2 (en)	2013-09-12
KR101612400B1 (ko)	2016-04-14
KR20100023007A (ko)	2010-03-03
US9279730B2 (en)	2016-03-08
AU2008256413A1 (en)	2008-12-04
JP2010528300A (ja)	2010-08-19
EP2153187B1 (de)	2013-01-16
CN101688810A (zh)	2010-03-31

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Legal Events

Date	Code	Title	Description
2018-04-24	B09A	Decision: intention to grant [chapter 9.1 patent gazette]
2018-06-19	B16A	Patent or certificate of addition of invention granted [chapter 16.1 patent gazette]
2020-09-24	B21F	Lapse acc. art. 78, item iv - on non-payment of the annual fees in time	Free format text: REFERENTE A 12A ANUIDADE.
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