BR9508275A - Processo para a medição da profundidade de uma microestrutura - Google Patents

Processo para a medição da profundidade de uma microestrutura

Info

Publication number: BR9508275A
Authority: BR; Brazil
Prior art keywords: microstructure; depth; measuring; reference grid; grid structure
Prior art date: 1994-07-13

Application number

BR9508275A

Other languages

English (en)

Inventor

Heinrich Wild

Original Assignee

Kurz Leonhard Fa

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1994-07-13

Filing date

1995-06-10

Publication date

1997-11-04

1995-06-10 Application filed by Kurz Leonhard Fa filed Critical Kurz Leonhard Fa

1997-11-04 Publication of BR9508275A publication Critical patent/BR9508275A/pt

Classifications

- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/22—Measuring arrangements characterised by the use of optical techniques for measuring depth

Landscapes

Physics & Mathematics (AREA)
General Physics & Mathematics (AREA)
Investigating Or Analysing Materials By Optical Means (AREA)
Length Measuring Devices By Optical Means (AREA)
Analysing Materials By The Use Of Radiation (AREA)

BR9508275A 1994-07-13 1995-06-10 Processo para a medição da profundidade de uma microestrutura BR9508275A (pt)

Applications Claiming Priority (2)

Application Number	Priority Date	Filing Date	Title
DE4424565A DE4424565C1 (de)	1994-07-13	1994-07-13	Verfahren zur Messung der Tiefe einer Mikrostruktur
PCT/DE1995/000783 WO1996002807A1 (de)	1994-07-13	1995-06-10	Verfahren zur messung der tiefe einer mikrostruktur

Publications (1)

Publication Number	Publication Date
BR9508275A true BR9508275A (pt)	1997-11-04

Family

ID=6522947

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
BR9508275A BR9508275A (pt)	1994-07-13	1995-06-10	Processo para a medição da profundidade de uma microestrutura

Country Status (10)

Country	Link
EP (1)	EP0770201B1 (pt)
JP (1)	JPH10502734A (pt)
AT (1)	ATE176526T1 (pt)
AU (1)	AU691622B2 (pt)
BR (1)	BR9508275A (pt)
CA (1)	CA2194883A1 (pt)
DE (2)	DE4424565C1 (pt)
ES (1)	ES2127535T3 (pt)
TW (1)	TW251346B (pt)
WO (1)	WO1996002807A1 (pt)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
DE19632763C2 (de) *	1996-08-14	1998-09-10	Holger Moritz	Meßkopf für die Beobachtung der Photolackentwicklung
DE19652563A1 (de) *	1996-12-17	1998-06-18	Heidenhain Gmbh Dr Johannes	Lichtelektrische Positionsmeßeinrichtung
DE19702851C1 (de) *	1997-01-27	1998-08-06	Deutsch Zentr Luft & Raumfahrt	Verfahren und Vorrichtung zur Prüfung offener, aber nicht vollständig einsehbarer Hohlräume
DE19739885A1 (de) *	1997-09-11	1999-03-18	Bernd Klose	Komparativer Oberflächenqualifizierer

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
DE3518774A1 (de) *	1985-05-24	1986-11-27	Dr. Johannes Heidenhain Gmbh, 8225 Traunreut	Verfahren zur ermittlung und optimierung der optischen weglaenge einer durchgehenden transparenten schicht oder einer strukturierten schicht
JPH0617774B2 (ja) *	1987-06-22	1994-03-09	大日本スクリ−ン製造株式会社	微小高低差測定装置
JPH0223617A (ja) *	1988-07-13	1990-01-25	Mitsubishi Electric Corp	半導体基板ウェハの溝形成方法
FR2665024B1 (fr) *	1990-07-20	1994-02-18	Jean Galvier	Procede de determination de l'elimination complete d'une couche mince sur un substrat non plan.
US5361137A (en) *	1992-08-31	1994-11-01	Texas Instruments Incorporated	Process control for submicron linewidth measurement

1994
- 1994-07-13 DE DE4424565A patent/DE4424565C1/de not_active Expired - Fee Related
- 1994-09-07 TW TW083108245A patent/TW251346B/zh active
1995
- 1995-06-10 AU AU26682/95A patent/AU691622B2/en not_active Ceased
- 1995-06-10 CA CA002194883A patent/CA2194883A1/en not_active Abandoned
- 1995-06-10 JP JP8504567A patent/JPH10502734A/ja active Pending
- 1995-06-10 DE DE59505046T patent/DE59505046D1/de not_active Expired - Fee Related
- 1995-06-10 ES ES95921698T patent/ES2127535T3/es not_active Expired - Lifetime
- 1995-06-10 WO PCT/DE1995/000783 patent/WO1996002807A1/de active IP Right Grant
- 1995-06-10 EP EP95921698A patent/EP0770201B1/de not_active Expired - Lifetime
- 1995-06-10 BR BR9508275A patent/BR9508275A/pt not_active Application Discontinuation
- 1995-06-10 AT AT95921698T patent/ATE176526T1/de not_active IP Right Cessation

Also Published As

Publication number	Publication date
AU2668295A (en)	1996-02-16
WO1996002807A1 (de)	1996-02-01
TW251346B (en)	1995-07-11
ATE176526T1 (de)	1999-02-15
EP0770201B1 (de)	1999-02-03
DE4424565C1 (de)	1995-08-24
EP0770201A1 (de)	1997-05-02
DE59505046D1 (de)	1999-03-18
JPH10502734A (ja)	1998-03-10
CA2194883A1 (en)	1996-02-01
AU691622B2 (en)	1998-05-21
ES2127535T3 (es)	1999-04-16

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Legal Events

Date	Code	Title	Description
2000-03-21	FA10	Dismissal: dismissal - article 33 of industrial property law