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ATE514972T1 - Schutzmembran und verfahren zu seiner herstellung - Google Patents

Schutzmembran und verfahren zu seiner herstellung

Info

Publication number
ATE514972T1
ATE514972T1 AT09159299T AT09159299T ATE514972T1 AT E514972 T1 ATE514972 T1 AT E514972T1 AT 09159299 T AT09159299 T AT 09159299T AT 09159299 T AT09159299 T AT 09159299T AT E514972 T1 ATE514972 T1 AT E514972T1
Authority
AT
Austria
Prior art keywords
plane
silicon single
single crystal
crystal
pellicle
Prior art date
Application number
AT09159299T
Other languages
English (en)
Inventor
Shoji Akiyama
Toshihiko Shindo
Yoshihiro Kubota
Original Assignee
Shinetsu Chemical Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shinetsu Chemical Co filed Critical Shinetsu Chemical Co
Application granted granted Critical
Publication of ATE514972T1 publication Critical patent/ATE514972T1/de

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
    • G03F1/62—Pellicles, e.g. pellicle assemblies, e.g. having membrane on support frame; Preparation thereof
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y10/00—Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y40/00—Manufacture or treatment of nanostructures
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
    • G03F1/22—Masks or mask blanks for imaging by radiation of 100nm or shorter wavelength, e.g. X-ray masks, extreme ultraviolet [EUV] masks; Preparation thereof
    • G03F1/24—Reflection masks; Preparation thereof

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Nanotechnology (AREA)
  • General Physics & Mathematics (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Manufacturing & Machinery (AREA)
  • Mathematical Physics (AREA)
  • Theoretical Computer Science (AREA)
  • Preparing Plates And Mask In Photomechanical Process (AREA)
AT09159299T 2008-05-02 2009-05-04 Schutzmembran und verfahren zu seiner herstellung ATE514972T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2008120664A JP4928494B2 (ja) 2008-05-02 2008-05-02 ペリクルおよびペリクルの製造方法

Publications (1)

Publication Number Publication Date
ATE514972T1 true ATE514972T1 (de) 2011-07-15

Family

ID=40941653

Family Applications (1)

Application Number Title Priority Date Filing Date
AT09159299T ATE514972T1 (de) 2008-05-02 2009-05-04 Schutzmembran und verfahren zu seiner herstellung

Country Status (7)

Country Link
US (1) US7951513B2 (de)
EP (1) EP2113809B1 (de)
JP (1) JP4928494B2 (de)
KR (1) KR101435226B1 (de)
CN (1) CN101571671A (de)
AT (1) ATE514972T1 (de)
TW (1) TWI398723B (de)

Families Citing this family (44)

* Cited by examiner, † Cited by third party
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EP2051139B1 (de) * 2007-10-18 2010-11-24 Shin-Etsu Chemical Co., Ltd. Pellikel und Verfahren zu dessen Herstellung
JP4934099B2 (ja) * 2008-05-22 2012-05-16 信越化学工業株式会社 ペリクルおよびペリクルの製造方法
CN102822744B (zh) * 2010-04-02 2015-04-01 信越化学工业株式会社 光掩模单元及其制造方法
KR102068146B1 (ko) * 2010-06-25 2020-01-20 에이에스엠엘 네델란즈 비.브이. 리소그래피 장치 및 방법
JP2012151158A (ja) * 2011-01-17 2012-08-09 Shin Etsu Chem Co Ltd Ｅｕｖ用ペリクル膜及びペリクル、並びに該膜の製造方法
EP2541559B1 (de) * 2011-06-30 2014-03-26 Rohm and Haas Electronic Materials LLC Transparente leitfähige Artikel
KR101303795B1 (ko) * 2011-12-26 2013-09-04 주식회사 에프에스티 초극자외선용 펠리클 및 그 제조방법
US20130250260A1 (en) * 2012-03-23 2013-09-26 Globalfoundries Inc. Pellicles for use during euv photolithography processes
WO2013152921A1 (en) * 2012-04-12 2013-10-17 Asml Netherlands B.V. Pellicle, reticle assembly and lithographic apparatus
WO2014142125A1 (ja) 2013-03-15 2014-09-18 旭化成イーマテリアルズ株式会社 ペリクル膜及びペリクル
US9182686B2 (en) 2013-06-13 2015-11-10 Globalfoundries U.S. 2 Llc Extreme ultraviolet radiation (EUV) pellicle formation apparatus
US9057957B2 (en) 2013-06-13 2015-06-16 International Business Machines Corporation Extreme ultraviolet (EUV) radiation pellicle formation method
US9360749B2 (en) 2014-04-24 2016-06-07 Taiwan Semiconductor Manufacturing Co., Ltd. Pellicle structure and method for forming the same
WO2015174412A1 (ja) * 2014-05-16 2015-11-19 三井化学株式会社 ペリクル枠、ペリクル、枠部材、露光原版、露光装置、及び半導体装置の製造方法
EP3164764B1 (de) 2014-07-04 2021-02-24 ASML Netherlands B.V. Membrane zur verwendung in einer lithographievorrichtung und lithographievorrichtung mit solch einer membran
KR102233579B1 (ko) 2014-08-12 2021-03-30 삼성전자주식회사 극자외선 리소그래피용 펠리클
WO2016032096A1 (ko) * 2014-08-29 2016-03-03 주식회사 에프에스티 탄화규소를 이용한 펠리클 및 그 제조방법
CN113917783B (zh) 2014-09-19 2023-12-19 三井化学株式会社 防护膜组件、其制造方法及曝光方法
CN106796391B (zh) * 2014-09-19 2020-02-11 三井化学株式会社 防护膜组件、防护膜组件的制造方法及使用了防护膜组件的曝光方法
US10031411B2 (en) * 2014-11-26 2018-07-24 Taiwan Semiconductor Manufacturing Company, Ltd. Pellicle for EUV mask and fabrication thereof
GB2534404A (en) 2015-01-23 2016-07-27 Cnm Tech Gmbh Pellicle
JP6408396B2 (ja) * 2015-02-17 2018-10-17 三井化学株式会社 ペリクル膜の製造方法、ペリクルの製造方法、およびフォトマスクの製造方法
KR102696704B1 (ko) 2015-07-17 2024-08-21 에이에스엠엘 네델란즈 비.브이. 멤브레인 조립체를 제조하는 방법
US9950349B2 (en) 2015-09-15 2018-04-24 Internationa Business Machines Corporation Drying an extreme ultraviolet (EUV) pellicle
US9835940B2 (en) 2015-09-18 2017-12-05 Taiwan Semiconductor Manufacturing Company, Ltd. Method to fabricate mask-pellicle system
US9915867B2 (en) 2015-09-24 2018-03-13 International Business Machines Corporation Mechanical isolation control for an extreme ultraviolet (EUV) pellicle
KR101714908B1 (ko) * 2015-10-23 2017-03-10 한양대학교 에리카산학협력단 극자외선 리소그래피용 펠리클 구조체
CA3008474A1 (en) 2015-12-14 2017-06-22 Asml Netherlands B.V. A membrane for euv lithography
US9759997B2 (en) * 2015-12-17 2017-09-12 Taiwan Semiconductor Manufacturing Company, Ltd. Pellicle assembly and method for advanced lithography
KR102186010B1 (ko) 2016-01-26 2020-12-04 한양대학교 산학협력단 Euv 펠리클 구조체, 및 그 제조 방법
CN108699687B (zh) * 2016-02-19 2022-03-01 爱沃特株式会社 化合物半导体基板、表膜、和化合物半导体基板的制造方法
KR101792409B1 (ko) * 2016-04-21 2017-11-21 한양대학교 산학협력단 Euv 펠리클 구조체, 및 그 제조 방법
JP6944768B2 (ja) * 2016-08-29 2021-10-06 エア・ウォーター株式会社 ペリクルの製造方法
TWI612369B (zh) * 2016-12-28 2018-01-21 Micro Lithography Inc Euv光罩無機保護薄膜組件製造方法
KR102330943B1 (ko) * 2017-03-10 2021-11-25 삼성전자주식회사 포토마스크용 펠리클과 이를 포함하는 레티클 및 리소그래피용 노광 장치
JP6518801B2 (ja) 2017-03-10 2019-05-22 エスアンドエス テック カンパニー リミテッド 極紫外線リソグラフィ用ペリクル及びその製造方法
US10509312B2 (en) * 2017-09-26 2019-12-17 Taiwan Semiconductor Manufacturing Co., Ltd. Approach for ultra thin-film transfer and handling
KR101900720B1 (ko) 2017-11-10 2018-09-20 주식회사 에스앤에스텍 극자외선 리소그래피용 펠리클 및 그의 제조방법
US11237475B2 (en) * 2017-11-10 2022-02-01 Asml Netherlands B.V. EUV pellicles
NL2022935B1 (en) 2018-05-04 2020-04-30 Asml Netherlands Bv Pellicle for euv lithography
JP7213249B2 (ja) * 2018-07-06 2023-01-26 株式会社カネカ ペリクル複合体及びその製造方法
JP7040427B2 (ja) 2018-12-03 2022-03-23 信越化学工業株式会社 ペリクル、ペリクル付露光原版、露光方法及び半導体の製造方法
JP7318580B2 (ja) * 2020-03-30 2023-08-01 信越半導体株式会社 Ｓｏｉウェーハの製造方法
CN118076920A (zh) * 2021-10-20 2024-05-24 日本碍子株式会社 Euv透过膜

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GB2121980B (en) 1982-06-10 1986-02-05 Standard Telephones Cables Ltd X ray masks
JPH0262542A (ja) * 1988-08-29 1990-03-02 Shin Etsu Chem Co Ltd エキシマレーザーリソグラフィー用ペリクル
US5935733A (en) * 1996-04-05 1999-08-10 Intel Corporation Photolithography mask and method of fabrication
JP3386693B2 (ja) * 1997-06-09 2003-03-17 信越化学工業株式会社 ペリクルの製造方法
US6197454B1 (en) 1998-12-29 2001-03-06 Intel Corporation Clean-enclosure window to protect photolithographic mask
JP2000292908A (ja) * 1999-04-02 2000-10-20 Shin Etsu Chem Co Ltd リソグラフィー用ペリクル
US6623893B1 (en) 2001-01-26 2003-09-23 Advanced Micro Devices, Inc. Pellicle for use in EUV lithography and a method of making such a pellicle
US20030228529A1 (en) * 2002-06-10 2003-12-11 Dupont Photomasks, Inc. Photomask and method for repairing defects
JP2004339003A (ja) * 2003-05-15 2004-12-02 Shin Etsu Handotai Co Ltd シリコンエピタキシャルウェーハ及びシリコンエピタキシャルウェーハの製造方法
JP2005070120A (ja) * 2003-08-27 2005-03-17 Shin Etsu Chem Co Ltd リソグラフィ用ペリクル
JP2005215508A (ja) * 2004-01-30 2005-08-11 Nikon Corp 基板及び露光装置並びに露光システム
JP2007293692A (ja) 2006-04-26 2007-11-08 Funai Electric Co Ltd ディスクトップ型パーソナルコンピューター及び光学ドライブ搭載機器
EP2051139B1 (de) * 2007-10-18 2010-11-24 Shin-Etsu Chemical Co., Ltd. Pellikel und Verfahren zu dessen Herstellung
JP4861963B2 (ja) * 2007-10-18 2012-01-25 信越化学工業株式会社 ペリクルおよびペリクルの製造方法
JP4934099B2 (ja) * 2008-05-22 2012-05-16 信越化学工業株式会社 ペリクルおよびペリクルの製造方法

Also Published As

Publication number Publication date
US20090274962A1 (en) 2009-11-05
KR20090115657A (ko) 2009-11-05
TW200947113A (en) 2009-11-16
TWI398723B (zh) 2013-06-11
JP2009271262A (ja) 2009-11-19
CN101571671A (zh) 2009-11-04
US7951513B2 (en) 2011-05-31
KR101435226B1 (ko) 2014-08-28
EP2113809A1 (de) 2009-11-04
EP2113809B1 (de) 2011-06-29
JP4928494B2 (ja) 2012-05-09

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Legal Events

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