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ATE376050T1 - Halbleiterreinigungslösung - Google Patents

Halbleiterreinigungslösung

Info

Publication number
ATE376050T1
ATE376050T1 AT04737678T AT04737678T ATE376050T1 AT E376050 T1 ATE376050 T1 AT E376050T1 AT 04737678 T AT04737678 T AT 04737678T AT 04737678 T AT04737678 T AT 04737678T AT E376050 T1 ATE376050 T1 AT E376050T1
Authority
AT
Austria
Prior art keywords
compound
cleaning solution
equal
present
chemical formula
Prior art date
Application number
AT04737678T
Other languages
English (en)
Inventor
Rita Vos
Paul Mertens
Bernd Kolbesen
Albrecht Fester
Oliver Doll
Original Assignee
Imec Inter Uni Micro Electr
Air Prod & Chem
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Imec Inter Uni Micro Electr, Air Prod & Chem filed Critical Imec Inter Uni Micro Electr
Application granted granted Critical
Publication of ATE376050T1 publication Critical patent/ATE376050T1/de

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02041—Cleaning
    • H01L21/02043—Cleaning before device manufacture, i.e. Begin-Of-Line process
    • H01L21/02052—Wet cleaning only
    • C—CHEMISTRY; METALLURGY
    • C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
    • C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
    • C11D3/00—Other compounding ingredients of detergent compositions covered in group C11D1/00
    • C11D3/39—Organic or inorganic per-compounds
    • C—CHEMISTRY; METALLURGY
    • C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
    • C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
    • C11D3/00—Other compounding ingredients of detergent compositions covered in group C11D1/00
    • C11D3/39—Organic or inorganic per-compounds
    • C11D3/3947—Liquid compositions
    • C—CHEMISTRY; METALLURGY
    • C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
    • C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
    • C11D7/00—Compositions of detergents based essentially on non-surface-active compounds
    • C11D7/22—Organic compounds
    • C11D7/32—Organic compounds containing nitrogen
    • C11D7/3281—Heterocyclic compounds
    • C—CHEMISTRY; METALLURGY
    • C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
    • C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
    • C11D7/00—Compositions of detergents based essentially on non-surface-active compounds
    • C11D7/22—Organic compounds
    • C11D7/34—Organic compounds containing sulfur
    • C—CHEMISTRY; METALLURGY
    • C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
    • C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
    • C11D2111/00—Cleaning compositions characterised by the objects to be cleaned; Cleaning compositions characterised by non-standard cleaning or washing processes
    • C11D2111/10—Objects to be cleaned
    • C11D2111/14—Hard surfaces
    • C11D2111/22—Electronic devices, e.g. PCBs or semiconductors

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Oil, Petroleum & Natural Gas (AREA)
  • Wood Science & Technology (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
  • Detergent Compositions (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
AT04737678T 2003-06-27 2004-06-26 Halbleiterreinigungslösung ATE376050T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US48314703P 2003-06-27 2003-06-27

Publications (1)

Publication Number Publication Date
ATE376050T1 true ATE376050T1 (de) 2007-11-15

Family

ID=33552033

Family Applications (1)

Application Number Title Priority Date Filing Date
AT04737678T ATE376050T1 (de) 2003-06-27 2004-06-26 Halbleiterreinigungslösung

Country Status (5)

Country Link
US (1) US7521408B2 (de)
EP (1) EP1648991B1 (de)
AT (1) ATE376050T1 (de)
DE (1) DE602004009584T2 (de)
WO (1) WO2005001016A1 (de)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2005001016A1 (en) * 2003-06-27 2005-01-06 Interuniversitair Microelektronica Centrum (Imec) Semiconductor cleaning solution
US7700533B2 (en) 2005-06-23 2010-04-20 Air Products And Chemicals, Inc. Composition for removal of residue comprising cationic salts and methods using same
GB0520380D0 (en) 2005-10-07 2005-11-16 Unilever Plc Stain removal
DE602006014551D1 (de) * 2006-10-31 2010-07-08 Soitec Silicon On Insulator Verfahren zur Charakterisierung von Defekten auf Silizium-Oberflächen, Ätzlösung für Silizium-Oberflächen und Verfahren zur Behandlung von Silizium-Oberflächen mit der Ätzlösung
TW200833871A (en) * 2006-11-17 2008-08-16 Sachem Inc Selective metal wet etch composition and process
CN101270325A (zh) * 2007-03-23 2008-09-24 安集微电子（上海）有限公司 一种清洗液及其应用
JP2009099945A (ja) * 2007-09-28 2009-05-07 Fujifilm Corp 半導体デバイス用洗浄剤及びそれを用いた洗浄方法
WO2009064745A1 (en) * 2007-11-13 2009-05-22 Sachem, Inc. High negative zeta potential polyhedral silsesquioxane composition and method for damage free semiconductor wet clean
TWI426125B (zh) * 2007-11-20 2014-02-11 Anji Microelectronics Co Ltd 清洗液及其應用
JP5278492B2 (ja) * 2010-06-16 2013-09-04 株式会社デンソー 半導体装置の製造方法
CN102064090B (zh) * 2010-10-15 2013-01-09 北京通美晶体技术有限公司 化合物半导体晶片清洗方法
US20120295447A1 (en) * 2010-11-24 2012-11-22 Air Products And Chemicals, Inc. Compositions and Methods for Texturing of Silicon Wafers
US10076301B2 (en) 2012-12-31 2018-09-18 Volcano Corporation Devices, systems, and methods for assessment of vessels
US10780461B2 (en) * 2015-05-15 2020-09-22 Taiwan Semiconductor Manufacturing Co., Ltd Methods for processing substrate in semiconductor fabrication

Family Cites Families (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2842862A1 (de) * 1978-10-02 1980-04-10 Boehringer Mannheim Gmbh Verfahren zur bestimmung von ionen, polaren und/oder lipophilen substanzen in fluessigkeiten
US5686410A (en) * 1989-07-20 1997-11-11 Novartis Ag Polypeptide derivatives
DE69231971T2 (de) * 1991-01-24 2002-04-04 Purex Co., Ltd. Lösungen zur Oberflächenbehandlung von Halbleitern
JP3075290B2 (ja) * 1991-02-28 2000-08-14 三菱瓦斯化学株式会社 半導体基板の洗浄液
DE4136590A1 (de) * 1991-11-07 1993-05-13 Bosch Gmbh Robert Pumpe
US5421897A (en) * 1992-07-17 1995-06-06 Grawe; John Abatement process for contaminants
TW274630B (de) * 1994-01-28 1996-04-21 Wako Zunyaku Kogyo Kk
US5466389A (en) * 1994-04-20 1995-11-14 J. T. Baker Inc. PH adjusted nonionic surfactant-containing alkaline cleaner composition for cleaning microelectronics substrates
US5498293A (en) * 1994-06-23 1996-03-12 Mallinckrodt Baker, Inc. Cleaning wafer substrates of metal contamination while maintaining wafer smoothness
EP0789071B1 (de) * 1995-07-27 2006-10-11 Mitsubishi Chemical Corporation Verfahren zur behandlung einer substratoberfläche und behandlungsmittel hierfür
US5989353A (en) * 1996-10-11 1999-11-23 Mallinckrodt Baker, Inc. Cleaning wafer substrates of metal contamination while maintaining wafer smoothness
US6066609A (en) * 1997-07-31 2000-05-23 Siemens Aktiengesellschaft Aqueous solution for cleaning a semiconductor substrate
US6599370B2 (en) * 2000-10-16 2003-07-29 Mallinckrodt Inc. Stabilized alkaline compositions for cleaning microelectronic substrates
WO2002051961A2 (en) * 2000-12-22 2002-07-04 Interuniversitair Microelektronica Centrum (Imec) Composition comprising an oxidizing and complexing compound
KR20020061530A (ko) * 2001-01-18 2002-07-24 쉬플리 캄파니, 엘.엘.씨. 촉매 금속의 회수방법
GB0116212D0 (en) * 2001-07-03 2001-08-29 Avecia Ltd Process
KR100546169B1 (ko) * 2001-09-21 2006-01-24 주식회사 하이닉스반도체 포토레지스트 제거용 용액 조성물
ATE521692T1 (de) * 2002-11-05 2011-09-15 Basf Se Halbleiteroberflächenbehandlung und dabei verwendete mischung
WO2005001016A1 (en) * 2003-06-27 2005-01-06 Interuniversitair Microelektronica Centrum (Imec) Semiconductor cleaning solution
BRPI0416067A (pt) * 2003-10-29 2007-01-02 Mallinckrodt Baker Inc removedores alcalinos de resìduo de cinza/gravação pós-plasma e composições de descascamento de fotorresistes contendo inibidores de corrosão de haleto de metal
US7432233B2 (en) * 2003-12-18 2008-10-07 Interuniversitair Microelektronica Centrum (Imec) Composition and method for treating a semiconductor substrate
WO2005107723A2 (en) * 2004-05-06 2005-11-17 Rashid Buttar Transdermal delivery systems and transdermal chelation preparations

Also Published As

Publication number Publication date
US7521408B2 (en) 2009-04-21
US20060089280A1 (en) 2006-04-27
WO2005001016A1 (en) 2005-01-06
DE602004009584D1 (de) 2007-11-29
EP1648991A1 (de) 2006-04-26
EP1648991B1 (de) 2007-10-17
DE602004009584T2 (de) 2008-08-07

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Legal Events

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