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ATA571080A - MEASUREMENT METHOD FOR DETERMINING THE THICKNESS OF THIN LAYERS - Google Patents

MEASUREMENT METHOD FOR DETERMINING THE THICKNESS OF THIN LAYERS

Info

Publication number
ATA571080A
ATA571080A AT571080A AT571080A ATA571080A AT A571080 A ATA571080 A AT A571080A AT 571080 A AT571080 A AT 571080A AT 571080 A AT571080 A AT 571080A AT A571080 A ATA571080 A AT A571080A
Authority
AT
Austria
Prior art keywords
determining
thickness
measurement method
thin layers
layers
Prior art date
Application number
AT571080A
Other languages
German (de)
Other versions
AT382963B (en
Inventor
Klaus Christoph Dipl Ing Harms
Ewald Dipl Ing Dr Techn Benes
Original Assignee
Leybold Heraeus Gmbh & Co Kg
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leybold Heraeus Gmbh & Co Kg filed Critical Leybold Heraeus Gmbh & Co Kg
Priority to AT571080A priority Critical patent/AT382963B/en
Priority to DE19813145309 priority patent/DE3145309A1/en
Priority to GB8135283A priority patent/GB2088058B/en
Priority to FR8121976A priority patent/FR2494840A1/en
Publication of ATA571080A publication Critical patent/ATA571080A/en
Application granted granted Critical
Publication of AT382963B publication Critical patent/AT382963B/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/02—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness
    • G01B7/06—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring thickness
    • G01B7/063—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring thickness using piezoelectric resonators
    • G01B7/066—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring thickness using piezoelectric resonators for measuring thickness of coating

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices Characterised By Use Of Acoustic Means (AREA)
AT571080A 1980-11-24 1980-11-24 MEASUREMENT METHOD FOR DETERMINING THE THICKNESS OF THIN LAYERS AT382963B (en)

Priority Applications (4)

Application Number Priority Date Filing Date Title
AT571080A AT382963B (en) 1980-11-24 1980-11-24 MEASUREMENT METHOD FOR DETERMINING THE THICKNESS OF THIN LAYERS
DE19813145309 DE3145309A1 (en) 1980-11-24 1981-11-14 MEASUREMENT METHOD FOR DETERMINING THE THICKNESS OF THIN LAYERS
GB8135283A GB2088058B (en) 1980-11-24 1981-11-23 Measuring ccoating thickness
FR8121976A FR2494840A1 (en) 1980-11-24 1981-11-24 MEASURING METHOD FOR DETERMINING THE THICKNESS OF THIN FILMS USING AN OSCILLATOR CRYSTAL, PARTICULARLY IN THE OPTICAL INDUSTRY AND IN THE MANUFACTURE OF SEMICONDUCTORS

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
AT571080A AT382963B (en) 1980-11-24 1980-11-24 MEASUREMENT METHOD FOR DETERMINING THE THICKNESS OF THIN LAYERS

Publications (2)

Publication Number Publication Date
ATA571080A true ATA571080A (en) 1986-09-15
AT382963B AT382963B (en) 1987-05-11

Family

ID=3578812

Family Applications (1)

Application Number Title Priority Date Filing Date
AT571080A AT382963B (en) 1980-11-24 1980-11-24 MEASUREMENT METHOD FOR DETERMINING THE THICKNESS OF THIN LAYERS

Country Status (4)

Country Link
AT (1) AT382963B (en)
DE (1) DE3145309A1 (en)
FR (1) FR2494840A1 (en)
GB (1) GB2088058B (en)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3700366A1 (en) * 1987-01-08 1988-07-21 Leybold Ag DEVICE FOR DETERMINING THE THICKNESS OF CHANGING MATERIAL LAYERS ON A SUBSTRATE DURING THE COATING PROCESS
ATE76972T1 (en) * 1987-03-31 1992-06-15 Benjamin Gavish METHOD AND DEVICE FOR MONITORING SMALL PEAK SHIFTS IN A FREQUENCY SPECTRUM.
DE3920052A1 (en) * 1989-06-20 1991-01-10 Peter Dipl Ing Berg Inertial mass measuring system deriving physical characteristics - uses vibrating oscillator working with higher and/or variable damping e.g. in liq.
US5112642A (en) * 1990-03-30 1992-05-12 Leybold Inficon, Inc. Measuring and controlling deposition on a piezoelectric monitor crystal
US6370955B1 (en) 1999-06-15 2002-04-16 Massachusetts Institute Of Technology High-temperature balance
JP2005049236A (en) * 2003-07-29 2005-02-24 Kansai Paint Co Ltd Electrodeposition characteristic measuring device, evaluation method and management method
DE102006006172B3 (en) * 2006-02-10 2007-09-27 Carl Zeiss Ag Coating e.g. anti-reflection coating, thickness measuring device for e.g. lens, has signal lines guiding to measuring heads and running into inner tubes, where cooling medium flows into curved tube via area between curved- and inner tubes
CN116121686B (en) * 2022-11-24 2023-08-04 广东粤水电新能源装备有限公司 Automatic zinc spraying system of wind power tower based on big data

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
HU167641B (en) * 1974-02-07 1975-11-28
HU170602B (en) * 1975-05-05 1977-07-28

Also Published As

Publication number Publication date
DE3145309A1 (en) 1982-06-16
AT382963B (en) 1987-05-11
GB2088058A (en) 1982-06-03
FR2494840B1 (en) 1984-03-23
FR2494840A1 (en) 1982-05-28
GB2088058B (en) 1984-09-05

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Legal Events

Date Code Title Description
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