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GB2054136B - Apparatus for measuring the thickness of thin layers - Google Patents

Apparatus for measuring the thickness of thin layers

Info

Publication number
GB2054136B
GB2054136B GB7925263A GB7925263A GB2054136B GB 2054136 B GB2054136 B GB 2054136B GB 7925263 A GB7925263 A GB 7925263A GB 7925263 A GB7925263 A GB 7925263A GB 2054136 B GB2054136 B GB 2054136B
Authority
GB
United Kingdom
Prior art keywords
measuring
thickness
thin layers
layers
thin
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB7925263A
Other versions
GB2054136A (en
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Priority to GB7925263A priority Critical patent/GB2054136B/en
Publication of GB2054136A publication Critical patent/GB2054136A/en
Application granted granted Critical
Publication of GB2054136B publication Critical patent/GB2054136B/en
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B15/00—Measuring arrangements characterised by the use of electromagnetic waves or particle radiation, e.g. by the use of microwaves, X-rays, gamma rays or electrons
    • G01B15/02—Measuring arrangements characterised by the use of electromagnetic waves or particle radiation, e.g. by the use of microwaves, X-rays, gamma rays or electrons for measuring thickness

Landscapes

  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • General Physics & Mathematics (AREA)
  • Measurement Of Radiation (AREA)
GB7925263A 1979-07-19 1979-07-19 Apparatus for measuring the thickness of thin layers Expired GB2054136B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
GB7925263A GB2054136B (en) 1979-07-19 1979-07-19 Apparatus for measuring the thickness of thin layers

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB7925263A GB2054136B (en) 1979-07-19 1979-07-19 Apparatus for measuring the thickness of thin layers

Publications (2)

Publication Number Publication Date
GB2054136A GB2054136A (en) 1981-02-11
GB2054136B true GB2054136B (en) 1983-06-29

Family

ID=10506632

Family Applications (1)

Application Number Title Priority Date Filing Date
GB7925263A Expired GB2054136B (en) 1979-07-19 1979-07-19 Apparatus for measuring the thickness of thin layers

Country Status (1)

Country Link
GB (1) GB2054136B (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6399944B1 (en) * 1999-07-09 2002-06-04 Fei Company Measurement of film thickness by inelastic electron scattering

Also Published As

Publication number Publication date
GB2054136A (en) 1981-02-11

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Legal Events

Date Code Title Description
PCNP Patent ceased through non-payment of renewal fee