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FR2494840B1 - - Google Patents

Info

Publication number
FR2494840B1
FR2494840B1 FR8121976A FR8121976A FR2494840B1 FR 2494840 B1 FR2494840 B1 FR 2494840B1 FR 8121976 A FR8121976 A FR 8121976A FR 8121976 A FR8121976 A FR 8121976A FR 2494840 B1 FR2494840 B1 FR 2494840B1
Authority
FR
France
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR8121976A
Other languages
French (fr)
Other versions
FR2494840A1 (en
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Balzers und Leybold Deutschland Holding AG
Original Assignee
Leybold Heraeus GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leybold Heraeus GmbH filed Critical Leybold Heraeus GmbH
Publication of FR2494840A1 publication Critical patent/FR2494840A1/en
Application granted granted Critical
Publication of FR2494840B1 publication Critical patent/FR2494840B1/fr
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/02—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness
    • G01B7/06—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring thickness
    • G01B7/063—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring thickness using piezoelectric resonators
    • G01B7/066—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring thickness using piezoelectric resonators for measuring thickness of coating

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices Characterised By Use Of Acoustic Means (AREA)
FR8121976A 1980-11-24 1981-11-24 MEASURING METHOD FOR DETERMINING THE THICKNESS OF THIN FILMS USING AN OSCILLATOR CRYSTAL, PARTICULARLY IN THE OPTICAL INDUSTRY AND IN THE MANUFACTURE OF SEMICONDUCTORS Granted FR2494840A1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
AT571080A AT382963B (en) 1980-11-24 1980-11-24 MEASUREMENT METHOD FOR DETERMINING THE THICKNESS OF THIN LAYERS

Publications (2)

Publication Number Publication Date
FR2494840A1 FR2494840A1 (en) 1982-05-28
FR2494840B1 true FR2494840B1 (en) 1984-03-23

Family

ID=3578812

Family Applications (1)

Application Number Title Priority Date Filing Date
FR8121976A Granted FR2494840A1 (en) 1980-11-24 1981-11-24 MEASURING METHOD FOR DETERMINING THE THICKNESS OF THIN FILMS USING AN OSCILLATOR CRYSTAL, PARTICULARLY IN THE OPTICAL INDUSTRY AND IN THE MANUFACTURE OF SEMICONDUCTORS

Country Status (4)

Country Link
AT (1) AT382963B (en)
DE (1) DE3145309A1 (en)
FR (1) FR2494840A1 (en)
GB (1) GB2088058B (en)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3700366A1 (en) * 1987-01-08 1988-07-21 Leybold Ag DEVICE FOR DETERMINING THE THICKNESS OF CHANGING MATERIAL LAYERS ON A SUBSTRATE DURING THE COATING PROCESS
ATE76972T1 (en) * 1987-03-31 1992-06-15 Benjamin Gavish METHOD AND DEVICE FOR MONITORING SMALL PEAK SHIFTS IN A FREQUENCY SPECTRUM.
DE3920052A1 (en) * 1989-06-20 1991-01-10 Peter Dipl Ing Berg Inertial mass measuring system deriving physical characteristics - uses vibrating oscillator working with higher and/or variable damping e.g. in liq.
US5112642A (en) * 1990-03-30 1992-05-12 Leybold Inficon, Inc. Measuring and controlling deposition on a piezoelectric monitor crystal
US6370955B1 (en) * 1999-06-15 2002-04-16 Massachusetts Institute Of Technology High-temperature balance
JP2005049236A (en) * 2003-07-29 2005-02-24 Kansai Paint Co Ltd Electrodeposition characteristic measuring device, evaluation method and management method
DE102006006172B3 (en) * 2006-02-10 2007-09-27 Carl Zeiss Ag Coating e.g. anti-reflection coating, thickness measuring device for e.g. lens, has signal lines guiding to measuring heads and running into inner tubes, where cooling medium flows into curved tube via area between curved- and inner tubes
CN116121686B (en) * 2022-11-24 2023-08-04 广东粤水电新能源装备有限公司 Automatic zinc spraying system of wind power tower based on big data

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
HU167641B (en) * 1974-02-07 1975-11-28
HU170602B (en) * 1975-05-05 1977-07-28

Also Published As

Publication number Publication date
GB2088058A (en) 1982-06-03
DE3145309A1 (en) 1982-06-16
FR2494840A1 (en) 1982-05-28
GB2088058B (en) 1984-09-05
AT382963B (en) 1987-05-11
ATA571080A (en) 1986-09-15

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Legal Events

Date Code Title Description
ST Notification of lapse