AR107318A1 - Método óptico para medir los grosores de recubrimiento depositados sobre el sustrato - Google Patents
Método óptico para medir los grosores de recubrimiento depositados sobre el sustratoInfo
- Publication number
- AR107318A1 AR107318A1 ARP170100042A ARP170100042A AR107318A1 AR 107318 A1 AR107318 A1 AR 107318A1 AR P170100042 A ARP170100042 A AR P170100042A AR P170100042 A ARP170100042 A AR P170100042A AR 107318 A1 AR107318 A1 AR 107318A1
- Authority
- AR
- Argentina
- Prior art keywords
- substrate
- optical method
- measuring
- coat thicknesses
- light
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
- G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
- G01B11/0616—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating
- G01B11/0625—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating with measurement of absorption or reflection
- G01B11/0633—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating with measurement of absorption or reflection using one or more discrete wavelengths
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C21/00—Accessories or implements for use in connection with applying liquids or other fluent materials to surfaces, not provided for in groups B05C1/00 - B05C19/00
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
- G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
- G01B11/0616—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating
- G01B11/0625—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating with measurement of absorption or reflection
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
- G01B21/02—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness
- G01B21/08—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness for measuring thickness
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/28—Investigating the spectrum
- G01J3/42—Absorption spectrometry; Double beam spectrometry; Flicker spectrometry; Reflection spectrometry
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
- G01N21/27—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands using photo-electric detection ; circuits for computing concentration
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Health & Medical Sciences (AREA)
- Theoretical Computer Science (AREA)
- Mathematical Physics (AREA)
- Engineering & Computer Science (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Length Measuring Devices By Optical Means (AREA)
Abstract
Métodos y aparatos para medir un grosor de un recubrimiento sobre un objeto. La luz se dirige hacia el objeto en una posición predeterminada sobre el objeto de tal manera que una porción de luz interactúa con el objeto. Se captura una imagen que tiene por lo menos dos canales de longitud de onda (por ejemplo, canales de color) que es producida por la porción de luz que interactúa con el objeto. Un desplazamiento relativo se determina entre cada uno de por lo menos dos canales de longitud de onda, con base en un histograma de cada canal de longitud de onda de por lo menos dos canales de longitud de onda. Por lo menos uno del grosor o una aceptabilidad del recubrimiento sobre el objeto se determina con base en el desplazamiento relativo determinado.
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US201662275905P | 2016-01-07 | 2016-01-07 |
Publications (1)
Publication Number | Publication Date |
---|---|
AR107318A1 true AR107318A1 (es) | 2018-04-18 |
Family
ID=59274525
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
ARP170100042A AR107318A1 (es) | 2016-01-07 | 2017-01-06 | Método óptico para medir los grosores de recubrimiento depositados sobre el sustrato |
Country Status (9)
Country | Link |
---|---|
US (1) | US10753728B2 (es) |
EP (1) | EP3400431B1 (es) |
CN (1) | CN108474739B (es) |
AR (1) | AR107318A1 (es) |
ES (1) | ES2917217T3 (es) |
MX (1) | MX2018008315A (es) |
PT (1) | PT3400431T (es) |
TW (1) | TWI723113B (es) |
WO (1) | WO2017120160A1 (es) |
Families Citing this family (19)
Publication number | Priority date | Publication date | Assignee | Title |
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US11836911B2 (en) * | 2017-07-26 | 2023-12-05 | Canon Kabushiki Kaisha | Image data management method, production apparatus, production system, image data management method for production system, and non-transitory computer-readable recording medium |
DE102018103171A1 (de) * | 2017-11-23 | 2019-05-23 | Tdk Electronics Ag | Verfahren zum Bestimmen von Eigenschaften einer Beschichtung auf einer transparenten Folie, Verfahren zur Herstellung einer Kondensatorfolie und Einrichtung zum Bestimmen von Eigenschaften einer Beschichtung auf einer transparenten Folie |
JP6687656B2 (ja) * | 2018-03-19 | 2020-04-28 | ファナック株式会社 | 検査装置およびその検査方法 |
JP6996413B2 (ja) * | 2018-04-27 | 2022-01-17 | トヨタ自動車株式会社 | 解析装置および解析プログラム |
RU2687312C1 (ru) * | 2018-07-23 | 2019-05-13 | Общество С Ограниченной Ответственностью "С-Инновации" (Ооо "С-Инновации") | Способ гравиметрического определения толщины сверхпроводящего слоя втсп проводов второго поколения |
KR102056759B1 (ko) * | 2018-09-03 | 2019-12-17 | 재단법인 오송첨단의료산업진흥재단 | 영상처리 기반의 수분 및 광 투과도 측정 시스템 및 이를 이용한 수분 및 광 투과도 측정 방법 |
US10746530B2 (en) * | 2018-12-07 | 2020-08-18 | Onto Innovation Inc. | Optical metrology device for measuring samples having thin or thick films |
CN110068278A (zh) * | 2019-04-22 | 2019-07-30 | 南京理工大学 | 基于fpga的非接触式光纤预制棒尺寸实时测量系统及方法 |
US11216928B2 (en) * | 2019-09-10 | 2022-01-04 | The Boeing Company | Method and apparatus for coating thickness inspection of a surface and coating defects of the surface |
JP7536517B2 (ja) * | 2019-10-08 | 2024-08-20 | キヤノン株式会社 | 教師データの生成方法、学習済の学習モデル、及びシステム |
US11633763B2 (en) * | 2019-12-16 | 2023-04-25 | Applied Vision Corporation | Sequential imaging for container sidewall inspection |
JP2023015418A (ja) * | 2019-12-27 | 2023-02-01 | パナソニックIpマネジメント株式会社 | 検査方法、プログラム、及び、検査システム |
CN111750786B (zh) * | 2020-07-06 | 2022-03-01 | 上海新昇半导体科技有限公司 | 厚度量测设备、抛光系统及抛光物料管理方法 |
CN111833345B (zh) * | 2020-07-29 | 2024-03-26 | 广东电网有限责任公司 | 一种基于光学图像的金属表面氧化层厚度的监控方法 |
US12254383B2 (en) * | 2021-03-30 | 2025-03-18 | Accenture Global Solutions Limited | Intelligent real-time defect prediction, detection, and AI driven automated correction solution |
CN113790674B (zh) * | 2021-08-06 | 2024-10-08 | 东旭药玻(北京)科技有限公司 | 用于玻璃制品的测量方法、处理器和测量装置 |
TWI800002B (zh) * | 2021-09-22 | 2023-04-21 | 易學科技股份有限公司 | 數位化色度尺規系統之設計方法及其數位化色度尺規系統 |
JPWO2023195215A1 (es) * | 2022-04-08 | 2023-10-12 | ||
CN116045791B (zh) * | 2023-04-03 | 2023-07-21 | 成都飞机工业(集团)有限责任公司 | 一种金属漆涂层厚度评估方法 |
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US4461576A (en) | 1981-02-18 | 1984-07-24 | Courser Incorporated | Optical measuring system |
US4651568A (en) | 1984-08-30 | 1987-03-24 | Kirin Beer Kabushiki Kaisha | Glass bottle inspection |
CA2034162A1 (en) | 1990-02-23 | 1991-08-24 | Akira Inoue | Method and apparatus for measuring the thickness of a coating |
GB9219450D0 (en) * | 1992-09-15 | 1992-10-28 | Glaverbel | Thin film thickness monitoring and control |
KR960018523A (ko) * | 1994-11-16 | 1996-06-17 | 배순훈 | 드럼의 다이아몬드상 카본 코팅두께 측정방법 |
EP0833126B1 (en) * | 1995-06-14 | 2003-04-09 | Kirin Beer Kabushiki Kaisha | Apparatus and methods for inspecting coating film |
US5619330A (en) | 1995-12-22 | 1997-04-08 | Thomson Consumer Electronics, Inc. | Method and apparatus for determining thickness of an OPC layer on a CRT faceplate panel |
US6252237B1 (en) | 1998-07-15 | 2001-06-26 | 3M Innovation Properties Company | Low cost thickness measurement method and apparatus for thin coatings |
US6392756B1 (en) * | 1999-06-18 | 2002-05-21 | N&K Technology, Inc. | Method and apparatus for optically determining physical parameters of thin films deposited on a complex substrate |
KR100366613B1 (ko) * | 1999-10-06 | 2003-01-06 | 삼성전자 주식회사 | 박막두께 측정방법 및 이를 적용한 장치 |
US7365860B2 (en) | 2000-12-21 | 2008-04-29 | Sensory Analytics | System capable of determining applied and anodized coating thickness of a coated-anodized product |
US6646752B2 (en) | 2002-02-22 | 2003-11-11 | Taiwan Semiconductor Manufacturing Co. Ltd | Method and apparatus for measuring thickness of a thin oxide layer |
US6797958B2 (en) | 2002-06-13 | 2004-09-28 | The Boeing Company | Method of measuring sol-gel coating thickness using infrared absorbance |
US6995377B2 (en) * | 2002-08-02 | 2006-02-07 | Plastipak Packaging, Inc. | Process and apparatus for testing bottles |
FR2849180A1 (fr) | 2002-12-20 | 2004-06-25 | Atofina | Procede et appareil pour la mesure sans contact de l'epaisseur d'un revetement sur un substrat |
US7259857B2 (en) * | 2004-01-14 | 2007-08-21 | Xerox Corporation | Methods for automated uniformity assessment and modification of image non-uniformities |
DE102004034693B4 (de) | 2004-07-17 | 2006-05-18 | Schott Ag | Verfahren und Vorrichtung zur berührungslosen optischen Messung der Dicke von heißen Glaskörpern mittels der chromatischen Aberration |
EP1715289A1 (en) * | 2005-04-21 | 2006-10-25 | Nederlandse Organisatie Voor Toegepast-Natuurwetenschappelijk Onderzoek Tno | An optical light reflection method |
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CN100582655C (zh) * | 2005-07-29 | 2010-01-20 | 大日本网目版制造株式会社 | 不均匀检查装置及不均匀检查方法 |
JP4955240B2 (ja) * | 2005-09-02 | 2012-06-20 | パナソニック株式会社 | 膜測定装置およびそれを用いる塗工装置 |
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JP5228490B2 (ja) * | 2005-12-26 | 2013-07-03 | 株式会社ニコン | 画像解析によって欠陥検査を行う欠陥検査装置 |
EP2023129A4 (en) | 2006-05-23 | 2012-02-22 | Kirin Techno System Company Ltd | SURFACE INSPECTION DEVICE |
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JP4279322B2 (ja) | 2007-02-20 | 2009-06-17 | 三菱重工業株式会社 | 波長選択方法、膜厚計測方法、膜厚計測装置、及び薄膜シリコン系デバイスの製造システム |
US9194814B2 (en) | 2010-10-01 | 2015-11-24 | Kirin Techno-System Company, Limited | Glass bottle inspection apparatus and method |
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JP6207333B2 (ja) * | 2013-10-07 | 2017-10-04 | 関西ペイント株式会社 | 膜厚測定方法および膜厚測定装置 |
TWI486550B (zh) * | 2014-01-20 | 2015-06-01 | Nat Univ Tsing Hua | 厚度線上即時檢測之光學干涉裝置及其方法 |
-
2017
- 2017-01-04 US US16/065,839 patent/US10753728B2/en not_active Expired - Fee Related
- 2017-01-04 ES ES17736209T patent/ES2917217T3/es active Active
- 2017-01-04 CN CN201780005995.2A patent/CN108474739B/zh not_active Expired - Fee Related
- 2017-01-04 MX MX2018008315A patent/MX2018008315A/es unknown
- 2017-01-04 WO PCT/US2017/012086 patent/WO2017120160A1/en active Application Filing
- 2017-01-04 PT PT177362092T patent/PT3400431T/pt unknown
- 2017-01-04 EP EP17736209.2A patent/EP3400431B1/en active Active
- 2017-01-06 AR ARP170100042A patent/AR107318A1/es active IP Right Grant
- 2017-01-06 TW TW106100484A patent/TWI723113B/zh not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
EP3400431A4 (en) | 2019-08-28 |
CN108474739B (zh) | 2021-10-01 |
TWI723113B (zh) | 2021-04-01 |
MX2018008315A (es) | 2018-12-06 |
PT3400431T (pt) | 2022-06-20 |
EP3400431B1 (en) | 2022-03-23 |
US10753728B2 (en) | 2020-08-25 |
US20190011252A1 (en) | 2019-01-10 |
EP3400431A1 (en) | 2018-11-14 |
ES2917217T3 (es) | 2022-07-07 |
TW201733688A (zh) | 2017-10-01 |
CN108474739A (zh) | 2018-08-31 |
WO2017120160A1 (en) | 2017-07-13 |
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