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PT3400431T - Método óptico para medir a espessura de revestimentos depositados em substratos - Google Patents

Método óptico para medir a espessura de revestimentos depositados em substratos

Info

Publication number
PT3400431T
PT3400431T PT177362092T PT17736209T PT3400431T PT 3400431 T PT3400431 T PT 3400431T PT 177362092 T PT177362092 T PT 177362092T PT 17736209 T PT17736209 T PT 17736209T PT 3400431 T PT3400431 T PT 3400431T
Authority
PT
Portugal
Prior art keywords
substrates
measure
thickness
optical method
coatings deposited
Prior art date
Application number
PT177362092T
Other languages
English (en)
Original Assignee
Arkema Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Arkema Inc filed Critical Arkema Inc
Publication of PT3400431T publication Critical patent/PT3400431T/pt

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
    • G01B11/0616—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating
    • G01B11/0625—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating with measurement of absorption or reflection
    • G01B11/0633—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating with measurement of absorption or reflection using one or more discrete wavelengths
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C21/00—Accessories or implements for use in connection with applying liquids or other fluent materials to surfaces, not provided for in groups B05C1/00 - B05C19/00
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
    • G01B11/0616—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating
    • G01B11/0625—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating with measurement of absorption or reflection
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
    • G01B21/02—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness
    • G01B21/08—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness for measuring thickness
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G01J3/42—Absorption spectrometry; Double beam spectrometry; Flicker spectrometry; Reflection spectrometry
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/27—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands using photo-electric detection ; circuits for computing concentration

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Health & Medical Sciences (AREA)
  • Theoretical Computer Science (AREA)
  • Mathematical Physics (AREA)
  • Engineering & Computer Science (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Length Measuring Devices By Optical Means (AREA)
PT177362092T 2016-01-07 2017-01-04 Método óptico para medir a espessura de revestimentos depositados em substratos PT3400431T (pt)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US201662275905P 2016-01-07 2016-01-07

Publications (1)

Publication Number Publication Date
PT3400431T true PT3400431T (pt) 2022-06-20

Family

ID=59274525

Family Applications (1)

Application Number Title Priority Date Filing Date
PT177362092T PT3400431T (pt) 2016-01-07 2017-01-04 Método óptico para medir a espessura de revestimentos depositados em substratos

Country Status (9)

Country Link
US (1) US10753728B2 (pt)
EP (1) EP3400431B1 (pt)
CN (1) CN108474739B (pt)
AR (1) AR107318A1 (pt)
ES (1) ES2917217T3 (pt)
MX (1) MX2018008315A (pt)
PT (1) PT3400431T (pt)
TW (1) TWI723113B (pt)
WO (1) WO2017120160A1 (pt)

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CN111750786B (zh) * 2020-07-06 2022-03-01 上海新昇半导体科技有限公司 厚度量测设备、抛光系统及抛光物料管理方法
CN111833345B (zh) * 2020-07-29 2024-03-26 广东电网有限责任公司 一种基于光学图像的金属表面氧化层厚度的监控方法
US12254383B2 (en) * 2021-03-30 2025-03-18 Accenture Global Solutions Limited Intelligent real-time defect prediction, detection, and AI driven automated correction solution
CN113790674B (zh) * 2021-08-06 2024-10-08 东旭药玻(北京)科技有限公司 用于玻璃制品的测量方法、处理器和测量装置
TWI800002B (zh) * 2021-09-22 2023-04-21 易學科技股份有限公司 數位化色度尺規系統之設計方法及其數位化色度尺規系統
JPWO2023195215A1 (pt) * 2022-04-08 2023-10-12
CN116045791B (zh) * 2023-04-03 2023-07-21 成都飞机工业（集团）有限责任公司 一种金属漆涂层厚度评估方法

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Also Published As

Publication number Publication date
EP3400431A4 (en) 2019-08-28
CN108474739B (zh) 2021-10-01
TWI723113B (zh) 2021-04-01
AR107318A1 (es) 2018-04-18
MX2018008315A (es) 2018-12-06
EP3400431B1 (en) 2022-03-23
US10753728B2 (en) 2020-08-25
US20190011252A1 (en) 2019-01-10
EP3400431A1 (en) 2018-11-14
ES2917217T3 (es) 2022-07-07
TW201733688A (zh) 2017-10-01
CN108474739A (zh) 2018-08-31
WO2017120160A1 (en) 2017-07-13

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