Wet Etching
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Recent papers in Wet Etching
In this treatment method laser radiation, which is guided from a coaxially expanding liquid jet-stream, locally initiates a thermochemical etching reaction on a metal surface, which leads to selective material removal at high resolution... more
In this work we present a locally developed MEMS-based technology for the assembly and characterization of optical MEMS components. For the assembly purpose, the processes required for the Si and glass micromachining (oxidation,... more
Recent research results are presented where lasers of different pulse durations and wavelengths have been coupled to near-field-scanning optical microscopes (NSOMs) through apertured bent cantilever fiber probes and atomic force... more