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... A SMA coil and a stailless steel liner coil are connected nickel electroplating and acrylic resinelectrodeposition. ... Late News ofthe 17th Sensor Symposium",p.107, 2000 10) S.Wang, JFLi, R.Watanabe and... more
... A SMA coil and a stailless steel liner coil are connected nickel electroplating and acrylic resinelectrodeposition. ... Late News ofthe 17th Sensor Symposium",p.107, 2000 10) S.Wang, JFLi, R.Watanabe and M.Esashi,"Fabrication of Lead Zirconate Titanate Microrodsfor 1-3 ...
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... S. Shoji and M. Esashi, Micro flow cell for blood gas analysis realizing very small sample volume ... 20 M. Takinami, K. Minami and M. Esashi, High-speed direc-tional low-temperature dry etching ... 7683 Part 2. Full Text via... more
... S. Shoji and M. Esashi, Micro flow cell for blood gas analysis realizing very small sample volume ... 20 M. Takinami, K. Minami and M. Esashi, High-speed direc-tional low-temperature dry etching ... 7683 Part 2. Full Text via CrossRef | View Record in Scopus | Cited By in Scopus (0 ...
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Small sized but relatively complicated intelligent systems or subsystems were fabricated based on silicon micromachining. Packaged micromechanical sensors as extremely sensitive resonant sensors, accelerometers and a silicon diaphragm... more
Small sized but relatively complicated intelligent systems or subsystems were fabricated based on silicon micromachining. Packaged micromechanical sensors as extremely sensitive resonant sensors, accelerometers and a silicon diaphragm capacitive vacuum sensor were developed. A two-dimensional electromagnetic optical scanner was also developed. The vacuum pressures in the packaged cavities of these devices were well controlled. Microflow control systems which have bakable microvalves were fabricated for advanced semiconductor processes. Novel three-dimensional micro fabrication methods were developed for silicon micromachining.
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In this paper, the design and evaluation of silicon-based PbZrTiO3 (PZT) driven XY-microstages with total dimensions of 20 × 20 × 0.4 mm3 are presented. The PZT actuator has the advantage of having high accuracy and high intrinsic... more
In this paper, the design and evaluation of silicon-based PbZrTiO3 (PZT) driven XY-microstages with total dimensions of 20 × 20 × 0.4 mm3 are presented. The PZT actuator has the advantage of having high accuracy and high intrinsic resonance frequency. However, its displacement is very small; thus Moonie amplification mechanisms are integrated to magnify the displacement. Finite element method simulation
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Recent research activities on solid state micro sensors in Japan are reviewed. Many kinds of micro sensors for chemical and physical quantitative analysis have been developed for biomedical instrumentation. Many of these sensors are... more
Recent research activities on solid state micro sensors in Japan are reviewed. Many kinds of micro sensors for chemical and physical quantitative analysis have been developed for biomedical instrumentation. Many of these sensors are fabricated with the advanced art of semiconductor technology, which is called micromachining. This technology enables fabrication of sensors so small that they can be used in catheter tubes etc. Moreover, it has brought out integrated sensing systems or multi sensors. In the field of chemical sensors, the development of ISFETs, i.e. ion sensitive field effect transistors, has been much advanced. These have been applied not only as ion sensors but also as biosensors or dissolved gas sensors. On the other hand, the major research activities on micro sensors for physical quantities have been on pressure sensors for measurements in blood vessels etc.
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A thermal micro mass flow sensor was developed. A micro bridge heater was fabricated by micromachining. The sensor has high sensitivity and quick response because of its small thermal capacity and small thermal time constant. Micro bridge... more
A thermal micro mass flow sensor was developed. A micro bridge heater was fabricated by micromachining. The sensor has high sensitivity and quick response because of its small thermal capacity and small thermal time constant. Micro bridge differential heaters were used to detect mass flow in a small flow range. An integrated magnetic oxygen sensor was fabricated using the micro
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MEMS-based electrostatically levitated spherical 3-axis accelerometer has been developed. Fabrication of the spherical MEMS device is made possible by incorporating Ball Semiconductor technology and a novel sacrificial etching process... more
MEMS-based electrostatically levitated spherical 3-axis accelerometer has been developed. Fabrication of the spherical MEMS device is made possible by incorporating Ball Semiconductor technology and a novel sacrificial etching process utilizing xenon difluoride gas etching through gas permeable layer. 1-millimeter diameter spherical proof mass is completely suspended without any mechanical support by closed-loop controlled electrostatic forcers. 3-axis acceleration is derived from
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... In the other a small vacuum pump is placed in the sealed cavity. A non-evaporable getter (NEG: SAES Getters: ST122/CTAM) is used as a small vacuum pump. ... 5. A small vacuum chamber having a window on the lid is connected to a... more
... In the other a small vacuum pump is placed in the sealed cavity. A non-evaporable getter (NEG: SAES Getters: ST122/CTAM) is used as a small vacuum pump. ... 5. A small vacuum chamber having a window on the lid is connected to a sorption pump or a turbo molecular pump. ...
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A distributed electrostatic micro actuator (DEMA) has been proposed. The actuator has many small driving units which consist of two wave-like insulated electrodes. Both ends of insulated electrodes are connected to each other, and the... more
A distributed electrostatic micro actuator (DEMA) has been proposed. The actuator has many small driving units which consist of two wave-like insulated electrodes. Both ends of insulated electrodes are connected to each other, and the driving unit has narrow gap for deformation caused by electrostatic forces. The driving units have large area of electrodes and are distributed in series and
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... steel pipe, durabilities to baking or to corrosive gases and an evaluation in application will be the subject of future work 5. Conclusions Micro fluid control systems integrated on a silicon wafer by micromachining have advantages in... more
... steel pipe, durabilities to baking or to corrosive gases and an evaluation in application will be the subject of future work 5. Conclusions Micro fluid control systems integrated on a silicon wafer by micromachining have advantages in controllability A liquid flow control system ...
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ABSTRACT First Page of the Article
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Three kinds of active catheters whose outside diameters are less than 2 mm were fabricated. One uses polymer links, the other two are linkless active catheters using adhesive. Distributed shape memory alloy (SMA) coil were used as... more
Three kinds of active catheters whose outside diameters are less than 2 mm were fabricated. One uses polymer links, the other two are linkless active catheters using adhesive. Distributed shape memory alloy (SMA) coil were used as actuators for the active motion. There are endoskeletal type and exoskeletal type in the linkless active catheters. We have applied the endoskeletal type
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We have developed a new batch fabrication process of a shape memory alloy (SMA) sheet based on electrochemical pulse etching with a sacrificial dummy metal layer. The method has realized a throughout micromachining of the SMA sheet. Using... more
We have developed a new batch fabrication process of a shape memory alloy (SMA) sheet based on electrochemical pulse etching with a sacrificial dummy metal layer. The method has realized a throughout micromachining of the SMA sheet. Using the new batch fabrication process, flat meandering S-shape SMA actuators of 38μm in thickness have been developed. The actuators whose widths were
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ABSTRACT
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Capacitive resonant mass sensing employing a single-crystalline silicon resonator with a thickness of 250 nm and electrical LC oscillator is presented, and the detectable minimum mass of 1times10-14 g is obtained in air. It was shown that... more
Capacitive resonant mass sensing employing a single-crystalline silicon resonator with a thickness of 250 nm and electrical LC oscillator is presented, and the detectable minimum mass of 1times10-14 g is obtained in air. It was shown that capacitive detection is less affected to noise than optical detection from the experimental comparison. Using the theoretical model and experimental results, low frequency
Research Interests: Engineering, Computer Aided Design, Silicon, Scientific Instruments, Transducers, and 10 morePhysical sciences, Microelectrodes, CHEMICAL SCIENCES, Reproducibility of Results, Gases, Molecular weight, Sensitivity and Specificity, Equipment Design, Equipment Failure Analysis, and Electric Capacitance
The characteristics of various types of ISFET's using inorganic gate films are described. The pH and pNa selectivities are investigated for SiO2, Si3N4, Al2O3, alumino-silicate, and sodium-aluminosilicate gate dielectrics. The... more
The characteristics of various types of ISFET's using inorganic gate films are described. The pH and pNa selectivities are investigated for SiO2, Si3N4, Al2O3, alumino-silicate, and sodium-aluminosilicate gate dielectrics. The transient response and device stability are also studied for different values of solution pH. The Al2O3gate shows a nearly ideal pH response, excellent stability, and selectivity to other cations. On
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The fabrication of a three-way valve on a silicon wafer by micromachining techniques is presented. The valve consists of two silicon wafers, a pyrex glass, and a piezoelectric actuator. This three-way valve can control gas flow or liquid... more
The fabrication of a three-way valve on a silicon wafer by micromachining techniques is presented. The valve consists of two silicon wafers, a pyrex glass, and a piezoelectric actuator. This three-way valve can control gas flow or liquid flow with voltage applied to the actuator. The liquid flow can be controlled from 0.1 μl /min to 70 μl/min. The results
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A silicon (Si) micro electro mechanical system (MEMS) package using a lightly-doped Si chip carrier for coplanar waveguide (CPW) microwave and millimeter-wave integrated circuits (MMICs) is proposed in order to reduce parasitic problems... more
A silicon (Si) micro electro mechanical system (MEMS) package using a lightly-doped Si chip carrier for coplanar waveguide (CPW) microwave and millimeter-wave integrated circuits (MMICs) is proposed in order to reduce parasitic problems of leakage, coupling, and resonance. The proposed chip carrier scheme is verified by fabricating and measuring a high resistivity silicon (HRS, 10 kΩ·cm) CPW on three types of carriers (conductor-back metal, lightly-doped Si, and HRS) in the frequency range 0.5 to 40 GHz. The proposed MEMS package using the lightly-doped (15 Ω·cm) Si chip carrier and the HRS shows low loss and is resonance-free since the lightly-doped Si chip carrier effectively absorbs and suppresses the resonant leakage. The Si MEMS package for CPW MMICs has an insertion loss (S21) of 2.0 dB, a reflection loss (S11) of 10 dB, and a power loss (PL) of 6.0 dB up to 40 GHz.