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Platz et al., 1995 - Google Patents

VHF-deposited a-SiC: H alloys for high-bandgap solar cells: combining high Voc and reasonable stability

Platz et al., 1995

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Document ID
9062530052020023138
Author
Platz R
Fischer D
Shah A
Publication year
Publication venue
MRS Online Proceedings Library (OPL)

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The material properties of a-SiC: H alloys deposited by VHFGD are studied, with a special emphasis on the effect of hydrogen dilution of the plasma on layer quality. By incorporating these layers into pin solar cells the authors compare layer properties and cell performance …
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