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Lill et al., 1999 - Google Patents

Preparation of amorphous hydrogenated silicon-germanium material and solar cells using the thermocatalytic chemical vapor deposition

Lill et al., 1999

Document ID
1345486534171186311
Author
Lill M
Schröder B
Publication year
Publication venue
Applied physics letters

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Snippet

Hydrogenated amorphous silicon-germanium (a-SiGe: H) films were produced by the “thermocatalytic chemical vapor deposition”[(TC-CVD) also called “hot-wire” CVD] method. With respect to proposed superstrate solar cell application of the material, the substrate …
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    • Y02E10/548Amorphous silicon PV cells
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