Lill et al., 1999 - Google Patents
Preparation of amorphous hydrogenated silicon-germanium material and solar cells using the thermocatalytic chemical vapor depositionLill et al., 1999
- Document ID
- 1345486534171186311
- Author
- Lill M
- Schröder B
- Publication year
- Publication venue
- Applied physics letters
External Links
Snippet
Hydrogenated amorphous silicon-germanium (a-SiGe: H) films were produced by the “thermocatalytic chemical vapor deposition”[(TC-CVD) also called “hot-wire” CVD] method. With respect to proposed superstrate solar cell application of the material, the substrate …
- 239000000463 material 0 title abstract description 15
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