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Heyman, 2022 - Google Patents

Design of a magnetically-levitated long-stroke 6-DOF nanoprecision positioning stage

Heyman, 2022

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Document ID
8062416516261906876
Author
Heyman I
Publication year

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Snippet

Micro/nano-positioning stages are at the core of a wide range of machines and instruments such as lithography scanners, precision machine tools, and microscopes. Growing demand for precise positioning performance over long motion strokes in all translational degrees-of …
Continue reading at repositories.lib.utexas.edu (PDF) (other versions)

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00—Measuring arrangements characterised by the use of electric or magnetic means
    • G01B7/30—Measuring arrangements characterised by the use of electric or magnetic means for measuring angles or tapers; for testing the alignment of axes
    • G01B7/31—Measuring arrangements characterised by the use of electric or magnetic means for measuring angles or tapers; for testing the alignment of axes for testing the alignment of axes

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