Kang et al., 2012 - Google Patents
Development of flexure based 6-degrees of freedom parallel nano-positioning system with large displacementKang et al., 2012
View PDF- Document ID
- 15239679896756930388
- Author
- Kang D
- Gweon D
- Publication year
- Publication venue
- Review of Scientific Instruments
External Links
Snippet
This paper details the development of a novel flexure jointed precision parallel nano- positioning system in combination with piezo-electric stepping motor for the application of precise optics alignment. The characteristics of the developed system are evaluated in this …
- 238000006073 displacement reaction 0 title description 17
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
- G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
- G02B7/003—Alignment of optical elements
- G02B7/004—Manual alignment, e.g. micromanipulators
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