[go: up one dir, main page]

Jeong et al., 2000 - Google Patents

Fabrication and test of a thermopneumatic micropump with a corrugated p+ diaphragm

Jeong et al., 2000

View PDF
Document ID
6416346729165118405
Author
Jeong O
Yang S
Publication year
Publication venue
Sensors and Actuators A: Physical

External Links

Snippet

This paper presents a thermopneumatic micropump fabricated by micromachining. The micropump consists of a p+ silicon diaphragm, a micro heater and a pair of nozzle/diffuser. The thermopneumatic actuator of this paper is characterized by a corrugated diaphragm …
Continue reading at www.academia.edu (PDF) (other versions)

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING ENGINES OR PUMPS
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K99/0001—Micro-valves
    • F16K99/0034—Operating means specially adapted for microvalves
    • F16K99/0042—Electric operating means therefor
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING ENGINES OR PUMPS
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K2099/0073—Fabrication methods specifically adapted for microvalves
    • F16K2099/0074—Fabrication methods specifically adapted for microvalves using photolithography, e.g. etching
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING ENGINES OR PUMPS
    • F04—POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F04B43/04—Pumps having electric drive
    • F04B43/043—Micro pumps
    • F04B43/046—Micro pumps with piezo-electric drive

Similar Documents

Publication Publication Date Title
Jeong et al. Fabrication and test of a thermopneumatic micropump with a corrugated p+ diaphragm
Sim et al. A phase-change type micropump with aluminum flap valves
Yun et al. A surface-tension driven micropump for low-voltage and low-power operations
Makino et al. Fabrication of TiNi shape memory micropump
Selvaganapathy et al. Electrothermally actuated inline microfluidic valve
Jeong et al. Fabrication of a peristaltic PDMS micropump
Yang et al. Design, fabrication, and testing of micromachined silicone rubber membrane valves
Xu et al. Characteristics and fabrication of NiTi/Si diaphragm micropump
Oosterbroek et al. A micromachined pressure/flow-sensor
Kim et al. A disposable thermopneumatic-actuated micropump stacked with PDMS layers and ITO-coated glass
Jeong et al. Fabrication and drive test of pneumatic PDMS micro pump
Nguyen et al. Hybrid-assembled micro dosing system using silicon-based micropump/valve and mass flow sensor
Jeong et al. Fabrication of a thermopneumatic microactuator with a corrugated p+ silicon diaphragm
Carlen et al. Surface micromachined paraffin-actuated microvalve
Li et al. Development of large flow rate, robust, passive micro check valves for compact piezoelectrically actuated pumps
Kim et al. A disposable polydimethylsiloxane-based diffuser micropump actuated by piezoelectric-disc
Ni et al. An integrated planar magnetic micropump
Bodén et al. A polymeric paraffin actuated high-pressure micropump
Bae et al. A bidirectional electrostatic microvalve with microsecond switching performance
Yang et al. A bimetallic thermally actuated micropump
Matsubara et al. A Microfabricated Pistonless Syringe Pump Driven by Electro‐Conjugate Fluid with Leakless On/Off Microvalves
Yoshida et al. Normally closed electrostatic microvalve with pressure balance mechanism for portable fuel cell application
McCarthy et al. Temperature-regulated nonlinear microvalves for self-adaptive MEMS cooling
Yang et al. Fabrication and dynamic testing of electrostatic actuators with p+ silicon diaphragms
Cunneen et al. A positive displacement micropump for microdialysis