Yang et al., 1996 - Google Patents
A bimetallic thermally actuated micropumpYang et al., 1996
- Document ID
- 1177647435026396879
- Author
- Yang Y
- Zhou Z
- Ye X
- Jiang X
- Publication year
- Publication venue
- ASME International Mechanical Engineering Congress and Exposition
External Links
Snippet
In this paper a bimetallic thermally-actuated membrane micropump is presented. The micropump have been fabricated using silicon micromachining technique. The pump consists of two chips and comprises a pump chamber, two bimetallic actuators and two …
- 239000012528 membrane 0 abstract description 2
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING ENGINES OR PUMPS
- F04—POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B43/00—Machines, pumps, or pumping installations having flexible working members
- F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
- F04B43/04—Pumps having electric drive
- F04B43/043—Micro pumps
- F04B43/046—Micro pumps with piezo-electric drive
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