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Liu et al., 2004 - Google Patents

Electrical properties of sputter deposited SrTiO3 gate dielectrics

Liu et al., 2004

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Document ID
5367490949898142526
Author
Liu C
Tseng T
Publication year
Publication venue
Journal of the European Ceramic Society

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We report the electrical properties of gate dielectric SrTiO3 (STO) thin films on Si substrates grown by radio-frequency magnetron sputtering. The interfacial layer between STO and Si degrades the performance of the gate dielectric. We used SiON as a sacrificial layer for …
Continue reading at ir.lib.nycu.edu.tw (PDF) (other versions)

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