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Hori et al., 2002 - Google Patents

Quarter-micrometer SPI (self-aligned pocket implantation) MOSFET's and its application for low supply voltage operation

Hori et al., 2002

Document ID
10063005284640161539
Author
Hori A
Hiroki A
Nakaoka H
Segawa M
Hori T
Publication year
Publication venue
IEEE transactions on electron devices

External Links

Snippet

A novel SPI (Self-aligned Pocket Implantation) technology has been presented, which improves short channel characteristics without increasing junction capacitance. This technology features a localized pocket implantation using gate electrode and TiSi/sub 2/film …
Continue reading at ieeexplore.ieee.org (other versions)

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