WO2025080512A1

WO2025080512A1 - Multi plenum showerhead without faceplate

Info

Publication number: WO2025080512A1
Application number: PCT/US2024/050156
Authority: WO
Inventors: David Alan TENCE; Mojtaba KAZEMI; Dustin Zachary Austin; Christopher Matthew Jones; Phuong Kim TA; Emile Charles DRAPER
Original assignee: Lam Research Corp
Current assignee: Lam Research Corp
Priority date: 2023-10-09
Filing date: 2024-10-07
Publication date: 2025-04-17
Anticipated expiration: 2026-04-09
Also published as: TW202531434A

Abstract

A showerhead includes a plate and a baffle. The plate includes a first surface and an opening at a center of the first surface. The baffle is disposed in the opening of the plate. The baffle extends into the plate through the opening. The baffle includes a second surface that lies in a plane parallel to the first surface of the plate and includes a first set of holes and a second set of holes in the second surface. The first set of holes and the second set of holes are not in fluid communication with each other. The baffle includes a connecting plate to connect the baffle to the showerhead, a stem extending from the connecting plate, and a gas delivery plate extending from the stem and including the first and second sets of holes to deliver one more gases.

Description

MULTI PLENUM SHOWERHEAD WITHOUT FACEPLATE

CROSS-REFERENCE TO RELATED APPLICATIONS

[0001] This application claims the benefit of U.S. Provisional Application No. 63/543,203, filed on October 9, 2023. The entire disclosure of the application referenced above is incorporated herein by reference.

FIELD

[0002] The present disclosure relates generally to substrate processing systems and more particularly to a multi-plenum showerhead without faceplate for substrate processing systems.

BACKGROUND

[0003] The background description provided here is for the purpose of generally presenting the context of the disclosure. Work of the presently named inventors, to the extent it is described in this background section, as well as aspects of the description that may not otherwise qualify as prior art at the time of filing, are neither expressly nor impliedly admitted as prior art against the present disclosure.

[0004] Substrate processing systems (also called tools) are used to treat substrates such as semiconductor wafers. A substrate processing system comprises a processing chamber. The processing chamber comprises a plurality of process modules (also called stations). Each process module can process a substrate. For example, the processing may include deposition, etching, cleaning, and/or other substrate treatments. During processing, the substrate is arranged on a substrate support in the process module. A gas delivery system introduces one or more gases and/or vaporized precursors into the process module via a gas delivery device. For example, the gas delivery device can be a showerhead, an injector, and so on. In some processes, plasma may be used to initiate chemical reactions. Examples of the processes comprise chemical vapor deposition (CVD), atomic layer deposition (ALD), plasma enhanced (PE) CVD (PECVD), and PEALD.

SUMMARY

[0005] A showerhead comprises a plate and a baffle. The plate comprises a first surface and an opening at a center of the first surface. The baffle is disposed in the opening of the plate. The baffle extends into the plate through the opening. The baffle comprises a second surface that lies in a plane parallel to the first surface of the plate and comprises a first set of holes and a second set of holes in the second surface. The first set of holes and the second set of holes are not in fluid communication with each other.

[0006] In additional features, the second surface of the baffle is coplanar with the first surface of the plate.

[0007] In additional features, nine holes of the first set of holes form a first square around a center of the second surface of the baffle. One or more holes of the first set of holes lie within the first square. None of the second set of holes lie within the first square.

[0008] In additional features, four holes of the second set of holes form a second square that is larger than the first square. The second square has a center coincident with the centers of the first square and the second surface of the baffle. Each of the four holes lies radially outward from one of the nine holes that lies at a corner of the first square.

[0009] In additional features, the second surface of the baffle further comprises a third set of holes having a diameter that is less than or equal to diameters of the first and second sets of holes. At least four holes of the third set of holes lie within the second square and outside the first square.

[0010] In additional features, at least one hole of the third set of holes and two holes of the first set of holes form a triangle with no other hole in the triangle.

[0011] In additional features, the third set of holes lies in a circle that is concentric with the centers of the first and second squares and with the center of the second surface of the baffle. Corners of the first square lie on the circle.

[0012] In additional features, the third set of holes is in fluid communication with the second set of holes and is not in fluid communication with the first set of holes.

[0013] In additional features, two diameters of the second surface of the baffle that are perpendicular to each other and that intersect at the center of the second surface of the baffle form four quadrants on the second surface of the baffle. The two diameters comprise only the first set of holes. Each quadrant comprises one or more holes of the third set of holes.

[0014] In additional features, each diameter comprises nine holes of the first set of holes. [0015] In additional features, the showerhead is configured to supply one or more gases through the baffle directly to a process chamber.

[0016] In additional features, the showerhead is configured to supply one or more gases through the baffle to a substrate facing the plate. The showerhead does not comprise a faceplate with holes facing the substrate.

[0017] In additional features, the showerhead is configured to supply a first gas through the first set of holes and supply a second gas through the second set of holes to a substrate facing the plate.

[0018] In additional features, the first and second sets of holes have the same diameter.

[0019] In additional features, the first and second sets of holes are arranged along concentric circles. The holes on at least one circle have a different diameter than the holes on at least one other circle.

[0020] In additional features, the first and second sets of holes are arranged in rows and columns.

[0021] In additional features, the baffle is coupled to the plate by one or more fasteners.

[0022] In additional features, the plate and the baffle are unitary.

[0023] In additional features, the baffle comprises a ring around the second surface of the baffle. The showerhead further comprises a gap between an outer diameter of the ring and an inner diameter of the opening in the plate.

[0024] In additional features, the baffle comprises a ring around the second surface of the baffle. An outer diameter of the ring is less than an inner diameter of the opening in the plate.

[0025] In additional features, an edge of the first surface of the plate is rounded along an inner diameter of the opening in the plate.

[0026] In additional features, the baffle comprises a ring around the second surface of the baffle, the showerhead further comprises a gap between an outer diameter of the ring and an inner diameter of the opening in the plate. The first set of holes in the baffle is configured to supply a first gas. The second set of holes in the baffle is disjoint from the first set of holes and is configured to supply a second gas. The gap is configured to pass the second gas. [0027] In additional features, the first and second sets of holes are arranged in an alternating pattern.

[0028] In additional features, each hole in the first and second sets of holes is spaced from adjacent holes in the first and second sets of holes by a predetermined distance.

[0029] In additional features, a diameter of the second surface of the baffle is 75-99% of a diameter of the opening.

[0030] In additional features, a diameter of the second surface of the baffle is 0.5-50% of a diameter of the first surface of the plate.

[0031] In additional features, a diameter of the opening is 0.5-50% of a diameter of the plate.

[0032] In additional features, the showerhead further comprises a stem connected to a second surface of the plate. The second surface is opposite to the first surface. The stem comprises a base portion coupled to a center region of the second surface of the plate and comprises a vertical portion extending vertically upwards from the base portion.

[0033] In additional features, the second surface of the plate (i) extends perpendicularly upwards from an outer diameter of the first surface for a first distance, (ii) extends, after the first distance, radially inwards for a second distance at an angle relative to the first surface of the plate and (iii) extends, after the second distance, radially inwards parallel to the first surface of the plate for a third distance to the base portion of the stem.

[0034] In still other features, a baffle for a showerhead comprises a connecting plate, a stem, and a gas delivery plate. The connecting plate is configured to connect the baffle to the showerhead. The stem extends from the connecting plate. The gas delivery plate extends from the stem and comprises a first set of holes and a second set of holes to deliver one more gases. The first set of holes and the second set of holes are not in fluid communication with each other.

[0035] In additional features, the connecting plate, the stem, and the gas delivery plate are cylindrical, and have different diameters.

[0036] In additional features, at least one of the connecting plate, the stem, and the gas delivery plate has a different shape than others of the connecting plate, the stem, and the gas delivery plate. [0037] In additional features, at least one of the connecting plate, the stem, and the gas delivery plate has a different size than others of the connecting plate, the stem, and the gas delivery plate.

[0038] In additional features, the connecting plate and the gas delivery plate have the same size.

[0039] In additional features, the connecting plate, the stem, and the gas delivery plate are unitary.

[0040] In additional features, the connecting plate, the stem, and the gas delivery plate are coupled to each other using one or more fasteners.

[0041] In additional features, the gas delivery plate is of a greater diameter than the stem. The connecting plate is of a greater diameter than the gas delivery plate.

[0042] In additional features, the baffle further comprises an opening extending through centers of the connecting plate and the stem and partially extending into the gas delivery plate through a center of the gas delivery plate.

[0043] In additional features, the connecting plate comprises a plurality of arcuate slots extending through the connecting plate. The plurality of arcuate slots is positioned radially outward from the stem.

[0044] In additional features, the gas delivery plate comprises a first set of holes and a second set of holes arranged in an alternating pattern. The first set of holes is configured to deliver a first gas and the second set of holes is configured to deliver a second gas that is different from the first gas.

[0045] In additional features, the first and second sets of holes have the same diameter.

[0046] In additional features, the first and second sets of holes are arranged along concentric circles. The holes on at least one circle have a different diameter than the holes on at least one other circle.

[0047] In additional features, the first and second sets of holes are arranged in rows and columns.

[0048] In additional features, one hole of the first set of holes is at a center of the gas delivery plate. Nine holes of the first set of holes form a first square at the center of the gas delivery plate. One or more holes of the first set of holes lie within the first square. None of the second set of holes lie within the first square. [0049] In additional features, four holes of the second set of holes form a second square with a center coincident with the centers of the first square and the gas delivery plate. Each of the four holes lies radially outward from one of the nine holes that lies at a corner of the first square.

[0050] In additional features, the gas delivery plate further comprises a third set of holes having a diameter that is less than or equal to diameters of each of the first and second sets of holes. At least four holes of the third set of holes lie within the second square and outside the first square.

[0051] In additional features, at least one hole of the third set of holes and two holes of the first set of holes form a triangle with no other hole in the triangle.

[0052] In additional features, the third set of holes lies in a circle that is concentric with the centers of the first and second squares and with the center of the gas delivery plate. Corners of the first square lie on the circle.

[0053] In additional features, the third set of holes is in fluid communication with the second set of holes and is not in fluid communication with the first set of holes.

[0054] In additional features, two diameters of the gas delivery plate that are perpendicular to each other and that intersect at the center of the gas delivery plate form four quadrants. The two diameters comprise only the first set of holes. Each quadrant comprises two holes of the third set of holes.

[0055] In additional features, each diameter comprises nine holes of the first set of holes.

[0056] In additional features, the stem comprises a fourth set of holes along a rim of the stem and a plurality of channels extending radially inwards at an angle relative to a vertical axis through the stem and the gas delivery plate between the third and fourth sets of holes. The third and fourth sets of holes are in fluid communication with each other, with the second set of holes, with the plurality of arcuate slots, and with an annular volume between the connecting and gas delivery plates around the stem.

[0057] In additional features, the second, third, and fourth sets of holes; the plurality of arcuate slots. The annular volume are not in fluid communication with the first set of holes. [0058] In additional features, the gas delivery plate comprises a plate and a frustoconical portion and a ring attached to the plate. The ring surrounds the frustoconical portion defining a gap therebetween.

[0059] In additional features, a smaller end of the frustoconical portion is attached to the plate. An inner portion of the ring tapers radially inwards as the ring extends towards the plate.

[0060] In additional features, a larger end of the frustoconical portion is attached to the plate. An inner portion of the ring tapers radially outwards as the ring extends towards the plate.

[0061] In additional features, the frustoconical portion comprises a fifth set of holes positioned transversely through the frustoconical portion. The first set of holes is connected through the frustoconical portion perpendicularly to the fifth set of holes.

[0062] In additional features, the baffle further comprises an opening extending through centers of the connecting plate and the stem and partially extending into the gas delivery plate through a center of the gas delivery plate. The opening is in fluid communication with the first and fifth sets of holes and with the gap between the frustoconical portion and the ring.

[0063] In additional features, the opening, the first and fifth sets of holes, and the gap are not in fluid communication the second, third, and fourth sets of holes. The plurality of arcuate slots. The annular volume between the connecting and gas delivery plates around the stem.

[0064] In additional features, diameters of each hole in the third and fourth sets of holes and each channel in the plurality of channels are the same. The angle is 45-85 degrees.

[0065] In additional features, a diameter of the first and second sets of holes is 1 -25% of a diameter of the fifth set of holes. A diameter of the third and fourth sets of holes and of the plurality of channels is 10-100% of a diameter of the first and second sets of holes.

[0066] In additional features, a thickness of the stem is less than a thickness of the connecting plate. A thickness of the gas delivery plate is less than the thickness of the stem.

[0067] In still other features, a showerhead comprises a baseplate and a baffle. The baseplate comprises a first surface and an opening at a center of the first surface. The baffle is disposed in the opening of the baseplate. The baffle extends into the baseplate through the opening. The baffle comprises a second surface that lies in a plane parallel to the first surface of the baseplate and comprises a first set of holes and a second set of holes in the second surface. The first set of holes and the second set of holes are not in fluid communication with each other.

[0068] In additional features, the showerhead is configured to supply one or more gases through the baffle directly to a process chamber.

[0069] In additional features, the showerhead is configured to supply one or more gases through the baffle to a substrate facing the baseplate, the showerhead does not comprise a faceplate with holes facing the substrate.

[0070] In additional features, the second surface of the baffle is coplanar with the first surface of the baseplate.

[0071] In additional features, the baffle is coupled to the baseplate by one or more fasteners.

[0072] In additional features, the baseplate and the baffle are unitary.

[0073] In additional features, a diameter of the opening is 0.5-50% of a diameter of the baseplate.

[0074] In additional features, a diameter of the second surface of the baffle is 0.5-50% of a diameter of the first surface of the baseplate.

[0075] In additional features, a diameter of the second surface of the baffle is 75-95% of a diameter of the opening.

[0076] In additional features, the showerhead is configured to supply a first gas through the first set of holes and supply a second gas through the second set of holes to a substrate facing the baseplate.

[0077] In additional features, the baseplate comprises a first slot in a second surface of the baseplate. The second surface is opposite to the first surface. The showerhead further comprises a first component and a second component. The first component comprises a first base portion disposed in the first slot and a first vertical portion extending from the first base portion. The first vertical portion comprises a conduit. The second component comprises a second base portion disposed in the first slot on the first base portion and a second vertical portion extending from the second base portion. The second vertical portion comprises an inlet. The first and second base portions have the same diameter as the first slot. The second vertical portion has a greater diameter than the first vertical portion. The second vertical portion surrounds the first vertical portion defining a first annular volume therebetween. The first annular volume is in fluid communication with the inlet and is not in fluid communication with the conduit.

[0078] In additional features, the opening has a first diameter. The first slot has a second diameter. The first base portion comprises a second slot facing the opening and having a third diameter greater than the first diameter and less than the second diameter. The baffle is disposed in the second slot.

[0079] In additional features, the baffle comprises a connecting plate disposed in the second slot, a stem extending from the connecting plate, and a gas delivery plate extending from the stem. The connecting plate, the stem, and the gas delivery plate have different diameters.

[0080] In additional features, the connecting plate, the stem, and the gas delivery plate are unitary.

[0081] In additional features, the connecting plate, the stem, and the gas delivery plate are coupled to each other using one or more fasteners.

[0082] In additional features, the gas delivery plate is of a greater diameter than the stem. The connecting plate is of a greater diameter than the gas delivery plate.

[0083] In additional features, a thickness of the stem is less than a thickness of the connecting plate. A thickness of the gas delivery plate is less than the thickness of the stem.

[0084] In additional features, the connecting plate comprises a plurality of arcuate slots arranged in a circle having a greater dimeter than the stem. The first vertical portion comprises a plurality of angular holes extending radially inward and downward through the first base portion to the second slot. The angular holes are in fluid communication with the first annular volume and coincide with the arcuate slots.

[0085] In additional features, the gas delivery plate comprises a plate, a frustoconical portion having a smaller end attached to the plate, and a ring surrounding the frustoconical portion and attached to the plate. An inner portion of the ring tapers parallel to the frustoconical portion defining a gap therebetween.

[0086] In additional features, the baffle comprises a third set of holes and a fifth set of holes. The third set of holes extends radially outwardly at an angle through the frustoconical portion into the stem forming a fourth set of holes on a rim of the stem. The fifth set of holes is positioned transversely through the frustoconical portion. The first set of holes is connected through the frustoconical portion perpendicularly to the fifth set of holes.

[0087] In additional features, the conduit extends through centers of the connecting plate, the stem, and the plate into the frustoconical portion and is in fluid communication with the first and fifth sets of holes and with the gap between the frustoconical portion and the ring.

[0088] In additional features, the connecting and gas delivery plates define a second annular volume therebetween and around the stem. The second set of holes extend through the plate and the frustoconical portion. The second, third, and fourth sets of holes are in fluid communication with the second annular volume.

[0089] In additional features, the conduit, the first and fifth sets of holes, and the gap (296) between the frustoconical portion and the ring are in fluid communication with each other and define a first plenum of the showerhead. The inlet, the first and second annular volumes, the angular holes, the arcuate slots, the second, third, and fourth sets of holes, and a second gap between gas delivery plate and the opening are in fluid communication with each other and define a second plenum of the showerhead.

[0090] In additional features, a portion of the conduit extending through centers of the connecting plate, the stem, and the plate into the frustoconical portion; the first and fifth sets of holes; and the gap between the frustoconical portion and the ring are in fluid communication with each other and define a first plenum of the baffle. The second annular volume, the arcuate slots, and the second, third, and fourth sets of holes are in fluid communication with each other and define a second plenum of the baffle.

[0091] In additional features, the first and second sets of holes have the same diameter.

[0092] In additional features, the first and second sets of holes are arranged along concentric circles. The holes on at least one circle have a different diameter than the holes on at least one other circle.

[0093] In additional features, an edge of the first surface of the baseplate is rounded along an inner diameter of the opening in the baseplate.

[0094] In additional features, the first and second sets of holes are arranged in an alternating pattern. [0095] In additional features, each hole in the first and second sets of holes is spaced from adjacent holes in the first and second sets of holes by a predetermined distance.

[0096] In additional features, the first and second sets of holes have a smaller diameter of the fifth set of holes. A diameter of the third and fourth sets of holes is less than or equal to a diameter of the first and second sets of holes.

[0097] Further areas of applicability of the present disclosure will become apparent from the detailed description, the claims and the drawings. The detailed description and specific examples are intended for purposes of illustration only and are not intended to limit the scope of the disclosure.

BRIEF DESCRIPTION OF THE DRAWINGS

[0098] The present disclosure will become more fully understood from the detailed description and the accompanying drawings, wherein:

[0099] FIG. 1 shows an example of a substrate processing system for processing substrates using a showerhead without faceplate and including a baffle according to the present disclosure;

[0100] FIG. 2 shows an example of a perspective view of the showerhead according to the present disclosure; and

[0101] FIG. 3 shows an example of a side view of the showerhead according to the present disclosure;

[0102] FIG. 4 shows an example of a bottom view of the showerhead according to the present disclosure;

[0103] FIG. 5 shows an example of a cross-sectional view of the showerhead according to the present disclosure;

[0104] FIG. 6 shows an example of a baseplate of the showerhead according to the present disclosure;

[0105] FIGS. 7A-7E, 8, and 9 show examples of various components of the showerhead according to the present disclosure;

[0106] FIGS. 10A-10C show examples of various perspective views of a baffle of the showerhead according to the present disclosure; [0107] FIGS. 11 A and 11 B show examples of side views of the baffle of the showerhead according to the present disclosure;

[0108] FIG. 12 shows an example of a top view of the baffle of the showerhead according to the present disclosure;

[0109] FIG. 13 shows a first example of a cross-sectional view of the baffle of the showerhead according to the present disclosure;

[0110] FIG. 14 shows a second example of a partial cross-sectional view of the baffle of the showerhead according to the present disclosure;

[0111] FIG. 15 shows an example of a bottom view of the baffle of the showerhead according to the present disclosure;

[0112] FIG. 16 shows a third example of a cross-sectional view of the baffle of the showerhead according to the present disclosure;

[0113] FIG. 17 is a perspective view of a showerhead with a baffle for a substrate processing system according to the present disclosure;

[0114] FIG. 18 is a side view of the showerhead shown in FIG. 17;

[0115] FIG. 19 is a top view of the showerhead shown in FIG. 17;

[0116] FIG. 20 is a bottom view of the showerhead shown in FIG. 17;

[0117] FIG. 21 is a perspective view of the baffle of the showerhead shown in FIG. 17 with the baffle upright;

[0118] FIG. 22 is a perspective view of the baffle of the showerhead shown in FIG. 17 with the baffle upside down;

[0119] FIG. 23 is a side view of the baffle shown in FIG. 22;

[0120] FIG. 24 is a top view of the baffle shown in FIG. 22; and

[0121] FIG. 25 is a bottom view of the baffle shown in FIG. 22.

[0122] In the drawings, reference numbers may be reused to identify similar and/or identical elements.

DETAILED DESCRIPTION

[0123] In deposition processes, showerheads are typically used to deliver process gases to processing chambers under vacuum in a controlled and uniform manner. The showerheads typically comprise a backplate and a faceplate attached to the backplate. The faceplate typically has a diameter that is equal to or greater than the substrate and that is equal to or less than the backplate. The faceplate comprises thousands of through holes distributed across the entire faceplate through which process gases are introduced into the processing chamber.

[0124] Many factors including but not limited to gas properties, deposition chemistry and uniformity, temperature, pressure, and throughput affect the design of showerheads. Single and dual plenum showerheads with different overall sizes and hole patterns in faceplates are typically used to deliver process gases to processing chambers. These designs are typically complex and require advanced manufacturing techniques, which make the showerheads expensive components of a gas delivery system. For example, in dual-plenum showerheads, the through holes are cross-drilled, which includes orthogonally drilling holes though a baseplate of the showerhead, which is an expensive process. Showerhead design has a direct impact on throughput, which directly relates to the manufacturing cost of semiconductors.

[0125] The present disclosure provides a multi-plenum showerhead with a simple and cost-effective design that eliminates the faceplate and allows delivery of up to three separate gases to a processing chamber. More specifically, the state-of-the-art comprises single and dual plenum showerheads of various sizes and hole patterns in faceplates. In some designs, showerheads are mounted (or suspended) above a pedestal in a processing chamber with a gap between the bottom face (i.e., the faceplate) of the showerhead and a substrate arranged on the pedestal. In other designs, showerheads and pedestals are reversed, which allows a process gas to flow from the bottom of the processing chamber, through the substrate support, to the top of the processing chamber. Showerheads can also be used to generate and deliver plasmas. In these applications, showerheads are utilized as an electrode (ground or active electrode of an RF generating system) in addition to delivering gases to the processing chamber.

[0126] In a single plenum showerhead, all gases flow through a shared path either separately or together, while in a dual plenum showerhead, two separate paths allow passage of two separate streams of gases. In either design, the showerheads comprise a faceplate with many (e.g., thousands of) holes distributed across the entire faceplate through which process gases are delivered into the processing chamber. Showerheads can be actively heated using different techniques such as heating elements or can be passively heated through radiation, convection, and conduction by components in the processing chamber that are hotter than the showerhead.

[0127] Showerheads can be a source of failure partly due to their complex and customized design. With a single plenum showerhead, the common gas delivery path can result in particle development due to remaining gases left over (stagnant) from previously supplied chemistry in a multi chemistry process. Also, non-uniformity of deposition and low throughput are directly related to the design of showerheads. Showerhead failure (e.g., clogging of through holes in the faceplate) can increase non-productive time (downtime) for a processing chamber. For example, the clogged through holes in the faceplate need to be periodically cleaned, which increases the downtime. Further, the cleaning process can alter the dimensions of the holes over time, which requires replacing the showerheads. Due to the high cost of showerheads, replacing them frequently can increase the overall cost of semiconductor manufacturing.

[0128] The faceless multi-plenum showerhead according to the present disclosure solves the above problems as follows. Unlike the conventional showerheads comprising faceplates with thousands of through holes distributed across the entire faceplate, the multi-plenum showerhead of the present disclosure does not comprise a faceplate. The faceless multi-plenum showerhead according to the present disclosure is without a faceplate and is therefore called a faceless multi-plenum showerhead (or simply a faceless showerhead), where faceless means faceplate-less or without faceplate. In the faceless showerhead, a baffle is used instead of the faceplate. The baffle provides one or more plenums and corresponding through holes. The baffle is disposed in the backplate of the showerhead.

[0129] The faceless showerhead comprises only the backplate and the baffle and does not comprise the faceplate. The diameter of the baffle is less than the diameters of the backplate, the substrate, and the faceplate, which is not used in the faceless showerhead but is used in conventional showerheads. For example, the diameter of the baffle is less than 50% of the diameters of the backplate, the substrate, and the faceplate. Multiple (e.g., two or more) separate plenums in the baffle allow delivering multiple (e.g., two or more) separate streams of processes gases either concurrently or sequentially. The number of through holes in the baffle (e.g., about one hundred) are also considerably less than the number of through holes in the faceplate. Thus, the faceless showerhead delivers process gases through a considerably smaller area from the bottom of the faceless showerhead (e.g., from ,5%-50% area of the bottom of the faceless showerhead) as compared to the conventional showerheads with faceplates.

[0130] The faceless showerhead reduces or eliminates particle generation and increases throughput by reducing the amount of time required to deliver and purge gasses through the multiple plenums as compared to conventional showerhead designs. The faceless showerhead is also easier to clean than the conventional showerheads with faceplates. For example, the faceless showerhead can be cleaned by machining the bottom surface of the faceless showerhead, which is easier than cleaning the clogged through holes in the faceplate of the conventional showerheads.

[0131] Further, unlike the faceplates, the baffle is easier to manufacture and cheaper to replace. For example, the baffle can be manufactured using additive manufacturing techniques such as 3D printing, which can eliminate the expensive cross-drilling process to drill the through holes, and which can reduce the manufacturing and replacement costs of the baffle as compared to the faceplate. Thus, the faceless showerhead is a simpler and cost-effective design than conventional showerhead designs.

[0132] More specifically, the faceless showerhead uses a baffle design instead of a typical faceplate with hole patterns to achieve uniformity of gases flowing out of each plenum. The design of the faceless showerhead minimizes stagnation of gases in the processing chamber, which results in shorter purge times than when using conventional showerheads. The faceless showerhead design can be used in actively and passively heated applications and for RF or non-RF applications. The faceless showerhead can be actively or passively heated and cooled. Thus, as compared to conventional showerheads, the faceless showerhead design increases process speed by delivering multiple separate gases, reduces cost by eliminating complex manufacturing techniques, and reduces non-productive time (downtime) of processing chambers due to improved reliability. These and other features of the present disclosure are described below in further detail.

[0133] The present disclosure is organized in two sections as follows. A first section includes FIGS. 1 -16. A second section includes FIGS. 17-25. In the first section, internal and external features of the showerhead and the baffle are shown and described in detail. In the second section, only the external features of the showerhead and the baffle are shown and described briefly. In the first section, initially, an example of a substrate processing system in which the faceless showerhead of the present disclosure can be used is shown and described with reference to FIG. 1 . The showerhead and its elements including the baffle are shown and described with reference to FIGS. 2-9. The baffle of the showerhead is described in detail with reference to FIGS. 10A-16. In the second section, various views of the showerhead and the baffle are shown. Some of the views in the second section are also shown and described in the first section. Nonetheless, since the figures in the first section include reference numerals, in the second section, some of the views shown in the first section and other views of the showerhead and the baffle are shown again to show the external features of the showerhead and the baffle without the reference numerals.

FIRST SECTION: INTERNAL AND EXTERNAL FEATURES OF SHOWERHEAD

[0134] Throughout the following description, as shown in FIGS. 2-16, an axis parallel to a plane in which the backplate (also called a baseplate) and the baffle of the showerhead lie is called a horizontal axis, an x-axis, or a first axis; and an axis perpendicular to the plane in which the backplate and the baffle of the showerhead lie is called a vertical axis, z-axis, an axis of the showerhead, or a second axis. The x-axis is also parallel to the plane in which a substrate lies when the substrate is placed on a substrate support for processing. The x-axis is also parallel to diameters of the backplate and the baffle of the showerhead. The x-axis also extends along a radial direction of backplate and the baffle of the showerhead. Further, examples of various dimensions of different components of the showerhead and the baffle, along with their technical advantages, are described in the end.

[0135] Further, throughout the present disclosure, the showerhead including the baffle is generally described as comprising various components. These components can be attached to each other as described below using suitable fasteners. Alternatively, these components can be diffusion bonded together. In some examples, the showerhead including the baffle can be manufactured as a unitary, integrated, and single component using a variety of manufacturing techniques such as 3D printing. Additionally, throughout the present disclosure, the baffle is also generally described as comprising various components. These components can also be attached to each other as described below using suitable fasteners. Alternatively, these components can also be diffusion bonded together. In some examples, the baffle can also be manufactured as a unitary, integrated, and single component using a variety of manufacturing techniques such as 3D printing. The baffle can then be attached to the remainder of the showerhead using suitable fasteners or diffusion bonding.

[0136] Furthermore, all or some of the components of the showerhead and/or the baffle can comprise the same or different materials. Examples of the materials include metallic materials (e.g., metals and alloys) and ceramic materials. For example, ceramic materials provide the advantage of being non-corrosive to some of the chemistries used to process substrates while metallic materials can be used in high-temperature applications.

EXAMPLE OF SUBSTRATE PROCESSING SYSTEM

[0137] FIG. 1 shows an example of a substrate processing system 100 in which the faceless showerhead with the baffle described above and further described below with reference to FIGS. 2-16 can be used. The substrate processing system 100 comprises a station (also called a process module or a processing chamber) 1 12 in which substrates are processed. While only one station 1 12 is shown as an example, the substrate processing system 100 may comprise a plurality of stations 1 12. Each station 1 12 may use the faceless showerhead with the baffle of the present disclosure. For example, a substrate may be processed sequentially in the stations 112. Different processes such as atomic layer deposition (ALD), chemical vapor deposition (CVD), plasma enhanced ALD (PEALD), plasma enhanced CVD (PECVD), thermal ALD (T-ALD), and so on may be performed on the substrate in different stations using the faceless showerhead with the baffle of the present disclosure.

[0138] The station 1 12 comprises a pedestal (also called a substrate support) 1 14 and a showerhead 1 16. The pedestal 1 14 comprises a base portion (also called a baseplate) 1 18 and a stem portion 120. The stem portion 120 extends from base portion 1 18 and is coupled to the bottom of the station 1 12. During processing, a substrate 124 is arranged on a top surface of the base portion 118 of the pedestal 1 14.

[0139] The substrate 124 can be clamped to the top surface of the base portion 1 18 of the pedestal 1 14 using a clamping mechanism such as vacuum clamping. Alternatively, while not shown, the pedestal 1 14 can use another type of clamping mechanism. For example, the pedestal 1 14 may comprise an electrostatic chuck (ESC). The ESC can be disposed in the base portion 1 18 of the pedestal 1 14. The ESC comprises a clamping electrode disposed close to the top surface of the base portion 118 of the pedestal 1 14. The clamping electrode electrostatically clamps the substrate 124 to the top surface of the base portion 1 18 of the pedestal 1 14. Other examples of clamping mechanisms include mechanical clamping, mesas (small miniature contact areas or MCAs) disposed on the top surface of the base portion 1 18 of the pedestal 1 14, and so on. In some processes (e.g., ALD), regardless of the clamping scheme used, the pedestal 1 14 with the substate 124 can be moved by an actuator 121 close to the bottom of the showerhead 1 16.

[0140] The showerhead 1 16 is described below in detail with reference to FIGS. 2-16. Briefly, the showerhead 1 16 comprises a base portion (also called a baseplate) 126 and a stem portion (or stem) 128. The baseplate 126 of the showerhead 1 16 is generally cylindrical. The baseplate 126 of the showerhead 116 is greater than or equal to a diameter of the substrate 124. The stem 128 of the showerhead 1 16 is also generally cylindrical. The stem 128 of the showerhead 1 16 is of a smaller diameter than the baseplate 126 of the showerhead 1 16. The stem 128 of the showerhead 1 16 extends from the baseplate 126 of the showerhead 1 16. The stem 128 of the showerhead 1 16 is attached to a top plate of the station 1 12. While the showerhead 1 16 is shown as a chandelier style showerhead comprising the stem 128 that is attached to the top plate of the station 112, the showerhead 116 can be of any other type (e.g., flush-mounted to the top plate of the station 1 12).

[0141] The stem 128 of the showerhead 1 16 receives various gases (e.g., process gases, vaporized precursors, purge gases, cleaning gases, etc.) from a gas delivery system 150 via a manifold 152. The baseplate 126 of the showerhead 116 does not comprise a faceplate comprising through holes or slots (not shown) through which the gases are introduced into the station 1 12. Instead, the baseplate 126 of the showerhead 1 16 comprises a baffle 127, which is much smaller in diameter than the baseplate 126 (see dimensions below). Accordingly, the baffle 127 is also much smaller in diameter than the substrate 124 (see dimensions below). The baffle 127 comprises dual disjoint plenums and various holes through which the gases are introduced into the station 1 12. The showerhead 1 16 and the baffle 127 are described below in detail with reference to FIGS. 2-16.

[0142] The substrate processing system 100 comprises the gas delivery system 150. The gas delivery system 150 comprises gas sources 154, valves 156, and mass flow controllers (MFCs) 158. The gas sources 154 supply various gases such as process gases, inert gases (also called purge gases, edge gases, carrier gases), cleaning gases, etc. The valves 156 are connected to the gas sources 154 and the MFCs 158. The valves 156 can be controlled to supply the gases from the gas sources 154 to the MFCs 158. The MFCs 158 regulate the flow of the gases to the manifold 152. The gases are supplied through the manifold 152 to the showerhead 1 16 and the baffle 127 as described below in further detail with reference to FIGS. 2-16.

[0143] Additionally, in some applications, the substrate processing system 100 comprises another delivery system configured to deliver vaporized precursors via respective valves, which are collectively shown as vaporized precursors and valves 151 . The vaporized precursors and valves 151 deliver vaporized precursors to the manifold 152. The manifold 152 supplies the gases or gas mixtures from the gas delivery system 150 and/or the vaporized precursors from the vaporized precursors and valves 151 to the showerhead 1 16. Thus, the gas delivery system 150 and the vaporized precursors and valves 151 can supply different chemistries to the showerhead 1 16 and the baffle 127 as described below in further detail with reference to FIGS. 2-16.

[0144] The substrate processing system 100 further comprises a radio frequency (RF) power supply 160. In some processes, when plasma is used, the RF power supply 160 supplies RF power to the showerhead 1 16 during processing of the substrate 124 and during cleaning of the station 112 with the pedestal 114 being grounded or floating. While not shown, in some applications, the RF power supply 160 supplies RF power to the pedestal 1 14 during processing of the substrate 124 and during cleaning of the station 1 12 with the showerhead 1 16 being grounded or floating. The RF power excites the gases (e.g., process gases, vaporized precursors, cleaning gases, etc.) introduced into the station 1 12 through the showerhead 116 and the baffle 127 to generate plasma between the showerhead 1 16 and the pedestal 1 14. The plasma can be used to process the substrate 124 and to clean various components within the station 1 12 (e.g., the pedestal 1 14, sidewalls of the station 1 12, and so on).

[0145] The base portion 1 18 of the pedestal 1 14 comprises a heater 162. The heater 162 heats the base portion 1 18 of the pedestal 114, which in turn heats the substrate 124. The base portion 1 18 of the pedestal 1 14 comprises a temperature sensor 164 to sense the temperature of the pedestal 114. While not shown, the baseplate 126 of the showerhead 1 16 may also comprise a heater to heat the gases, gas mixtures, and/or the vaporized precursors being introduced into the station 1 12 through the showerhead 1 16. Additionally, the baseplate 126 of the showerhead 1 16 may also comprise a temperature sensor 168 to sense the temperature of the showerhead 116. [0146] The substrate processing system 100 further comprises a vacuum pump 172 and valves 170. When vacuum clamping is used to clamp the substrate 124 to the pedestal 1 14, the vacuum pump 172 creates vacuum on the top surface of the pedestal 1 14. The vacuum pump 172 also evacuates gases and reactants from the station 1 12. The vacuum pump 172 also maintains pressure (e.g., vacuum) in the station 1 12 during processing of the substrate 124.

[0147] The substrate processing system 1 10 further comprises a controller 180. The controller 180 controls the valves 156 and 170, the MFCs 158, the heaters in the pedestal 1 14 and the showerhead 1 16, the actuator 121 , the RF power supply 160, and the vacuum pump 172. The controller 180 monitors the temperatures of the pedestal 1 14 and the showerhead 1 16 using the temperature sensors 164 and 168 in the pedestal 1 14 and the showerhead 1 16. The controller 180 controls the temperatures of the pedestal 1 14 and the showerhead 1 16 by controlling the heaters in the pedestal 1 14 and the showerhead 116. Additionally, while not shown, the substrate processing system 100 may also comprise a cooling system that supplies a coolant to cooling channels in the pedestal 1 14 and the showerhead 1 16. The controller 180 controls the supply of the coolant to the cooling channels in the pedestal 1 14 and the showerhead 1 16 to control the temperatures of the pedestal 1 14 and the showerhead 1 16.

EXAMPLE OF SHOWERHEAD

[0148] FIGS. 2-5 show various views of an example of the showerhead 1 16 according to the present disclosure. FIGS. 6-9 show various views of examples of different components (elements) of the showerhead 1 16. FIGS. 10A-16 show an example of the baffle 127 of the showerhead 1 16 in further detail. The showerhead 1 16 and the baffle 127 are now described in further detail with reference to FIGS. 2-16.

[0149] Referring to FIGS. 2-4, FIG. 2 shows a perspective view of the showerhead 1 16. FIG. 3 shows a side view of the showerhead 1 16. FIG. 4 shows a bottom view of the showerhead 116. In FIGS. 2 and 3, the showerhead 1 16 comprises the baseplate 126 and the stem 128 that extends vertically upwards (along the z-axis) from the baseplate 126. The baseplate 126 and the stem 128 are generally cylindrical. The stem 128 is of a smaller diameter than the baseplate 126. The baseplate 126 is shown and described below in further detail with reference to FIGS. 5 and 6. The stem 128 comprises a shell 190 and a tube 192, both of which are shown and described below in further detail with reference to FIGS. 7A-9. [0150] In FIGS. 2 and 3, broadly speaking, the stem 128 is connected to an upper surface of the baseplate 126. The stem 128 comprises a base portion 200 and a vertical portion 202, which form (define) the shell 190. The stem 128 additionally comprises the tube 192. The base portion 200 is coupled to a center region of the upper surface of the baseplate 126. The vertical portion 202 of the stem 128 extends vertically upwards (along the z-axis) from the base portion 200 of the stem 128. Gases are supplied to the showerhead 1 16 through the tube 192 and an inlet 194. The gases received through the tube 192 and the inlet 194 are supplied through distinct plenums in the baffle 127 (see FIG. 5) to the station 112 as described below in detail.

[0151] In FIG. 3, a side view of the showerhead 116 is shown. For example, the upper surface of the baseplate 126 is shaped as follows. The upper surface of the baseplate

126 extends perpendicularly upwards (along the z-axis) from an outer diameter (OD) of a lower surface of the baseplate 126 for a first distance. After the first distance, the upper surface of the baseplate 126 extends radially inwards (along the x-axis) for a second distance at an angle relative to the lower surface of the baseplate 126 (i.e., relative to the x-axis). After the second distance, the upper surface of the baseplate 126 extends radially inwards parallel to the lower surface of the baseplate 126 (along the x-axis) for a third distance towards the stem 128.

[0152] FIG. 4 shows a bottom view of the showerhead 1 16. The lower surface of the baseplate 126 comprises an opening 204 at a center of the lower surface of the baseplate 126. The baffle 127 is disposed in the opening 204 of the baseplate 126. As described below in further detail with reference to FIGS. 5 and 6, the baffle 127 extends into the baseplate 126 (along the z-axis) through the opening 204. Diameters of the opening 204 and a lower surface of the baffle 127 visible in the bottom view of the showerhead 1 16 are much less than (e.g., less than or equal to half) the diameter of the baseplate 126. The baseplate 126 does not comprise any holes between an outer diameter (“OD”) of the opening 204 and the OD of the baseplate 126 through which gases can be supplied to the station 112.

[0153] The lower surface of the baffle 127 lies in a plane parallel to the lower surface of the baseplate 126. For example, the lower surface of the baffle 127 can be coplanar with the lower surface of the baseplate 126. In some examples, the lower surface of the baffle

127 can be recessed or shifted upwards from the opening 204 along the z-axis. The lower surface of the baffle 127 comprises at least a first set of holes and a second set of holes. The at least first and second sets of holes are generally shown at 212, 210 in the lower surface of the baffle 127 seen in FIG. 4. The layout and geometric arrangement of the first and second sets of holes 212, 210 is shown and described below in detail with reference to FIG. 15.

[0154] The first and second sets of holes 212, 210 are in fluid communication with inner and outer plenums of the showerhead 1 16, respectively, which are shown and described below in further detail with reference to FIGS. 5-16. The first and second sets of holes 212, 210 are not in fluid communication with each other. The baffle 127 comprises various additional holes, which are shown as third, fourth, and fifth sets of holes at 262, 264, 260, respectively, in FIGS. 10A-16. These holes in the baffle 127 are shown and described below in further detail with reference to FIGS. 10A-16.

[0155] FIG. 5 shows a cross-sectional view of the showerhead 1 16. The showerhead 1 16 comprises the baseplate 126, the baffle 127, and the stem 128. The baffle 127 is shown and described in detail with reference to FIGS. 10A-16. Accordingly, when describing some elements (features) of the baffle 127, references are also made to FIGS. 10A-16 as needed.

[0156] The stem 128 comprises the shell 190 and the tube 192. The baseplate 126, the shell 190, and the tube 192 are shown and described in detail with reference to FIGS. 6- 9. Accordingly, when describing some elements (features) of the baseplate 126, the shell 190, and the tube 192, references are also made to FIGS. 6-9 as needed.

[0157] In general, as described below in detail, the shell 190 and the tube 192 are cylindrical components that are concentric around the axis of the showerhead 1 16, and the shell 190 surrounds the tube 192. Accordingly, the tube 192 can also be generally called a first component or an inner component of the stem 128 or of the showerhead 1 16, and the shell 190 can also be generally called a second component or an outer component 190 of the stem 128 or of the showerhead 1 16.

[0158] The shell 190 comprises the base portion 200 and the vertical portion 202. The vertical portion 202 of the shell 190 extends vertically upwards (along the z-axis) from a center region of the base portion 200 of the shell 190. The base portion 200 and vertical portion 202 of the shell 190 are cylindrical. The vertical portion 202 of the shell 190 is of a smaller diameter than the base portion 200 of the shell 190. [0159] The tube 192 also comprises a base portion 220 and a vertical portion 222. The vertical portion 222 of the tube 192 extends vertically upwards (along the z-axis) from a center region of the base portion 220 of the tube 192. The base portion 220 and vertical portion 222 of the tube 192 are cylindrical. The vertical portion 222 of the tube 192 is of a smaller diameter than the base portion 220 of the tube 192.

[0160] The shell 190 is a single, integrated, unitary component. The tube 192 is also a single, integrated, unitary component. The baseplate 126, the shell 190, and the tube 192 can be separate elements that can be connected to each other using fasteners or can be diffusion bonded to each other. Alternatively, the baseplate 126, the shell 190, and the tube 192 can be manufactured as a single, integrated, unitary component.

[0161] The baseplate 126 comprises a cylindrical slot 230 formed through the upper surface of the baseplate 126. The slot 230 extends about half-way though the baseplate 126 in the vertical direction (along the Z-axis). The slot 230 does not extend all the way through the lower surface of the baseplate 126. The base portion 220 of the tube 192 is disposed in the slot 230. The base portion 220 of the tube 192 has the same diameter as the diameter of the slot 230. A height (thickness) of the base portion 220 of the tube 192 (measured along the z-axis) is less than a depth of the slot 230 (also measured along the z-axis).

[0162] The base portion 200 of the shell 190 is disposed in the slot 230 on top of the base portion 220 of the tube 192. The base portion 200 of the shell 190 has the same diameter as the diameter of the base portion 220 of the tube 192. The base portion 200 of the shell 190 has the same diameter as the diameter of the slot 230.

[0163] A height (thickness) of the base portion 200 of the shell 190 (measured along the z-axis) is less than the depth of the slot 230. The height of the base portion 200 of the shell 190 is less than the height of the base portion 220 of the tube 192. The height of the base portion 220 of the tube 192 is greater than the height of the base portion 200 of the shell 190 to accommodate a connecting plate 240 of the baffle 127 within the base portion 220 of the tube 192 as described below in detail. A sum of the height of the base portion 200 of the shell 190 and the height of the base portion 220 of the tube 192 is equal to the depth of the slot 230.

[0164] An upper surface of the base portion 200 of the shell 190 forms (defines) the upper surface of the baseplate 126. The diameters of the slot 230, the base portion 220 of the tube 192, and the base portion 200 of the shell 190, which are equal, are greater than the diameter of the opening 204, greater than the diameter of the connecting plate 240 of the baffle 127, and less than the diameter of the baseplate 126.

[0165] A height of the vertical portion 222 of the tube 192 (measured along the z-axis) from the base portion 220 of the tube 192 is less than a height of the vertical portion 202 of the shell 190 (measured along the z-axis) from the base portion 200 of the shell 190. An outer diameter (OD) of vertical portion 202 of the shell 190 is greater than an OD of the vertical portion 222 of the tube. The vertical portion 222 of the tube 192 is hollow at the center from and through a top end of the vertical portion 222 of the tube 192 to and through a bottom end of the base portion 220 of the tube 192. The hollow portion of the tube 192 is cylindrical.

[0166] The vertical portion 202 of the shell 190 is partially hollow at the center. The partially hollow portion of the shell 190 is also cylindrical. The partially hollow portion of the shell 190 extends through a bottom end of the base portion 200 of shell 190. The partially hollow portion of the shell 190 does not extend through a top end of the vertical portion 202 of shell 190.

[0167] A height of the partially hollow portion of vertical portion 202 of the shell 190 (measured along the z-axis) is equal to the height of the vertical portion 222 of the tube 192. The partially hollow portion of the shell 190 surrounds and encloses the vertical portion 222 of the tube 192. Thus, the vertical portion 202 of the shell 190 surrounds and encloses the vertical portion 222 of the tube 192. In general, the shell 190 partially surrounds and encloses the tube 192. In other words, in general, the shell 190 surrounds and encloses the vertical portion 222 of the tube 192.

[0168] An inner diameter (ID) of the partially hollow portion of the vertical portion 202 of the shell 190 is greater than the OD of the vertical portion 222 of the tube 192. The ID of the partially hollow portion of the vertical portion 202 of the shell 190 and the OD of the vertical portion 222 of the tube 192 define an annular volume 232. The inlet 194 is connected to the annular volume 232 by a channel (shown at 237 in FIG. 7C) and an opening 236 in the vertical portion 202 of the shell 190. The channel 237 is not visible in the view shown in FIG. 5, but is shown in FIGS. 7A-7E. The opening 236 is located along the ID of the partially hollow portion of the vertical portion 202 of the shell 190 near an upper end of the partially hollow portion of the vertical portion 202 of the shell 190. The channel 237 extends from the opening 194 to the opening 236 in the vertical portion 202 of the shell 190. The channel 237 and the opening 236 are shown and described below in detail with reference to FIGS. 7A-7E.

[0169] The vertical portion 222 of the tube 192 comprises a groove 238 around the OD of the vertical portion 222 of the tube 192 near an upper end of the vertical portion 222 of the tube 192. For example, the groove 238 is in the same horizontal plane along the x-axis as the opening 236. The groove 238 is circular all around the tube 192. The opening 236 can be all around the shell 190 or can be in a portion of the shell 190. The groove 238 is in fluid communication with the annular volume 232.

[0170] The vertical portion 202 of the shell 190 also comprises a groove 239 around the ID of the partially hollow portion of the vertical portion 202 of the shell 190 near a lower end of the vertical portion 202 of the shell 190. The groove 239 is also in fluid communication with the annular volume 232. For example, the annular volume 232 can be tuned for different applications by changing the inner diameter of the vertical portion 202 of the shell 190 and the outer diameter of the vertical portion 222 of the tube 192. A gas supplied from the inlet 194 flows through channel 237 and the opening 236 into the annular volume 232. The groove 239 can be greater in size than the groove 238 and aids in gas flow uniformity when the gas flows down through the annular volume 232 to the baffle 127. The grooves 238, 239 are configured to adjust the direction and velocity of the gas.

[0171] The height of the vertical portion 222 of the tube 192 is less than the height of the vertical portion 202 of the shell 190 (along the z-axis). An upper end of the vertical portion 222 of the tube 192 lies within and below the upper end of the vertical portion 202 of the shell 190 (along the z-axis). The upper end of the vertical portion 222 of the tube 192 extends radially inwards (along the x-axis), narrows in diameter, and extends vertically upwards (along the z-axis) forming a conduit 224. The vertical portion 202 of the shell 192 comprises an opening 225 (shown in FIG. 7B) at the center of the vertical portion 202 of the shell 190. The conduit 224 extends through the opening 225.

[0172] An ID of the conduit 224 is equal to the ID of the hollow portion of the vertical portion 222 of the tube 192. The conduit 224 extends through the top end of the vertical portion 202 of the base portion 200. The conduit 224 is in fluid communication with the hollow portion of the tube 192. The conduit 224 is not in fluid communication with the annular volume 232 between the tube 192 and the shell 190. A gas supplied through the conduit 224 flows through the hollow portion of the tube 192 into the baffle 127 as described below in detail. The gas supplied through the conduit 224 does not flow through the annular volume 232. The gas supplied through the annular volume 232 does not flow through the conduit 224. The annular volume 232 is disjoint from the conduit 224 and the hollow portion of the tube 192.

[0173] The baffle 127 is described below in detail with reference to FIGS. 10A-16. Briefly, the baffle 127 comprises the connecting plate 240, a stem 242, and a gas delivery plate 244. The connecting plate 240 connects the baffle 127 to the showerhead 1 16 as described below. The connecting plate 240 is connected to the stem 242. The stem 242 is connected to gas delivery plate 244. The connecting plate 240, the stem 242, and the gas delivery plate 244 can be separate elements that can be connected to each other using fasteners or can be diffusion bonded to each other. Alternatively, the connecting plate 240, the stem 242, and the gas delivery plate 244 can be manufactured as a single, integrated, unitary component.

[0174] In some embodiments, the baffle 127 is connected to showerhead 1 16 as follows. The base portion 220 of the tube 192 comprises a cylindrical slot 246 formed through a lower surface of the base portion 220 of the tube 192. The slot 246 extends about half-way or one-third way though the base portion 220 of the tube 192 in the vertical direction (along the Z-axis). The slot 246 does not extend all the way through the upper surface of the base portion 220 of the tube 192. The base portion 220 of the tube 192 comprises an alignment pin 285 that mates with a corresponding hole 286 in the top surface of the connecting plate 240 of the baffle 127. The alignment pin 285 and hole 286 orient the baffle 127 as described below in detail.

[0175] The lower surface of the baseplate 126 includes the opening 204 at the center of the baseplate 126. The diameter of the slot 246 is greater than the diameter of the opening 204. The slot 230 in the baseplate 126 and the slot 246 in the base portion 220 of the tube 192 are concentric with the opening 204. Accordingly, when the base portion 220 of the tube 192 is disposed in the slot 230, an annular ledge 207 is formed in the baseplate 126 above the opening 204. In some examples, the diameter of the connecting plate 240 of the baffle 127 is greater than the diameter of the opening 204. The diameter of the connecting plate 240 of the baffle 127 is equal to the diameter of the slot 246. A height of the connecting plate 240 of the baffle 127 (measured along the z-axis) is equal to a depth of the slot 246 (measured along the z-axis). Thus, when the connecting plate 240 of the baffle 127 is disposed through the opening 204 into the baseplate 126 of the showerhead 1 16, an outer lower edge of the connecting plate 240 of the baffle 127 rests on the annular ledge 207. The stem 242 and the gas delivery plate 244 of the baffle 127 extend downwards (along the z-axis) through the opening 204.

[0176] A gap 250 is maintained between the opening 204 in the baseplate 126 and the bottom of the baffle 127. The size (i.e., width along the x-axis) of the gap 250 can be changed depending on application requirements by changing the ID of the opening 204 and/or the OD of a ring 294 of the baffle 127 (shown and described below with reference to FIGS. 10A-16). For example, a ratio of the OD of the ring 294 of the baffle 127 to the ID of the opening 204 can be 75-99%. The gap 250 provides radial outward flow to the edge of the substrate 124 to improve process uniformity across the substrate 124. If an application does not require uniform deposition/etching across the substrate 124 and requires only processing of the center region of the substrate 124, the gap 250 can be eliminated altogether. Further, the diameter of the bottom surface of the baffle 127 can be 0.5-50% of the diameter of the bottom surface of the baseplate 126. The diameter of the bottom surface of the baffle 127 is selected based on the diameter of the substrate 124 and based on the region of focus of uniformity on the substrate 124. The size of the bottom surface of the baffle 127 is configured to be within 50% of the bottom surface of the baseplate 126 so that the gas delivery rate at the edge of the baffle 127 would be more uniform with the gas delivery rate around the center of the baffle 127. An edge of the lower surface of the baseplate 126 at the opening 204 may be rounded as shown at 205 in FIG. 5. The rounded edge of the lower surface of the baseplate 126 at the opening 204 facilitates gas flow through the gap 250 radially outwards towards the outer diameter (OD) of the lower surface of the baseplate 126.

[0177] The gas delivery plate 244 is greater in diameter than the stem 242. The connecting plate 240 is greater in diameter than the gas delivery plate 244. The gas delivery plate 244 is smaller in diameter than the opening 204. Therefore, the gap 250 exists between the gas delivery plate 244 and the opening 204. An annular volume 252 is defined around the stem 242 by the connecting plate 240 and the gas delivery plate 244. The annular volume 252 is in fluid communication with the gap 250.

[0178] The lower surface of the gas delivery plate 244 lies in the same plane as the lower surface of the baseplate 126. In some examples, the lower surface of the gas delivery plate 244 is coplanar and level with the lower surface of the baseplate 126. In other examples, the lower surface of the gas delivery plate 244 is slightly recessed or shifted vertically upwards (in the direction of the z-axis) relative to the lower surface of the baseplate 126.

[0179] In some examples, at least one of the connecting plate 240, the stem 242, and the gas delivery plate 244 can have a different shape than others of the connecting plate 240, the stem 242, and the gas delivery plate 244. For example, any of the connecting plate 240, the stem 242, and the gas delivery plate 244 can be square, rectangular, hexagonal, octagonal, circular, cylindrical, or of any other polygonal shape. In some examples, at least one of the connecting plate 240, the stem 242, and the gas delivery plate 244 can have a different size (e.g., a dimension measured along the x-axis and/or along the z-axis) than others of the connecting plate 240, the stem 242, and the gas delivery plate 244. For example, size can include any dimensions that define area and volume. The slot 246 in the base portion 220 of the tube 192 can have a shape and size corresponding to the shape and size of the connecting plate 240. Any combination of shapes and sizes may be used to implement the connecting plate 240, the stem 242, and the gas delivery plate 244.

[0180] The baffle 127 may be connected to the showerhead 1 16 using fasteners or can be diffusion bonded to each other. For example, the connecting plate 240 may be fastened or diffusion bonded to the baseplate 126 at the annular ledge 207 and to the slot 246. Alternatively, the baffle 127 and the showerhead 1 16 can be manufactured as a single, integrated, unitary component.

[0181] The baffle 127 comprises several different holes, which are described throughout the present disclosure as first through fifth sets of holes. The first through fifth sets of holes are shown at 212, 210, 262, 264, and 260, respectively in FIGS. 5 and I Q- 16. While some of the holes are not visible in the view shown in FIG. 5 and are shown and described below in detail with reference to FIGS. 10A-16, these holes are briefly described below so that flow paths of gases though the showerhead 1 16 and the baffle 127 can be described with reference to FIG. 5. Further, throughout the present disclosure, while the holes in each set of holes are shown to be circular, the holes in each set of holes need not be round (circular) but can have other polygonal shapes. Additionally, the ends of these holes from which gases exit the holes can be flared. For example, the ends of the circular holes can be conical, where, for each hole, a radius of the conical end is greater than a radius of the hole. The flared ends of the holes aid with properly distributing gases exiting from the holes and also avoid clogging and cleaning of the holes.

[0182] The gas delivery plate 244 is shown and described in further detail with reference to FIGS. 10A-16. Briefly, the gas delivery plate 244 comprises at least the first and second sets of holes generally shown at 212, 210 in the lower surface of the baffle 127 seen in FIG. 4. Of the first and second sets of holes 212, 210, only the first set of holes 212 is seen in the view shown in FIG. 5. The second set of holes 210 is not visible in the view shown in FIG. 5 but are shown in FIGS. 10A-16. The second set of holes 210 extends through the gas delivery plate 244 (see FIGS. 10A-16). The second set of holes 210 is in fluid communication with the annular volume 252 between the connecting plate 240 and the gas delivery plate 244 and with the gap 250 between the gas delivery plate 244 and the opening 204 in the baseplate 126 (see FIGS. 10A-16). Additionally, the gas delivery plate 244 comprises a third set of holes, which are also not visible in the view shown in FIG. 5 but are shown at 262 in FIGS. 10A-16. The third set of holes 262 comprises fewer holes than the first and second sets of holes 212, 210 as shown and described below in detail with reference to FIGS. 10A-16. In some embodiments, the first and second sets of holes 212 and 210 have the same diameter when measured from the bottom side of the baffle 127 , but the third set of the holes 262 have a smaller diameter.

[0183] The stem 242 of the baffle 127 further comprises a fourth set of holes that is also not visible in the view shown in FIG. 5 but are shown at 264 in FIGS. 10A-16 and are described below in detail with reference to FIGS. 10A-16. As described below, the fourth set of holes 264 extend radially inward and downward from the stem 242 at an angle to and through the lower surface of the gas delivery plate 244 to the third set of holes 262 at the lower surface of the gas delivery plate 244. As shown and described below, each hole in the third and fourth sets of holes 262, 264 is a single, angular (slanted), continuous hole. The third and fourth sets of holes 262, 264 are in fluid communication with the annular volume 252 between the connecting plate 240 and the gas delivery plate 244, and with the gap 250 between the gas delivery plate 244 and the opening 204 in the baseplate 126.

[0184] The gas delivery plate 244 comprises a fifth set of holes 260. As described below in detail with reference to FIG. 14, the fifth set of holes 260 holes is positioned transversely (along the x-axis) through a frustoconical portion of the gas delivery plate 244 shown at 292 in FIGS. 10A-16. The first set of holes 212 extend from the lower surface of the gas delivery plate 244 to the fifth set of holes 260 as shown in FIG. 5 and in FIGS. 10A-16. According to some embodiments, the first and fifth sets of holes 212, 260 are in fluid communication with each other. The first and fifth sets of holes 212, 260 are not in fluid communication with the second, third, and fourth sets of holes 210, 262, 264, with the annular volume 252 between the connecting plate 240 and the gas delivery plate 244, and with the gap 250 between the gas delivery plate 244 and the opening 204 in the baseplate 126.

[0185] The connecting plate 240 and the stem 242 of the baffle 127 are hollow at the center. In some examples, the hollow portions of the connecting plate 240 and the stem 242 have the same diameter as the hollow portion of the vertical portion 222 of the tube 192. In some examples, the hollow portion of the connecting plate 240 has a larger or smaller diameter compared to the hollow portion of the vertical portion 222. The hollow portions of the connecting plate 240 and the stem 242 of the baffle 127 and the hollow portion of the vertical portion 222 of the tube 192 are concentric.

[0186] The connecting plate 240 of the baffle 127 has an opening 245 (shown in FIGS. 10A-16) at the center of the top surface of the connecting plate 240 that is connected to the stem 242 of the baffle 127. The opening 245 at the center of the top surface of the connecting plate 240 is concentric with the hollow portions of the connecting plate 240 and the stem 242 of the baffle 127. The opening 245 at the center of the top surface of the connecting plate 240 is also concentric with the hollow portion of the vertical portion 222 of the tube 192. In some examples, a diameter of the opening 245 in the top surface of the connecting plate 240 is the same as the diameters of the hollow portions of the connecting plate 240 and the stem 242 of the baffle 127. The diameter of the opening

245 in the top surface of the connecting plate 240 is also equal to the diameter of the hollow portion of the vertical portion 222 of the tube 192. In some examples, the above- mentioned portions have different diameters.

[0187] The opening 245 at the center of the top surface of the connecting plate 240 and the hollow portions of the connecting plate 240 and the stem 242 extend partially, less than hallway into the gas delivery plate 244. The hollow portions of the connecting plate 240, the stem 242, and the hollow portion of the vertical portion 222 of the tube 192 are in fluid communication with the fifth set of holes 260. Consequently, the conduit 224 of the tube 192 of the showerhead 1 16 is in fluid communication with the fifth set of holes 260 in the baffle 127.

[0188] Thus, the conduit 224, the hollow portion of the vertical portion 222 of the tube 192, the hollow portions of the connecting plate 240, the stem 242, and the gas delivery plate 244, the fifth set of holes 260, and the first set of holes 212 are in fluid communication with each other. The conduit 224, the hollow portion of the vertical portion 222 of the tube 192, the hollow portions of the connecting plate 240, the stem 242, and the gas delivery plate 244, the fifth set of holes 260, and the first set of holes 212 form (define) an inner flow path for a gas supplied to the showerhead 1 16 through the conduit 224. The inner flow path can also be called an inner plenum of the showerhead 1 16.

[0189] The hollow portion of the gas delivery plate 244, the fifth set of holes 260, and the first set of holes 212 form (define) an inner plenum of the baffle 127. The inner flow path of the showerhead 1 16 is in fluid communication with the inner plenum of the baffle 127. The inner flow path is disjoint from and is not in fluid communication with the second, third, and fourth sets of holes 210, 262, 264; with the annular volume 252 between the connecting plate 240 and the gas delivery plate 244; and with the gap 250 between the gas delivery plate 244 and the opening 204 in the baseplate 126.

[0190] A plurality of angular holes 270 are positioned near the lower end of the vertical portion 222 of the tube 192. The angular holes 270 are positioned radially across from the groove 239 in the shell 190 along the x-axis. The angular holes 270 are in fluid communication with the annular volume 232 between the vertical portion 202 of the shell 190 and the vertical portion 222 of tube 192. The angular holes 270 extend radially inward and downward from a rim of the lower end of the vertical portion 222 of the tube 192 at an angle relative to the z-axis. The angular holes 270 extend through the base portion 220 of the tube 192 to the slot 246 in the base portion 220 of the tube 192.

[0191] The connecting plate 240 of the baffle 127 comprises a plurality of arcuate slots, which shown at 272-1 , 272-2, 272-3 in FIGS. 10A-10B and 12 (collectively called the arcuate slots 272). The arcuate slots 272 are shown and described below in detail with reference to FIG. 12. Only two arcuate slots 272-1 and 272-2 are visible in the view shown in FIG. 5. The arcuate slots 272 extend through the connecting plate 240 of the baffle 127 along the z-axis. The arcuate slots 272 are arranged around the hollow portion at the center of the connecting plate 240 of the baffle 127. The arcuate slots 272 lie along a circle having a diameter greater than the diameter of the stem 242 of the baffle 127. Therefore, the acuate slots 272 are in fluid communication with the annular volume 252 between the connecting plate 240 and the gas delivery plate 244 of the baffle 127. The acuate slots 272 are also in fluid communication with the second, third, and fourth sets of holes 210, 262, 264 in the gas delivery plate 244 of the baffle 127.

[0192] The arc length and radial width of the arcuate slots 272 are configured to direct the gas flow at a suitable velocity into the annular volume 252 between the connecting plate 240 and the gas delivery plate 244 of the baffle 127. The shape of the arcuate slots 272 is generally consistent with the overall shape of the baffle 127, which is cylindrical in the example shown. Instead, of the baffle 127 is square or rectangular, which can be manufactured using additive manufacturing techniques (e.g., 3D printing), the shape of the slots 272 can also be square or rectangular to be consistent with the corresponding overall shape of the baffle 127. The shape of the slots 272 needs to be consistent with the overall shape of the baffle 127 to provide consistent and uniform gas flow through the baffle 127.

[0193] The angular holes 270 are grouped at locations around the rim of the lower end of the vertical portion 222 of the tube 192 according to the locations of the arcuate slots 272 in the connecting plate 240 of the baffle 127. The angular holes 270 are in fluid communication with the annular volume 252 between the connecting plate 240 and the gas delivery plate 244 of the baffle 127. Thus, the inlet 194, the channel 237, and the opening 236 in the vertical portion 202 of the shell 190, the groove 238 in the vertical portion 222 of the tube, the annular volume 232 between the vertical portion 202 of the shell 190 and the vertical portion 222 of tube 192, the groove 239 in the vertical portion 202 of the shell 190, the angular holes 270, the arcuate slots 272, the annular volume 252 between the connecting plate 240 and the gas delivery plate 244 of the baffle 127, the second, third, and fourth sets of holes 210, 262, 264 in the gas delivery plate 244 of the baffle 127, and the gap 250 between the gas delivery plate 244 and the opening 204 in the baseplate 126 form (define) an outer flow path for a gas supplied to the showerhead 1 16 through the inlet 194. The outer flow path can also be called an outer plenum of the showerhead 1 16. The outer flow path is disjoint from and is not in fluid communication with the inner flow path. That is, the outer plenum of the showerhead 116 is not in fluid communication with the inner plenum of the showerhead 1 16.

[0194] The arcuate slots 272 in the connecting plate 240 of the baffle 127 and the second, third, and fourth sets of holes 210, 262, 264 in the gas delivery plate 244 of the baffle 127 form (define) an outer plenum of the baffle 127. The outer flow path of the showerhead 1 16 is in fluid communication with the outer plenum of the baffle 127. The outer plenum of the baffle 127 is disjoint from and is not in fluid communication with the inner plenum of the baffle 127. Thus, the inner and outer flow paths (i.e., inner and outer plenums) of the showerhead 1 16 and the baffle 127 are disjoint from (i.e., are not in fluid communication with) each other. Therefore, the gases flowing through the inner and outer flow paths (i.e., inner and outer plenums) of the showerhead 1 16 and the baffle 127 do not mix with each other in the showerhead 116 and in the baffle 127.

[0195] For convenience, the inner flow path and the inner plenums of the showerhead 1 16 and the baffle 127 can be respectively called the first flow path and the first plenums of the showerhead 1 16 and the baffle 127. The outer flow path and the outer plenums of the showerhead 1 16 and the baffle 127 can be respectively called the second flow path and the second plenums of the showerhead 1 16 and the baffle 127. A first gas supplied through the conduit 224 to the showerhead 1 16 flows through the first flow path and the first plenums of the showerhead 1 16 and the baffle 127. A second gas supplied through the inlet 194 to the showerhead 1 16 flows through the second flow path and the second plenums of the showerhead 1 16 and the baffle 127. The first gas does not mix with the second gas in the showerhead 1 16 and in the baffle 127. In some examples, the first gas and the second gas can be the same. For example, the same gas can be supplied through the first and second plenums concurrently, sequentially, or in other ways.

EXAMPLES OF SHOWERHEAD COMPONENTS

[0196] FIGS. 6-9 show examples and various views of the baseplate 126, the shell 190, and the tube 192 of the showerhead 1 16. FIG. 6 shows the baseplate 126. FIGS. 7A-7E show the shell 190. FIGS. 8 and 9 show the tube 192. The baffle 127 of the showerhead 1 16 is shown and described in detail with reference to FIGS. 10A-16.

[0197] FIG. 6 shows a top perspective view of the baseplate 126. The lower surface of the baseplate 126 comprises the opening 204 through which the baffle 127 is disposed in the showerhead 116 as described above. The upper surface of the baseplate 126 comprises the slot 230. The base portions 220 and 200 of the tube 192 and the shell 190 are disposed in the slot 230 as described above. When the baseplate 126, the shell 190, and the tube 192 are manufactured as separate components, the baseplate 126 comprises a circular groove 280 in the slot 230. The circular groove 280 surrounds the opening 204. A sealing element (e.g., an O-ring) is disposed in the circular groove 280 to seal the bottom of the base portion 220 of the tube 192 to the slot 230. The circular groove 280 is unnecessary and can be eliminated when the showerhead 1 16 (e.g., the baseplate 126, the shell 190, and the tube 192) is manufactured as a single, integrated, unitary component (e.g., using additive manufacturing techniques such as 3D printing).

[0198] FIGS. 7A-7E show various views of the shell 190. FIG. 7A shows a side view of the shell 190 showing the base portion 200 and the vertical portion 202 of the shell 190. The side view also shows an arcuate member 284 (shown in FIG. 7E) that covers the opening 236 in the vertical portion 202 of the shell 190. A cross-section taken along the line AA is shown in FIG. 7C, which is described below.

[0199] FIG. 7B shows a top view of the shell 190 showing the inlet 194 and the opening 225. A cross-section taken along the line BB is shown in FIG. 7D, which is described below. FIG. 7C shows the inlet 194, the opening 236, and the groove 239 in the vertical portion 202 of the shell 190. FIG. 7C also shows the channel 237 in the vertical portion 202 of the shell 190 that connects the inlet 194 to the opening 236.

[0200] FIG. 7D shows the opening 225, the inlet 194, and the channel 237 in the vertical portion 202 of the shell 190. FIG. 7D also shows an opening 282 in a sidewall of the vertical portion 202 of the shell 190. The opening 282 provides access for forming the channel 237 in the vertical portion 202 of the shell 190. The opening 282 is closed with the arcuate member 284 shown in FIG. 7E after forming the channel 237. The opening 282 and the arcuate member 284 are unnecessary and can be eliminated when the showerhead 116 (e.g., the baseplate 126, the shell 190, and the tube 192) is manufactured as a single, integrated, unitary component (e.g., using 3D printing).

[0201] FIGS. 8 and 9 show various views of the tube 192. FIG. 8 shows a side view of the tube 192 showing the conduit 224, the base portion 220 with the slot 246, and the vertical portion 222 with the angular holes 270 around the rim of the vertical portion 222. FIG. 8 also shows the alignment pin 285 in the slot 246 that engages with the hole 286 in the top surface of the connecting plate 240 of the baffle 127 to orient the baffle 127 such that other ends of the angular holes 270 at the slot 246 align with the arcuate slots 272 in the connecting plate 240 of the baffle 127.

[0202] In some examples, the alignment pin 285 can be provided on the top surface of the connecting plate 240 of the baffle 127, and the hole 286 can be provided in the slot 246 in the base portion 220 of the tube 192. Further, the alignment pin 285 and hole 286 can be eliminated when the showerhead 1 16 and the baffle 127 are manufactured as a single, integrated, and unitary structure (e.g., using 3D printing).

[0203] FIG. 9 shows a bottom view of the tube 192 showing the slot 246 in the base portion 220 of the tube 192 with the other ends of the angular holes 270 at the slot 246, which are on the rim of the vertical portion 222 of tube 192. FIG. 9 also shows the angular holes 270 arranged in groups so as to align the other ends of the angular holes 270 at the slot 246 with the arcuate slots 272 in the connecting plate 240 of the baffle 127. The other ends of the angular holes 270 at the slot 246 in the base portion 220 of the tube 192 mate with the arcuate slots 272 in the connecting plate 240 of the baffle 127.

EXAMPLE OF BAFFLE

[0204] FIGS. 10A-16 show the baffle 127 in detail. FIGS. 10A-10C show different perspective views of the baffle 127. FIGS. 11 A and 1 1 B show side views of the baffle 127. FIGS. 12 and 15 show top and bottom views of the baffle 127, respectively. FIGS. 13, 14, and 16 show different cross-sectional views of the baffle 127.

[0205] FIG. 10A shows a top perspective view of the baffle 127. FIG. 10B shows a side perspective view of the baffle 127. FIG. 10C shows a bottom perspective view of the baffle 127. The elements (features) of the baffle 127 that are identified with the same reference numerals and that are already described above are not described again for brevity.

[0206] In FIGS. 10A and 10B, the baffle 127 comprises the connecting plate 240, the stem 242, and the gas delivery plate 244, which are described above with reference to FIG. 5. The connecting plate 240, the stem 242, and the gas delivery plate 244 are cylindrical and have different diameters. For example, the diameter of the stem 242 is less than the diameter of the gas delivery plate 244, and the diameter of the gas delivery plate is less than the diameter of the connecting plate 240. The stem 242 is not visible in FIGS. 10A-10C but is seen in FIGS. 1 1 A, 1 1 B, 13, and 16. The gas delivery plate 244 comprises a plate 290, a frustoconical portion 292 (visible in FIG. 10C), and a ring 294. The plate 290 and the ring 294 have the same outer diameters. The connecting plate 240, the stem 242, and the gas delivery plate 244 also have different thicknesses (heights) measured along the z-axis. For example, the thickness of the stem 242 is less than the thickness of the connecting plate 240, and the thickness of the gas delivery plate 244 is less than the thickness of the stem 242. [0207] While the plate 290, the frustoconical portion 292, and the ring 294 are shown and described as separate components of the gas delivery plate 244, the gas delivery plate 244 is a single, integrated, and unitary component. Furthermore, while the baffle 127 is described as comprising the connecting plate 240, the stem 242, and the gas delivery plate 244, the baffle 127 can be manufactured as a single, integrated, and unitary component (e.g., using additive manufacturing techniques such as 3D printing).

[0208] The upper surface of the connecting plate 240 comprises the opening 245, the arcuate slots 272, the hole 286 that mates with the alignment pin 285, and the second set of holes 210, all of which are already described above with reference to FIG. 5. The upper surface of the connecting plate 240 comprises an annular groove 247 that surrounds the opening 245 and that is surrounded by the arcuate slots 272. A sealing element (e.g., an O-ring) is disposed in the annular groove 247 to seal the top surface of the connecting plate 240 to the bottom of the base portion 220 of the tube 192. The annular groove 247 is unnecessary and can be eliminated when the baffle 127 is diffusion bonded to the bottom of the base portion 220 of the tube 192 or when the showerhead 1 16 (e.g., the baseplate 126, the shell 190, and the tube 192) and the baffle 127 are manufactured as a single, integrated, unitary component (e.g., using 3D printing).

[0209] In FIG. 10C, another perspective view of the baffle 127 is shown with the baffle 127 in an inverted (downside up) position. The frustoconical portion 292 and the ring 294 of the gas delivery plate 244 are shown in detail. A first end of the frustoconical portion 292 (i.e., an upper end when the baffle 127 is installed in the showerhead 1 16) has a smaller diameter than a second end of the frustoconical portion 292 (i.e., a lower end when the baffle 127 is installed in the showerhead 1 16). The upper end of the frustoconical portion 292 is connected to the bottom of the plate 290, which is seen more clearly in FIGS. 1 1A, 13, and 16. The lower end of the frustoconical portion 292 defines the bottom of the baffle 127. The lower end of the frustoconical portion 292 comprises the first, second, and third sets of holes 212, 210, 262 described above with reference to FIG. 5. The fifth set of holes 260 seen around the rim of the frustoconical portion 292 are formed in the frustoconical portion 292 as described below with reference to FIG. 14.

[0210] When the baffle 127 is installed in the showerhead 116, the ring 294 extends vertically downwards from an outer diameter (OD) of the plate 290. An OD of the ring 294 is the same as the OD of the plate 290. The ring 294 surrounds the frustoconical portion 292 as seen more clearly in FIGS. 1 1 A and 1 1 B. An inner portion of the ring 294 tapers radially outwards parallel to an outer portion or periphery of the frustoconical portion 292, which also tapers radially outwards (see FIGS. 1 1 A, 13, and 16). The outer periphery of the frustoconical portion 292 and the inner portion of the ring 294 define a gap 296 between the frustoconical portion 292 and the ring 294. The gas flowing through the fifth set of holes 260 flows through the gap 296 and is directed downwards (FIG. 10C shows the baffle 127 in an inverted or upside-down position) towards the substrate 124 (shown in FIG. 1 ). For example, the size (i.e., the width along the x-axis) of the gap 296 can be changed by changing the ID of the ring 294 and/or the OD of the bottom portion of the frustoconical portion 292. Depending on application, the gap 296 can be decreased or increased to restrict or increase the flow of gas from the fifth set of holes 260 and the gap 296 towards the substrate 124. Thus, the fifth set of holes 260 form the inner plenum of the baffle 127, and the fifth set of holes 260 and the gap 296 along with the tapered portions of the frustoconical portion 292 and the ring 294 direct the gas flowing through the inner plenum of the baffle 127 downwards towards the substrate 124.

[0211 ] In the example of the baffle 127 shown in FIGS. 10A-16, the frustoconical portion 292 is shown with the first end having the smaller diameter connected to the connecting plate 290. However, in other examples, the second end of the frustoconical portion 292 having the larger diameter can be connected to the connecting plate 290 instead. In such a design, the inner portion of the ring 294 tapers radially inwards parallel to the outer portion or periphery of the frustoconical portion 292. In still other examples, the element 292 can be cylindrical instead of being frustoconical, in which case the ring 294 is also cylindrical or annular, and the inner portion of the ring 294 is vertical (i.e., parallel to the z-axis and parallel to the outer portion or periphery of the cylindrical element 292).

[0212] FIGS. 11 A and 1 1 B show side views of the baffle 127. FIG. 1 1 A shows the ring 294 partially to illustrate the fifth set of holes 260 seen around the rim of the frustoconical portion 292. FIG. 1 1 A also shows the inner portion of the ring 294 tapering parallel to the outer periphery of the frustoconical portion 292. FIG. 11 B shows the ring 294 covering the fifth set of holes 260 seen around the rim of the frustoconical portion 292. The side views in FIGS. 1 1 A and 1 1 B also show the stem 242 and the annular volume 252 between the connecting plate 240 and the gas delivery plate 244, which are described above with reference to FIG. 5. The side views also show the fourth set of holes 264 on the rim of the stem 242, which are described below in detail. [0213] FIG. 12 shows the top view of the baffle 127. The arcuate slots 272 and the hole 286 that mates with the alignment pin 285 are seen, which are already described above with reference to FIG. 5. Some of the second set of holes 210 in the plate 290 of the baffle 127 are visible through the arcuate slots 272. As described above with reference to FIG. 5, the opening 245 in the connecting plate 240 extends through the connecting plate 240 and the stem 242 and partially extends through the gas delivery plate 244. The opening 245 extends through the plate 290 into the upper end of the frustoconical portion 292. Therefore, the upper end of the frustoconical portion 292 is visible through the opening 245 in the top view of the baffle 127. Additionally, at least one hole of the first set of holes 212 that is at the center of the bottom of the baffle 127 (i.e., at the center of the lower end of the frustoconical portion 292) is also visible through the opening 245 in the top view of the baffle 127. In some examples, more than one hole of the first set of holes 212 may be positioned near the hole of the first set of holes 212 that is at the center of the bottom of the baffle 127 (i.e., at the center of the lower end of the frustoconical portion 292). A cross-section of the baffle 127 taken along the line CC is shown in FIG. 13.

[0214] FIG. 13 shows the cross-sectional view of the baffle 127 taken along the line CC shown in FIG. 12. The arcuate slot 272-1 extending through the connecting plate 240 along the z-axis is seen. The opening 245 extending through the connecting plate 240 and the stem 242, through the plate 290, and partially extending into the frustoconical portion 292 along the z-axis is seen. The ring 294 surrounding the frustoconical portion 292 and tapering parallel to the frustoconical portion 292 is seen. The first set of holes 212 extending from the lower end of the frustoconical portion 292 to the fifth set of holes 260 are seen. A cross-section of the frustoconical portion 292 taken along the line DD is shown in FIG. 14.

[0215] FIG. 14 shows the cross-sectional view of the frustoconical portion 292 taken along the line DD shown in FIG. 13. The fifth set of holes 260 are positioned transversely (along the x-axis) in the frustoconical portion 292. For example, the fifth set of holes 260 are defined by forming two sets of orthogonal channels transversely (along the x-axis) in the frustoconical portion 292. In some examples, the two sets of orthogonal channels can be formed by cross-drilling the fifth set of holes 260 diametrically through the frustoconical portion 292. However, the cross-drilling process, which can be onerous, can be eliminated by manufacturing the baffle 127 or at least the gas delivery plate 244 using additive manufacturing techniques such as 3D printing. Using additive manufacturing also allows forming more complex channels (e.g., spiral channels), which is infeasible using CNC machining typically used to form the orthogonal channels.

[0216] The first set of holes 212 are formed from the lower end of the frustoconical portion 292 to connect the first set of holes 212 to the fifth set of holes 260. The second set of holes 210 extend through the plate 290 and the frustoconical portion 292. The third set of holes 262 extend radially outwardly at an angle from the lower end of the frustoconical portion 292 to the rim of the stem 242 of the baffle 127 as described below in further detail with reference to FIG. 16. The third set of holes 262 lie along a circle (also shown at 304 in FIG. 15) as described below in further detail with reference to FIG. 15. The first, second, and third sets of holes 212, 210 262 can also be formed while forming other components of the baffle 127 when the baffle 127 is manufactured using 3D printing.

[0217] FIG. 15 shows the bottom view of the baffle 127. The first, second, and third sets of holes 212, 210, 262 are seen. The layout and geometric arrangement of the first, second, and third sets of holes 212, 210, 262 is now described in further detail. The layout and geometric arrangement of these holes is described below in two ways: first, as seen from the perspective of the showerhead 1 16 with the showerhead and the baffle 127 as a whole; and second, as seed from the perspective of the baffle 127 alone. Accordingly, some of the description below from the perspective of the showerhead 1 16 overlaps (i.e., is repeated) with some of the description from the perspective of the baffle 127.

[0218] From the perspective of the showerhead 1 16, nine holes of the first set of holes 212 form a first square 300 (can also be called a first square region) around a center of the lower surface of the baffle 127. The lower surface of the baffle 127 is the lower surface of the gas delivery plate 244 or the lower surface of the frustoconical portion 292 of the baffle 127. One or more holes of the first set of holes 212 lie within the first square 300. In one example, depending on process recipe, one hole 212 lies at the center of the first square 300 as shown. In another example, while not shown, depending on process recipe, the hole 212 at the center of the first square 300 can be optional and can be omitted. None of the second set of holes 210 lie within the first square 300. Four holes of the second set of holes 210 form a second square 302 (can also be called a second square region) that is larger than the first square 300 and that surrounds the first square 300. The second square 302 has a center that is coincident with the centers of the first square 300 and the lower surface of the baffle 127. Each of the four holes of the second set of holes 210 lies radially outward from one of the nine holes of the first set of holes 212 that lies at a corner of the first square 300.

[0219] The lower surface of the baffle 127 further comprises the third set of holes 262 having a diameter that is less than or equal to diameters of the first and second sets of holes 212, 210. At least four holes of the third set of holes 262 lie within the second square 302 and outside the first square 300. In some examples, eight of the third set of holes 262 lie within the second square 302 and outside the first square 300. At least one hole of the third set of holes 262 and two holes of the first set of holes 212 form a triangle pattern with no other hole in the triangle within the second square 302.

[0220] The third set of holes 262 lies in a circle 304 that is concentric with the centers of the first and second squares 300, 302 and with the center of the lower surface of the baffle 127. Corners of the first square 300 lie on the circle 304. The second square 302 circumscribes the circle 304 and the first square 300. The third set of holes 262 is in fluid communication with the second set of holes 210 and is not in fluid communication with the first set of holes 212.

[0221] The hole pattern described above results is providing uniform flow and distribution of gases from the baffle 127 to the substrate 124. Specifically, the hole pattern allows mixing of gases between the baffle 127 and the substrate 124 if the gases are supplied concurrently through these holes (e.g., in a CVD process) without using a faceplate with holes distributed all across the faceplate to achieve the mixing of gases. Furthermore, the hole pattern relationships (including spaces designated for no holes) between the first, second, and third sets of holes improve gas delivery uniformity from at least two disjointed delivery channels. For example, the hole pattern relationships would allow some processing recipes to mix the gas or gases more uniformly immediately outside the bottom surface of the baffle 127 to provide roughly equal concentration of different gases at any given region of the substrate 124. Alternatively, the hole pattern provides uniform flow and distribution of gases from the baffle 127 onto the substrate 124 if the gases are supplied sequentially through these holes (e.g., in an ALD process), which improves process uniformity in the center region of the substrate 124 without using a faceplate with holes distributed all across the faceplate to achieve the process uniformity. The numbers of holes in the hole pattern described above are examples. Different numbers of the holes in the hole pattern can be selected based on process requirements and the diameter of the substrate 124 to provide uniform flow and distribution of gases from the baffle 127 to the substrate 124.

[0222] Two diameters 306-1 , 306-2 (collectively the diameters 306) of the lower surface of the baffle 127 that are perpendicular to each other and that intersect at the center of the lower surface of the baffle 127 form four quadrants on the lower surface of the baffle 127. The two diameters 306 comprise only the first set of holes 212. Each quadrant comprises one or more holes of the third set of holes 262. Each diameter comprises nine holes of the first set of holes 212.

[0223] The first and second sets of holes 212, 210 are arranged in an alternating pattern. Each hole in the first and second sets of holes 212, 210 is spaced from adjacent holes in the first and second sets of holes by a predetermined distance. In some examples, the first and second sets of holes 212, 210 have the same diameter. The first and second sets of holes 212, 210 are arranged in rows and columns as shown in FIG. 15. In some examples, while not shown, the first set of holes 212 can have different diameters than the second set of holes 210. Further, in some examples, while not shown, the first and second sets of holes 212, 210 can be arranged along concentric circles with increasing radii, where the holes on at least one circle have a different diameter than the holes on at least one other circle. In other examples, the first and second sets of holes 212, 210 can be arranged in various patterns. For example, the first and second sets of holes 212, 210 can be arranged in radially expanding shapes, where the shapes can be any polygonal shapes.

[0224] From the perspective of the baffle 127, the gas delivery plate 244 (i.e., the lower surface of the frustoconical portion 292 of the baffle 127) comprises the first set of holes 212 and the second set of holes 210 that are arranged in the alternating pattern. The first and second sets of holes 212, 210 have the same diameter. In some examples, while not shown, the first set of holes 212 can have different diameters than the second set of holes 210. Further, in some examples, while not shown, the first and second sets of holes 212, 210 can be arranged along concentric circles with increasing radii, where the holes on at least one circle have a different diameter than the holes on at least one other circle.

[0225] One hole of the first set of holes 212 is at the center of the gas delivery plate 244. Eight holes of the first set of holes 212 form the first square 300 at the center of the gas delivery plate 244. One or more holes of the first set of holes 212 lie within the first square 300. None of the second set of holes 210 lie within the first square 300. Four holes of the second set of holes 210 form the second square 302 with a center coincident with the centers of the first square 300 and the gas delivery plate 244. Each of the four holes of the second set of holes 210 lies radially outward from one of the eight holes of the first set of holes 212 that lies at a corner of the first square 300.

[0226] The gas delivery plate 244 further comprises the third set of holes 262 having a diameter that is less than or equal to diameters of each of the first and second sets of holes 212, 210. At least four holes of the third set of holes 262 lie within the second square 302 and outside the first square 300. At least one hole of the third set of holes 262 and two holes of the first set of holes 212 form a triangle with no other hole in the triangle. The third set of holes 262 lies along the circle 304 that is concentric with the centers of the first and second squares 300, 302 and with the center of the gas delivery plate 244. Corners of the first square 300 lie on the circle 304. The second square 302 circumscribes the circle 304 and the first square 300. The third set of holes 262 is in fluid communication with the second set of holes 210 and is not in fluid communication with the first set of holes 212. Two diameters 306 of the gas delivery plate 244 that are perpendicular to each other and that intersect at the center of the gas delivery plate 244 form four quadrants. The two diameters 306 comprise only the first set of holes 212. Each of the four quadrants comprises two holes of the third set of holes 262. Each diameter comprises nine holes of the first set of holes 212.

[0227] FIG. 16 shows a cross-sectional view of the baffle 127 taken along the line EE shown in FIG. 15. The baffle 127 is shown inverted (upside down). The fourth set of holes 264 extend radially inward and downward at an angle from the rim of the stem 242, through the plate 290 and the frustoconical portion 292 of the gas delivery plate 244, to the third set of holes 262 at the lower surface of the gas delivery plate 244. A channel 266 connects each hole in the third and fourth sets of holes 262, 264. The channel 266 and the third and fourth sets of holes 262, 264 have the same diameter. Each hole of the third and fourth sets of holes 262, 264 is a single, angular (slanted), continuous hole.

[0228] The third and fourth sets of holes 262, 264 and the channel 266 are in fluid communication with the annular volume 252 between the connecting plate 240 and the gas delivery plate 244, the arcuate slots 272, the second set of holes 210, and the gap 250 (see FIG. 5) between the gas delivery plate 244 and the opening 204 in the baseplate 126. The third and fourth sets of holes 262, 264 and the channel 266 are not in fluid communication with the opening 245 in the connecting plate 240, the hollow portions of the connecting plate 240 and the stem 242, the partial hollow portion of the gas delivery plate 244, the fifth set of holes 260, first set of holes 212 (not visible in the view shown) that connect to the fifth set of holes 260, and the gap 296 between the ring 294 and the frustoconical portion 292 of the gas delivery plate 244.

[0229] The first gas flowing through the opening 245 in the connecting plate 240 flows through the hollow portions of the connecting plate 240 and the stem 242, the partial hollow portion of the gas delivery plate 244, the fifth set of holes 260, first set of holes 212 (not visible in the view shown) that connect to the fifth set of holes 260, and the gap 296 between the ring 294 and the frustoconical portion 292 of the gas delivery plate 244. The second gas that flows through the arcuate slots 272 flows through the annular volume 252 between the connecting plate 240 and the gas delivery plate 244, the third and fourth sets of holes 262, 264, the second set of holes 210, and the gap 250 (see FIG. 5) between the gas delivery plate 244 and the opening 204 in the baseplate 126. Thus, the first gas and the second gas do not mix with each other in the baffle 127.

EXAMPLES OF DIMENSIONS

[0230] The dimensions of the various components and features of the showerhead 1 16 and the baffle 127 depend on and are therefore a function of the size of the substrate 124. These dimensions can vary according to the size of the substrate 124. For example, the diameter of the baseplate 126 is greater than or equal to the diameter of the substrate 124 to ensure proper flow and containment of precursor above the substrate 124. The diameter of the opening 204 in the baseplate 126 and diameter of the baffle 127 (i.e., the diameters of the connecting plate 240, the stem 242, and the gas delivery plate 244) vary as the diameter of the baseplate 126 varies, which in turn varies according to the diameter of the substrate. Therefore, examples of the dimensions of the various components and features of the showerhead 116 and the baffle 127 are provided below in relative terms. That is, dimensions of two components or features are expressed as a ratio or percentage of the dimensions of each other. However, regardless of the variations, the descriptions of dimensions of the various components and features of the showerhead 1 16 and the baffle 127, which are described above as being “greater than,” “less than,” “equal to” or “the same as,” “greater than or equal to,” and “less than or equal to” remain unchanged.

[0231] For example, the diameter of the lower surface of the baffle 127 (i.e., the gas delivery plate 244) is 0.5-50% of the diameter of the lower surface of the baseplate 126 of the showerhead 1 16. This dimensional relationship is not merely a design choice but rather defines the area or radial portion of the substrate 124 from the center of the substrate 124 that can receive the gases supplied by the baffle 127. For example, if the diameter of the baffle 127 is less than 5%, the gas flow from the baffle 127 can cause undesirable jetting (focused gas delivery causing nonuniformity) in the center portion of the substrate 124.

[0232] Having a small baffle 127 has some advantages in terms of deposition speed for some processes. However, there are practical limitations when manufacturing the baffle 127 as a separable assembly. For example, the size of the baffle 127 cannot be reduced beyond a limit when the baffle 127 is manufactured by welding together separately manufactured elements 240, 242, 244. In some other applications, the baffle 127 can be larger to aid gas flow uniformity.

[0233] Although the gases from the baffle 127 are distributed primarily towards the center region of the substrate 124, the baseplate 126 of the showerhead 116 needs to have a larger bottom surface for various reasons and technical effects. For example, the bottom surface of the baseplate 126 of the showerhead 1 16 has several applications: First, the bottom surface of the baseplate 126 performs thermal management since the bottom surface of the baseplate 126 absorbs heat from the pedestal 1 14. Second, the bottom surface of the baseplate 126 provides a surface above the substrate 124 to keep and guide precursor in the region of interest on the substrate 124 rather than expanding the precursor in the entire processing chamber 1 12. To achieve these objectives, the bottom surface of the baseplate 126 can have various sizes depending on the size of the substrate 124 and process parameters.

[0234] Furthermore, typically, showerheads with faceplates have gas delivery holes throughout the faceplate that cover the size of the substrate 124. However, as explained above, these showerheads suffer from the problem that the holes in the faceplate clog over time, which requires service (cleaning) and eventual replacement of the showerhead, which increase not only cost but also downtime and throughput of the tool. In contrast, in the showerhead 1 16 comprising the baffle 127, having holes just in the center region of the showerhead 1 16 solves the problem of clogging and cleaning of showerheads. Further, the baffle 127 can be replaced or cleaned more easily and at a much lower cost than replacing the entire showerhead. Additionally, by using the showerhead 1 16 with the baffle 127, wafer throughput increases because the baffle 127 can supply precursors at faster flow rates, which in turn can be deposited on the substrate 124 faster as compared to a typical showerhead with faceplate having several hundred (or thousand) holes, which add long purging times to clean the thousands of holes between dosing of different precursors.

[0235] Like the baffle 127, the diameter of the opening 204 in the baseplate of the showerhead 116 is also 0.5-50% of the diameter of the baseplate 126 of the showerhead. This dimensional relationship is not merely a design choice but is rather consistent with the dimensions of the baffle 127 and the gap 250 between the baffle 127 and the baseplate 126, which in turn is material to directing gas flow through the gap 250 towards the substrate 124. Accordingly, the opening 204 is dimensioned to not only to fit the baffle 127 into the showerhead 116 but also to provide a suitable gap 250.

[0236] The diameter of the lower surface of the baffle 127 (i.e., the gas delivery plate 244) is 75-95% of a diameter of the opening 204 in the baseplate 126 of the showerhead 1 16. This dimensional relationship is not merely a design choice but rather defines the gap 250 between the baffle 127 and the baseplate 126, which in turn is material to directing gas flow through the gap 250 towards the substrate 124. In some embodiments, the lower surface of the baffle 127 is not flat. For example, the bottom surface may comprise one or more concave or convex regions.

[0237] In the baffle 127, the diameter of the first and second sets of holes 212, 210 is 1 -25% of the diameter of the fifth set of holes 260, and the diameter of the third and fourth sets of holes 262, 264 and the channels 266 is 10-100% of the diameter of the first and second sets of holes 212, 210. The diameters of these holes are not merely a design choice but determine the flow rate and pressure at which the gases flow out of these holes onto the substrate 124, which again is material to preventing undesirable jetting (focused gas delivery causing nonuniformity) in the center portion of the substrate 124. While the third set of holes 262 are shown smaller than the first and second sets of holes 212, 210, the third set of holes 262 can be as close in size as possible to the first and second sets of holes 212, 210. However, the size of the third set of holes 262 cannot be so large and the angle of the channels 266 associated with the third set of holes 262 cannot be such that the third set of holes 262 may penetrate into the outer plenum of the baffle 127. Further, the angle of the channel 266 connecting the third and fourth sets of holes 262, 264 (e.g., 45-85 degrees relative to the z-axis) is also configured to direct the gas from annular volume 252 through the third set of holes 262 onto the center portion of the substrate 124 to ensure process uniformity at the center portion of the substrate 124.

[0238] The number of holes in the various sets of holes described above also serve specific purposes. For example, while only one hole 212 of the first set of holes 212 is shown at the center of the lower surface of the baffle 127, more holes 212 can be provided proximate to the hole 212 in the center (e.g., within the first square 300) depending on different applications. However, in some applications, providing more holes 212 in the center region of the lower surface of the baffle 127 can cause jetting effects, which can adversely impact deposition uniformity on the substrate 124. Whether to have one or more holes 212 in the center region of the lower surface of the baffle 127 also depends on the size of the first and second sets of holes 212, 210. Fewer holes 212 can be positioned in the center region of the lower surface of the baffle 127 if the diameter of the first and second sets of holes 212, 210 is larger. Since the baffle 127 can be a removable component of the showerhead 116, the baffle 127 can have different hole sizes and patterns for different process application (e.g. thermal ALD vs CVD, or bigger holes for stickier precursor molecules, and so on).

[0239] In the baffle 127, the size of the fifth set of holes 260 is greater than the size of the first set of holes 212 for the following reason. As already described above, the fifth set of holes 260 are positioned transversely in the frustoconical portion 282 of the gas delivery plate 244 of the baffle 127. Accordingly, the fifth set of holes 260 provide channels for passing gas through the inner plenum of the baffle 127 whereas the first set of holes 212 are individual holes. Therefore, the fifth set of holes 260 must be larger in size than the first set of holes 212 to deliver fluid to the smaller first set of holes 212 holes and to the gap 250 between the baffle 127 and the opening 204 in the lower surface of the baseplate 126 of the showerhead 1 16.

[0240] The grooves 238, 239 in the tube 192 and the shell 190 are configured to reduce the velocity and enhance flow uniformity of the gas flowing through the annular volume 232 between the tube 192 and the shell 190. The angle of the angular holes 270 and the arc length and radial width of the arcuate slots 272 are also configured to direct the gas flow at a suitable velocity into the annular volume 252 between the connecting plate 240 and the gas delivery plate 244 of the baffle 127. Further, the angle of the channel 266 connecting the third and fourth sets of holes 262, 264 (e.g., 45-85 degrees relative to the z-axis) is also configured to direct the gas from annular volume 252 through the third set of holes 262 onto the center portion of the substrate 124. Furthermore, the angle at which the inner portion of the ring 294 and the outer periphery of the frustoconical portion 292 tapers (e.g., 15-45 degrees) is also configured to direct the gas from the fifth set of holes 260 through the gap 296 between the ring 294 and the frustoconical portion 292 and to distribute the gas radially outward onto the substrate 124.

SECOND SECTION: EXTERNAL FEATURES OF SHOWERHEAD AND BAFFLE

[0241] FIGS. 17-25 show examples of various views of the showerhead 1 16 and the baffle 127. Some of the views shown in FIGS. 17-25 are also shown and described above with reference to FIGS. 1 -16. Nonetheless, since FIGS. 1 -16 include reference numerals, some of the views shown in FIGS. 1 -16 and other views of the showerhead 116 and the baffle 127 are shown again in FIGS. 17-25 to show the external features of the showerhead 1 16 and the baffle 127 without the reference numerals.

[0242] FIG. 17 shows an example of a perspective view of the showerhead 1 16 with the baffle 127. FIG. 17 is similar to FIG. 2 and shows the baseplate 126 and the stem 128 of the showerhead 116, which are already described above in detail with reference to FIGS. 1 -16. FIG. 18 shows an example of a side view of the showerhead 1 16 shown in FIG. 17. FIG. 18 is similar to FIG. 3 and is therefore not described again for brevity. FIG. 19 shows an example of a top view of the showerhead 116 shown in FIG. 17. In FIG. 19, examples of optional fasteners used to attach the shell 190 and the tube 192 to each other and to the baseplate 126 of the showerhead 1 16 are shown. FIG. 20 shows an example of a bottom view of the showerhead 1 16 shown in FIG. 17. FIG. 20 is similar to FIG. 4 and is therefore not described again for brevity.

[0243] FIG. 21 shows an example of a perspective view of the baffle 127 of the showerhead 1 16 shown in FIG. 17 with the baffle 127 upright. FIG. 21 is similar to FIG. 10B and is therefore not described again for brevity. FIG. 22 shows an example of a perspective view of the baffle 127 of the showerhead 1 16 shown in FIG. 17 with the baffle 127 upside down. FIG. 22 is similar to FIG. 10C and is therefore not described again for brevity. FIG. 23 shows an example of a side view of the baffle 127 shown in FIG. 22. FIG. 23 is similar to FIG. 1 1 B and is therefore not described again for brevity. FIG. 24 shows an example of a top view of the baffle 127 shown in FIG. 22. FIG. 24 is similar to FIG. 12 and is therefore not described again for brevity. FIG. 25 shows an example of a bottom view of the baffle 127 shown in FIG. 22. FIG. 25 is similar to FIG. 15 and is therefore not described again for brevity. [0244] The foregoing description is merely illustrative in nature and is not intended to limit the disclosure, its application, or uses. The broad teachings of the disclosure can be implemented in a variety of forms. Therefore, while this disclosure includes particular examples, the true scope of the disclosure should not be so limited since other modifications will become apparent upon a study of the drawings, the specification, and the following claims.

[0245] It should be understood that one or more steps within a method may be executed in different order (or concurrently) without altering the principles of the present disclosure. Further, although each of the examples is described above as having certain features, any one or more of those features described with respect to any one of the examples of the disclosure can be implemented in and/or combined with features of any of the other examples, even if that combination is not explicitly described. In other words, the described examples are not mutually exclusive, and permutations of one or more examples with one another remain within the scope of this disclosure.

[0246] Spatial and functional relationships between elements (for example, between modules, circuit elements, semiconductor layers, etc.) are described using various terms, including “connected,” “engaged,” “coupled,” “adjacent,” “next to,” “on top of,” “above,” “below,” and “disposed.” Unless explicitly described as being “direct,” when a relationship between first and second elements is described in the above disclosure, that relationship can be a direct relationship where no other intervening elements are present between the first and second elements, but can also be an indirect relationship where one or more intervening elements are present (either spatially or functionally) between the first and second elements. As used herein, the phrase at least one of A, B, and C should be construed to mean a logical (A OR B OR C), using a non-exclusive logical OR, and should not be construed to mean “at least one of A, at least one of B, and at least one of C.”

[0247] In some implementations, a controller is part of a system, which may be part of the above-described examples. Such systems can comprise semiconductor processing equipment, including a processing tool or tools, chamber or chambers, a platform or platforms for processing, and/or specific processing components (a wafer pedestal, a gas flow system, etc.). These systems may be integrated with electronics for controlling their operation before, during, and after processing of a semiconductor wafer or substrate.

[0248] The electronics may be referred to as the “controller,” which may control various components or subparts of the system or systems. The controller, depending on the processing requirements and/or the type of system, may be programmed to control any of the processes disclosed herein, including the delivery of processing gases, temperature settings (e.g., heating and/or cooling), pressure settings, vacuum settings, power settings, radio frequency (RF) generator settings, RF matching circuit settings, frequency settings, flow rate settings, fluid delivery settings, positional and operation settings, wafer transfers into and out of a tool and other transfer tools and/or load locks connected to or interfaced with a specific system.

[0249] Broadly speaking, the controller may be defined as electronics having various integrated circuits, logic, memory, and/or software that receive instructions, issue instructions, control operation, enable cleaning operations, enable endpoint measurements, and the like. The integrated circuits may include chips in the form of firmware that store program instructions, digital signal processors (DSPs), chips defined as application specific integrated circuits (ASICs), and/or one or more microprocessors, or microcontrollers that execute program instructions (e.g., software).

[0250] Program instructions may be instructions communicated to the controller in the form of various individual settings (or program files), defining operational parameters for carrying out a particular process on or for a semiconductor wafer or to a system. The operational parameters may, in some examples, be part of a recipe defined by process engineers to accomplish one or more processing steps during the fabrication of one or more layers, materials, metals, oxides, silicon, silicon dioxide, surfaces, circuits, and/or dies of a wafer.

[0251] The controller, in some implementations, may be a part of or coupled to a computer that is integrated with the system, coupled to the system, otherwise networked to the system, or a combination thereof. For example, the controller may be in the “cloud” or all or a part of a fab host computer system, which can allow for remote access of the wafer processing. The computer may enable remote access to the system to monitor current progress of fabrication operations, examine a history of past fabrication operations, examine trends or performance metrics from a plurality of fabrication operations, to change parameters of current processing, to set processing steps to follow a current processing, or to start a new process.

[0252] In some examples, a remote computer (e.g., a server) can provide process recipes to a system over a network, which may include a local network or the Internet. The remote computer may include a user interface that enables entry or programming of parameters and/or settings, which are then communicated to the system from the remote computer. In some examples, the controller receives instructions in the form of data, which specify parameters for each of the processing steps to be performed during one or more operations. It should be understood that the parameters may be specific to the type of process to be performed and the type of tool that the controller is configured to interface with or control.

[0253] Thus, as described above, the controller may be distributed, such as by comprising one or more discrete controllers that are networked together and working towards a common purpose, such as the processes and controls described herein. An example of a distributed controller for such purposes would be one or more integrated circuits on a chamber in communication with one or more integrated circuits located remotely (such as at the platform level or as part of a remote computer) that combine to control a process on the chamber.

[0254] Without limitation, example systems may include a plasma etch chamber or module, a deposition chamber or module, a spin-rinse chamber or module, a metal plating chamber or module, a clean chamber or module, a bevel edge etch chamber or module, a physical vapor deposition (PVD) chamber or module, a chemical vapor deposition (CVD) chamber or module, an atomic layer deposition (ALD) chamber or module, an atomic layer etch (ALE) chamber or module, an ion implantation chamber or module, a track chamber or module, and any other semiconductor processing systems that may be associated or used in the fabrication and/or manufacturing of semiconductor wafers.

[0255] As noted above, depending on the process step or steps to be performed by the tool, the controller might communicate with one or more of other tool circuits or modules, other tool components, cluster tools, other tool interfaces, adjacent tools, neighboring tools, tools located throughout a factory, a main computer, another controller, or tools used in material transport that bring containers of wafers to and from tool locations and/or load ports in a semiconductor manufacturing factory.

Claims

CLAIMS What is claimed is:

1 . A showerhead comprising: a plate comprising a first surface and an opening at a center of the first surface; and a baffle disposed in the opening of the plate, the baffle extending into the plate through the opening, the baffle comprising a second surface that lies in a plane parallel to the first surface of the plate and comprising a first set of holes and a second set of holes in the second surface, the first set of holes and the second set of holes are not in fluid communication with each other.

2. The showerhead of claim 1 wherein the second surface of the baffle is coplanar with the first surface of the plate.

3. The showerhead of claim 1 wherein: nine holes of the first set of holes form a first square around a center of the second surface of the baffle; one or more holes of the first set of holes lie within the first square; and none of the second set of holes lie within the first square.

4. The showerhead of claim 3 wherein: four holes of the second set of holes form a second square that is larger than the first square, the second square has a center coincident with the centers of the first square and the second surface of the baffle; and each of the four holes lies radially outward from one of the nine holes that lies at a corner of the first square.

5. The showerhead of claim 4 wherein the second surface of the baffle further comprises a third set of holes having a diameter that is less than or equal to diameters of the first and second sets of holes and wherein at least four holes of the third set of holes lie within the second square and outside the first square.

6. The showerhead of claim 5 wherein at least one hole of the third set of holes and two holes of the first set of holes form a triangle with no other hole in the triangle.

7. The showerhead of claim 5 wherein the third set of holes lies in a circle that is concentric with the centers of the first and second squares and with the center of the second surface of the baffle and wherein corners of the first square lie on the circle.

8. The showerhead of claim 5 wherein the third set of holes is in fluid communication with the second set of holes and is not in fluid communication with the first set of holes.

9. The showerhead of claim 5 wherein: two diameters of the second surface of the baffle that are perpendicular to each other and that intersect at the center of the second surface of the baffle form four quadrants on the second surface of the baffle; the two diameters comprise only the first set of holes; and each quadrant comprises one or more holes of the third set of holes.

10. The showerhead of claim 9 wherein each diameter comprises nine holes of the first set of holes.

11 . The showerhead of claim 1 wherein the showerhead is configured to supply one or more gases through the baffle directly to a process chamber.

12. The showerhead of claim 1 wherein the showerhead is configured to supply one or more gases through the baffle to a substrate facing the plate and wherein the showerhead does not comprise a faceplate with holes facing the substrate.

13. The showerhead of claim 1 wherein the showerhead is configured to supply a first gas through the first set of holes and supply a second gas through the second set of holes to a substrate facing the plate.

14. The showerhead of claim 1 wherein the first and second sets of holes have the same diameter.

15. The showerhead of claim 1 wherein the first and second sets of holes are arranged along concentric circles and wherein the holes on at least one circle have a different diameter than the holes on at least one other circle.

16. The showerhead of claim 1 wherein the first and second sets of holes are arranged in rows and columns.

17. The showerhead of claim 1 wherein the baffle is coupled to the plate by one or more fasteners.

18. The showerhead of claim 1 wherein the plate and the baffle are unitary.

19. The showerhead of claim 1 wherein the baffle comprises a ring around the second surface of the baffle, the showerhead further comprising a gap between an outer diameter of the ring and an inner diameter of the opening in the plate.

20. The showerhead of claim 1 wherein the baffle comprises a ring around the second surface of the baffle, and wherein an outer diameter of the ring is less than an inner diameter of the opening in the plate.

21 . The showerhead of claim 1 wherein an edge of the first surface of the plate is rounded along an inner diameter of the opening in the plate.

22. The showerhead of claim 1 wherein the baffle comprises a ring around the second surface of the baffle, the showerhead further comprising: a gap between an outer diameter of the ring and an inner diameter of the opening in the plate; wherein the first set of holes in the baffle is configured to supply a first gas; wherein the second set of holes in the baffle is disjoint from the first set of holes and is configured to supply a second gas; and wherein the gap is configured to pass the second gas.

23. The showerhead of claim 1 wherein the first and second sets of holes are arranged in an alternating pattern.

24. The showerhead of claim 1 wherein each hole in the first and second sets of holes is spaced from adjacent holes in the first and second sets of holes by a predetermined distance.

25. The showerhead of claim 1 wherein a diameter of the second surface of the baffle is 75-99% of a diameter of the opening.

26. The showerhead of claim 1 wherein a diameter of the second surface of the baffle is 0.5-50% of a diameter of the first surface of the plate.

27. The showerhead of claim 1 wherein a diameter of the opening is 0.5-50% of a diameter of the plate.

28. The showerhead of claim 1 further comprises: a stem connected to a second surface of the plate, the second surface being opposite to the first surface, wherein the stem comprises a base portion coupled to a center region of the second surface of the plate and comprises a vertical portion extending vertically upwards from the base portion.

29. The showerhead of claim 28 wherein the second surface of the plate (i) extends perpendicularly upwards from an outer diameter of the first surface for a first distance, (ii) extends, after the first distance, radially inwards for a second distance at an angle relative to the first surface of the plate and (iii) extends, after the second distance, radially inwards parallel to the first surface of the plate for a third distance to the base portion of the stem.

30. A baffle for a showerhead, the baffle comprising: a connecting plate configured to connect the baffle to the showerhead; a stem extending from the connecting plate; and a gas delivery plate extending from the stem and comprising a first set of holes and a second set of holes to deliver one more gases, the first set of holes and the second set of holes are not in fluid communication with each other.

31 . The baffle of claim 30 wherein the connecting plate, the stem, and the gas delivery plate are cylindrical, and have different diameters.

32. The baffle of claim 30 wherein at least one of the connecting plate, the stem, and the gas delivery plate has a different shape than others of the connecting plate, the stem, and the gas delivery plate.

33. The baffle of claim 30 wherein at least one of the connecting plate, the stem, and the gas delivery plate has a different size than others of the connecting plate, the stem, and the gas delivery plate.

34. The baffle of claim 30 wherein the connecting plate and the gas delivery plate have the same size.

35. The baffle of claim 30 wherein the connecting plate, the stem, and the gas delivery plate are unitary.

36. The baffle of claim 30 wherein the connecting plate, the stem, and the gas delivery plate are coupled to each other using one or more fasteners.

37. The baffle of claim 31 wherein the gas delivery plate is of a greater diameter than the stem and wherein the connecting plate is of a greater diameter than the gas delivery plate.

38. The baffle of claim 31 further comprising an opening extending through centers of the connecting plate and the stem and partially extending into the gas delivery plate through a center of the gas delivery plate.

39. The baffle of claim 31 wherein the connecting plate comprises a plurality of arcuate slots extending through the connecting plate, the plurality of arcuate slots is positioned radially outward from the stem.

40. The baffle of claim 31 wherein the gas delivery plate comprises a first set of holes and a second set of holes arranged in an alternating pattern, wherein the first set of holes is configured to deliver a first gas and the second set of holes is configured to deliver a second gas that is different from the first gas.

41 . The baffle of claim 40 wherein the first and second sets of holes have the same diameter.

42. The baffle of claim 40 wherein the first and second sets of holes are arranged along concentric circles and wherein the holes on at least one circle have a different diameter than the holes on at least one other circle.

43. The baffle of claim 40 wherein the first and second sets of holes are arranged in rows and columns.

44. The baffle of claim 40 wherein: one hole of the first set of holes is at a center of the gas delivery plate; nine holes of the first set of holes form a first square at the center of the gas delivery plate; one or more holes of the first set of holes lie within the first square; and none of the second set of holes lie within the first square.

45. The baffle of claim 44 wherein: four holes of the second set of holes form a second square with a center coincident with the centers of the first square and the gas delivery plate; and each of the four holes lies radially outward from one of the nine holes that lies at a corner of the first square.

46. The baffle of claim 45 wherein the gas delivery plate further comprises a third set of holes having a diameter that is less than or equal to diameters of each of the first and second sets of holes and wherein at least four holes of the third set of holes lie within the second square and outside the first square.

47. The baffle of claim 46 wherein at least one hole of the third set of holes and two holes of the first set of holes form a triangle with no other hole in the triangle.

48. The baffle of claim 46 wherein the third set of holes lies in a circle that is concentric with the centers of the first and second squares and with the center of the gas delivery plate and wherein corners of the first square lie on the circle.

49. The baffle of claim 46 wherein the third set of holes is in fluid communication with the second set of holes and is not in fluid communication with the first set of holes.

50. The baffle of claim 46 wherein: two diameters of the gas delivery plate that are perpendicular to each other and that intersect at the center of the gas delivery plate form four quadrants; the two diameters comprise only the first set of holes; and each quadrant comprises two holes of the third set of holes.

51 . The baffle of claim 50 wherein each diameter comprises nine holes of the first set of holes.

52. The baffle of claim 46 wherein: the stem comprises a fourth set of holes along a rim of the stem and a plurality of channels extending radially inwards at an angle relative to a vertical axis through the stem and the gas delivery plate between the third and fourth sets of holes; and the third and fourth sets of holes are in fluid communication with each other, with the second set of holes, with the plurality of arcuate slots, and with an annular volume between the connecting and gas delivery plates around the stem.

53. The baffle of claim 52 wherein the second, third, and fourth sets of holes; the plurality of arcuate slots; and the annular volume are not in fluid communication with the first set of holes.

54. The baffle of claim 52 wherein the gas delivery plate comprises: a plate; and a frustoconical portion and a ring attached to the plate, wherein the ring surrounds the frustoconical portion defining a gap therebetween.

55. The baffle of claim 54 wherein: a smaller end of the frustoconical portion is attached to the plate; and an inner portion of the ring tapers radially inwards as the ring extends towards the plate.

56. The baffle of claim 54 wherein: a larger end of the frustoconical portion is attached to the plate; and an inner portion of the ring tapers radially outwards as the ring extends towards the plate.

57. The baffle of claim 54 wherein the frustoconical portion comprises: a fifth set of holes positioned transversely through the frustoconical portion, wherein the first set of holes is connected through the frustoconical portion perpendicularly to the fifth set of holes.

58. The baffle of claim 57 further comprising: an opening extending through centers of the connecting plate and the stem and partially extending into the gas delivery plate through a center of the gas delivery plate, wherein the opening is in fluid communication with the first and fifth sets of holes and with the gap between the frustoconical portion and the ring.

59. The baffle of claim 58 wherein the opening, the first and fifth sets of holes, and the gap are not in fluid communication the second, third, and fourth sets of holes; the plurality of arcuate slots; and the annular volume between the connecting and gas delivery plates around the stem.

60. The baffle of claim 52 wherein: diameters of each hole in the third and fourth sets of holes and each channel in the plurality of channels are the same; and the angle is 45-85 degrees.

61 . The baffle of claim 57 wherein: a diameter of the first and second sets of holes is 1 -25% of a diameter of the fifth set of holes; and a diameter of the third and fourth sets of holes and of the plurality of channels is 10-100% of a diameter of the first and second sets of holes.

62. The baffle of claim 30 wherein: a thickness of the stem is less than a thickness of the connecting plate; and a thickness of the gas delivery plate is less than the thickness of the stem.