WO2023201612A1 - Six-degree-of-freedom precision motion platform based on flexible mechanism - Google Patents

Abstract

A six-degree-of-freedom precise motion platform based on a flexible mechanism, comprising a Z-axis moving module (1), an XY-axis moving module (2), a Z-axis rotating module (3), and an XY-axis rotating module (4). A Z-axis moving mechanism (12) is provided in the Z-axis moving module (1); an XY-axis moving mechanism (21) is provided in the XY-axis moving module (2); a Z-axis rotating mechanism (31) is provided in the Z-axis rotating module (3); an XY-rotating mechanism (41) is provided in the XY-axis rotating module (4); and the Z-axis moving mechanism (12), the XY-axis moving mechanism (21), the Z-axis rotating mechanism (31), and the XY-axis rotating mechanism (41) are all flexible mechanisms. Movement in an X-axis direction, a Y-axis direction, and a Z-axis direction and rotation around a θx axis, a θy axis, and a θz axis can be achieved at the same time; there is no abrasion caused by gaps; the motion trajectory is continuous; the controllability is good; output displacement with higher resolution can be provided; and motion control of an execution mechanism is better implemented.

Description

A six-degree-of-freedom precision motion platform based on a flexible mechanism Technical field

The invention relates to the technical field of multi-degree-of-freedom motion platforms, and in particular to a six-degree-of-freedom precision motion platform based on a flexible mechanism.

Background technique

Multi-degree-of-freedom motion platforms, such as six-degree-of-freedom motion platforms, can achieve motion output with multiple different degrees of freedom and are widely used in automated machining, machinery manufacturing and other fields.

The applicant found that there are at least the following technical problems in the prior art: 1) Most of the existing multi-degree-of-freedom electric platforms use traditional multi-degree-of-freedom mechanical arm contact transmission, which has a complex structure, a lot of mechanism redundancy, and difficult processing and assembly; 2 ) The existing multi-degree-of-freedom electric platform causes wear and requires lubrication due to the existence of gaps, making it difficult to achieve continuous high-precision motion control; 3) Due to the existence of parasitic errors, if higher-precision control is to be achieved, additional decoupling is required mechanism, so the corresponding motion control system is more complex.

Contents of the invention

The purpose of the present invention is to provide a six-degree-of-freedom precision motion platform based on a flexible mechanism to solve the technical problems existing in the prior art. The many technical effects that can be produced by the preferred technical solutions among the many technical solutions provided by the present invention are described in detail below.

In order to achieve the above objects, the present invention provides the following technical solutions:

A six-degree-of-freedom precision motion platform based on a flexible mechanism, including a Z-axis movement module, an XY-axis movement module, a Z-axis rotation module and an XY-axis rotation module, and a Z-axis movement mechanism is provided in the Z-axis movement module;

The XY-axis movement module is connected to the top of the Z-axis movement module, and an XY-axis movement mechanism is provided in the XY-axis movement module;

The Z-axis rotation module is connected to the top of the XY-axis movement module, and a Z-axis rotation mechanism is provided in the Z-axis rotation module;

The XY-axis rotation module is connected to the top of the Z-axis rotation module, and an XY-axis rotation mechanism is provided in the XY-axis rotation module;

The Z-axis moving mechanism, the XY-axis moving mechanism, the Z-axis rotating mechanism and the XY-axis rotating mechanism are all flexible mechanisms.

Preferably, the Z-axis movement module also includes a base, a first driving mechanism, a spring and a platform connector;

The bottom of the first driving mechanism is connected to the base and the top of the first driving mechanism is connected to the platform connector;

The number of the Z-axis moving mechanisms is two groups, and the two groups of Z-axis moving mechanisms are symmetrically arranged on both sides of the first driving mechanism. The bottom of the Z-axis moving mechanism is connected to the base and its top Connected to the platform connector;

The spring is connected between the Z-axis moving mechanism and the platform connector;

The platform connector is connected to the XY axis moving module.

Preferably, the XY-axis moving module further includes a second driving mechanism mounting piece and a second driving mechanism, and the second driving mechanism is fixed on the XY-axis moving mechanism through the second driving mechanism mounting piece.

Preferably, the XY-axis moving mechanism is connected to the Z-axis moving module and the Z-axis rotation module respectively. The XY-axis moving mechanism is a parallel two-degree-of-freedom motion mechanism, and the motions of the two degrees of freedom are respectively controlled by Two of said second drive mechanisms drive.

Preferably, the Z-axis rotation module further includes a connecting piece, a third driving mechanism and a third driving mechanism mounting piece, the bottom of the connecting piece is connected to the XY-axis moving module, and the top of the connecting piece is connected to the The Z-axis rotating mechanism is connected, and the third driving mechanism is fixed on the Z-axis rotating mechanism through the third driving mechanism mounting piece.

Preferably, the XY axis rotation module also includes a fourth driving mechanism, an output rod and a fixed platform;

The fixed platform is connected to the Z-axis rotation module;

The number of the XY-axis rotation mechanisms is two, and the two XY-axis rotation mechanisms are arranged orthogonally and symmetrically, and the top of each XY-axis rotation mechanism is connected to the fixed platform;

Each XY-axis rotation mechanism corresponds to one of the fourth driving mechanisms, and the fourth driving mechanism is fixed at the rotation center of the XY-axis rotation mechanism;

Both ends of the output rod are each connected to an output end of the XY-axis rotation mechanism.

Preferably, the XY-axis rotation mechanism is provided with a first point, a second point, a third point and a fourth point, and the first point, the second point, the third point are The point position and the fourth point position together form a parallelogram.

Preferably, a decoupling structure is provided at both the first point and the fourth point.

Preferably, the decoupling structure is a flexible Hooke hinge.

The beneficial effects of the present invention are: the six-degree-of-freedom precision motion platform is composed of four motion modules: Z-axis movement module, XY-axis movement module, Z-axis rotation module and XY-axis rotation module. The six-degree-of-freedom precision motion platform can simultaneously Realizing movement along the three axes of X, Y, and Z and rotation around the three axes of θx, θy, and θz can avoid assembly errors caused by too long assembly size chains, and make the three rotational degrees of freedom of θx, θy, and θz The centers of rotation coincide;

The configuration design is more reasonable, the assembly is simple, and the cost is reduced;

By using a flexible mechanism, there is no wear caused by gaps, the motion trajectory is continuous, the controllability is good, and it can provide higher resolution output displacement;

The control system is required to be simpler and better realize the motion control of the actuator.

Description of the drawings

In order to explain the embodiments of the present invention or the technical solutions in the prior art more clearly, the drawings needed to be used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings in the following description are only These are some embodiments of the present invention. For those of ordinary skill in the art, other drawings can be obtained based on these drawings without exerting creative efforts.

Figure 1 is a structural diagram of the present invention;

Figure 2 is an exploded structural view of the present invention;

Figure 3 is a structural diagram of the Z-axis movement module in the present invention;

Figure 4 is a structural diagram of the Z-axis moving mechanism in the present invention;

Figure 5 is a structural diagram of the XY axis movement module in the present invention;

Figure 6 is a structural diagram of the XY axis moving mechanism in the present invention;

Figure 7 is a structural diagram of the Z-axis rotation module in the present invention;

Figure 8 is a structural diagram of the Z-axis rotation mechanism in the present invention;

Figure 9 is a structural diagram of the XY axis rotation module in the present invention;

Figure 10 is a structural diagram of the XY axis rotation mechanism in the present invention;

Figure 11 is a structural diagram of the flexible Hooke hinge in the present invention;

In the figure, 1. Z-axis moving module; 11. Base; 12. Z-axis moving mechanism; 13. First driving mechanism; 14. Spring; 15. Platform connector;

2. XY axis moving module; 21. XY axis moving mechanism; 211. First mechanism block; 212. First reed group; 213. Second mechanism block; 214. Second reed group; 215. Third mechanism block ; 216. The third reed group; 217. The fourth reed group; 22. The second driving mechanism mounting piece; 23. The second driving mechanism;

3. Z-axis rotation module; 31. Z-axis rotation mechanism; 3101. First rod body; 3102. Second rod body; 3103. First reed; 3104. Second reed; 3105. Third reed; 3106. Three rod body; 3107, fourth rod body; 3108, fifth rod body; 3109, fourth reed; 3110, fifth reed; 3111, sixth rod body; 32, connector; 33, third driving mechanism; 34, third Three drive mechanism mounting parts;

4. XY axis rotation module; 41. XY axis rotation mechanism; 411. First point; 412. Second point; 413. Third point; 414. Fourth point; 415. Fifth point; 416 , first connecting rod; 42. fourth driving mechanism; 43. output rod; 44. fixed platform;

5. Virtual rotation center.

Detailed ways

In order to make the purpose, technical solutions and advantages of the present invention clearer, the technical solutions of the present invention will be described in detail below. Obviously, the described embodiments are only some of the embodiments of the present invention, but not all of the embodiments. Based on the embodiments of the present invention, all other implementations obtained by those of ordinary skill in the art without any creative work fall within the scope of protection of the present invention.

In the description of the present invention, it should be understood that the terms "center", "lateral", "length", "width", "height", "upper", "lower", "front", "rear", The directions or positional relationships indicated by "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "side", etc. are based on those shown in Figure 1 The orientation or positional relationship is only for the convenience of describing the present invention and simplifying the description, and does not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation of the present invention. .

In the description of the present invention, it should also be noted that, unless otherwise clearly stated and limited, the terms "installation", "connection" and "connection" should be understood in a broad sense. For example, it can be a fixed connection or a removable connection. Detachable connection, or integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium. For those of ordinary skill in the art, the specific meanings of the above terms in the present invention may be understood based on specific circumstances.

Referring to Figures 1 to 11, the present invention mentions a six-degree-of-freedom precision motion platform based on a flexible mechanism, including a Z-axis movement module 1, an XY-axis movement module 2, a Z-axis rotation module 3 and an XY-axis rotation module 4;

The Z-axis moving module 1 can control the movement in the Z-axis direction, and the Z-axis moving module 1 is provided with a Z-axis moving mechanism 12;

The XY-axis movement module 2 is connected to the top of the Z-axis movement module 1. The XY-axis movement module 2 can control movement in the X-axis and Y-axis directions. The XY-axis movement module 2 is provided with an XY-axis movement mechanism 21;

The Z-axis rotation module 3 is connected to the top of the XY-axis movement module 2. The Z-axis rotation module 3 can control the Z-axis rotation. The Z-axis rotation module 3 is provided with a Z-axis rotation mechanism 31;

The XY-axis rotation module 4 is connected to the top of the Z-axis rotation module 3. The XY-axis rotation module 4 can control X-axis rotation and Y-axis rotation. The XY-axis rotation module 4 is provided with an XY-axis rotation mechanism 41. The XY-axis rotation module 4 The output end is connected to external modules such as flexible grippers;

The Z-axis moving mechanism 12, the XY-axis moving mechanism 21, the Z-axis rotating mechanism 31 and the XY-axis rotating mechanism 41 are all flexible mechanisms. The flexible mechanism bodies of each module are integrally processed and formed by wire EDM, and the material is AL7075;

The four motion modules of Z-axis movement module 1, XY-axis movement module 2, Z-axis rotation module 3 and XY-axis rotation module 4 adopt a series-parallel hybrid design and are combined to form a six-degree-of-freedom precision motion platform. The six-degree-of-freedom precision motion platform can At the same time, movement along the three axes of X, Y, and Z and rotation around the three axes of θx, θy, and θz can be avoided, which can avoid assembly errors caused by too long assembly size chains, and allow the three rotational degrees of freedom of θx, θy, and θz. The centers of rotation coincide;

The six-degree-of-freedom precision motion platform has a more reasonable configuration design, simple assembly, and reduced cost;

By using a flexible mechanism, the six-degree-of-freedom precision motion platform has no wear caused by gaps, continuous motion trajectories, good controllability, and can provide higher-resolution output displacement;

The control system of the six-degree-of-freedom precision motion platform is required to be simpler and better realize the motion control of the actuator.

The Z-axis moving module 1 includes a base 11, a Z-axis moving mechanism 12, a first driving mechanism 13, a spring 14 and a platform connector 15. The base 11 is used to carry the six-degree-of-freedom precision motion platform as a whole, and can also be positioned and installed with other equipment. ;

The first driving mechanism 13 is preferably a voice coil motor, which can meet the demand for a larger stroke while ensuring thrust. The bottom of the voice coil motor is connected to the base 11, and the top of the voice coil motor is connected to the platform connector 15;

There are two sets of Z-axis moving mechanisms 12, both of which adopt a parallelogram flexible guide mechanism configuration and are integrally processed and formed by wire EDM. The material is preferably AL7075. The flexible motion unit is specifically a reed type. Two sets of Z-axis movements The mechanism 12 is symmetrically arranged on both sides of the first driving mechanism 13 and has good guiding performance. The bottom of the Z-axis moving mechanism 12 is detachably connected to the base 11 and can be pre-tightened on the base 11 by two screws. The Z-axis movement The top of the mechanism 12 is detachably connected to the platform connector 15. The Z-axis moving mechanism 12 has three columns. The top of the middle column is pre-tightened and fixed on the platform connector 15 through a screw. The other two columns are equipped with springs. 14. The top of the spring 14 is connected to the bottom of the platform connector 15. The four springs 14 on the two Z-axis moving mechanisms 12 can provide elastic potential energy to offset the gravity of each module above, reduce the load on the drive motor, and ensure the stroke;

The platform connector 15 is detachably connected to the XY-axis moving module 2. Specifically, the four corners of the platform connector 15 can be pre-tightened on the XY-axis moving module 2 through four screws;

The voice coil motor in the first driving mechanism 13 moves along the Z-axis through the driving platform connector 15, and is transmitted to the Z-axis moving mechanism 12 through the middle column on the Z-axis moving mechanism 12, pulling the reed to deform, and reacting on the platform connection. On item 15, the output displacement is controlled. Compared with the method of directly driving the rigid mechanism by the motor, the movement trajectory of the flexible motion unit is more continuous, has good controllability, and can provide higher resolution output displacement.

The XY-axis moving module 2 includes an XY-axis moving mechanism 21, a second driving mechanism mounting part 22 and a second driving mechanism 23;

The XY-axis moving mechanism 21 is detachably connected to the Z-axis moving module 1 and the Z-axis rotating module 3 respectively. It is preferable that the four corners of the XY-axis moving mechanism 21 are pre-tightened on the Z-axis moving module 1 through four screws, and can Preferably, the middle part of the XY-axis moving mechanism 21 is pre-tightened on the Z-axis rotation module 3 through two screws;

The XY-axis moving mechanism 21 is the main moving structural component and is integrally processed and formed by wire EDM. The material is preferably AL7075. The flexible motion unit is specifically a reed type and is a parallel two-degree-of-freedom motion mechanism using a parallelogram guide mechanism. The symmetrical design realizes the input and output decoupling motion of two degrees of freedom. The motion of the two degrees of freedom is driven by two second driving mechanisms 23 respectively. The second driving mechanism 23 is preferably a voice coil motor, and the voice coil motor passes through the second driving mechanism. The driving mechanism mounting piece 22 is fixed on the XY-axis moving mechanism 21;

Taking the movement in the X-axis direction as an example, when the voice coil motor drives the XY-axis moving mechanism 21 to move in the positive direction of the X-axis, it will pull the first mechanism block 211 on the XY-axis moving mechanism 21 to move. The stiffness is much greater than the stiffness in the vertical axis direction, so the first mechanism block 211 can sequentially drive the first reed group 212, the second mechanism block 213, the second reed group 214 and the third mechanism block 215 to move forward along the X-axis. The third reed group 216 and the fourth reed group 217 will be rotated by the traction force of the second mechanism block 213, and the pulling force of the third reed group 216 and the fourth reed group 217 reacts on the second mechanism block 213, thus The resultant force is 0 along the Y-axis and a small negative force along the X-axis. Therefore, the second mechanism block 213 only moves in the positive direction along the X-axis without generating parasitic motion in the Y-axis direction. , the selection of Y-axis direction movement is the same as the above-mentioned X-axis direction movement, so this flexible mechanism can achieve the decoupling function.

The Z-axis rotation module 3 includes a Z-axis rotation mechanism 31, a connecting piece 32, a third driving mechanism 33 and a third driving mechanism mounting piece 34;

The bottom of the connecting piece 32 is detachably connected to the XY-axis moving module 2, and can be preferably pre-tightened on the XY-axis moving module 2 through two screws. The top of the connecting piece 32 is detachably connected to the Z-axis rotation mechanism 31, and can be preferably pre-tensioned on the A screw is pre-tightened on the Z-axis rotating mechanism 31;

The Z-axis rotation mechanism 31 is the main moving structural component and is integrally processed and formed by wire EDM. The material is preferably AL7075. The flexible motion unit is specifically a reed type and adopts a symmetrical design of a parallelogram guide mechanism to achieve rotation along the Z-axis direction. rotational motion;

Since the Z-axis rotation center of the entire six-degree-of-freedom precision motion platform needs to fall at a specified distance from the lower surface of an external module such as a flexible gripper, and needs to be avoided, the Z-axis rotation mechanism 31 needs to be designed as a remote motion mechanism. The center of rotation falls outside the mechanism, and subsequent design only requires the center of rotation to coincide with the required destination point;

The rotational motion of the Z-axis rotation mechanism 31 is driven by the third drive mechanism 33. The third drive mechanism 33 is preferably a swing angle motor. The swing angle motor can be fixed on the Z-axis rotation mechanism 31 through the third drive mechanism mounting piece 34. The swing angle The movement stroke of the motor is related to the structural design;

The first rod 3101 on the Z-axis rotation mechanism 31 is a fixed end. The stator of the swing angle motor is connected to the first rod 3101. The first rod 3101 is connected to the second rod 3102 through the first reed 3103. The stator of the swing angle motor is The rotor is connected to the second rod 3102. The second reed 3104 is connected to the second rod 3102 and the third rod 3106 respectively. The third reed 3105 is connected to the second rod 3102 and the fourth rod 3107 respectively. The fifth rod 3108 is connected to the third rod 3106 through the fourth reed 3109, and the fifth rod 3108 is connected to the fourth rod 3107 through the fifth reed 3110;

When the swing angle motor drives the second rod 3102 to rotate around the center point of the first reed 3103, it can drive the second reed 3104 and the third reed 3105 to rotate, and the flange of the second rod 3102 and the third rod 3106, the fifth rod 3108 and the fourth rod 3107 form a parallel four-rod mechanism, then the rotation angles of the fourth reed 3109 and the fifth reed 3110 are the same as the second reed 3104 and the third reed 3105 respectively. Since the position of the first reed 3103 has been designed in advance, the rotation angle of the first reed 3103 is the rotation angle of the virtual rotation center 5;

The sixth rod body 3111 is an additional constraint, and a set of parallel parallel four-rod mechanisms is attached to limit the movement range of the mechanism, increase the system stiffness, and achieve precise control.

The XY-axis rotation module 4 includes an XY-axis rotation mechanism 41, a fourth driving mechanism 42, an output rod 43 and a fixed platform 44;

The fixed platform 44 is detachably connected to the Z-axis rotation module 3, preferably pre-tightened by two screws;

The XY-axis rotation mechanism 41 is integrally processed and formed by wire EDM. The material is preferably AL7075. The number of the XY-axis rotation mechanism 41 is two. The two XY-axis rotation mechanisms 41 are arranged orthogonally and symmetrically relative to the virtual rotation center 5. Each The top ends of each XY-axis rotation mechanism 41 are detachably connected to the fixed platform 44, and can preferably be pre-tightened together by two screws;

The fourth driving mechanism 42 is preferably a rotating motor. Each XY-axis rotating mechanism 41 corresponds to a rotating motor. The rotating motor is fixed at the rotation center of the XY-axis rotating mechanism 41 through a connecting piece. The rotating motor can output rotational torque to the XY-axis rotation. Agency 41 on;

Both ends of the output rod 43 are detachably connected to the output end of an XY-axis rotation mechanism 41, and are preferably pre-tightened by screws;

The output rod 43 can be connected to an external module such as a mechanical arm, an electric gripper or a motion platform to achieve transmission around the virtual rotation center 5 .

The XY-axis rotation mechanism 41 is a parallel four-bar motion mechanism. The first point 411, the second point 412, the third point 413 and the fourth point 414 in the XY-axis rotation mechanism 41 together form a parallelogram. At the same time, the fourth point 414, the third point 413, the fifth point 415 and the virtual rotation center 5 also form a parallelogram, so together they form a planar VC mechanism. The third point on the output member of the planar VC mechanism The five-point position 415 makes a circular motion with the virtual rotation center 5 as the center. There is a virtual constraint relationship between the fifth point 415 and the virtual rotation center 5. By controlling the rotation variable of the first point 411 by the rotating motor, the third point can be output. The rotation variable of the five-point position 415 to the virtual rotation center 5, the third point 413, the fifth point 415 and the first link 416 also form a parallelogram. The first link 416 is an additional constraint, with the purpose of increasing Structural rigidity for precise control.

It is worth noting that due to the parasitic motion characteristics of the flexible mechanism, the two sets of orthogonal XY-axis rotation mechanisms 41 will affect each other during rotation, and there is motion coupling. Therefore, at the connection between the XY-axis rotation mechanism 41 and the fixed platform 44 , that is, a corresponding decoupling structure is designed at the first point 411 and the fourth point 414. The decoupling structure here is preferably an axis-intersecting flexible Hooke hinge. The flexible Hooke hinge takes advantage of the flexibility characteristics of the material. Compared with the traditional U pair, on the one hand, this structure can realize the transmission of rotational variables in the normal direction of the XY-axis rotation mechanism 41, and on the other hand, it can also realize the tangential motion decoupling of the mechanism.

The six-degree-of-freedom precision motion platform can be used to adjust the posture of precision components with six degrees of freedom. The flexible mechanism driven by the voice coil motor realizes linear adjustment with three degrees of freedom. The flexible mechanism driven by the swing angle motor realizes rotational adjustment with three degrees of freedom. The rotation center Coincident, and the center of rotation is on the reference plane surface, and the design of decoupling and additional constraints can ensure precision control and achieve precise positioning. The clever use of flexible mechanisms greatly improves the accuracy of the motion control system and simplifies the complexity of the motion control system. sex.

The above are only specific embodiments of the present invention, but the protection scope of the present invention is not limited thereto. Any person familiar with the technical field can easily think of changes or substitutions within the technical scope disclosed by the present invention, and all of them should be covered. within the protection scope of the present invention. Therefore, the protection scope of the present invention should be subject to the protection scope of the claims.

Claims (9)

A six-degree-of-freedom precision motion platform based on a flexible mechanism, characterized by including a Z-axis movement module (1), an XY-axis movement module (2), a Z-axis rotation module (3) and an XY-axis rotation module (4), Wherein: the Z-axis movement module (1) is provided with a Z-axis movement mechanism (12); The XY-axis movement module (2) is connected to the top of the Z-axis movement module (1), and an XY-axis movement mechanism (21) is provided in the XY-axis movement module (2); The Z-axis rotation module (3) is connected to the top of the XY-axis movement module (2), and a Z-axis rotation mechanism (31) is provided in the Z-axis rotation module (3); The XY-axis rotation module (4) is connected to the top of the Z-axis rotation module (3), and an XY-axis rotation mechanism (41) is provided in the XY-axis rotation module (4); The Z-axis moving mechanism (12), the XY-axis moving mechanism (21), the Z-axis rotating mechanism (31) and the XY-axis rotating mechanism (41) are all flexible mechanisms. The six-degree-of-freedom precision motion platform based on a flexible mechanism according to claim 1, characterized in that: the Z-axis movement module (1) also includes a base (11), a first driving mechanism (13), and a spring (14) and platform connectors (15); The bottom of the first driving mechanism (13) is connected to the base (11) and the top is connected to the platform connector (15); The number of the Z-axis moving mechanisms (12) is two groups, and the two groups of Z-axis moving mechanisms (12) are symmetrically arranged on both sides of the first driving mechanism (13). The Z-axis moving mechanism (12) ) The bottom is connected to the base (11) and the top is connected to the platform connector (15); The spring (14) is connected between the Z-axis moving mechanism (12) and the platform connector (15); The platform connector (15) is connected to the XY-axis moving module (2). The six-degree-of-freedom precision motion platform based on a flexible mechanism according to claim 1, characterized in that: the XY-axis movement module (2) also includes a second drive mechanism mounting piece (22) and a second drive mechanism (23) , the second driving mechanism (23) is fixed on the XY-axis moving mechanism (21) through the second driving mechanism mounting piece (22). The six-degree-of-freedom precision motion platform based on a flexible mechanism according to claim 3, characterized in that: the XY-axis moving mechanism (21) is respectively connected with the Z-axis moving module (1) and the Z-axis rotation module ( 3), the XY-axis moving mechanism (21) is a parallel two-degree-of-freedom motion mechanism, and its two degrees of freedom motion are respectively driven by the two second driving mechanisms (23). The six-degree-of-freedom precision motion platform based on a flexible mechanism according to claim 1, characterized in that: the Z-axis rotation module (3) further includes a connecting piece (32), a third driving mechanism (33) and a third driving mechanism. Mechanism mounting piece (34), the bottom of the connecting piece (32) is connected to the XY-axis moving module (2), and the top of the connecting piece (32) is connected to the Z-axis rotation mechanism (31) , the third driving mechanism (33) is fixed on the Z-axis rotating mechanism (31) through the third driving mechanism mounting piece (34). The six-degree-of-freedom precision motion platform based on a flexible mechanism according to claim 1, characterized in that: the XY-axis rotation module (4) also includes a fourth drive mechanism (42), an output rod (43) and a fixed platform ( 44); The fixed platform (44) is connected to the Z-axis rotation module (3); The number of the XY-axis rotation mechanisms (41) is two. The two XY-axis rotation mechanisms (41) are arranged orthogonally and symmetrically. The top of each XY-axis rotation mechanism (41) is connected to the fixed platform (41). 44) connected; Each XY-axis rotation mechanism (41) corresponds to a fourth driving mechanism (42), and the fourth driving mechanism (42) is fixed at the rotation center of the XY-axis rotation mechanism (41); Both ends of the output rod (43) are each connected to an output end of the XY-axis rotation mechanism (41). The six-degree-of-freedom precision motion platform based on a flexible mechanism according to claim 6, characterized in that: the XY-axis rotation mechanism (41) is provided with a first point (411), a second point (412), The third point (413) and the fourth point (414), the first point (411), the second point (412), the third point (413) and the fourth point The points (414) together form a parallelogram. The six-degree-of-freedom precision motion platform based on a flexible mechanism according to claim 7, characterized in that: a decoupling structure is provided at both the first point (411) and the fourth point (414). The six-degree-of-freedom precision motion platform based on a flexible mechanism according to claim 8, wherein the decoupling structure is a flexible Hooke hinge.

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