WO2022134838A1 - Packaging structure and packaging method - Google Patents
Packaging structure and packaging method Download PDFInfo
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- WO2022134838A1 WO2022134838A1 PCT/CN2021/126740 CN2021126740W WO2022134838A1 WO 2022134838 A1 WO2022134838 A1 WO 2022134838A1 CN 2021126740 W CN2021126740 W CN 2021126740W WO 2022134838 A1 WO2022134838 A1 WO 2022134838A1
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- WIPO (PCT)
- Prior art keywords
- light
- cover plate
- transmitting cover
- chip unit
- plastic
- Prior art date
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- 238000004806 packaging method and process Methods 0.000 title claims abstract description 39
- 238000000034 method Methods 0.000 title claims abstract description 18
- 229920003023 plastic Polymers 0.000 claims abstract description 31
- 239000004033 plastic Substances 0.000 claims abstract description 31
- 238000007789 sealing Methods 0.000 claims description 21
- 238000005538 encapsulation Methods 0.000 claims description 18
- 238000005520 cutting process Methods 0.000 claims description 11
- 239000002184 metal Substances 0.000 claims description 11
- 239000011521 glass Substances 0.000 claims description 5
- 239000002245 particle Substances 0.000 claims description 4
- 230000002093 peripheral effect Effects 0.000 claims description 3
- 238000001746 injection moulding Methods 0.000 abstract description 5
- 238000003384 imaging method Methods 0.000 abstract description 4
- 239000000243 solution Substances 0.000 abstract description 2
- 239000010410 layer Substances 0.000 description 24
- 230000000694 effects Effects 0.000 description 6
- 230000003287 optical effect Effects 0.000 description 6
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- 238000002834 transmittance Methods 0.000 description 3
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- 238000010586 diagram Methods 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012858 packaging process Methods 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 238000003466 welding Methods 0.000 description 2
- VVQNEPGJFQJSBK-UHFFFAOYSA-N Methyl methacrylate Chemical compound COC(=O)C(C)=C VVQNEPGJFQJSBK-UHFFFAOYSA-N 0.000 description 1
- 229920005372 Plexiglas® Polymers 0.000 description 1
- 238000007792 addition Methods 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 239000003822 epoxy resin Substances 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 230000031700 light absorption Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- 229920000647 polyepoxide Polymers 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
Images
Classifications
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
- H10F39/80—Constructional details of image sensors
- H10F39/806—Optical elements or arrangements associated with the image sensors
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
- H10F39/011—Manufacture or treatment of image sensors covered by group H10F39/12
- H10F39/024—Manufacture or treatment of image sensors covered by group H10F39/12 of coatings or optical elements
Definitions
- the invention belongs to the technical field of semiconductors, and in particular relates to a packaging structure and a packaging method.
- a photosensitive chip is an electronic device that senses external light and converts it into electrical signals.
- Photosensitive chips are usually fabricated using semiconductor manufacturing processes. After the photosensitive chip is fabricated, a series of packaging processes are performed on the photosensitive chip to form a packaged package structure for use in electronic devices such as digital cameras and digital video cameras.
- the packaging structure of the photosensitive chip in the prior art includes a transparent cover plate, and the transparent cover plate is used to protect the optical area of the photosensitive chip and can transmit light.
- the transparent cover plate has vertical sidewalls, and the sidewalls have the problem of incident light reflection.
- the reflected light of different angles will be reflected to the optical area, which will interfere with the effective direct light entering the optical area and affect the Imaging effect.
- An embodiment of the present invention provides a packaging structure and method for solving the technical problems in the prior art that the sidewall of the light-transmitting cover plate reflects incident light, interferes with effective direct light entering the optical zone, and affects the imaging effect, including:
- a package structure includes:
- a chip unit with opposing front and back sides, the front side of which has a sensing area
- the plastic sealing layer shields the side wall of the light-transmitting cover plate from light in the direction perpendicular to the sensing area, and exposes the area opposite to the sensing area.
- the side wall of the light-transmitting cover plate is an inclined plane
- the plastic sealing layer is combined with the inclined surface.
- a step portion is formed on the peripheral edge of the light-transmitting cover plate
- the plastic encapsulation layer is filled on the stepped portion.
- the plastic sealing layer does not protrude from the surface of the light-transmitting cover plate facing away from the chip unit.
- the light-transmitting cover plate is supported on the surface of the chip unit by a supporting structure,
- the sensing area is located in the cavity enclosed by the support structure.
- a circuit board is further included, and the back surface of the chip unit is attached and fixed on the circuit board,
- the bonding pads of the chip unit and the circuit board are electrically connected through metal leads,
- the plastic packaging layer is arranged on the surface of the circuit board on which the chip unit is fixed, and surrounds the chip unit and the metal leads.
- the light-transmitting cover plate is dry film, inorganic glass or organic glass.
- the present application also provides a packaging method for a packaging structure, including:
- the chip unit and the light-transmitting cover plate are plastic-sealed, and the formed plastic-sealing layer shields the sidewall of the light-transmitting cover plate from light in the direction perpendicular to the sensing area, and exposes the area opposite to the sensing area.
- the present application also provides a packaging method for a packaging structure, including:
- the wafer has a plurality of the chip units
- a light-transmitting cover plate is provided, and the light-transmitting cover plate covers the front surface of the chip unit;
- the wafer and the light-transmitting cover plate are cut to form a plurality of single-grain packaging structures
- the single-particle packaging structure is plastic-sealed, and the formed plastic-sealing layer shields the sidewall of the light-transmitting cover plate from light in a direction perpendicular to the sensing area, and exposes an area opposite to the sensing area.
- the circuit board is cut to form a plurality of single-particle packages.
- the side wall of the light-transmitting cover plate is shielded by the plastic sealing layer, so as to avoid the reflection of incident light, interfere with the sensing area, and affect the imaging effect.
- Embodiment 1 is a cross-sectional view of a package structure in Embodiment 1 of the present application;
- Embodiment 2 is a cross-sectional view of a package structure in Embodiment 2 of the present application.
- 3 to 8 are schematic diagrams of intermediate structures formed by the packaging structure in Embodiment 1 of the present application.
- a package structure 10 including a chip unit 11 , a light-transmitting cover plate 12 , a circuit board 13 and a plastic sealing layer 16 .
- the chip unit 11 has opposite front surfaces 111 and back surfaces 112 , the front surface has a sensing area 113 , and the front surface 111 of the chip unit 11 is provided with pads 114 located outside the sensing area 113 .
- the chip unit 11 is a photosensitive chip, which may be a fingerprint sensor chip, an image sensor chip, or the like.
- the light-transmitting cover plate 12 covers the front surface 111 of the chip unit 11 for protecting the front surface of the chip unit 11 to be packaged. Since light needs to pass through the light-transmitting cover plate 12 to reach the sensing area 113 , the light-transmitting cover plate 12 has high light transmittance and is a light-transmitting material. Both surfaces of the light-transmitting cover plate 12 are flat and smooth, and will not cause scattering or diffuse reflection of incident light.
- the material of the light-transmitting cover plate 12 may be dry film, inorganic glass, plexiglass or other light-transmitting materials with specific strength, and the transmittance needs to reach more than 92%.
- the light-transmitting cover plate 12 is supported on the front surface of the chip unit 11 by the support structure 14 , a cavity 114 is enclosed between the support structure 14 , the light-transmitting cover plate 12 and the chip unit 11 , and the sensing area 113 is formed in the inside the cavity 114 .
- the light-transmitting cover plate 12 can also be pasted and fixed with the chip unit through an optical adhesive layer (not shown), and the optical adhesive layer has high light transmittance.
- an encapsulation structure that can form no cavity is adopted, and the plastic encapsulation mold can directly act on the transparent cover plate.
- the circuit board 13 is used to connect external circuits.
- the backside of the chip unit 11 is glued to one surface of the circuit board 13 , and the other surface of the circuit board 13 is provided with solder balls 131 electrically connected to the external circuit.
- the bonding pads 114 of the chip unit 11 and the circuit board 13 are electrically connected through metal leads 15 .
- connection between the pads and the outside can also be realized by means of through silicon vias.
- the chip unit 11 is further provided with: through holes extending from the back side 112 of the chip unit 11 to the front side 111 (not shown in the figure). shown), the through hole exposes the pad 114, the pad 114 is electrically connected to the solder ball 131 through a metal wiring layer (not shown), and the chip unit 11 and other external circuits are electrically connected by the solder ball 131 and other external circuits. electrical connection.
- the plastic sealing layer 16 is formed by injection molding, which shields the sidewall of the light-transmitting cover plate 12 in the direction perpendicular to the sensing area 113 and exposes the area opposite to the sensing area 113 .
- the plastic sealing layer 16 shields the side wall of the light-transmitting cover plate 12 , which can minimize the incidence of external light on the side wall of the light-transmitting cover plate 12 .
- the plastic encapsulation layer 16 also surrounds the pads 114 and the metal leads 15 .
- the plastic sealing layer 16 can cover the side wall 121 of the light-transmitting cover plate 12 , it can play a role of reflecting the light incident on the side wall 121 of the light-transmitting cover plate 12 .
- the material of the plastic sealing layer 16 may be epoxy resin molding compound.
- the plastic encapsulation layer 16 is a black plastic encapsulation layer.
- the plastic encapsulation layer 16 does not protrude from the surface of the transparent cover plate away from the chip unit.
- the surface of the plastic encapsulation layer and the light incident surface of the transparent cover plate are located on the same plane.
- the side wall 121 of the light-transmitting cover plate 12 is an inclined plane, and the inclined plane is along the vertical direction away from the photosensitive chip. direction, gradually approaching the sensing area 113 .
- the specific position of the projected edge of the plastic sealing layer 16 on the chip unit 11 is not limited.
- a stepped portion 122 is formed on the peripheral edge of the light-transmitting cover plate 12 , and the plastic sealing layer 16 is filled on the stepped portion 122 . cover the face.
- the specific position of the projected edge of the plastic sealing layer 16 on the chip unit 11 is not limited.
- the thickness of the step portion 122 in the direction perpendicular to the photosensitive region 113 should be as small as possible.
- an embodiment of the present invention provides a packaging method for forming a packaging structure as shown in FIG. 1 .
- FIG. 3 to FIG. 7 are schematic diagrams of intermediate structures formed during the packaging process of the packaging method according to the embodiment of the present invention.
- Step s1 Referring to FIGS. 3 and 4 , provide a wafer to be packaged, wherein FIG. 3 is a schematic top view of the wafer to be packaged, and FIG. 4 is a cross-sectional view along A-A of FIG. 3 (a single chip unit is an example).
- the wafer to be packaged has a front side 111 and a back side 112 opposite the front side 111 .
- the wafer 100 includes a plurality of chip units 11 arranged in an array. There are dicing channels 110 between adjacent chip units 11 to facilitate dicing in the subsequent dicing process.
- the front surface 111 includes a sensing area 113 and a non-sensing area surrounding the sensing area, and a pad 114 is disposed in the non-sensing area.
- the cutting channel 110 between two adjacent chip units 11 is only a blank area reserved for cutting between the two chip units 11 , and the cutting channel 110 is connected to the chip units 11 on both sides. There is no actual boundary line in between.
- Step s2 as shown in FIG. 5 , a light-transmitting cover plate 12 is provided, a plurality of supporting structures 14 are formed on a surface of the light-transmitting cover plate 12 , and then the supporting structures 14 and the front surface 111 of the chip unit 11 are bonded combine.
- Step s3 as shown in FIG. 6 , the bonding pads 114 on the chip unit 11 are exposed by cutting or cutting and etching, and then the wafer 100 is divided by the cutting process. When cutting, along the cutting channel 110 The cutting is carried out in the direction to form a plurality of package structures 10 .
- the wafer 100 can be cut by a dicing knife or a laser, and the dicing knife can be cut by a metal knife or a resin knife.
- the light-transmitting cover plate may be cut by a special-shaped blade to form the inclined side wall 121 shown in FIG. 1 .
- the light-transmitting cover plate can be cut by blades of different widths to form the stepped portion 122 structure shown in FIG. 2 .
- Step s4 as shown in FIG. 7 , a circuit board 13 is provided, and the circuit board 13 has opposite front and back.
- the front side is used to fix the chip unit 11 .
- the back side of the chip unit 11 is arranged to face the front side of the circuit board 13 .
- the backside of the circuit board 13 has solder balls 131 , and the solder balls 131 are used for connection with external circuits.
- An interconnection circuit is provided in the circuit board 13 , and the interconnection circuit is connected to the solder balls 131 .
- the chip unit 11 and the circuit board 13 can be fixed by bonding through an adhesive layer, or fixed by welding through a welding process.
- the chip unit 11 is electrically connected to the circuit board 13 through metal leads 15 .
- the electrical connection between the chip unit 11 and the circuit board 13 is not limited to the connection of the metal leads 15 .
- An interconnection structure may also be formed on the surface of the chip unit 11 through a TSV (through silicon via) process, and the electrical connection of the circuit board 13 is directly performed through the interconnection structure.
- Step s5 injection molding is performed on the sidewall of the light-transmitting cover plate, the exposed pads 114 and the metal leads 15 .
- Step s6 The circuit board 13 is cut and divided into individual packages, as shown in FIG. 1 and FIG. 2 .
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Abstract
Description
本发明属于半导体技术领域,具体涉及一种封装结构和封装方法。The invention belongs to the technical field of semiconductors, and in particular relates to a packaging structure and a packaging method.
感光芯片是一种能够感受外部光线并将其转换为电信号的电子器件。感光芯片通常采用半导体制造工艺进行芯片制作。在感光芯片制作完成后,再通过对感光芯片进行一系列封装工艺从而形成封装好的封装结构,以用于诸如数码相机、数码摄像机等的电子设备中。A photosensitive chip is an electronic device that senses external light and converts it into electrical signals. Photosensitive chips are usually fabricated using semiconductor manufacturing processes. After the photosensitive chip is fabricated, a series of packaging processes are performed on the photosensitive chip to form a packaged package structure for use in electronic devices such as digital cameras and digital video cameras.
现有技术中的感光芯片的封装结构包括透明盖板,透明盖板用于对感光芯片的光学区域进行保护并可以透光。The packaging structure of the photosensitive chip in the prior art includes a transparent cover plate, and the transparent cover plate is used to protect the optical area of the photosensitive chip and can transmit light.
但在现有的感光芯片具体使用过程中,透明盖板具有垂直的侧壁,侧壁存在入射光反射问题,不同角度的反射光会反射到光学区域,干扰有效直射光进入到光学区,影响成像效果。However, in the specific use process of the existing photosensitive chip, the transparent cover plate has vertical sidewalls, and the sidewalls have the problem of incident light reflection. The reflected light of different angles will be reflected to the optical area, which will interfere with the effective direct light entering the optical area and affect the Imaging effect.
发明内容SUMMARY OF THE INVENTION
本发明一实施例提供一种封装结构和方法,用于解决现有技术中透光盖板的侧壁存在入射光反射、干扰有效直射光进入到光学区,影响成像效果的技术问题,包括:An embodiment of the present invention provides a packaging structure and method for solving the technical problems in the prior art that the sidewall of the light-transmitting cover plate reflects incident light, interferes with effective direct light entering the optical zone, and affects the imaging effect, including:
一实施例中,一种封装结构,包括:In one embodiment, a package structure includes:
芯片单元,具有相对的正面和背面,其正面具有感应区域;A chip unit, with opposing front and back sides, the front side of which has a sensing area;
透光盖板,覆盖所述芯片单元的正面;a light-transmitting cover plate covering the front side of the chip unit;
塑封层,在垂直所述感应区域的方向上对所述透光盖板的侧壁进行遮光,并暴露出与所述感应区域相对的区域。The plastic sealing layer shields the side wall of the light-transmitting cover plate from light in the direction perpendicular to the sensing area, and exposes the area opposite to the sensing area.
优选的,在上述的封装结构中,所述透光盖板的侧壁为斜面,Preferably, in the above-mentioned packaging structure, the side wall of the light-transmitting cover plate is an inclined plane,
所述塑封层结合于所述斜面上。The plastic sealing layer is combined with the inclined surface.
优选的,在上述的封装结构中,所述透光盖板的四周边缘开设形成有台阶部,Preferably, in the above-mentioned packaging structure, a step portion is formed on the peripheral edge of the light-transmitting cover plate,
所述塑封层填充于所述台阶部上。The plastic encapsulation layer is filled on the stepped portion.
优选的,在上述的封装结构中,所述塑封层不凸伸出所述透光盖板背离所述芯片单元的表面。Preferably, in the above-mentioned packaging structure, the plastic sealing layer does not protrude from the surface of the light-transmitting cover plate facing away from the chip unit.
优选的,在上述的封装结构中,所述透光盖板通过支撑结构支撑于所述芯片单元的表面,Preferably, in the above-mentioned packaging structure, the light-transmitting cover plate is supported on the surface of the chip unit by a supporting structure,
所述感应区域位于所述支撑结构围成的空腔内。The sensing area is located in the cavity enclosed by the support structure.
优选的,在上述的封装结构中,还包括一电路板,所述芯片单元的背面贴合固定于所述电路板上,Preferably, in the above-mentioned packaging structure, a circuit board is further included, and the back surface of the chip unit is attached and fixed on the circuit board,
所述芯片单元的焊垫与电路板之间通过金属引线电性连接,The bonding pads of the chip unit and the circuit board are electrically connected through metal leads,
所述塑封层设置在所述电路板固定所述芯片单元的表面,并对芯片单元和金属引线进行包围。The plastic packaging layer is arranged on the surface of the circuit board on which the chip unit is fixed, and surrounds the chip unit and the metal leads.
优选的,在上述的封装结构中,所述透光盖板为干膜、无机玻璃或有机玻璃。Preferably, in the above-mentioned packaging structure, the light-transmitting cover plate is dry film, inorganic glass or organic glass.
另一实施例中,本申请还提供了一种封装结构的封装方法,包括:In another embodiment, the present application also provides a packaging method for a packaging structure, including:
提供所述的芯片单元;providing the chip unit;
将透光盖板覆盖所述芯片单元的正面;Covering the front surface of the chip unit with a light-transmitting cover plate;
对芯片单元和透光盖板进行塑封,所形成的塑封层在垂直所述感应区域的方向上对所述透光盖板的侧壁进行遮光,并暴露出与所述感应区域相对的区域。The chip unit and the light-transmitting cover plate are plastic-sealed, and the formed plastic-sealing layer shields the sidewall of the light-transmitting cover plate from light in the direction perpendicular to the sensing area, and exposes the area opposite to the sensing area.
另一实施例中,本申请还提供了一种封装结构的封装方法,包括:In another embodiment, the present application also provides a packaging method for a packaging structure, including:
提供一晶圆,该晶圆具有多个所述的芯片单元;providing a wafer, the wafer has a plurality of the chip units;
提供一透光盖板,将该透光盖板覆盖所述芯片单元的正面;A light-transmitting cover plate is provided, and the light-transmitting cover plate covers the front surface of the chip unit;
通过切割工艺,切割所述晶圆和透光盖板,形成多个单粒的封装结构;Through a cutting process, the wafer and the light-transmitting cover plate are cut to form a plurality of single-grain packaging structures;
对单粒的封装结构进行塑封,所形成的塑封层在垂直所述感应区域的方向上对所述透光盖板的侧壁进行遮光,并暴露出与所述感应区域相对的区域。The single-particle packaging structure is plastic-sealed, and the formed plastic-sealing layer shields the sidewall of the light-transmitting cover plate from light in a direction perpendicular to the sensing area, and exposes an area opposite to the sensing area.
优选的,在上述的封装结构的封装方法中,还包括:Preferably, in the above-mentioned encapsulation method of the encapsulation structure, further comprising:
将多颗单粒的封装结构粘合在电路板上,然后再对单粒的封装结构进行塑封;Adhere the multi-grain single-grain encapsulation structure to the circuit board, and then plastic-encapsulate the single-grain encapsulation structure;
以及在塑封后,切割电路板形成多个单粒的封装体。And after plastic sealing, the circuit board is cut to form a plurality of single-particle packages.
与现有技术相比,本案通过在注塑过程中,通过塑封层对透光盖板的侧壁进行遮挡,避免入射光反射、干扰感应区域,影响成像效果。Compared with the prior art, in this case, during the injection molding process, the side wall of the light-transmitting cover plate is shielded by the plastic sealing layer, so as to avoid the reflection of incident light, interfere with the sensing area, and affect the imaging effect.
为了更清楚地说明本申请实施例或现有技术中的技术方案,下面将对实施例或现有技术描述中所需要使用的附图作简单地介绍,显而易见地,下面描述中的附图仅仅是本申请中记载的一些实施例,对于本领域普通技术人员来讲,在不付出创造性劳动的前提下,还可以根据这些附图获得其他的附图。In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the following briefly introduces the accompanying drawings required for the description of the embodiments or the prior art. Obviously, the drawings in the following description are only These are some embodiments described in this application. For those of ordinary skill in the art, other drawings can also be obtained based on these drawings without any creative effort.
图1是本申请实施方式1中封装结构的剖视图;1 is a cross-sectional view of a package structure in Embodiment 1 of the present application;
图2是本申请实施方式2中封装结构的剖视图;2 is a cross-sectional view of a package structure in Embodiment 2 of the present application;
图3至8是本申请实施方式1中封装结构所形成的中间结构的示意图。3 to 8 are schematic diagrams of intermediate structures formed by the packaging structure in Embodiment 1 of the present application.
通过应连同所附图式一起阅读的以下具体实施方式将更完整地理解本发明。本文中揭示本发明的详细实施例;然而,应理解,所揭示的实施例仅具本发明的示范性,本发明可以各种形式来体现。因此,本文中所揭示的特定功能细节不应解释为具有限制性,而是仅解释为权利要求书的基础且解释 为用于教示所属领域的技术人员在事实上任何适当详细实施例中以不同方式采用本发明的代表性基础。The present invention will be more fully understood from the following detailed description, which should be read in conjunction with the accompanying drawings. Detailed embodiments of the present invention are disclosed herein; however, it is to be understood that the disclosed embodiments are merely exemplary of the invention, which may be embodied in various forms. Therefore, specific functional details disclosed herein are not to be interpreted as limiting, but merely as a basis for the claims and for teaching one skilled in the art to vary in virtually any suitable detailed embodiment. The manner adopts the representative basis of the present invention.
结合图1所示,本申请一实施例中,提供了一种封装结构10,包括芯片单元11、透光盖板12、电路板13和塑封层16。With reference to FIG. 1 , in an embodiment of the present application, a
结合图4所示,芯片单元11具有相对的正面111和背面112,其正面具有感应区域113,芯片单元11的正面111设置有位于感应区域113之外的焊垫114。Referring to FIG. 4 , the
芯片单元11为感光芯片,可以为指纹传感芯片、影像传感芯片等。The
透光盖板12覆盖芯片单元11的正面111,用于对待封装芯片单元11的正面进行保护。由于需要光线透过透光盖板12到达感应区域113,因此,透光盖板12具有较高的透光性,为透光材料。透光盖板12两个表面均平整、光滑,不会对入射光线产生散射、漫反射等。The light-transmitting
具体地,透光盖板12的材料可以为干膜、无机玻璃、有机玻璃或者其他具有特定强度的透光材料,透过率需要达到92%以上。Specifically, the material of the light-transmitting
在一实施例中,透光盖板12通过支撑结构14支撑于芯片单元11的正面,在支撑结构14、透光盖板12和芯片单元11之间围成空腔114,感应区域113形成于所述空腔114内。In one embodiment, the light-transmitting
在另一实施例中,透光盖板12也可以通过光学胶层(图未示)与芯片单元之间无间隙贴合固定,光学胶层具有高透光率。该实施例中,采用可以形成无空腔的封装结构,塑封模具可以直接作用在透明盖板上。In another embodiment, the light-transmitting
电路板13用于连接外部电路,芯片单元11的背面粘合在电路板13的一表面上,电路板13的另一表面上设置有与外部电路电性连接的焊球131。芯片单元11的焊垫114与电路板13之间通过金属引线15电性连接。The
在另一实施例中,还可以通过硅通孔的方式实现焊垫与外部连接,具体地,芯片单元11上还设置有:从芯片单元11的背面112向正面111延伸的通孔(图未示),通孔暴露出焊垫114,焊垫114通过金属布线层(图未示)与焊球131实现电连接,且利用焊球131与外部其他电路电连接实现芯片单元11与外部其他电路的电连接。In another embodiment, the connection between the pads and the outside can also be realized by means of through silicon vias. Specifically, the
塑封层16通过注塑方式形成,其在垂直感应区域113的方向上对透光盖板12的侧壁进行遮光,并暴露出与所述感应区域113相对的区域。The
本案中,塑封层16对透光盖板12的侧壁进行遮挡,可以尽量减少外部光线入射在透光盖板12的侧壁上。同时,塑封层16还对焊垫114、金属引线15进行包围。In this case, the
塑封层16只要能够覆盖透光盖板12侧壁121即可起到对入射至透光盖板12的侧壁121上的光进行反射的作用。As long as the
塑封层16的材质为可以为环氧树脂模塑料。尤其,为了增加塑封层16对光的反射和吸收作用,可选的,塑封层16为黑色塑封层。The material of the
为了提高封装效果,塑封层16不凸伸出所述透光盖板背离所述芯片单元的表面,在优选的实施例中,塑封层的表面和透光盖板的入光面位于同一平面。In order to improve the encapsulation effect, the
为了实现上述目的,满足遮光效果,且不提高注塑成本,结合图1所示,在第一实施例中,透光盖板12侧壁121为斜面,该斜面在沿远离所述感光芯片的垂直方向上,逐渐靠近感应区域113。In order to achieve the above purpose, satisfy the shading effect, and not increase the cost of injection molding, as shown in FIG. 1 , in the first embodiment, the
第一实施例中,不限定塑封层16在芯片单元11上的投影边缘的具体位置,当塑封层16在芯片单元11上的投影朝向感应区域113的边缘距离感应区域113越近时,透光盖板12侧壁121越倾斜,则入射至透光盖板12侧壁121的光线越少,因此,本实施例中塑封层16在芯片单元11上的投影朝向感应区域113的边缘距离感应区域113的边缘越近越好。In the first embodiment, the specific position of the projected edge of the
参图2所示,在第二实施例中,透光盖板12的四周边缘开设形成有台阶部122,塑封层16填充于所述台阶部122上,塑封层16可以对台阶部122的顶面进行遮挡。Referring to FIG. 2 , in the second embodiment, a stepped
第二实施例中,不限定塑封层16在芯片单元11上的投影边缘的具体位置,当塑封层16在芯片单元11上的投影朝向感应区域113的边缘距离感应区域113越近时,台阶部122在水平方向的长度越长,则入射至透光盖板12侧壁121的光线越少。In the second embodiment, the specific position of the projected edge of the
需要说明的是,台阶部122在垂直于感光区域113的方向上的厚度应越小越好。It should be noted that, the thickness of the
对应地,本发明实施例提供了一种封装方法,用于形成如图1所示的封装结构。请参考图3至图7,为本发明实施例的封装方法的封装过程中形成的中间结构示意图。Correspondingly, an embodiment of the present invention provides a packaging method for forming a packaging structure as shown in FIG. 1 . Please refer to FIG. 3 to FIG. 7 , which are schematic diagrams of intermediate structures formed during the packaging process of the packaging method according to the embodiment of the present invention.
步骤s1:参考图3和4,提供待封装晶圆,其中,图3为待封装晶圆的俯视结构示意图,图4为图3沿A-A的剖视图(单个芯片单元为例)。Step s1 : Referring to FIGS. 3 and 4 , provide a wafer to be packaged, wherein FIG. 3 is a schematic top view of the wafer to be packaged, and FIG. 4 is a cross-sectional view along A-A of FIG. 3 (a single chip unit is an example).
待封装晶圆具有正面111和与正面111相对的背面112。晶圆100包括多个阵列排布的芯片单元11。相邻芯片单元11之间具有切割沟道110,以便于在后续切割工艺中进行切割处理。The wafer to be packaged has a
正面111包括感应区域113以及包围感应区的非感应区,在非感应区设置有焊垫114。The
需要说明的是,相邻两个芯片单元11之间的切割沟道110仅为两个芯片单元11之间预留的用于切割的留白区域,切割沟道110与两侧的芯片单元11之间不具有实际的边界线。It should be noted that the cutting
步骤s2:结合图5所示,提供一透光盖板12,在透光盖板12的一表面上形成多个支撑结构14,然后将支撑结构14与芯片单元11的正面111之间进行键合。Step s2 : as shown in FIG. 5 , a light-transmitting
步骤s3:结合图6所示,通过切割或切割加刻蚀的方式暴露出芯片单元11上的焊垫114,然后再通过切割工艺分割晶圆100,在进行切割时,沿着切割沟道110的方向进行切割,形成多个封装结构10。晶圆100切割可以采用切片刀切割或者激光切割,切片刀切割可以采用金属刀或者树脂刀。Step s3 : as shown in FIG. 6 , the
其中,可以通过异型刀片对透光盖板进行切割,以形成图1所示倾斜的侧壁121。Wherein, the light-transmitting cover plate may be cut by a special-shaped blade to form the
可以通过不同宽度的刀片对透光盖板进行切割,以形成图2所示的台阶 部122结构。The light-transmitting cover plate can be cut by blades of different widths to form the stepped
步骤s4:结合图7所示,提供一电路板13,将电路板13具有相对的正面以及背面。所述正面用于固定芯片单元11。具体的,将芯片单元11的背面朝向电路板13的正面设置。电路板13的背面具有焊球131,所述焊球131用于和外部电路连接。电路板13内设置有互联电路,互联电路与所述焊球131连接。Step s4 : as shown in FIG. 7 , a
芯片单元11与电路板13之间可以通过胶层贴合固定,或是通过焊接工艺焊接固定。The
然后,将芯片单元11通过金属引线15与所述电路板13电连接。Then, the
其中,所述芯片单元11与所述电路板13的电连接方式不局限于金属引线15连接。还可以通过TSV(硅通孔)工艺在芯片单元11的表面形成互联结构,直接通过该互联结构所述电路板13的电连接。Wherein, the electrical connection between the
步骤s5:结合图8所示,对透光盖板的侧壁、暴露出的焊垫114和金属引线15进行注塑处理。Step s5 : as shown in FIG. 8 , injection molding is performed on the sidewall of the light-transmitting cover plate, the exposed
步骤s6:对电路板13进行切割,分割成单颗的封装体,参图1和图2所示。Step s6: The
本发明的各方面、实施例、特征及实例应视为在所有方面为说明性的且不打算限制本发明,本发明的范围仅由权利要求书界定。在不背离所主张的本发明的精神及范围的情况下,所属领域的技术人员将明了其它实施例、修改及使用。The aspects, embodiments, features, and examples of the present invention are to be considered in all respects illustrative and not intended to limit the invention, the scope of which is defined only by the claims. Other embodiments, modifications, and uses will be apparent to those skilled in the art without departing from the spirit and scope of the claimed invention.
除非另外具体陈述,否则术语“包含(include、includes、including)”、“具有(have、has或having)”的使用通常应理解为开放式的且不具限制性。The use of the terms "include, includes, including," "have, has, or having" should generally be understood to be open-ended and not limiting unless specifically stated otherwise.
除非另外具体陈述,否则本文中单数的使用包含复数(且反之亦然)。此外,除非上下文另外清楚地规定,否则单数形式“一(a、an)”及“所述(the)”包含复数形式。另外,在术语“约”的使用在量值之前之处,除非另外具体陈述,否则本发明教示还包括特定量值本身。The use of the singular herein includes the plural (and vice versa) unless specifically stated otherwise. Also, the singular forms "a (a, an)" and "the (the)" include the plural forms unless the context clearly dictates otherwise. Additionally, where the use of the term "about" precedes a magnitude, the teachings of the present invention also include the particular magnitude itself, unless specifically stated otherwise.
应理解,各步骤的次序或执行特定动作的次序并非十分重要,只要本发明教示保持可操作即可。此外,可同时进行两个或两个以上步骤或动作。It should be understood that the order of the steps or the order in which the particular actions are performed is not critical so long as the present teachings remain operable. Furthermore, two or more steps or actions may be performed simultaneously.
尽管已参考说明性实施例描述了本发明,但所属领域的技术人员将理解,在不背离本发明的精神及范围的情况下可做出各种其它改变、省略及/或添加且可用实质等效物替代所述实施例的元件。另外,可在不背离本发明的范围的情况下做出许多修改以使特定情形或材料适应本发明的教示。因此,本文并不打算将本发明限制于用于执行本发明的所揭示特定实施例,而是打算使本发明将包含归属于所附权利要求书的范围内的所有实施例。此外,除非具体陈述,否则术语第一、第二等的任何使用不表示任何次序或重要性,而是使用术语第一、第二等来区分一个元素与另一元素。Although the present invention has been described with reference to illustrative embodiments, those skilled in the art will understand that various other changes, omissions and/or additions and the like may be made without departing from the spirit and scope of the invention Effects replace elements of the described embodiments. In addition, many modifications may be made to adapt a particular situation or material to the teachings of the invention without departing from its scope. Therefore, it is not intended herein to limit the invention to the particular embodiments disclosed for carrying out the invention, but it is intended that this invention include all embodiments falling within the scope of the appended claims. Furthermore, unless specifically stated, any use of the terms first, second, etc. does not denote any order or importance, but rather the terms first, second, etc. are used to distinguish one element from another.
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