WO2021208439A1

WO2021208439A1 - Non-contact height measurement device for dicing machine

Info

Publication number: WO2021208439A1
Application number: PCT/CN2020/130729
Authority: WO
Inventors: 杨云龙; 于光明; 胡章坤
Original assignee: 江苏京创先进电子科技有限公司
Priority date: 2020-04-16
Filing date: 2020-11-23
Publication date: 2021-10-21
Also published as: CN111618724A

Abstract

A non-contact height measurement device (10) for a dicing machine. The non-contact height measurement device (10) is mounted on a dicing machine mounting plate (20). The non-contact height measurement device (10) comprises a horizontal push mechanism mounting block (1) and a non-contact height measurement assembly (10) separately mounted on the dicing machine mounting plate (20). A horizontal push mechanism (5) is mounted on the horizontal push mechanism mounting block (1). A power output end of the horizontal push mechanism (5) is connected to a protective cover (3) having a side opening. The non-contact height measurement assembly (10) is fixedly mounted on a non-contact height measurement mounting plate (4). A side surface of the non-contact height measurement mounting plate (4) and the protective cover (3) engage with each other to form a sealed protective cover for protecting the non-contact height measurement assembly (10). The protective cover (3) can be pushed and moved horizontally relative to the dicing machine mounting plate (20) so as to open or close the sealed protective cover. The invention avoids the issue of the prior art in which splashing of accumulated water occurs with a flip-type protective cover. In addition, the sealed protective cover is opened by means of horizontal pushing, thereby facilitating operation, and ensuring that the operation is stable and reliable.

Description

Non-contact height measuring device for dicing machine

Technical field

The invention relates to the manufacturing field of a dicing machine, in particular to a non-contact height measuring device for a dicing machine.

Background technique

The dicing machine is a key equipment for post-semiconductor packaging. Its function is to divide the device into individual circuit units or separate large-size materials into small-size materials. During the cutting process, the Z-bearing bearing air static pressure spindle drives the grinding wheel blade to perform scribing. As the processing progresses, the blade is constantly worn. In order to ensure that the relative position of the Z axis and the processed material remains unchanged, it is necessary to measure the height of the grinding wheel blade during the cutting process.

In the prior art, a non-contact height measuring device is used to meet the height measurement function of the dicing machine in the cutting process. The working principle of the non-contact height measuring device is: by installing two opposite beam optical fiber sensors on a fixed block, When in use, turn the cylinder to open the protective cover that protects the optical fiber sensor. The spray rod is aligned with the surface of the optical fiber, and the cleaning fluid and compressed air are respectively flushed out to clean the sensor surface. When not in use, the cylinder is turned over to close the protective cover. Since the dicing machine needs water to cool during the cutting process, water droplets will adhere to the air static pressure spindle, so there will be a lot of water mist in the cutting cavity of the dicing machine, so when the protective cover is turned over and opened, there will be a part of the cover. Cooling water causes the water in the cover to splash around when the protective cover is closed. In addition, due to the restriction of the flip mechanism and the structure and opening method of the protective cover, there are often problems such as the protective cover cannot be opened or the cover body is deformed. The performance is unstable, which seriously affects the use of the dicing machine.

Therefore, the applicant hopes to require a new non-contact height measuring device for a dicing machine to solve the above technical problems.

Summary of the invention

In view of this, the purpose of the present invention is to provide a non-contact height measuring device for a dicing machine to avoid the problem of water splashing around in the flip-type protective cover in the prior art. At the same time, the present invention uses a horizontal push motion to open and close. The protective cover is simple and convenient, and the working process is stable and reliable.

The technical scheme adopted by the present invention is as follows:

A non-contact height measuring device for a dicing machine includes a dicing machine mounting plate located below the grinding wheel blade, and a non-contact height measuring device is installed on the dicing machine mounting plate; the non-contact height measuring device includes separately installed The horizontal pushing mechanism mounting block and the non-contact height measuring assembly on the mounting plate of the dicing machine, the horizontal pushing mechanism mounting block is mounted with a horizontal pushing mechanism, and the power output end of the horizontal pushing mechanism is installed and connected with a side opening The protective cover of the non-contact height measurement component is fixedly mounted on the non-contact height measurement mounting plate, and the side surface of the non-contact height measurement mounting plate is matched with the protective cover to form a protection for the non-contact height measurement component The closed protective cover; the protective cover can be horizontally pushed and displaced horizontally relative to the dicing machine mounting plate to realize the opening and closing of the closed protective cover.

Preferably, the horizontal pushing mechanism includes an air cylinder mounted on the mounting block of the horizontal pushing mechanism, and the output end of the air cylinder is fixedly connected with a protective cover for driving the protective cover to perform a horizontal horizontal pushing displacement.

Preferably, the output end of the cylinder is installed and connected to the protective cover through a flat push guide mounting block, wherein the flat push guide mounting block adopts a first flat push guide mounting part and a second flat push guide mounting part that are integrally connected to form an L shape. The horizontal push guide installation part, the first horizontal push guide installation part is fixedly installed on the inner surface of the protective cover, and the second horizontal push guide installation part is fixedly installed on the inner surface of the protective cover.

Preferably, the second flat push guide mounting portion is in sliding contact and fit with the side guide of the cylinder.

Preferably, a sensor for identifying that the enclosed protective cover is in an open or closed state is installed on the horizontal pushing mechanism.

Preferably, the horizontal pushing mechanism mounting block includes a connecting rod fixedly installed on the dicing machine mounting plate, a transition connecting block is fixedly installed on the connecting rod, and the flat pushing mechanism is installed on the transition connecting block .

Preferably, the bottom of the non-contact height measurement mounting plate is fixedly mounted on the dicing machine mounting plate.

Preferably, the non-contact height measurement assembly includes an optical fiber sensor fixing block fixedly installed on the non-contact height measurement mounting plate, and opposite beam optical fiber sensors are installed on both sides of the optical fiber sensor fixing block, and the grinding wheel blade passes through The Z-axis moves between the through-beam optical fiber sensor to realize the non-contact height measurement of the grinding wheel blade.

Preferably, the optical fiber sensor fixing block is further equipped with a cleaning liquid spray rod and a compressed air spray rod respectively, which are respectively used for the cleaning and blowing functions of the opposite-beam type optical fiber sensor.

Preferably, the cleaning fluid spray rod and the compressed air spray rod are respectively provided with a cleaning fluid connector and a compressed air connector, and the cleaning fluid connector and the compressed air connector are respectively supplied with an external cleaning fluid source supply connector and a compressed air source through a connecting pipe Connector connection.

The present invention realizes the selective opening and closing of the enclosed protective cover by setting the horizontal pushing mechanism, so that in actual application, when the non-contact height measuring assembly is required for height measurement, the horizontal pushing displacement of the horizontal pushing mechanism opens and closes The protective cover body, when the height measurement of the non-contact height measurement component is finished or is not working, the closed protective cover body is closed and closed by the horizontal horizontal displacement of the horizontal pushing mechanism to avoid splashing water in the flip-type protective cover in the prior art Problem, at the same time, the present invention adopts a horizontal push movement to open the closed protective cover, which is simple and convenient, and the working process is stable and reliable.

Description of the drawings

Figure 1 is a schematic diagram of the installation structure of the non-contact height measuring device in the specific embodiment of the present invention (hidden part of the protective cover 3);

Fig. 2 is an exploded structure diagram of Fig. 1.

Detailed ways

The embodiment of the invention discloses a non-contact height measuring device for a dicing machine, comprising a dicing machine mounting plate located below the grinding wheel blade, and a non-contact height measuring device is installed on the dicing machine mounting plate; the non-contact height measuring device includes The mounting block of the horizontal pushing mechanism and the non-contact height measuring assembly are respectively installed on the mounting plate of the dicing machine. The mounting block of the horizontal pushing mechanism is equipped with a horizontal pushing mechanism. The power output end of the flat pushing mechanism is installed and connected with a protective cover with side openings The non-contact height measurement component is fixedly installed on the non-contact height measurement mounting plate, and the side of the non-contact height measurement mounting plate corresponds to the protective cover to form a closed protective cover for protecting the non-contact height measurement component; the protective cover is relative to The mounting plate of the dicing machine can be horizontally pushed and displaced horizontally to realize the opening and closing of the enclosed protective cover.

In order to enable those skilled in the art to better understand the technical solutions in the present invention, the following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described The embodiments are only a part of the embodiments of the present invention, rather than all the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative work shall fall within the protection scope of the present invention.

Please refer to Figures 1 and 2, a non-contact height measuring device 10 for a dicing machine, including a dicing machine mounting plate 20 located below the grinding wheel blade (not shown), and the dicing machine mounting plate 20 is installed There is a non-contact height measuring device 10; the non-contact height measuring device 10 includes a horizontal push mechanism mounting block 1 and a non-contact height measuring component 2 respectively installed on the dicing machine mounting plate 20, and a flat push mechanism mounting block 1 is installed The power output end of the pushing mechanism 5 and the horizontal pushing mechanism 5 are installed and connected to the protective cover 3 with side openings. The non-contact height measurement assembly 2 is fixedly installed on the non-contact height measurement mounting plate 4, and the side of the non-contact height measurement mounting plate 4 is connected with The protective cover 3 correspondingly cooperates to form a closed protective cover for protecting the non-contact height measuring component 2; the protective cover 3 can be horizontally pushed and displaced with respect to the dicing machine mounting plate 20 to realize the opening and closing of the closed protective cover ；

Preferably, in this embodiment, the horizontal pushing mechanism 5 includes an air cylinder 51 installed on the mounting block 1 of the horizontal pushing mechanism, and the output end of the air cylinder 51 is fixedly connected to the protective cover 3 for driving the protective cover 3 for lateral horizontal pushing displacement; The output end 51a of the cylinder 51 is installed and connected to the protective cover 3 through a flat push guide mounting block 52, wherein the flat push guide mounting block 52 adopts a first flat push guide mounting portion 52a and a second flat push guide that are integrally connected to form an L-shape Mounting part 52b, the first flat push guide mounting part 52a is fixedly installed on the inner surface of the shield 3, the second flat push guide mounting part 52b is fixedly installed on the inner surface of the shield 3; the second flat push guide mounting part 52b and the cylinder 51 side guide sliding contact coordination, further conducive to the guiding effect of horizontal push;

Preferably, in this embodiment, the horizontal pushing mechanism 5 is equipped with a sensor (a known structure, not shown in the figure) for identifying whether the enclosed protective cover is in an open or closed state, and the installation position of the sensor can be in the protective cover 3. Or on the cylinder 51, this embodiment is not particularly limited. The sensor can ensure that only when the protective cover of the enclosed protective cover is fully closed and the sensor recognizes the fully closed signal, the Z axis will drive the grinding wheel blade to move downward. Non-contact height measurement process;

Preferably, in this embodiment, the horizontal push mechanism mounting block 1 includes a connecting rod 11 fixedly mounted on the dicing machine mounting plate 20, the connecting rod 11 is fixedly mounted with a transition block 12, and the air cylinder 51 is mounted on the transition block 12. On; the bottom of the non-contact height measurement mounting plate 4 is mounted on the dicing machine mounting plate 20 with a limit; the installation structure design of this embodiment is conducive to obtaining more convenient and quick installation, disassembly and maintenance effects;

Preferably, in this embodiment, the non-contact height measurement assembly 2 includes an optical fiber sensor fixing block 21 fixedly installed on the non-contact height measurement mounting plate. The optical fiber sensor fixing block 21 is equipped with opposite beam optical fiber sensors 22 and a grinding wheel. The blade moves through the Z axis to the opposite-beam optical fiber sensor 22 to achieve non-contact height measurement of the grinding wheel blade; the optical fiber sensor fixing block 21 is also equipped with a cleaning liquid spray bar 23 and a compressed air spray bar 24 respectively for opposite shooting For the cleaning and blowing functions of the optical fiber sensor 22, this embodiment separates the cleaning liquid path from the compressed air path, effectively blocking the mixing of the cleaning liquid and air, reducing the blowing phase time, and completing the opposite beam optical fiber sensor After the cleaning of 22, the cleaning liquid on the surface of the opposite-beam optical fiber sensor 22 can be quickly dried by the air blowing function to improve work efficiency;

Preferably, in order to achieve quick installation, in this embodiment, the cleaning fluid spray rod 23 and the compressed air spray rod 24 are respectively provided with a cleaning fluid connector 23a and a compressed air connector 24a, and the cleaning fluid connector 23a and the compressed air connector 24a respectively pass through The connecting pipe (not shown in the figure) is connected to the external cleaning liquid source supply joint and the compressed air source supply joint. The external cleaning liquid source supply joint and the compressed air source supply joint can be directly arranged on the dicing machine mounting board 20.

In this embodiment, the horizontal pushing mechanism 5 is provided to realize the selective opening and closing of the enclosed protective cover, so that in practical applications, when a non-contact height measuring component is required for height measurement, the horizontal pushing mechanism 5 is used for horizontal pushing Displacement opens the enclosed protective cover, and the non-contact height measurement component 2 is exposed. First, the cleaning liquid spray rod 23 is aligned with the opposite shot point of the opposite beam optical fiber sensor 22 to flush out the cleaning liquid, and then the surface of the opposite beam optical fiber sensor 22 is cleaned. The airflow is blown out through the compressed air spray rod 24 to clean the remaining cleaning liquid on the surface of the opposite-beam fiber optic sensor 22; after this process, the Z axis slowly descends, and the grinding wheel blade is slowly lowered to the opposite-beam fiber optic sensor 22 to block The beam of light realizes the non-contact height measurement of the grinding wheel blade, and then slowly lifts it up. After three reciprocations, the Z-axis drives the grinding wheel blade to lift and return to the initial installation height, and the non-contact height measurement component 2 height measurement ends; when non-contact height measurement When the height measurement of the component 2 is finished or in a non-working state, the closed protective cover is closed by the horizontal horizontal displacement of the horizontal pushing mechanism 5 to avoid the problem of water splashing around the flip-type protective cover in the prior art. At the same time, this embodiment adopts The closed protective cover is opened by the horizontal push movement, which is simple and convenient, and the working process is stable and reliable.

For those skilled in the art, it is obvious that the present invention is not limited to the details of the above exemplary embodiments, and the present invention can be implemented in other specific forms without departing from the spirit or basic characteristics of the present invention. Therefore, from any point of view, the embodiments should be regarded as exemplary and non-limiting. The scope of the present invention is defined by the appended claims rather than the above description, and therefore it is intended to fall within the claims. All changes within the meaning and scope of the equivalent elements of are included in the present invention. Any reference signs in the claims should not be regarded as limiting the claims involved.

In addition, it should be understood that although this specification is described in accordance with the implementation manners, not each implementation manner only includes an independent technical solution. This narration in the specification is only for the sake of clarity, and those skilled in the art should regard the specification as a whole The technical solutions in the various embodiments can also be appropriately combined to form other implementations that can be understood by those skilled in the art.

Claims

A non-contact height measuring device for a dicing machine includes a dicing machine mounting plate located below the grinding wheel blade, and a non-contact height measuring device is installed on the dicing machine mounting plate; characterized in that, the non-contact height measuring device The device includes a flat pushing mechanism mounting block and a non-contact height measuring assembly respectively installed on the mounting plate of the dicing machine, a flat pushing mechanism is installed on the flat pushing mechanism mounting block, and the power output end of the flat pushing mechanism is installed A protective cover with side openings is connected, the non-contact height measurement assembly is fixedly mounted on a non-contact height measurement mounting plate, and the side surface of the non-contact height measurement mounting plate corresponds to the protective cover to form a non-contact measurement A closed protective cover for high component protection; the protective cover can be horizontally pushed and displaced horizontally relative to the dicing machine mounting plate to realize the opening and closing of the closed protective cover.
The non-contact height measuring device for a dicing machine according to claim 1, wherein the horizontal pushing mechanism comprises a cylinder mounted on the mounting block of the horizontal pushing mechanism, and the output end of the cylinder is fixedly connected with a protective cover , Used to drive the protective cover for horizontal horizontal push displacement.
The non-contact height measuring device for a dicing machine according to claim 2, wherein the output end of the cylinder is installed and connected to the protective cover through a flat push guide mounting block, wherein the flat push guide mounting block A first flat push guide mounting part and a second flat push guide mounting part that are integrally connected into an L-shaped The guide installation part is fixedly installed on the inner surface of the protective cover.
The non-contact height measuring device for a dicing machine according to claim 3, wherein the second flat push guide mounting portion is in sliding contact and fit with the side guide of the cylinder.
The non-contact height measuring device for a dicing machine according to claim 1, wherein a sensor for identifying that the enclosed protective cover is in an open or closed state is installed on the horizontal pushing mechanism.
The non-contact height measuring device for a dicing machine according to claim 1, wherein the mounting block of the horizontal pushing mechanism comprises a connecting rod fixedly mounted on the mounting plate of the dicing machine, and the connecting rod is fixed A transitional connecting block is installed, and the horizontal pushing mechanism is installed on the transitional connecting block.
The non-contact height measuring device for a dicing machine according to claim 6, wherein the bottom of the non-contact height measuring mounting plate is fixedly mounted on the dicing machine mounting plate.
The non-contact height measuring device for a dicing machine according to claim 1, wherein the non-contact height measuring component comprises an optical fiber sensor fixing block fixedly installed on the non-contact height measuring mounting plate, and the optical fiber On both sides of the sensor fixing block are installed opposite-beam type optical fiber sensors, and the grinding wheel blade is moved between the opposite-beam type optical fiber sensors through the Z axis to realize the non-contact height measurement of the grinding wheel blade.
The non-contact height measuring device for a dicing machine according to claim 8, wherein the optical fiber sensor fixing block is further equipped with a cleaning liquid spray rod and a compressed air spray rod respectively for the opposite-beam optical fiber The cleaning and blowing function of the sensor.
The non-contact height measuring device for a dicing machine according to claim 8, wherein the cleaning fluid spray rod and the compressed air spray rod are respectively provided with a cleaning fluid connector and a compressed air connector, and the cleaning fluid connector and the compressed air The air joints are respectively connected with an external cleaning liquid source supply joint and a compressed air source supply joint through a connecting pipe.