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WO2020141806A3 - 플라즈마 발생 장치 및 그 동작 방법 - Google Patents

플라즈마 발생 장치 및 그 동작 방법 Download PDF

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Publication number
WO2020141806A3
WO2020141806A3 PCT/KR2019/018549 KR2019018549W WO2020141806A3 WO 2020141806 A3 WO2020141806 A3 WO 2020141806A3 KR 2019018549 W KR2019018549 W KR 2019018549W WO 2020141806 A3 WO2020141806 A3 WO 2020141806A3
Authority
WO
WIPO (PCT)
Prior art keywords
induction coil
coil module
discharge induction
generating apparatus
plasma generating
Prior art date
Application number
PCT/KR2019/018549
Other languages
English (en)
French (fr)
Other versions
WO2020141806A2 (ko
Inventor
엄세훈
이윤성
손영훈
박세홍
Original Assignee
인투코어테크놀로지 주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from KR1020180173639A external-priority patent/KR102142867B1/ko
Priority claimed from KR1020190172614A external-priority patent/KR102257146B1/ko
Application filed by 인투코어테크놀로지 주식회사 filed Critical 인투코어테크놀로지 주식회사
Priority to US16/973,994 priority Critical patent/US11532455B2/en
Publication of WO2020141806A2 publication Critical patent/WO2020141806A2/ko
Publication of WO2020141806A3 publication Critical patent/WO2020141806A3/ko
Priority to US18/055,640 priority patent/US11791133B2/en
Priority to US18/465,849 priority patent/US12159766B2/en
Priority to US18/924,866 priority patent/US20250046571A1/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32082—Radio frequency generated discharge
    • H01J37/321—Radio frequency generated discharge the radio frequency energy being inductively coupled to the plasma
    • H01J37/3211—Antennas, e.g. particular shapes of coils
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32082—Radio frequency generated discharge
    • H01J37/32174—Circuits specially adapted for controlling the RF discharge
    • H01J37/32183—Matching circuits
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/32—Processing objects by plasma generation
    • H01J2237/327—Arrangements for generating the plasma
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/32798—Further details of plasma apparatus not provided for in groups H01J37/3244 - H01J37/32788; special provisions for cleaning or maintenance of the apparatus
    • H01J37/32816—Pressure
    • H01J37/32825—Working under atmospheric pressure or higher

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Plasma Technology (AREA)

Abstract

본 발명의 일 실시예에 따른 플라즈마 발생 장치는 유전체 방전 튜브에 배치된 한 쌍의 전극, 초기 방전 유도 코일 모듈, 및 메인 방전 유도 코일 모듈을 포함한다. 초기 방전 유도 코일 모듈 및 메인 방전 유도 코일 모듈은 RF 전원에 연결되고, 상기 RF 전원은 서로 다른 공진 주파수의 RF 전력을 초기 방전 유도 코일 모듈 및 메인 방전 유도 코일 모듈에 각각 제공한다.
PCT/KR2019/018549 2018-12-31 2019-12-27 플라즈마 발생 장치 및 그 동작 방법 WO2020141806A2 (ko)

Priority Applications (4)

Application Number Priority Date Filing Date Title
US16/973,994 US11532455B2 (en) 2018-12-31 2019-12-27 Plasma generating apparatus and method for operating same
US18/055,640 US11791133B2 (en) 2018-12-31 2022-11-15 Plasma generating apparatus and method for operating same
US18/465,849 US12159766B2 (en) 2018-12-31 2023-09-12 Plasma generating apparatus and method for operating same
US18/924,866 US20250046571A1 (en) 2018-12-31 2024-10-23 Plasma generating apparatus and method for operating same

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
KR1020180173639A KR102142867B1 (ko) 2018-12-31 2018-12-31 대기압 플라즈마 발생 장치
KR10-2018-0173639 2018-12-31
KR10-2019-0172614 2019-12-23
KR1020190172614A KR102257146B1 (ko) 2019-12-23 2019-12-23 플라즈마 발생 장치 및 그 동작 방법

Related Child Applications (1)

Application Number Title Priority Date Filing Date
US202016973994A Continuation 2018-12-31 2020-12-10

Publications (2)

Publication Number Publication Date
WO2020141806A2 WO2020141806A2 (ko) 2020-07-09
WO2020141806A3 true WO2020141806A3 (ko) 2020-12-17

Family

ID=71407050

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/KR2019/018549 WO2020141806A2 (ko) 2018-12-31 2019-12-27 플라즈마 발생 장치 및 그 동작 방법

Country Status (2)

Country Link
US (4) US11532455B2 (ko)
WO (1) WO2020141806A2 (ko)

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US10896806B2 (en) * 2016-11-03 2021-01-19 En2Core Technology, Inc. Inductive coil structure and inductively coupled plasma generation system
WO2020141806A2 (ko) 2018-12-31 2020-07-09 인투코어테크놀로지 주식회사 플라즈마 발생 장치 및 그 동작 방법
KR20220168428A (ko) * 2021-06-16 2022-12-23 (주)펨토사이언스 유도 결합형 플라즈마 생성 장치
WO2023081110A1 (en) * 2021-11-03 2023-05-11 Lam Research Corporation Method and apparatus for automated regulation of a frequency-modulated multilevel outphasing power amplifier
WO2023244714A1 (en) * 2022-06-17 2023-12-21 Standard Biotools Canada Inc. Rf coil resonator systems and methods
WO2025014713A1 (en) * 2023-07-12 2025-01-16 Lam Research Corporation A systems and methods for providing closed-loop voltage control of a nano pulse generator

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Also Published As

Publication number Publication date
US20250046571A1 (en) 2025-02-06
US20210319979A1 (en) 2021-10-14
US11791133B2 (en) 2023-10-17
US11532455B2 (en) 2022-12-20
US20230083958A1 (en) 2023-03-16
US12159766B2 (en) 2024-12-03
WO2020141806A2 (ko) 2020-07-09
US20240006150A1 (en) 2024-01-04

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