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WO2017142061A1 - Outil de coupe revêtu en surface - Google Patents

Outil de coupe revêtu en surface Download PDF

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Publication number
WO2017142061A1
WO2017142061A1 PCT/JP2017/005901 JP2017005901W WO2017142061A1 WO 2017142061 A1 WO2017142061 A1 WO 2017142061A1 JP 2017005901 W JP2017005901 W JP 2017005901W WO 2017142061 A1 WO2017142061 A1 WO 2017142061A1
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Prior art keywords
layer
ticn
carbonitride
cutting
compound
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Application number
PCT/JP2017/005901
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English (en)
Japanese (ja)
Inventor
正樹 奥出
西田　真
翔 龍岡
佐藤　賢一
光亮 柳澤
Original Assignee
三菱マテリアル株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Priority claimed from JP2017026575A external-priority patent/JP6853450B2/ja
Application filed by 三菱マテリアル株式会社 filed Critical 三菱マテリアル株式会社
Publication of WO2017142061A1 publication Critical patent/WO2017142061A1/fr

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23B—TURNING; BORING
    • B23B27/00—Tools for turning or boring machines; Tools of a similar kind in general; Accessories therefor
    • B23B27/14—Cutting tools of which the bits or tips or cutting inserts are of special material
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C23C16/32—Carbides
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C23C16/34—Nitrides
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C23C16/36—Carbonitrides
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C23C16/40—Oxides

Definitions

  • the invention of the present application has excellent plastic deformation resistance that the hard coating layer has excellent even when the hard coating layer is subjected to cutting under high load and low speed conditions in which the hard coating layer easily causes plastic deformation.
  • the present invention relates to a surface-coated cutting tool (hereinafter referred to as a coated tool) that exhibits excellent wear resistance over the use of the above.
  • a substrate (hereinafter collectively referred to as a tool substrate) composed of a tungsten carbide (hereinafter referred to as WC) -based cemented carbide or titanium carbonitride (hereinafter referred to as TiCN) -based cermet.
  • the lower layer is a Ti carbide (hereinafter referred to as TiC) layer, a nitride (hereinafter also referred to as TiN) layer, a carbonitride (hereinafter referred to as TiCN) layer, a carbon oxide (hereinafter referred to as TiCO).
  • TiCNO carbonitride oxide
  • Al 2 O 3 layer aluminum oxide layer
  • a composite hard layer composed of a titanium compound inner layer including at least one titanium carbonitride layer and an aluminum oxide outer layer is coated on the surface of a WC-based cemented carbide substrate.
  • at least one titanium carbonitride layer constituting the titanium compound inner layer is a TiCN layer in which a maximum peak by X-ray diffraction appears on the (220) plane
  • the aluminum oxide outer layer is a ⁇ type Occurrence of abnormal damage due to exfoliation, wear, etc. by using an aluminum oxide layer that is mainly composed of crystals and has a maximum peak on the surface defined as 2.79 angstroms of ⁇ -Al 2 O 3 in ASTM. It has been proposed to prevent tooling and improve tool life.
  • the TiCN layer is oriented in the (220) plane, the adhesion with the substrate or the underlying layer is increased, and peeling from the interface is less likely to occur. be able to. Further, on the TiCN layer oriented in the (220) plane, an oxidation in which a maximum peak appears on a plane mainly composed of ⁇ -type crystals and defined as a plane having a plane spacing of 2.79 ⁇ in ⁇ -Al 2 O 3 in ASTM. When the aluminum layer is coated, the surface of the ⁇ -Al 2 O 3 having an orientation of 2.79 angstroms between the surfaces is smooth and the surface of the coating layer is smooth, so that abnormal damage due to friction between the chips and the tool is less likely to occur.
  • the aluminum oxide layer is resistant to abnormal damage and exhibits stable wear resistance.
  • the inner layer has a multilayer structure having a titanium carbonitride layer having a thickness of 10 ⁇ m or more and having a columnar structure
  • the outer layer is at least The layer includes an ⁇ -type aluminum oxide layer, and the orientation index TC (422) and TC (311) of the (422) plane and the (311) plane are both 1.3 or more and 3 or less for the titanium carbonitride layer.
  • the peel resistance and wear resistance of the coated tool It has been proposed to improve crater resistance and breaking strength.
  • the orientation index TC (422) and TC (311) of the titanium carbonitride layer are both 1.3 or more, and the structure is a columnar structure, so that the fracture resistance of the film can be improved even with a film thickness of 10 ⁇ m or more. It is possible to greatly improve the wear resistance, and the progress of wear due to chipping during cutting can be suppressed, and the welding of the work material during cutting is less likely to occur. Since the increase in stress can be prevented, the peel resistance is also greatly improved.
  • Patent Document 3 discloses that in a coated tool in which a hard coating layer including at least one titanium carbonitride layer is formed on a substrate surface, an orientation index out of the texture coefficient TC (hkl) of the titanium carbonitride layer.
  • TC (220) is the maximum
  • the indentation hardness of the hardness reference piece is Hs
  • the indentation hardness of the titanium carbonitride layer is Ht, (average value of Ht) / Hs ⁇ 3 and the titanium carbonitride layer
  • the maximum value of the indentation hardness is Htmax and the minimum value is Htmin, (Htmax ⁇ Htmin) / (average value of Ht) ⁇ 0.5
  • the crystal orientation of the titanium carbonitride layer is controlled, and the carbon It has been proposed to improve the wear resistance and fracture resistance of the coated tool by eliminating variations in the hardness of the titanium nitride layer.
  • Japanese Laid-Open Patent Publication No. 8-300203 A) Japanese Patent No. 11-140647 (A) Japanese Patent No. 5729777 (B)
  • the inventors of the present invention have a high load acting on the cutting edge, and even when the hard coating layer is used under a high load / low speed cutting process condition in which plastic deformation easily occurs,
  • the hard coating layer is composed of a lower layer made of a Ti compound layer and an upper layer made of an Al 2 O 3 layer, and the lower layer is made of
  • TiCN Ti carbonitride
  • This invention is made
  • A) The hard coating layer comprises at least a lower layer and an upper layer
  • B) The lower layer is composed of one layer or two or more layers selected from a Ti carbide layer, a nitride layer, a carbonitride layer, a carbonate layer, and a carbonitride oxide layer, and at least one of them is A Ti compound layer composed of Ti carbonitride layers and having a total average layer thickness of 2 to 15 ⁇ m
  • the upper layer comprises an aluminum oxide layer having an average layer thickness of 1 to 15 ⁇ m
  • the area ratio occupied by the crystal grains having a columnar longitudinal structure having an aspect ratio of 5 or more is 70 area% or more.
  • Coated cutting tool (3) The surface-coated cutting tool according to (1) or (2), wherein in the Ti compound layer, the thickness of all Ti carbonitride layers is 1.5 to 12 ⁇ m.
  • the hard coating layer of the coated tool of the present invention is composed of at least a lower layer made of a Ti compound layer and an Al 2 O 3 layer to an upper layer.
  • the lower layer composed of a Ti compound layer (for example, a TiC layer, a TiN layer, a TiCN layer, a TiCO layer, and a TiCNO layer) gives high temperature strength to the hard coating layer due to its excellent high temperature strength. Further, the Ti compound layer is in close contact with both the tool base surface and the upper layer composed of the Al 2 O 3 layer, and has an action of maintaining the adhesion of the hard coating layer to the tool base. However, when the total average layer thickness of the Ti compound layer is less than 2 ⁇ m, the above-described effects cannot be sufficiently exhibited. On the other hand, the lower layer of the present invention has excellent plastic deformation resistance as will be described later.
  • a Ti compound layer for example, a TiC layer, a TiN layer, a TiCN layer, a TiCO layer, and a TiCNO layer
  • the total average layer thickness of the lower layer exceeds 15 ⁇ m, plastic deformation is caused by a high load acting during cutting. As a result, crystal grains fall off, thereby causing chipping, chipping, peeling, or abnormal damage such as progression of uneven wear. Therefore, in the coated tool of the present invention, the total average layer thickness of the lower layer made of the Ti compound layer is set to 2 to 15 ⁇ m.
  • the lower layer of the hard coating layer of the coated tool of the present invention is composed of a Ti compound layer, and the lower layer includes at least one TiCN layer, and the layer has (200) orientation.
  • the TiCN layer is configured as follows. That is, when the diffraction peak intensity from each crystal lattice plane is measured by X-ray diffraction for the crystal grains constituting the at least one TiCN layer of the lower layer, the maximum diffraction peak intensity appears on the (200) plane ( 200) It has orientation.
  • FIG. 1 shows an example of a chart of diffraction peak intensity from each crystal lattice plane measured by X-ray diffraction for the TiCN layer of the coated tool of the present invention. As is clear from FIG.
  • the TiCN layer of the coated tool of the present invention has the maximum diffraction peak intensity with respect to the (200) plane as compared with the peak intensity of other crystal lattice planes.
  • X-ray diffraction was measured by the 2 ⁇ - ⁇ method using CuK ⁇ rays using a Spectris PANalytical Empire as an X-ray diffractometer, and measurement conditions (measurement range (2 ⁇ ): 30 to 130 degrees, X-ray output: The measurement was performed under the conditions of 45 kV, 40 mA, divergent slit: 0.5 degree, scan step: 0.013 degree, measurement time per step: 0.48 sec / step.
  • the coated tool of the present invention has a value of Tc (200) of 2.0 or more, preferably 3.0 or more. It has the (200) orientation shown.
  • the orientation index Tc (hkl) is defined by the following formula.
  • I (hkl) represents the peak intensity (diffraction intensity) of the measured (hkl) plane
  • I 0 (hkl) is a JCPDS card (Joint Committee on Powder Diffraction Standards (powder X-ray diffraction standard)).
  • the average value of the powder diffraction intensity of TiC and TiN constituting the (hkl) plane represented is shown.
  • (hkl) is the eight faces of (111), (200), (220), (311), (222), (331), (420), (422) Indicates the average value of 8 surfaces.
  • At least one TiCN layer of the coated tool of the present invention shows the maximum peak intensity by X-ray diffraction on the (200) plane, and the orientation index Tc (200) ⁇ 2.0 (200). Due to the orientation, even when a large shearing force is applied to the TiCN layer during cutting, the TiCN layer has plastic deformation resistance. The occurrence of peeling or the occurrence of abnormal damage such as the progression of uneven wear can be suppressed, and the wear resistance can be improved thereby. However, when the X-ray diffraction peak intensity with respect to the (200) plane cannot be said to be maximum as compared with the diffraction peak intensity from other lattice planes, or the orientation index Tc (200) is less than 2.0.
  • the X-ray diffraction peak intensity of the (200) plane measured for at least one TiCN layer of the lower layer is maximum compared to the peak intensity of other crystal lattice planes,
  • the orientation index Tc (200) was determined to be 2.0 or more, preferably 3.0 or more.
  • At least one TiCN layer in the lower layer has a columnar vertically long structure.
  • the area ratio of the columnar vertically grown TiCN crystal grains having an aspect ratio of 5 or more determined from the maximum grain width W of the TiCN crystal grains and the maximum grain length L in the layer thickness direction is 70% of the longitudinal sectional area of the TiCN layer. In the case of occupying area% or more, it is possible to expect an excellent effect of improving wear resistance, which is a feature of a columnar vertically long structure.
  • the maximum grain width W and the maximum grain length L are the columnar vertically grown TiCN crystal grains, when one crystal grain in the longitudinal section of the TiCN layer is measured, the crystal grains in the direction perpendicular to the layer thickness direction.
  • the largest value of the width (short side) is called the maximum particle width W, while the largest value of the crystal grain height (long side) in the layer thickness direction is called the maximum particle length L.
  • the thickness of the TiCN layer is not particularly limited, but it is desirable that the thickness of all the TiCN layers constituting the Ti compound layer is 1.5 to 12 ⁇ m. This indicates that when the thickness of the TiCN layer is 1.5 ⁇ m or more, the value of Tc (200) tends to increase, and the plastic deformation resistance in high-load cutting is improved and the flank wear amount is also reduced. This is because the wear resistance is improved. On the other hand, if the thickness of the TiCN layer exceeds 12 ⁇ m, plastic deformation is likely to occur, and abnormal damage due to the progress of uneven wear occurs.
  • the lower Ti compound layer in this invention is formed as follows, for example. That is, various Ti compound layers comprising one or more of TiC layer, TiN layer, TiCN layer, TiCO layer, TiCNO layer and TiAlN layer are formed by vapor deposition using a normal chemical vapor deposition apparatus. Among them, a (200) highly oriented TiCN layer, or a TiCN layer in which a crystal grain having a columnar longitudinal structure having an aspect ratio of 5 or more occupies 70 area% or more of the lower layer longitudinal section is, for example, It can be formed by the vapor deposition method.
  • Reaction gas composition (volume%): TiCl 4 1-5%, CH 3 CN 0.5-1.5%, N 2 25-40%, balance H 2 , Reaction atmosphere temperature: 750 to 850 ° C.
  • Reaction atmosphere pressure 5 to 10 kPa
  • Reaction gas composition volume%: NH 3 0.5-2.0%, TiCl 4 0.1-0.3%, N 2 0-10%, balance H 2 , Reaction atmosphere temperature: 750 to 850 ° C.
  • Reaction atmosphere pressure 5 to 8 kPa By creating under such conditions, it becomes easy to form crystal grains having a columnar longitudinal structure having an aspect ratio of 5 or more.
  • the upper layer of the coated tool of the present invention includes a TiCN layer having a maximum peak intensity by X-ray diffraction on the (200) plane and an orientation index Tc (200) of 2.0 or more. Is formed by vapor-depositing an Al 2 O 3 layer having an average layer thickness of 1 to 15 ⁇ m by the usual chemical vapor deposition method.
  • Al 2 O 3 has various crystal structures such as ⁇ -type, ⁇ -type, and ⁇ -type, but has excellent high-temperature hardness, oxidation resistance, and excellent thermal stability.
  • the Al 2 O 3 layer constituting the upper layer is preferably an ⁇ -type Al 2 O 3 layer having an ⁇ -type crystal structure.
  • Reaction gas composition (volume%): AlCl 3 2-5%, CO 2 10-20%, HCl 1-3%, H 2 S 0-0.15%, balance H 2 , Reaction atmosphere temperature: 850 to 950 ° C. Reaction atmosphere pressure: 5 to 10 kPa It is produced under the following conditions. Further, if the average layer thickness of the upper layer is less than 1 ⁇ m, it is not possible to ensure wear resistance over a long period of use, whereas if the average layer thickness exceeds 15 ⁇ m, the Al 2 O 3 crystal grains are coarse.
  • the chipping resistance and fracture resistance during high-load cutting in which a large shearing force acts on the cutting edge, are reduced.
  • the hard coating layer formed on the surface of the tool base includes at least a lower layer made of a Ti compound layer and an upper layer made of an Al 2 O 3 layer, and at least one of the lower layers.
  • the layer is composed of a TiCN layer, and the TiCN layer has a maximum diffraction peak intensity due to X-ray diffraction on the (200) plane and the orientation index Tc (200) is 2.0 or more.
  • the layer is excellent in plastic deformation resistance. As a result, even when used under high-load / low-speed cutting conditions where a large shearing force acts on the TiCN layer surface, the coated tool of the present invention has the ability to drop crystal grains due to the excellent plastic deformation resistance of the TiCN layer.
  • the wear resistance can be further improved by setting the area ratio of the crystal grains having a columnar longitudinal structure having an aspect ratio of 5 or more in the lower layer to 70 area% or more of the vertical section of the lower layer. The life of the cutting tool can be extended.
  • Embodiments of the coated tool of the present invention will be specifically described based on examples.
  • WC powder, TiC powder, ZrC powder, NbC powder, Cr 3 C 2 powder, TiN powder, and Co powder all having an average particle diameter of 1 to 3 ⁇ m were prepared. Then, after adding wax, ball mill mixing in acetone for 24 hours, drying under reduced pressure, press-molding into a green compact of a predetermined shape at a pressure of 98 MPa. In a vacuum, vacuum sintering is performed at a predetermined temperature within a range of 1370 to 1470 ° C. for 1 hour, and after sintering, a tool base a to WC-base cemented carbide having an ISO standard CNMG120408 insert shape is used. Each d was produced.
  • ZrC powder ZrC powder
  • TaC powder Mo 2 C powder
  • WC powder Co powder all having an average particle diameter of 0.5 to 2 ⁇ m
  • Ni powder these raw material powders are blended in the blending composition shown in Table 2, wet mixed by a ball mill for 24 hours, dried, and then pressed into a compact at a pressure of 98 MPa.
  • the body was sintered in a nitrogen atmosphere of 1.3 kPa at a temperature of 1500 ° C. for 1 hour, and after sintering, a tool base e made of TiCN-based cermet having an insert shape of ISO standard CNMG120212 was produced.
  • each of the tool bases a to d and the tool base e is charged into a normal chemical vapor deposition apparatus, and under the conditions shown in Tables 3 and 4, as lower layers having the target layer thicknesses shown in Table 6.
  • the Ti compound layer shown in Table 6 was formed by vapor deposition of the Al 2 O 3 layer as the upper layer of the target layer thickness shown in Table 6 under the conditions shown in Table 3.
  • Invention coated tools 1 to 13 were produced respectively.
  • the HT-TiCN layer in Table 3 is a TiCN layer manufactured at a higher reaction atmosphere temperature than the TiCN layer shown in paragraph 0016.
  • the TiN layer-1 (first layer) and the TiAlN layer are the deposition conditions for the Ti compound layer in which columnar vertically oriented crystal grains having an aspect ratio of 5 or more are likely to be formed.
  • each of the tool bases a to d and the tool base e is loaded into a normal chemical vapor deposition apparatus, and the target layer thicknesses shown in Table 7 are set under the conditions shown in Tables 3 and 5.
  • the target layer thicknesses shown in Table 7 are set under the conditions shown in Tables 3 and 5.
  • the diffraction peak intensity from each lattice plane was measured by X-ray diffraction.
  • FIG. 1 the chart calculated
  • X-ray diffraction was measured by the 2 ⁇ - ⁇ method using CuK ⁇ rays using Spectris PANalytical Empirean as an apparatus. Measurement conditions are measurement range (2 ⁇ ): 30 to 130 degrees, X-ray output: 45 kV, 40 mA, diverging slit: 0.5 degrees, scan step: 0.013 degrees, measurement time per step: 0.48 sec / step It is. From the chart obtained above, it was determined whether or not the diffraction peak intensity from the (200) plane was the maximum with respect to the diffraction peak intensities from other lattice planes. Tables 6 and 7 show the determination results.
  • orientation index Tc (200) was determined based on the measurement result of the diffraction peak intensity.
  • the orientation index Tc (200) was calculated by the following formula.
  • I (hkl) represents the measured diffraction peak intensity of the (hkl) plane
  • I 0 (hkl) is represented by a JCPDS card (Joint Committee on Powder Diffraction Standards (powder X-ray diffraction standard))
  • hkl The average value of the powder diffraction intensities of TiC and TiN constituting the surface is shown.
  • (hkl) is the eight surfaces (111), (200), (220), (311), (222), (331), (420), and (422).
  • Tables 6 and 7 show the values of the orientation index Tc (200) calculated above.
  • the longitudinal section of the TiCN layer of the lower layer of the coated tools 1 to 13 of the present invention and the comparative coated tools 1 to 13 is 10 ⁇ m in a direction parallel to the tool base using a scanning electron microscope (5000 times magnification).
  • the maximum grain width W and the maximum grain length L are measured for each TiCN crystal grain existing in the region of the height of the TiCN layer in the direction perpendicular to the substrate, and the value of the aspect ratio L / W is set.
  • the area ratio of crystal grains having an aspect ratio L / W of 5 or more in the longitudinal section of the TiCN layer was determined. Tables 6 and 7 show the area ratios obtained above.
  • the thicknesses of the constituent layers of the hard coating layers of the inventive coated tools 1 to 13 and comparative example coated tools 1 to 13 were measured using a scanning electron microscope (longitudinal cross section measurement). The average layer thickness (average value of 5-point measurement) substantially the same as the thickness was shown.
  • the coated tool of the present invention exhibits excellent cutting performance in high-load / low-speed cutting in which a high load (a large shearing force) acts on the cutting edge, but the normal conditions such as various steel and cast iron Of course, it can also be used for continuous cutting and intermittent cutting.

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Inorganic Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Cutting Tools, Boring Holders, And Turrets (AREA)
  • Chemical Vapour Deposition (AREA)

Abstract

L'invention concerne un outil de coupe revêtu en surface avec une couche de revêtement dur formée sur une surface de corps de base d'outil de celui-ci, ladite couche de revêtement dur comprenant au moins une couche inférieure et une couche supérieure, la couche inférieure comprenant une couche de composé de Ti, ladite couche de composé de Ti ayant une épaisseur de couche moyenne totale de 2 à 15 µm et comprenant une ou plusieurs couches choisies parmi une couche de TiC, une couche de TiN, une couche de TiCN, une couche de TiCO et une couche de TiCNO, au moins une desdites une ou plusieurs couches étant une couche de TiCN, la couche supérieure comprenant une couche de Al2O3 ayant une épaisseur de couche moyenne de 1 à 15 μm, au moins une de la ou des couches de TiCN constituant la couche inférieure démontrant une intensité du pic de diffraction maximale au niveau du plan (200) pendant une diffraction des rayons X et ayant un indice d'orientation Tc(200) de 2,0 ou plus et, dans la couche inférieure, les grains cristallins qui ont une structure en colonne allongée verticalement avec un rapport d'aspect de 5 ou plus occupant de préférence 70 % ou plus de la zone d'une section transversale verticale de la couche inférieure.
PCT/JP2017/005901 2016-02-17 2017-02-17 Outil de coupe revêtu en surface WO2017142061A1 (fr)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP2016027727 2016-02-17
JP2016-027727 2016-02-17
JP2017026575A JP6853450B2 (ja) 2016-02-17 2017-02-16 表面被覆切削工具
JP2017-026575 2017-02-16

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Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0847999A (ja) * 1994-03-22 1996-02-20 Sandvik Ab 被覆超硬質焼結合金物品とその製造方法
WO2012144088A1 (fr) * 2011-04-21 2012-10-26 住友電工ハードメタル株式会社 Outil de coupe portant un revêtement de surface et procédé de fabrication associé
WO2014142190A1 (fr) * 2013-03-12 2014-09-18 日立ツール株式会社 Film dur, élément couvert d'un film dur, et procédé de fabrication du film dur et de l'élément couvert d'un film dur
WO2014198881A1 (fr) * 2013-06-14 2014-12-18 Sandvik Intellectual Property Ab Outil de coupe enrobé
JP2015500148A (ja) * 2011-12-14 2015-01-05 サンドビック インテレクチュアル プロパティー アクティエボラーグ 被覆切削工具及びその製造方法

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0847999A (ja) * 1994-03-22 1996-02-20 Sandvik Ab 被覆超硬質焼結合金物品とその製造方法
WO2012144088A1 (fr) * 2011-04-21 2012-10-26 住友電工ハードメタル株式会社 Outil de coupe portant un revêtement de surface et procédé de fabrication associé
JP2015500148A (ja) * 2011-12-14 2015-01-05 サンドビック インテレクチュアル プロパティー アクティエボラーグ 被覆切削工具及びその製造方法
WO2014142190A1 (fr) * 2013-03-12 2014-09-18 日立ツール株式会社 Film dur, élément couvert d'un film dur, et procédé de fabrication du film dur et de l'élément couvert d'un film dur
WO2014198881A1 (fr) * 2013-06-14 2014-12-18 Sandvik Intellectual Property Ab Outil de coupe enrobé

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