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WO2015160057A1 - Réacteur à plasma permettant de traiter un gaz d'échappement produit à partir d'une installation de traitement - Google Patents

Réacteur à plasma permettant de traiter un gaz d'échappement produit à partir d'une installation de traitement Download PDF

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Publication number
WO2015160057A1
WO2015160057A1 PCT/KR2014/010120 KR2014010120W WO2015160057A1 WO 2015160057 A1 WO2015160057 A1 WO 2015160057A1 KR 2014010120 W KR2014010120 W KR 2014010120W WO 2015160057 A1 WO2015160057 A1 WO 2015160057A1
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WO
WIPO (PCT)
Prior art keywords
conduit
electrode
exhaust gas
electrode portion
plasma
Prior art date
Application number
PCT/KR2014/010120
Other languages
English (en)
Korean (ko)
Inventor
고경오
강경두
노명근
Original Assignee
주식회사 클린팩터스
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from KR1020140045420A external-priority patent/KR101574121B1/ko
Priority claimed from KR1020140051011A external-priority patent/KR101611955B1/ko
Priority claimed from KR1020140070601A external-priority patent/KR101541817B1/ko
Application filed by 주식회사 클린팩터스 filed Critical 주식회사 클린팩터스
Priority to CN201480077937.7A priority Critical patent/CN106170845A/zh
Publication of WO2015160057A1 publication Critical patent/WO2015160057A1/fr

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    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/2406—Generating plasma using dielectric barrier discharges, i.e. with a dielectric interposed between the electrodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H2245/00—Applications of plasma devices
    • H05H2245/10—Treatment of gases
    • H05H2245/17—Exhaust gases

Definitions

  • the present invention relates to a plasma reactor, and more particularly, to decompose exhaust gas discharged from a process chamber, to detect an abnormality of a conduit, to reduce power consumption by reducing discharge current, and to reduce the flow of exhaust gas. It relates to a plasma reactor that can be formed in the form of swirl while guiding in a direction toward the inner circumferential surface of the conduit.
  • processes such as functional thin film formation and dry etching are applied.
  • Such a process is generally performed in a vacuum chamber, and various kinds of metal and nonmetallic precursors are used as process gases for forming a functional thin film, and various kinds of etching gases are also used for dry etching.
  • each component consisting of a process chamber, a vacuum pump, a scrubber, or the like is connected to each other through an exhaust line.
  • the gas discharged from the process chamber is different depending on the process, but may include a gas molecule or an unreacted precursor (precursor), a solid seed crystal of the aerosol state, and the inert gas as a carrier gas It may further include.
  • These exhaust gases are introduced into the vacuum pump along the exhaust line. Since the compression of the exhaust gases occurs at a high temperature of 100 or more inside the vacuum pump, phase shifts of the exhaust gases easily occur, and solid by-products are easily formed inside the vacuum pump. It accumulates and accumulates and corrodes by-products of corrosive gas including F, Cl, and the like, causing the vacuum pump to fail.
  • the conventional method for improving the vacuum pump failure due to the exhaust gas is to inject a purging gas into the vacuum pump while the exhaust gas is being pumped to lower the partial pressure of components that can form solid by-products in the exhaust gas. This is to minimize the formation of by-products.
  • the most commonly used purge gas is dry air or nitrogen.
  • Korean Patent No. 1065013 discloses a plasma reactor technology that decomposes exhaust gas by applying an AC driving voltage to cause a discharge to a conduit barrier.
  • the present invention can decompose the exhaust gas discharged from the process chamber, can detect the abnormality of the conduit and reduce the power consumption by reducing the discharge current, while inducing the flow of exhaust gas toward the inner peripheral surface of the conduit, It is an object to provide a plasma reactor capable of being formed in the form of swirl.
  • the present invention provides a plasma reactor disposed between a process chamber and a vacuum pump to decompose exhaust gas discharged from a process chamber, comprising: a conduit through which the exhaust gas flows; Plasma generating means provided in the conduit to cause plasma discharge to decompose the exhaust gas; A housing surrounding the conduit and having a separation space formed between the outer circumferential surface of the conduit; Sensing means for sensing an environmental condition of said conduit or said space; And a controller configured to determine a state of the conduit or the separation space from the information of the environmental condition received from the sensing means.
  • the plasma reactor according to the present invention has the following effects.
  • the temperature sensor and gas detector applied as the sensing means can detect the environmental conditions due to the abnormality of the space in the conduit or the housing within a short time, so that the abnormality of the plasma reactor can be detected more quickly. have.
  • control unit when the control unit detects an abnormality of the conduit or the separation space with the information transmitted through the sensing means, an alarm may be generated or the operation of the plasma reactor may be stopped to prevent a safety accident due to the exhaust gas leakage.
  • it is set to automatically turn off the plasma reactor at the moment of detecting abnormality of the conduit or the separation space, so that when the time is delayed while the operator cuts off the power after the alarm, It can prevent not only fire but also human accidents.
  • At least one or more of the first electrode portion and the second electrode portion may form a slit or opening to reduce an area, thereby reducing the power consumption by reducing the amount of discharge current during plasma discharge, thereby improving energy efficiency of the plasma reactor. It can have an effect that can be made.
  • the exhaust gas decomposition efficiency is low while maintaining the power consumption at a low level. It can have the effect of preventing losing.
  • the exhaust gas can be changed into a swirl form to flow inside the conduit.
  • the swirl shape induces a larger amount of exhaust gas near the area where the plasma discharge is concentrated, so that the exhaust gas is contacted with the plasma discharge more to decompose a larger amount of exhaust gas.
  • the reactive gas is injected toward the inflow direction of the exhaust gas, so that the reactive gas flowing into the conduit pushes the exhaust gas and delays the time that the exhaust gas stays in the conduit, thereby improving the decomposition efficiency of the exhaust gas further. It can have an effect.
  • FIG. 1 illustrates a connection relationship between a process chamber, a vacuum pump, a scrubber, and a plasma reactor.
  • Figure 2 shows the structure of a plasma reactor according to an embodiment of the present invention.
  • FIG. 3 is a perspective view showing the structure of the plasma reactor according to FIG.
  • FIG. 4 is a cross-sectional view showing the structure of a plasma reactor according to another embodiment of the present invention.
  • FIG. 5 is a cross-sectional view showing the structure of a plasma reactor according to another embodiment of the present invention.
  • FIG. 6 is a perspective view showing the structure of a plasma reactor according to another embodiment of the present invention.
  • FIG. 7 to 9 are perspective views showing the structure of a plasma reactor according to another embodiment of the present invention.
  • FIG. 10 is a perspective view showing the structure of a plasma reactor according to another embodiment of the present invention.
  • FIG. 11 is a perspective view showing the structure of a plasma reactor according to another embodiment of the present invention.
  • FIG. 12 is a perspective view showing the structure of a plasma reactor according to another embodiment of the present invention.
  • FIG. 13 is a perspective view showing the structure of a plasma reactor according to another embodiment of the present invention.
  • FIG. 14 is a perspective view showing the structure of a plasma reactor according to another embodiment of the present invention.
  • 15 and 16 are perspective views showing the structure of a plasma reactor according to another embodiment of the present invention.
  • FIG. 17 is a perspective view showing the structure of a plasma reactor according to another embodiment of the present invention.
  • FIG. 18 is a perspective view showing the structure of a plasma reactor according to another embodiment of the present invention.
  • 19 is a perspective view showing the structure of a plasma reactor according to another embodiment of the present invention.
  • 20 is a perspective view showing the structure of a plasma reactor according to another embodiment of the present invention.
  • 21 is a perspective view showing the structure of a plasma reactor according to another embodiment of the present invention.
  • the plasma reactor 100 is a by-product of the metal precursor, the non-metal precursor and the process gas, cleaning gas discharged from the process chamber 10 As shown in FIG. 1A to decompose the exhaust gas including the gas, it is disposed between the process chamber 10 and the vacuum pump 30.
  • the vacuum pump 30 and the scrubber 50 may be disposed.
  • a plurality of plasma reactors 100 may be installed to repeat the decomposition and purification of the exhaust gas several times.
  • the process chamber 110, the plasma reactor 100, the vacuum pump 130 and the scrubber 150 are connected to each other by an exhaust line.
  • the process chamber 110 is formed in a vacuum environment to perform processes such as ashing, deposition, etching, photography, cleaning, and nitriding. In this embodiment, a thin film formation or dry etching is performed in the process chamber 110 as an example.
  • an inner surface of the vacuum pump 130 or an inner surface of the scrubber 150 is formed. Accumulate and cause many problems.
  • the reactive gas causes the unreacted metallic precursor molecules or the unreacted nonmetallic precursor molecules to decompose, thereby forming metal oxides or nonmetal oxides of the microparticles without forming metallic byproducts or nonmetallic byproducts.
  • the conduit 110 of the plasma reactor 100 is a flow path through which the exhaust gas flows, and is formed in a cylindrical shape penetrating through the longitudinal direction.
  • the conduit 110 is formed of a high dielectric material such as alumina, zirconia (ZrO 2), yttria (Y 2 O 3), sapphire, quartz tube, glass tube, and the like.
  • ZrO 2 zirconia
  • Y 2 O 3 yttria
  • sapphire quartz tube, glass tube, and the like.
  • the plasma generating means is provided in the conduit 110 to generate a plasma discharge to decompose the exhaust gas flowing into the conduit 110.
  • the plasma generating means is spaced apart from the first electrode portion 120 and the first electrode portion 120 installed on the conduit 110, the first electrode portion 120 and the plasma It includes a second electrode 130 to cause a discharge to decompose the exhaust gas.
  • the first electrode portion 120 is extrapolated to surround the outer circumferential surface of the conduit 110. Accordingly, the first electrode part 120 is formed in a tube shape. AC voltage is applied to the first electrode part 120 to serve as a driving electrode. Referring to FIGS. 2 and 3, the first electrode part 120 is formed to have a long length in the longitudinal direction of the conduit 110, but is not limited thereto.
  • the buffer part (not shown) of a tube structure is inserted between the conduit 110 and the first electrode part 120.
  • the buffer part (not shown) is formed of an electrically conductive material or a dielectric material, and has an elasticity such that the conduit 110 and the first electrode part 120 may be in close contact with each other.
  • the second electrode 130 is connected to one or both ends of the conduit 110 in communication with the conduit 110. In this embodiment, as shown in Figures 2 and 3, it is connected in communication with both ends of the conduit (110).
  • the second electrode portions 130 cause plasma discharge with the first electrode portion 120. In order to cause the plasma discharge, there must be a voltage difference between the first electrode part 120 and the second electrode part 130.
  • the first electrode 120 is applied with an AC voltage as described above, in order for the second electrode 130 to have a voltage difference with the first electrode 120, the second electrode 130 is disposed. Should be the ground electrode. Therefore, the second electrode parts 130 are formed of a metal body. Referring to FIGS. 2 and 3, the second electrode unit 130 is formed to have a cross-section gradually smaller in the longitudinal direction, but is not limited thereto.
  • the second electrode 130 may have a cross section uniformly formed in the longitudinal direction.
  • the exhaust gas discharged from the process chamber 10 is introduced through the second electrode unit 130 of any one of the second electrode units 130 and decomposed while flowing through the conduit 110.
  • the other is discharged through the second electrode 130. 2 and 3, since the exhaust gas is introduced through the upper second electrode part 130, an exhaust gas inlet 131 is formed in the upper second electrode part 130, and the lower side of the upper electrode part 130 is formed. Since the exhaust gas is discharged through the second electrode unit 130, an exhaust gas discharge unit 132 is formed in the lower second electrode unit 130.
  • the exhaust gas flows into the conduit 110 through the exhaust gas inlet 131, and the exhaust gas having a predetermined pressure is present in the conduit 110.
  • the first electrode 120 which is a driving electrode
  • the movement of electrons is started between the second electrode 130, which is a ground electrode, and plasma discharge is performed to decompose the exhaust gas. Is generated.
  • the housing 140 surrounds the conduit 110 to protect the outer circumferential surface of the conduit 110 and the first electrode portion 120 formed on the outer circumferential surface of the conduit 110.
  • the housing 140 forms a space between the outer circumferential surface of the conduit 110.
  • the sensing means 150 is installed inside the housing 140, that is, on the outer circumferential surface of the conduit 110.
  • the sensing means 150 serves to detect an environmental condition of the conduit 110 or the separation space. In more detail, it is to detect when the surface temperature of the conduit 110 or the temperature of the space is greater than the set temperature, or to detect the environmental conditions of the space.
  • the control unit (not shown) which has received this information determines whether the conduit 110 or the separation space is abnormal and generates an alarm. Ring or stop the plasma discharge. Therefore, the control unit includes one or more of a notification unit (not shown) for ringing an alarm and a power switch (not shown) for locking to stop the plasma discharge.
  • the sensing means 150 is a temperature sensor, and if the environmental condition is a predetermined specific gas present in the separation space, the sensing means 150 Gas detector.
  • the temperature sensor detects whether the temperature of the conduit 110 or the space is greater than or equal to a set temperature.
  • the plasma reactor decomposes the exhaust gas for a long time, the exhaust gas may leak into a gap between a portion where the conduit 110 and the second electrode unit 130 are connected, and may flow into the space.
  • the conduit 110 is overheated and cracks are generated, a problem may occur in that exhaust gas leaks through the cracks.
  • the exhaust gas introduced into the separation space fills the separation space. Since the exhaust gas which has been decomposed by the plasma discharge has a very high temperature, the temperature of the separation space filled with the leaked exhaust gas is increased. Therefore, when the temperature sensor 150 detects that the temperature of the space is gradually increased to be above a set temperature, the temperature sensor 150 transmits the detected information to the controller, and the controller sounds an alarm or stops the operation of the plasma reactor 100. It can stop and prevent the safety accident by the outflow of exhaust gas.
  • the sensing means 150 may detect whether the conduit 110 is overheated by detecting whether the surface temperature of the conduit 110 is equal to or higher than a set temperature. As described above, even if the exhaust gas does not leak while the plasma reactor decomposes the exhaust gas for a long time, the conduit 110 may be overheated. Therefore, when the sensing means 150 detects the surface temperature of the conduit 110 and the surface temperature of the conduit 110 is higher than the set temperature, the operation of the plasma reactor 100 is stopped to prevent overheating of the conduit 110. Safety accidents caused by damages and gas leaks can be prevented.
  • the sensing means 150 is a gas detector
  • the gas detector detects the presence or absence of a specific gas set in the space.
  • the connection portion between the conduit 110 and the second electrode part 130 is loosened due to minute vibration and thermal deformation.
  • the exhaust gas may leak into a gap between the 110 and the second electrode 130 connected to each other, and may flow into the separation space.
  • the space When the exhaust gas leaks into a gap between the conduit 110 and the second electrode 130, the space is filled. Various gases are mixed in the exhaust gas.
  • the gas detector 150 installed in the separation space senses the presence or absence of a predetermined gas in the exhaust gas leaked into the separation space.
  • an alarm may be triggered or the operation of the plasma reactor may be stopped to prevent a safety accident that may be caused by damage caused by cracking of the conduit 110.
  • FIG. 4 shows a plasma reactor 100a according to another embodiment of the present invention.
  • the plasma reactor 100a illustrated in FIG. 4 has the same configuration as that of the plasma reactor 100 according to the above-described embodiment. Therefore, the same components as in the exemplary embodiment will be described with the same reference numerals, and detailed descriptions thereof will be omitted, and only different configurations will be described using the same reference numerals.
  • the plasma reactor 100a has a difference between the plasma reactor 100 and the plasma generating means.
  • the plasma generating means includes the first electrode part 110 and the second electrode part 130a in this embodiment, in the present embodiment, the second electrode part 110 and the second electrode part 130a are used. All are installed on the conduit 110. However, in this embodiment, the length of the first electrode portion 120 is shorter than in the embodiment in order to install the second electrode portion 130a on the conduit 110.
  • the second electrode part 130a is also installed on the conduit 110 to surround the outer circumferential surface of the conduit 110. Therefore, the second electrode portion 130a is also formed in a tube shape.
  • the first electrode 120 and the second electrode 130a are spaced apart from each other on the conduit 110.
  • one of the first electrode part 120 and the second electrode part 130a a relative positive voltage is applied, and the other a relative negative voltage is applied.
  • the first electrode 120 and the second electrode 130a are not provided as driving electrodes and ground electrodes, as described above, when a relative positive voltage and a negative voltage are applied, The voltage difference is generated between the electrode unit 120 and the second electrode unit 130a to cause the plasma discharge.
  • the plasma reactor 100a is disposed at both ends of the conduit 110.
  • a flange (not shown) is formed to be coupled with the exhaust line connecting the chamber 10 and the vacuum pump 50.
  • An exhaust gas inlet 131 and an exhaust gas outlet 132 are formed in the flange (not shown).
  • the plasma reactor 100b is different from the embodiment shown in FIGS. 2, 3, and 4 in the configuration of the plasma generating means for generating the plasma discharge.
  • the plasma generating means includes a coil unit 120a.
  • the coil unit 120a is installed while spirally wrapping the outer circumferential surface of the conduit 110.
  • an RF plasma discharge is generated in the coil unit 120a to decompose the exhaust gas flowing into the conduit 110.
  • the conduit 110 in which the RF plasma discharge is generated is formed of a dielectric.
  • FIGS. 6 shows a plasma reactor 100c according to another embodiment of the present invention.
  • the magnetic field generating means 120b is further included in the plasma reactor 100 shown in FIGS. 2 and 3.
  • the magnetic field generating means 120b is to solve the problem of erosion of the inner surface of the conduit 110.
  • the magnetic field generating means (120b) is installed outside the conduit 110, made of a coil or permanent magnet.
  • the motion trajectory of the charge particles in the plasma changes.
  • the incident angle of ions incident on the surface of the conduit 110 may be most effectively reduced.
  • the magnetic field generating means 120b may be formed of a solenoid coil.
  • the solenoid coil 120b is formed to have a structure surrounding the outside of the first electrode 120.
  • the number of windings or the forming area of the solenoid coil 120b may be adjusted according to the area of the first electrode part 120 and the diameter of the exhaust line, and the intensity of the current flowing through the solenoid coil 120b may be adjusted accordingly. This is possible.
  • the solenoid coil 120b may cover the entire conduit 110, may be installed to exceed the area of the conduit 110, or may be installed in a plurality of solenoid coils connected or spaced apart from each other.
  • the solenoid coil 120b may be in contact with the first electrode 120 in a form of an insulating film coated on an electric wire, and may be installed in a form spaced apart from the first electrode 120 by a separate means. May be When a current flows in the solenoid coil 120b, a magnetic field is formed in the longitudinal direction of the conduit 110. Since the solenoid coil 120b is wrapped and protected by the housing 140, electromagnetic waves generated from the solenoid coil 120b may be blocked from the outside.
  • the Helmholtz coil may be applied to the magnetic field generating means 120b.
  • the Helmholtz coils are spaced apart from each other by a distance corresponding to one-half of the diameter of the conduit 110 of the plurality of Helmholtz coils.
  • the upper and lower coils are spaced apart from each other by a distance corresponding to 1/2 of the diameter of the conduit 110 at the upper and lower ends of the conduit 110.
  • the Helmholtz coil may generate a magnetic field in the conduit 110, and the magnetic field formed in the longitudinal direction of the conduit 110 may change the trajectory of the movement of charge particles in the plasma to the inner surface of the conduit 110. Reduce the angle of incidence of colliding charge particles.
  • the Helmholtz coil is adjusted to the number of coils, the number of windings, the current strength flowing through the coil in consideration of the length and diameter of the conduit 110, the shape and voltage of the first electrode portion 120, and the like.
  • a permanent magnet may be applied to the magnetic field generating means 120b.
  • the permanent magnet is formed in a cylindrical shape penetrated along the inside and the longitudinal direction.
  • the permanent magnet is installed on the outside of the conduit 110 to surround the outer circumferential surface of the first electrode portion 120.
  • the permanent magnet may generate a magnetic field in the conduit 110, and the magnetic field formed in the longitudinal direction of the conduit 110 may change the trajectory of the movement of charge particles in the plasma to the inner surface of the conduit 110. Reduce the angle of incidence of colliding charge particles.
  • the magnetic flux of the permanent magnet is determined in consideration of the length and diameter of the conduit 110, the shape and voltage of the first electrode portion 120, and the like.
  • the permanent magnet may be provided in the form of a plurality of rings rather than the cylindrical form as described above.
  • the permanent magnets in the form of a plurality of rings have only the difference of being installed on the outside of the conduit 110 in a form surrounding the outer circumferential surface of the first electrode 120, and perform the same function as the permanent magnets formed in a cylindrical shape. do.
  • the magnetic field generating means 120b affects the lifetime of the plasma reactor.
  • the plasma formed in the conduit 110 includes lycals, ions, active species, and the like, which are highly reactive, and the magnetic field generating means 120b forms a magnetic field parallel to the axial direction in the conduit 110.
  • the angle of incidence of the ions incident close to the perpendicular to the inner surface of the conduit 110 is greatly changed, not vertical, to greatly reduce the erosion of the inner surface of the conduit 110.
  • FIGS. 7 to 9 illustrate a plasma reactor 200 according to another embodiment of the present invention.
  • the plasma generating means of the plasma reactor 200 illustrated in FIGS. 7 to 9 includes a first electrode portion 220 and a second electrode portion 130 ′. At least one or more of the first electrode portion 220 and the second electrode portion 130 ′ has a structure in which the area is reduced to reduce power consumption by reducing the discharge current during plasma discharge. In this embodiment, the slit or the opening 225 is formed to reduce the area of the first electrode portion 220.
  • the first electrode portion 220 is a first circumference 221 formed along the circumferential direction of the conduit 110, the first circumference 221 and the second circumference 222 spaced apart from each other along the longitudinal direction of the conduit 110 and formed along the circumferential direction of the conduit 110 similarly to the first circumference 221, the first A plurality of first connecting portions 223 electrically connecting a circumference 221 and the second circumference 222 and spaced apart from each other along the circumferential direction of the conduit 110, and the first circumference 221.
  • the plurality of openings 225 are formed by the first circumference 221, the second circumference 222, the first connection parts 223, and the second connection parts 224.
  • one of the openings 225 of the plurality of openings 225 may be a pair of the first connecting portions 223 facing each other and a pair of mutually facing each other. It is formed by a pair of second connecting portion 224 across the first connecting portion 223 of each other. Looking at the other opening 225, the opening 225 crosses one side of the pair of second connecting portions 224 facing each other with the pair of second connecting portions 224 facing each other. It is formed by the first peripheral portion 221 and the first connecting portion 223 facing each other with the first peripheral portion 221.
  • the openings 125 are formed in a matrix arrangement as shown in FIG. 2.
  • the openings 225 formed as described above are formed in a rectangular shape. However, the shape of each of the openings 225 is not limited to a rectangle, and may be formed in more various shapes.
  • the widths of the first circumference 221 and the second circumference 222 may be the same or different, and the widths of the first connection 223 and the second connection 224 may also be the same. can be different.
  • the width of the first circumference 221 and the second circumference 222 and the width of the first connection 223 and the second connection 224 need not be defined to be the same. It can be variously adopted by the manufacturer to minimize power consumption and discharge current. However, the widths of the first circumference 221 and the second circumference 222 may be equally formed to improve plasma discharge efficiency.
  • the plasma reactor 200 further includes a gas injection tube 240 for injecting a reactive gas into the conduit 110, as shown in FIGS. 7 to 9.
  • a reactive gas is injected into the conduit 110 through the gas injection tube 240, the exhaust gas is mixed with the reactive gas and changes into a swirl form.
  • the reactive gas injected from the gas injection pipe 240 is not limited to changing the exhaust gas into a swirl form.
  • the gas injection pipe 240 has a plurality of nozzles formed at ends thereof to inject the reactive gas in multiple directions. Therefore, it is possible to have a swirl or a velocity component different from the exhaust gas according to the direction of the nozzle, and the exhaust gas mixed with the reactive gas may be changed into various shapes to flow inside the conduit 110. .
  • a hole (not shown) is formed in the second electrode part 130 ′ to which the gas injection pipe 240 is inserted and coupled.
  • a plurality of holes are formed in the second electrode part 130 ′ or spaced apart from each other in the circumferential direction.
  • the hole is formed to have an inclination by a set angle with respect to the tangential line of the circumferential surface of the second electrode 130.
  • the hole is most efficiently formed upstream than the region where the plasma discharge is concentrated. Therefore, referring to FIG. 9, the hole is formed in the second electrode part 130 ′ on the upper side of the two second electrode parts 130 ′ to couple the gas injection tube 240.
  • the reactive gas and the exhaust gas injected through the gas injection tube 240 are first mixed and then changed into a swirl to flow inside the conduit 110.
  • the reactive gas injected through the gas injection tube 240 is Since it flows along the inner circumferential surface of the second electrode part 130 ′, the exhaust gas may be changed into a swirl form by mixing with the exhaust gas.
  • a part of the reactive gas supplied from the gas injection tube 240 is also injected in the direction toward the exhaust gas inlet 131 in the second electrode portion 130 ⁇ , and the velocity component of the reactive gas is Since it has a velocity component opposite to the flow direction of the exhaust gas, the exhaust gas is pushed out so that the exhaust gas flows in the direction toward the second electrode portion 130 ′ in which the exhaust gas outlet 132 is formed. Delay and the interior of the conduit 110 increases the time of stay.
  • the residence time of the inside of the conduit 110 is increased by the reactive gas, thereby increasing the first electrode portion 220 and the first electrode. It is more exposed to the plasma discharge occurring between the two electrode portion 130 ⁇ has the effect of decomposing a larger amount of the exhaust gas and improving the decomposition efficiency of the exhaust gas.
  • FIG. 10 shows a plasma reactor 200a in accordance with another embodiment of the present invention.
  • FIG. 10 illustrates only the configuration of the first electrode part 220a among the plasma generating means in the plasma reactor 200 illustrated in FIGS. 7 to 9, so that only the first electrode part 220a will be described. Shall be.
  • the openings 225a are not arranged in a matrix arrangement. In this embodiment, the openings 225a are arranged to be spaced apart from each other along the circumferential direction of the conduit 110.
  • the first electrode portion 220a includes a first circumference 221a, a second circumference 222a, and a connection 223a.
  • the first circumference 221a is formed along the circumferential direction of the conduit 110
  • the second circumference 222a is along the length direction of the first circumference 221a and the conduit 110. Spaced apart from each other but is formed along the circumferential direction of the conduit 110, similar to the first circumferential portion (221a).
  • the connection part 223a connects the first circumference 221a and the second circumference 222a and is spaced apart from each other along the circumferential direction of the conduit 110.
  • the first circumference 221a, the second circumference 222a, and the first circumference 221a and the second circumference 222a which face each other are electrically connected to each other.
  • Two openings 225a are formed by a pair of connecting portions 223a, and the openings 225a are formed in a rectangular shape.
  • the opening 225a is not limited to a rectangular shape and may be formed in various shapes.
  • the widths of the first circumference 221a, the second circumference 222a, and the connecting portion 223a may all be the same or different. The width can be varied in a range in which the amount of discharge current can be reduced while maintaining the decomposition efficiency of the exhaust gas by the plasma discharge generated between the second electrode portion 130 ′.
  • FIG. 11 shows a plasma reactor 200b according to another embodiment of the present invention.
  • the second electrode portion 230b is extrapolated to the conduit 110 similarly to the first electrode portion 220b, but spaced apart from the first electrode portion 220b by a predetermined interval.
  • the first electrode portion 220b and the second electrode portion 230b have the same shape as that of the first electrode portion 220a shown in FIG. 10.
  • FIG. 12 shows a plasma reactor 200c in accordance with another embodiment of the present invention.
  • the first electrode portion 220c and the second electrode portion 230c are installed on the conduit 110.
  • the first electrode portion 220c and the second electrode portion 230c are formed with first slits 222c and second slits 232c at ends that are far from each other.
  • the first electrode portion 220c may be formed at an end portion of the first circumferential portion 221c formed along the circumferential direction of the conduit 110 and not facing the second electrode portion 230c.
  • One slit 222c is formed.
  • the second electrode portion 230c may have the second slit 232c at an end portion thereof not facing the first electrode portion 220c in the first circumference portion 221c formed along the circumferential direction of the conduit 110. Is formed. As shown in FIG.
  • the reason why the first slit 222c and the second slit 232c are formed is that the discharge voltage is closer to the position between the first electrode portion 220c and the second electrode portion 230c. In order to reduce the slit or the opening is not formed, it is a structure for reducing the discharge current in the distant place.
  • FIG. 13 shows a plasma reactor 200d according to another embodiment of the present invention.
  • FIG. 13 is a variation of the first electrode 220c and the second electrode 230c in the plasma reactor 200c shown in FIG. 12.
  • Each of the first electrode portion 220d and the second electrode portion 230d in the present embodiment further includes igniting electrodes 223d and 233d.
  • the igniting electrodes 223d and 233d are formed to reduce the discharge start voltage between the first electrode portion 220d and the second electrode portion 230d. Meanwhile, the igniting electrodes 223d and 233d may be formed in both the first electrode portion 220d and the second electrode portion 230d as shown in FIG. 12, but the first electrode portion 220d may be formed. ) And the second electrode portion 230d may be formed.
  • plasma discharge may occur well between the first electrode portions 220c and 220d and the second electrode portions 230c and 230d even at a low discharge voltage.
  • energy efficiency may be improved by reducing a discharge current in a portion where the first slit 222c and the second slit 232c are formed.
  • the second electrode 130 is provided at both ends of the conduit 110 as in the above-described embodiment.
  • the first electrode part 220e electrically connects the plurality of unit electrodes 221e and 222e spaced apart from each other along the longitudinal direction of the conduit 110 and the unit electrodes 221e and 222e. It includes the conductive connecting member 223e.
  • the unit electrode (221e, 222e) is one side is open and the discharge portion 221e formed in a ring structure and the plan is formed to extend to the opened one A branch 222e is included.
  • the ring structure of the discharge unit 221e may be variously formed in a circular or polygonal shape, and formed to correspond to the shape of the conduit 110.
  • the conductive connection member 223e is coupled to a fastening member, for example, a bolt, in a state of being fitted to the flange portion 222e of the unit electrodes 221e and 222e.
  • the unit electrodes 221e and 222e are electrically connected to each other by coupling the conductive connection member 223e.
  • it is not limited to the coupling by the fastening member, and may be coupled by welding or the like. Since the electrode parts are easily connected to each other by such a coupling structure, there is an advantage of easy installation.
  • the first electrode portion 220e connected as described above generates plasma discharge with the second electrode portions 130 connected to both ends of the conduit 110.
  • the plasma reactor 300 includes a conduit 310, a first electrode part 320, a second electrode part 330, and a housing 340.
  • the conduit 310 of the plasma reactor 300 is a flow path through which the exhaust gas flows.
  • the conduit 310 has a cylindrical shape through which the inside thereof is penetrated along the length direction.
  • the conduit 310 is formed of a dielectric including a high dielectric material such as alumina, zirconia (ZrO 2), yttria (Y 2 O 3), sapphire, quartz tube, glass tube, and the like.
  • the first electrode part 320 is extrapolated to an outer circumferential surface of the conduit 310 so as to surround the outer circumferential surface of the conduit 310, and is spaced apart from the second electrode parts 330 so as to be spaced apart from each other. Plasma discharge is caused between 330.
  • the first electrode part 320 is formed in a tube shape so as to surround the outer circumferential surface of the conduit 310. In general, the first electrode part 320 functions as a driving electrode to allow plasma discharge to occur between the second electrode parts 330. Therefore, an AC voltage is applied to the first electrode part 320. Referring to FIG. 15, the first electrode part 320 is formed to have a long length in the longitudinal direction of the conduit 310, but is not limited thereto.
  • the buffer portion is formed of a material or dielectric having an electrical conductivity, and the conduit 310 and The first electrode 320 has elasticity to be in close contact.
  • the second electrode portions 330 are connected to the conduit 310 at one or both ends of the conduit 310 in one embodiment according to FIGS. 15 and 16. In this embodiment, as shown in Figure 15 and 16, it will be described as being connected in communication with both ends of the conduit (310). Since the first electrode part 320 functions as a driving electrode to which an AC voltage is applied, the second electrode parts 330 may function as a ground electrode that may cause plasma discharge with the first electrode part 320. Do it. Therefore, the second electrode parts 330 are formed of a metal body.
  • the cross section of the second electrode part 330 is gradually reduced along the length direction, but the cross section of the second electrode part may be uniformly formed along the length direction.
  • the second electrode part 330 has an exhaust gas inlet 331 or an exhaust gas outlet 332 according to a position connected to the conduit 310. 15 and 16, the exhaust gas inlet 331 and the exhaust gas outlet 332 are formed in each of the second electrode units 330.
  • the second electrode parts 330b, 330c, and 330d may be extrapolated to an outer circumferential surface of the conduit 310.
  • the second electrode portions 330b, 330c, and 330d are spaced apart from each other by the set intervals with the first electrode portions 320b, 320c, and 320d.
  • the first electrode parts 320b, 320c, and 320d are driving electrodes to which an AC voltage is applied, and the second electrode parts 330b, 330c, and 330d are disposed between the first electrode parts 320b, 320c, and 320d.
  • the ground electrode is used to cause plasma discharge.
  • the present invention is not limited thereto.
  • an AC voltage is applied to both the first electrode portions 320b, 320c, and 320d and the second electrode portions 330b, 330c, and 330d, and any one of the first electrode portion and the second electrode portion is applied.
  • One may apply a relatively positive voltage, and the other may apply a relatively negative voltage to give a voltage difference between the two electrode parts to generate a plasma discharge.
  • the exhaust gas is introduced through the exhaust gas inlet 331 and flows into the conduit 310, and the exhaust gas having a predetermined pressure is present in the conduit 310.
  • an AC voltage is applied to the first electrode portions 320b, 320c, and 320d which are driving electrodes, movement of electrons is started and exhausted between the second electrodes 330b, 330c, and 330d which are ground electrodes. Plasma discharge is generated to decompose the gas.
  • the housing 340 may protect the outer circumferential surface of the conduit 310 and the first electrode portion 320 formed on the outer circumferential surface of the conduit 310. Wraps. The housing 340 forms a space between the outer circumferential surface of the conduit 310.
  • At least one of the first electrode unit 320 and the second electrode unit 330 has a structure in which the area is reduced to reduce power consumption by reducing the discharge current during plasma discharge. That is, the slit or opening 325 is formed in the first electrode 320 to reduce the area.
  • the first electrode portion 320 is a first circumference 321, the first circumference formed in the circumferential direction of the conduit 310 321 and the second circumference 322, which is spaced apart from each other along the longitudinal direction of the conduit 310 and is formed along the circumferential direction of the conduit 310 similarly to the first circumference 321, the first A plurality of first connecting portions 323 electrically connected to a circumference 321 and the second circumference 322 and spaced apart from each other along the circumferential direction of the conduit 310, and the first circumference 321.
  • the plurality of openings 325 are formed by the first circumference 321, the second circumference 322, the first connectors 323, and the second connectors 324.
  • the opening 325 of any one of the plurality of openings may have a pair of first connecting portions 323 facing each other and a pair of first connecting portions facing each other ( It is formed by a pair of second connectors 324 crossing each other across the 323. Looking at the other opening 325, the opening 325 crosses one side of the pair of second connecting portions 324 facing each other with the pair of second connecting portions 324 facing each other. It is formed by the first peripheral portion 321 and the first connecting portion 323 facing each other.
  • the openings 325 as described above are formed in an array in a matrix form as shown in FIG. 15.
  • the openings 325 formed as described above are formed in a rectangular shape. However, the shape of each of the openings 325 is not limited to the rectangle, and may be formed in more various shapes.
  • widths of the first circumference 321 and the second circumference 322 may be the same or different, and widths of the first connection 323 and the second connection 324 may be the same or different. can be different.
  • the width of the first circumference 321 and the second circumference 322 and the width of the first connection 323 and the second connection 324 need not be defined to be the same. It can be variously adopted by the manufacturer to minimize power consumption and discharge current. However, the widths of the first circumference 321 and the second circumference 322 may be equally formed to improve plasma discharge efficiency.
  • the first electrode part 320a may include a first circumference 321a, a second circumference 322a, and a connection part 323a. Include.
  • the first circumference 321a is formed along the circumferential direction of the conduit 310, and the second circumference 322a is along the longitudinal direction of the first circumference 321a and the conduit 310.
  • connection part 323a connects the first circumference 321a and the second circumference 322a and is spaced apart from each other along the circumferential direction of the conduit 310.
  • the first circumference 321a, the second circumference 322a, and the first circumference 321a and the second circumference 322a which face each other are electrically connected to each other.
  • Two openings 325a are formed by a pair of connecting portions 323a, and the openings 325a are formed in a rectangular shape.
  • the shape of the opening 325a is not limited to the rectangular shape but may be formed in various shapes.
  • the widths of the first circumference 321a, the second circumference 322a, and the connecting portion 323a may be the same or different from each other.
  • the width width may be variously adopted in the range that the discharge current amount can be reduced while maintaining the exhaust gas decomposition efficiency by the plasma discharge generated between the second electrode portion 330 by the manufacturer.
  • FIG. 18 illustrates a plasma reactor 300b according to another embodiment of the present invention.
  • the plasma reactor 300b illustrated in FIG. 18 may also include the second electrode part 330b.
  • On the outer circumferential surface of the conduit 310 is installed spaced apart from the first electrode portion (320b).
  • the first electrode part 320b and the second electrode part 330b are formed in the same shape as the first electrode part 320a shown in FIG. 17. Therefore, detailed descriptions of the shapes of the first electrode part 320b and the second electrode part 330b are omitted.
  • the shape of the first electrode part 320b and the second electrode part 330b is not limited to the shape shown in FIG. 18 but may be formed in the shape shown in FIGS. 15 and 16.
  • first slit 322c and second slit 322c are formed at ends of the first electrode 320c and the second electrode 330c which are far from each other.
  • the first electrode part 320c may be formed at an end portion of the first electrode part 330c not facing the second electrode part 330c formed in the circumferential direction of the conduit 310.
  • One slit 322c is formed.
  • the second electrode portion 330c may have the second slit 332c at an end portion of the second electrode portion 330c which does not face the first electrode portion 320c in the first circumference portion 321c formed along the circumferential direction of the conduit 310. Is formed.
  • the reason why the first slit 322c and the second slit 332c are formed as shown in FIG. 19 is that the discharge voltage is located between the first electrode part 320c and the second electrode part 330c. In order to reduce the slit or the opening is not formed, it is a structure for reducing the discharge current in the distant place.
  • FIG. 20 another embodiment of the first electrode part 320d and the second electrode part 330d of the plasma reactor 300d illustrated in FIG. 19 is a perspective view, wherein the first electrode is shown in FIG. It further includes igniting electrodes 323d and 333d formed in each of the portion 320d and the second electrode portion 330d.
  • the igniting electrodes 323d and 333d are formed to reduce the discharge start voltage between the first electrode 320d and the second electrode 330d.
  • only one of the first electrode part 320d and the second electrode part 330d may be formed.
  • plasma discharge may occur well between the first electrode portions 320c and 320d and the second electrode portions 330c and 330d even at a low discharge voltage.
  • energy efficiency may be improved by reducing a discharge current in a portion where the first slit 322c and the second slit 332c are formed.
  • the first electrode part 320e includes a plurality of unit electrodes 321e and 322e spaced apart from each other along a length direction of the conduit 310, and the plurality of units. And a conductive connection member 323e for electrically connecting the electrodes 321e and 322e.
  • the unit electrode has a discharge portion 321e having one opening and having a ring structure, and a flange portion 322e extending to the opened one. Include.
  • the conductive connection member 323e described above is coupled to a fastening member, for example, a bolt, etc. in a state of being fitted to the flange portion 322e of each unit electrode, and electrically connects the unit electrodes.
  • a fastening member for example, a bolt, etc.
  • it is not limited to the coupling by the fastening member, and may be coupled by welding or the like. Since the electrode parts are easily connected to each other by such a coupling structure, there is an advantage of easy installation.
  • the first electrode portion 320e connected in this manner may cause plasma discharge with the second electrode portion 330 connected to both ends of the conduit 310.
  • the ring structure of the discharge part 321e may be variously formed in a circular or polygonal shape.

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Plasma Technology (AREA)

Abstract

La présente invention se rapporte à un réacteur à plasma, et de façon plus précise, à un réacteur à plasma agencé entre une chambre de traitement et une pompe à vide de sorte à dissoudre le gaz d'échappement évacué de la chambre de traitement, ledit réacteur comprenant : un tube à travers lequel le gaz d'échappement s'écoule ; un moyen de génération de plasma, qui est monté sur le tube, pour dissoudre le gaz d'échappement en provoquant une décharge électrique de plasma ; un boîtier qui entoure le tube et crée un espace distinct entre le boîtier et la surface circonférentielle externe du tube ; un moyen de détection destiné à détecter des conditions environnementales dans le tube ou dans l'espace distinct ; et une unité de commande destinée à déterminer l'état du tube ou de l'espace distinct sur la base d'informations concernant les conditions environnementales reçues du moyen de détection.
PCT/KR2014/010120 2014-04-16 2014-10-27 Réacteur à plasma permettant de traiter un gaz d'échappement produit à partir d'une installation de traitement WO2015160057A1 (fr)

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CN201480077937.7A CN106170845A (zh) 2014-04-16 2014-10-27 处理发生于制程设备的废气的等离子体反应器

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KR10-2014-0045420 2014-04-16
KR1020140045420A KR101574121B1 (ko) 2014-04-16 2014-04-16 공정설비에서 발생되는 배기가스 처리 플라즈마 반응기
KR1020140051011A KR101611955B1 (ko) 2014-04-28 2014-04-28 공정설비에서 발생되는 배기가스 처리 플라즈마 반응기
KR10-2014-0051011 2014-04-28
KR10-2014-0070601 2014-06-11
KR1020140070601A KR101541817B1 (ko) 2014-06-11 2014-06-11 공정설비에서 발생되는 배기가스 처리 플라즈마 반응기

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JP2019503562A (ja) * 2016-01-13 2019-02-07 エムケイエス インストゥルメンツ， インコーポレイテッド ポンピング・ラインでの堆積クリーニングのための方法及び装置
CN109951944A (zh) * 2017-12-21 2019-06-28 宜林电子股份有限公司 利用针状电极的汽车用等离子簇离子发生器
US11024489B2 (en) 2016-01-13 2021-06-01 Mks Instruments, Inc. Method and apparatus for deposition cleaning in a pumping line
US11664197B2 (en) 2021-08-02 2023-05-30 Mks Instruments, Inc. Method and apparatus for plasma generation
US11745229B2 (en) 2020-08-11 2023-09-05 Mks Instruments, Inc. Endpoint detection of deposition cleaning in a pumping line and a processing chamber
US12159765B2 (en) 2022-09-02 2024-12-03 Mks Instruments, Inc. Method and apparatus for plasma generation

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TWI664354B (zh) * 2017-08-09 2019-07-01 揚億精密科技股份有限公司 渦流式氣體增壓排放輔助裝置

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US11745229B2 (en) 2020-08-11 2023-09-05 Mks Instruments, Inc. Endpoint detection of deposition cleaning in a pumping line and a processing chamber
US11664197B2 (en) 2021-08-02 2023-05-30 Mks Instruments, Inc. Method and apparatus for plasma generation
US12159765B2 (en) 2022-09-02 2024-12-03 Mks Instruments, Inc. Method and apparatus for plasma generation

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