WO2015140155A1

WO2015140155A1 - Transportation apparatus for moving and/or positioning objects

Info

Publication number: WO2015140155A1
Application number: PCT/EP2015/055533
Authority: WO
Inventors: Christian Wolfgang Ehmann; Christof Klesen; Martin Aenis
Original assignee: Mecatronix Ag
Priority date: 2014-03-19
Filing date: 2015-03-17
Publication date: 2015-09-24
Also published as: KR20160132884A; JP2017507870A; DE102014003882A1; JP2019194126A; KR101865166B1; DE102014003882B4; JP6538710B2

Abstract

The present invention relates to a transportation apparatus for moving and/or positioning objects, comprising: - a base (12) which extends along a transportation direction (z) and on which a plurality of actively controlled magnetic bearings (24a, 24b, 26a, 26b, 28, 29) which are spaced apart from one another in the transportation direction (z) are arranged, - a support (30) which is mounted in a contact-free manner on the base (12) by means of at least some magnetic bearings (24a, 24b, 26a, 26b, 28, 29) and can be moved relative to the base (12) in the transportation direction (z) by means of at least one drive (18) and on which at least one object (80) can be arranged, - at least one detection device (40, 42, 44, 46, 48) for determining a position of the support (30) in the transportation direction (z) relative to the magnetic bearings (24a, 24b, 26a, 26b, 28, 29), and - a controller (50, 51), which is coupled to the detection device (40, 42, 44, 46, 48, 49), for selectively driving at least one magnetic bearing (24a, 24b, 26a, 26b, 28, 29), which is magnetically operatively connected to the support (30) or forms an operative connection with the support (30) within a prespecified time interval, depending on the determined position of the support (30).

Description

Transport device for moving and / or positioning objects

Description

Technical Field The present invention relates to a transport device for moving and / or positioning objects, typically substrates, along a transport direction predetermined by a base. The transport device has at the base a plurality of spaced apart in the transport direction (z) and each actively controlled magnetic bearings for non-contact storage of a movable or displaceable along the base carrier.

In addition, the invention relates to a method for moving and / or positioning of objects by means of the transport device and an associated computer program for moving and / or positioning of objects by means of said transport device.

background

Magnetically mounted transport devices are known in principle from the prior art, for example from WO 2006/015636 A1 or from EP 2 543 749 A1. By means of the magnetic bearing, it is possible to use a support for receiving objects, typically of substrates, contactlessly along an elongate base or in a frame of one of two parts. mensionally configured base formed contact-free base to move and position according to predetermined process requirements, such as for the treatment of the substrate position. For the magnetic bearing a plurality of, each equipped with at least one switchable solenoid magnetic bearings are provided along the transport direction, which interact with a ferromagnetic counterpart. Vacuum environments must be realized for various machining processes to be performed on the object or substrate to be moved. The arrangement of a magnetic bearing transport device in a vacuum environment, such as in a corresponding process chamber, requires the arrangement of the Ele- romagnete on a stationary base, so that the heat generated during operation of the electromagnets controlled, can be dissipated, for example by means of a cooling circuit. The carrier movably held at the base by means of a plurality of magnetic bearings is to be equipped in this respect only with ferromagnetic and / or permanent magnetic counterparts, which cooperates with the approximately equidistant in the transport direction, but spaced apart magnetic bearings. The individual magnetic bearings are typically actively controlled. Each of the magnetic bearings is typically equipped with a distance sensor, which measures the distance between the support and the base in the plane (x, y) perpendicular to the transport direction (z) permanently or periodically. Corresponding measuring signals are compared via a control loop, for example with a nominal value. In accordance with a reference value comparison, the electromagnet of the respective magnetic bearing is controlled via a controller and an amplifier such that a predetermined distance is maintained between the magnetic bearing arranged on the base and the carrier. For positional control in the transverse direction (x), for example, two magnetically interacting with the opposite side edges of the carrier can be used for the floating and non-contact mounting of the carrier on the base. be provided on opposite sides of the carrier. There are also implementations of both tensile and compressive magnetic bearing generating, for example in the form of Lorenzaktoren conceivable, which are provided only along a side edge of the carrier. To compensate for the weight of the carrier, at least two magnetic bearings spaced apart from one another transversely to the transport direction are typically provided above the carrier, which are arranged, for example, in the region of the outer edges of the carrier on the base. At the base, magnetic bearings which act both in the transverse direction and in the vertical direction are spaced apart from one another in the transport direction and are arranged successively.

For the movement in the transport direction, a corresponding number of vertically and horizontally acting magnetic bearings are to be arranged on the base in the transport direction. The base-side arrangement of the electromagnets of the magnetic bearings forms discrete support or bearing points for the carrier. The carrier typically has an extension in the transport direction which is greater than the distance between at least two magnetic bearings which follow each other in the transport direction. For the transport of the carrier itself, any drive can be used. Typically, the drive is designed without contact and has a linear drive whose electrically actuated components are also arranged on the base.

Due to the discrete and spaced arrangement of a plurality of magnetic bearings in the transport direction enters a forward transport in the transport direction portion of the carrier during a forward movement successively in the range of action spaced in the transport direction magnetic bearings. The same applies to the rear in the transport direction boundary of the carrier. In the case of a translational movement along the base, a variety of disturbances can occur, in particular when transferring the carrier from a magnetic bearing to a magnetic bearing upstream in the direction of transport, which can influence and impair precise storage and spacing regulation in a plane perpendicular to the transport direction. On the one hand, situations may occur in which, for example, the boundary of the carrier located in the direction of movement already passes outside the range of action of a magnetic bearing before the front boundary returns to the effective area of another magnetic bearing upstream in the transport direction. In such situations, the carrier is temporarily held by a reduced number of magnetic bearings. The weight of the carrier is thus distributed over a reduced number of magnetic bearings. Although the active distance control of the individual magnetic bearings can react comparatively spontaneously thereto, the alternating support of the carrier at a different number of bearing points constitutes a disturbance which can impair the precision and accuracy of the entire transport device. Another disturbance may result from the fact that the carrier when entering into an area of action of a magnetic bearing or when moving out of the range of action of a magnetic bearing for the magnetic bearing control loop represents an instantaneous disturbance, and that the magnetic bearing in question at a reaching into its sphere of action carrier initially a generates an amount of unadjusted bearing or holding force that only "settles" after a few iterations of the magnetic-bearing control loop to a correct setpoint. Such disturbances can result from the fact that the range of action of the magnetic bearing and the measuring range of a sensor of the control loop slightly differ from each other for structural reasons. Another scenario may occur when the carrier, for example, with its rear in the direction of transport boundary, although no interaction with the magnetic bearing associated distance sensor, but is still in magnetic operative connection with the respective magnetic bearing. In the event of a loss of the distance signal or a sharp increase in the distance due to an "extension" from the area of the respective magnetic bearing, the control loop of the magnetic bearing in question sets a comparison wise large holding force, which can ultimately lead to an unwanted oscillation or to a similar disturbance of the carrier movement.

In contrast, the present invention is an object of the invention to provide an improved transport device for moving and / or positioning objects, a corresponding method and an associated computer program, which allows the most precise, easy to control and largely trouble-free movement of the carrier along the base of the transport device , The improvement should be possible with only the least possible intervention in existing transport device concepts, in particular to allow retrofitting and improving existing transport devices.

Invention and advantageous embodiments

This object is achieved with a transport device according to claim 1, with a method for moving and / or positioning of objects by means of such a transport device according to claim 14 and with an associated computer program according to claim 18. Advantageous embodiments are each the subject of dependent claims.

Accordingly, a transport device is provided for moving and / or positioning objects, in particular substrates to be treated. The transport device has a base which extends at least along a transport direction (z) and at which a plurality of magnetic bearings spaced apart from one another and respectively actively controlled in the transport direction (z) are arranged. Each equipped with electromagnet magnetic bearings are thus stationary and immovable arranged on the base. The transport device furthermore has a carrier which is mounted without contact on the base of at least some magnetic bearings and which is movable relative to the base by means of at least one drive in the transport direction (z). At least one object to be moved or positioned can be arranged on the carrier. The wearer may in particular may be configured as a substrate holder, for example as an electrostatic or mechanically acting substrate holding device.

The transport device further comprises a detection device for determining a position of the carrier in the transport direction. The detection device is in particular designed to determine the position of the carrier, relative to the transport direction, relative to the magnetic bearings. In this case, the detection device is used to obtain information which are currently in magnetic active connection with the carrier in the transport direction at a predetermined distance, which of the magnetic bearings, approximately corresponding to the carrier speed in the transport direction (z), will soon be in operative connection with a specific magnetic bearing and / or to determine which of the presently still in operative connection with the carrier magnetic bearing comes soon due to the locomotion of the wearer outside the range of action of the wearer.

Furthermore, the transport device has a control coupled to the detection device. This serves for the selective actuation of at least one magnetic bearing which is in magnetic operative connection with the carrier and / or for the selective activation within a predetermined time interval, which will soon be in operative connection with the carrier. The selective control of selectable and single or multiple magnetic bearings takes place here as a function of the determined position of the carrier with respect to the transport direction.

By means of the detection device and its coupling with the control, in particular the magnetic bearings which actively engage in the course of locomotion of the carrier with a front carrier boundary can be specifically controlled for the purpose of an initially gentle application of force to the magnetic bearing. The same can also be the case for a magnetic bearing that is still in operative connection with a rear boundary at a first moment, the carrier being outside in a subsequent or later moment reaches the sphere of action of the magnetic bearing in question. The actuation and magnetic interaction of a magnetic bearing which is still in operative connection with a rear boundary of the support can be adjusted in a manner that is more or less proactive in this way, so that any disturbances on the moving support can be eliminated or minimized as far as possible.

In this case, it is not only conceivable that magnetic bearings which engage or disengage only in each case with front and rear boundary of the carrier can be selectively activated as a function of the determined carrier position. Rather, it is also conceivable that as a function of the determined carrier position in the transport direction and those magnetic bearings are selectively controlled by the selective control of individual magnetic bearing, which come to lie approximately in an intermediate region between the front and rear boundary of the carrier. An uneven weight distribution or an eccentric center of gravity of the wearer can be directly compensated in this way. By way of example, the spatial weight distribution of the carrier can be taken into account via the detection device and / or via the controller and used for the most precise and trouble-free movement of the carrier along the base.

By means of the detection device and the control, individual magnetic bearings which reach into a certain region of the carrier can be precisely controlled in advance and in advance so as not to only have to react to actually occurring interactions between the carrier and the respective magnetic bearings.

The predictive control of individual magnetic bearings that can be achieved by means of the detection device and the controller can increase and improve the precision and accuracy for the support and the movement of the carrier on the base. According to a development thereof, it is provided that the controller is designed to selectively drive at least one magnetic bearing following a predetermined time function or a location function between an activated state (A) and a deactivated state (D). For example, for a front engagement of the carrier with a respective magnetic bearing to be engaged, a gentle continuous activation and activation of the respective magnetic bearing taking some time period may be implementable by the controller. Similarly, instead of a time interval or time, the actual instantaneous travel distance or position of the carrier relative to the respective magnetic bearing act as a manipulated variable. In the knowledge of a constant and / or instantaneous speed of the carrier in the transport direction, a time function can be transferred or converted into a corresponding location function and vice versa.

The time and / or position function provides an association of a control signal, which bears the electromagnet of the magnetic bearing, with a current position of the carrier. The actual position of the carrier relative to the magnetic bearing can be determined in knowledge of the carrier speed in the transport direction and as a result of determining the passage of the carrier past a known reference point. The control signal for the electromagnet of the respective magnetic bearing can also be provided via a time function.

In this way, it can be avoided that the magnetic bearing in question applies directly to the recognition of the carrier too much holding or bearing gergkraft applied, which could affect the equilibrium position of the carrier, which is held by other magnetic bearings. Similarly, for the disengagement of, for example, the rearward in the direction of movement of the carrier carrier with a respective magnetic bearing may be already controlled before reaching a disengaged position of the carrier and magnetic bearing magnetic bearing in question and / or continuously from an activated state into a deactivated state. Then tears in the course of further movement of the wearer, such as an ab- Level sensor signal, so this has no effect on the control of the magnetic bearing or its electromagnet, since the magnetic bearing is then already in a deactivated state. Consequently, in such situations, there is no or little interaction with the carrier from the disengaged magnetic bearing.

Of course, it is also conceivable that the selected magnetic bearing is adjustable to any conceivable intermediate value between the activated state and the deactivated state. In particular, it is conceivable to regulate the transition from the activated to the deactivated state as well as from the deactivated to the activated state as a function of the speed. It is particularly conceivable that the controller adjusts the activated state when the magnetic bearing in question is within a predetermined distance to the front or rear boundary of the carrier. A deactivated state should preferably be reached when the front or rear boundary of the carrier lying in the transport direction has completely come outside the effective range of the respective magnetic bearing.

The temporal function can represent, for example, a current for acting on the electromagnet of the magnetic bearing over time. The function itself can have the nature of a rectilinear ramp, a parabola, a hyperbola, or any other shape. It is also conceivable that the function also has certain unsteady or discontinuous points, if this serves to maintain a required distance between carrier and base.

The slope of the function or the predetermined time interval, within which the activated state of the function following in the deactivated state and vice versa, can correlate with the speed of movement of the carrier in the transport direction. At high speeds, the transition from the activated state to the deactivated state or conversely from the deactivated state to the activated state takes place within a comparatively short time interval. At comparatively low trans- Port speeds, the temporal function can be stretched accordingly.

It is also conceivable that the course of the temporal function varies depending on the speed. Such variations may be due, for example, to the inertial behavior of the carrier as well as its interaction with the individual magnetic bearings.

According to a further embodiment, the controller is designed to continuously convert at least one magnetic bearing over a predetermined time interval from a deactivated state (D) into an activated state (A) and / or vice versa, from an activated state (A) continuously into to transfer a deactivated state (D). By means of a continuous transition between deactivated and activated state, the control can bring about a gentle activation and / or deactivation of individual magnetic bearings.

This may prove to be advantageous in particular when engaging or disengaging between individual magnetic bearings and carriers. In accordance with a continuous movement of the carrier relative to the base, a comparatively smooth and low-interference or trouble-free transfer of the carrier from a magnetic bearing to a subsequent magnetic bearing in the transport direction can take place by means of a continuously or continuously configured temporal function. According to a further embodiment, the detection device is powered by a data transmission device, such as a data bus. Via the data transmission device, the position of the carrier in the transport direction and / or the speed of the instantaneous movement of the carrier in the transport direction can be provided. The data transmission device can in particular be coupled to the drive, which typically extends along the transport direction. For example, this can be a trans- Have port direction extending spatial coding, which allows a determination of the position of the carrier in the transport direction.

For example, the drive can provide position and / or speed parameters of the carrier by its coupling with the detection device. However, it is also conceivable that a global control of the transport device or a process device which is designed to carry out a treatment process of the object or of the substrate generates and outputs such control, position and speed commands that can be implemented by the drive of the transport device , In that regard, the detection device could receive only by coupling with the process control corresponding position and / or speed parameters of the carrier and provide the control of the transport device for selective control of individual magnetic bearings.

The provision of position and / or speed parameters via a data transmission device is particularly advantageous for the retrofitting of existing transport devices, since in this case no additional components need be reserved and installed for determining the carrier position in the transport direction and / or for the speed determination. The carrier position and / or carrier speed would be present anyway in an approximately bus-based data transmission device, which, for example, can also network all magnetic bearings with one another. According to a further embodiment, the detection device is designed to determine the speed of the carrier. The controller is also designed and provided to control at least one magnetic bearing as a function of the determined carrier speed. The carrier speed in the transport direction can either be measured directly by one or more detection devices or, for example, in the case of an embodiment in the form of a data transmission device, for example via the or provided via a global control of the transport device.

The detection device can be designed to independently determine and measure both the carrier position and the carrier speed. For this purpose, it can have at least one, preferably a plurality of sensors arranged along the transport direction, which sensors detect, for example, a slipping past of the carrier. Due to the known position of individual sensors and their distance in the transport direction, position and speed parameters of the carrier can thus be determined and made available to the controller. It is also conceivable that the detection device has, for example, a visual detection system, for example a camera system, in order to determine the position and / or speed of the carrier. For the selective control of individual magnetic bearings during transport of the carrier along the base, it is above all the current position of the carrier relative to the base that has to be determined. This can be done in different ways. On the one hand, a current absolute position of the carrier can be determined via the drive and transmitted to the controller via a data-related coupling between the drive and the controller. Furthermore, it is conceivable, with knowledge of a constant speed of the carrier in the transport direction, to detect only the passing of, for example, a front boundary on a magnetic bearing, for example by means of a position sensor. With knowledge of the position of the carrier at a time and with knowledge of the prevailing speed, the current position of the carrier can be determined or predicted at any time. The speed can e.g. be provided via a data transmission device.

It is also conceivable to measure the position of the carrier in the transport direction by means of one or more position and / or distance sensors. It can be provided for this purpose, for example, one or more non-contact in the transport direction sensors. By means of measuring in the transport direction and in a or multiple magnetic bearing integrated sensors, a connection to a data transmission device is not required, or the data transfer in a bus system can be reduced in an advantageous manner. The controller may be configured according to a further embodiment either as a global controller, which is coupled, for example, with all the magnetic bearings of the transport device. In this way, individual magnetic bearings can be selectively controlled and accordingly activated or deactivated by means of a single control. Alternatively, however, it is also conceivable that a plurality of decentralized controls are provided, which are each coupled to a separate detection device.

Position and speed parameters can be determined locally or decentrally in this way and accordingly be used directly for controlling affected magnetic bearings. Such a solution reduces the data traffic, for example, to a data transmission device, such as a bus system which couples data components to one another in terms of data technology. According to a further embodiment, a number of magnetic bearings each have an electromagnet and a control loop comprising a distance sensor for non-contact bearing of the carrier on the base. The control loop of the magnetic bearing typically comprises, in addition to the distance sensor, a desired value transmitter coupled to the distance sensor, a controller and an amplifier. The setpoint generator can be used to provide the controller with an actual value for the distance between base and carrier.

The prevailing distance can be detected by means of the distance sensor and measured quantitatively. A corresponding measurement signal can then be compared as an actual value with the desired value, so that the electromagnet can be acted upon by corresponding electrical signals to maintain a predetermined distance. The control loop can be used for a digital implementation. subject to a predetermined timing, typically in the range of a few kilohertz. However, analogue implementations of the control loop are also conceivable, so that the control loop can respond to any distance changes in each case with far-reaching delay. By means of the control loop formed from sensor, setpoint generator, regulator, amplifier and electromagnet, the magnetic bearing can be designed as actively controlled magnetic bearing.

In particular, if each of the magnetic bearings arranged on the base has its own control loop, the data transfer between, for example, a central control and / or a bus system interconnecting all magnetic bearings can be reduced in an advantageous manner.

By means of the control loop, each of the magnetic bearings can act quasi self-sufficient, comparable to a suspension spring and respond to changes in distance between the carrier and the base. The distance sensors are for the qualitative and quantitative detection and determination of distances in a plane perpendicular to the transport direction, that is formed in an x-y plane. For the lateral storage, that is, for the position control of the carrier in the transverse direction (x), two electromagnets may be provided on the base on the opposite outer sides of the carrier. For bi-directional magnetic bearings, e.g. can have a tensile and pressure force generating Lorenzaktor can also satisfy a one-sided arrangement. To compensate for the weight is basically the provision of a series of electromagnets, to provide approximately above the carrier. Typically, to compensate for the weight and for floating and non-contact bearing of the carrier in a plane perpendicular to the transport direction (z) each in the transverse direction (x) spaced from each other, approximately at the left and right outer edge of the carrier provided magnetic bearing above the carrier on the Base arranged.

In accordance with a further embodiment, detection device has at least one position sensor or distance sensor arranged on one of the magnetic bearings. sensor up. In this case, it is also advantageously provided that the detection device is data-technologically coupled to a data transmission device, such as a data bus system, or is formed by such a system. It is advantageous if the detection device by means of a data-technical coupling, such as the drive, the actual speed of the carrier in the transport direction, for example, continuously provided. For determining the position of the carrier, it is sufficient if only a first or one of the first magnetic bearing located in the transport direction is provided with a position or distance sensor by means of which the passage of the carrier on the relevant magnetic bearing can be detected.

According to a further embodiment, the detection device has a plurality of non-contact position sensors, of which at least one are respectively arranged on the magnetic bearings, and which are designed to determine a position of the carrier in the transport direction (z) relative to a respective magnetic bearing. The position sensors can be comparatively simple and inexpensive compared to the distance sensors of the control loop of the respective magnetic bearings. While the distance sensor has to determine a distance in the direction of action of the magnetic bearing as precisely as possible, it is sufficient if the position sensors merely provide a binary signal which provides information as to whether the carrier is located inside or outside the range detectable by the position sensor. The position sensor may be implemented similar to a light barrier, so that it serves only to determine whether the carrier is at a given time in the region of the magnetic bearing.

The position sensors can be implemented in a variety of ways. Conceivable are optical sensors, capacitive sensors as well as magnetic sensors that exploit, for example, the Hall effect. By forming the detection device in the form of, for example, a position sensor arranged on each magnetic bearing, a position sensor array is provided in the transport direction, by means of which, in particular, by networking a plurality of position sensors. tion sensors not only the current position of the carrier, but also its speed can be determined. The arrangement of the position sensors directly on the magnetic bearings is advantageous to the extent that with comparatively simple implemented and inexpensive realizable position sensors, for example, the retraction or extension of a front or rear boundary in or out of the range of action of a magnetic bearing is precisely determined.

According to a further embodiment, a distance sensor and at least one position sensor are arranged on at least one of the magnetic bearings, typically on all magnetic bearings. The position sensor can, with respect to the transport direction, offset from the distance sensor arranged. Based on the transport direction of the position sensor can be upstream of the distance sensor or also downstream. The position sensor in question can in this way determine a front or rear boundary of the carrier before it either enters the effective range of the magnetic bearing or outside the effective range of the magnetic bearing. In this way, the position of the front and / or rear limits of the carrier can be determined in advance, that is to say before the occurrence of a corresponding magnetic interaction with the relevant magnetic bearing.

According to a further embodiment, two position sensors in the transport direction (z) are arranged at a distance from one another on at least one of the magnetic bearings, typically on all magnetic bearings. The distance sensor of the magnetic bearing is in this case, based on the transport direction between the two position sensors. A position sensor is thus, in relation to the transport direction, upstream of the distance sensor, while the other position sensor is located downstream of the distance sensor. In this way, forward and backward movements in the transport direction of the carrier alike, so to speak mirror-symmetrically determined. The provision of two position sensors is particularly especially advantageous if the transport device is designed for forward and backward movements of the carrier relative to the base. Then change namely front and rear boundaries of the carrier with respect to the respective transport direction.

According to a further embodiment, however, the distance sensor of a magnetic bearing, which is typically integrated into the control loop of the magnetic bearing, act as a detection unit and accordingly both for detecting in the transport direction (z) front and / or rear lying ometrischen boundary of the carrier and for determining a distance (d) between the carrier and the base in a plane perpendicular to the transport direction of the carrier, typically in the xy plane.

The distance sensor, which typically forms a magnetic sensor and can be based on the utilization of the Hall effect, is in principle also able to determine the position of the carrier in the transport direction, in particular the passing of a front and / or rear boundary of the carrier to detect the relevant magnetic bearing. Such a configuration may require two different operating modes of the distance sensor. In a first or basic mode, the distance sensor may be designed for position detection of the carrier. For example, if the distance sensor has detected a carrier entering with its front boundary into the area of action of the sensor or of the magnetic bearing, it can transmit this to the central or local control so that it drives the relevant magnetic bearing in the intended manner.

With or before reaching a fully activated state of the distance sensor can then be switched to a second or distance mode in which it determines the distance in the direction of action of the magnetic bearing quantitatively and precisely for the active control of the magnetic bearing. According to a further development of this, it can further be provided that the carrier has a non-magnetic, ie non-ferromagnetic and non-permanent-magnetic, section in a border immediately adjacent to a front and / or rear boundary during transport of the carrier into the effective region of the magnetic bearing , The section is in particular largely free of interaction with the magnetic bearing. Since the front and / or rear geometric boundary of the carrier can be determined by the distance sensor, such a position detection of the switching on and / or off of the respective magnetic bearing can trigger or initiate.

If the magnetic bearing is activated, for example, by detection of the front boundary when the carrier enters the area of action of the magnetic bearing, then such activation has no or only a slight influence on the carrier, since only the non-magnetic portion of the carrier lies in the area of action of the carrier Magnetic bearing passes. Only with the advance of the forward movement of the carrier, a ferromagnetic and / or permanent magnetic section adjacent to the front nonmagnetic section passes successively into the area of action of the already fully activated magnetic bearing, whereby a holding, supporting or bearing force for the carrier can be built up continuously and successively.

In that embodiment, in which a ferromagnetic region of the carrier which is in operative connection with the magnetic bearings only fills a subregion of the geometrical outer dimension of the carrier in the transport direction, the selective actuation of individual magnetic bearings can also take place instantaneously, wherein the time function for activating the magnetic bearings is for example a jump or delta function. According to a further embodiment, it is also conceivable that at least two distance sensors spaced apart from one another in the transport direction (z) are arranged on at least one of the magnetic bearings, of which at least one is as Detection unit acts. It is conceivable that one of the distance sensors permanently acts as a position sensor, while the other distance sensor for quantitative measurement of the distance between the carrier and the base of the magnetic bearing functions. Instead of a static function assignment of the two distance sensors but also a dynamic assignment, in particular a change in function of the two distance sensors is conceivable. This in particular when the magnetic bearing in question interacts with a central region of the carrier, which, based on the transport direction between, is located approximately centrally between the front and the rear boundary of the carrier.

According to a further independent aspect, the invention further relates to a method for moving and / or positioning objects by means of a transport device described above. The method has the following steps:

Moving the carrier in the transport direction along the base by means of the drive - Determining a position of the carrier in the transport direction relative to the magnetic bearings by means of a detection device and selective driving at least one with the carrier in magnetic operative connection or within a predetermined time interval only in the future with the carrier in operative connection passing magnetic bearing, respectively depending on the determined position of the carrier.

The method in question can be carried out by means of the transport device described above. In that regard, all features and advantages described for the transport device also apply in the same manner to the method; and vice versa. According to a further embodiment of this, the magnetic bearing, which is in operative connection with the carrier or is in operative connection with the carrier within a predetermined time interval, follows a predetermined temporal function between an activated and deactivated state. In that regard, by the position determination of the carrier in the transport direction the soon coming to the carrier operatively connected magnetic bearing anticipatory and already beforehand a predetermined temporal function, such as ramped and accordingly gently controlled or turned on or activated. A transfer of the carrier to the accordingly gently activated magnetic bearing can be done in this way very precise and far-reaching trouble-free.

According to a further embodiment of the method, at least one of the magnetic bearings is selectively controlled to compensate for distance variations between the carrier and the base during movement of the carrier in the transport direction. The type of concrete control can be determined empirically, for example by calibration. Suitable temporal functions for controlling the deactivation or activation of individual magnetic bearings can be stored in the controller, for example in the form of lock-up tables.

Instead of a time function, a location function can also be stored, so that the activation and accordingly the activation or deactivation of the magnetic bearing takes place quantitatively as a function of the respectively prevailing position of the carrier in the transport direction. With knowledge of the speed of the carrier, a time function stored for instance in the memory of the controller can also be transferred at any time into a location function and vice versa. Furthermore, it is conceivable that the activation or deactivation of individual magnetic bearings takes place depending on the transport speed.

According to a further embodiment it is further provided that during the movement of the carrier along the base at least one of the magnetic warehouse is selectively controlled. In this case, the actuated magnetic bearing, in relation to the transport direction, interacts with a front boundary and / or with a rear boundary of the carrier or only comes into operative connection with the corresponding boundary of the carrier within a predetermined time interval. In this way, a forward-looking activation or deactivation of one or more magnetic bearings can be brought about, which enable a far-reaching, trouble-free translational movement of the carrier along the base. It goes without saying that, for example, if two magnetic bearings spaced apart from one another in the transverse direction (x) are provided, two magnetic bearings which interact with a left and a right side of the carrier, for example, can be activated or deactivated synchronously. In a further aspect, finally, a computer program for moving and / or positioning objects by means of a transport device described above is provided. The computer program in this case has program means for moving the carrier in the transport direction along the base, program means for determining a position of the carrier in the transport direction relative to the magnetic bearings and program means for selectively driving at least one of the carrier in magnetic operative connection or within a predetermined time interval the carrier in operative connection passing magnetic bearing in dependence of the determined position of the carrier.

The computer program can be implemented in particular in the controller, which is coupled to the detection device for determining the position of the carrier in the transport direction. The controller can be arranged globally, but also multiple and decentralized on the transport device or on each of the magnetic bearings. The computer program is used in particular for computer-aided implementation of the described method for moving and / or positions of objects and the operation of the previously described Transport device. All in terms of the above-described transport device and the method for moving and / or positioning of objects mentioned features, advantages and properties apply equally to said computer program; and vice versa.

Brief description of the figures

Other objects, features and advantageous embodiments of the invention will be explained in the following description of exemplary embodiments. 1 shows a schematic cross section through a transport device in the plane perpendicular to the transport direction; a schematic representation of a magnetic bearing with a control loop, a schematic plan view of the transport device viewed from above, a simplified schematic representation of the carrier viewed from above,

5 shows a further embodiment of the carrier viewed from above,

6a to 6f show a schematic illustration of a plurality of magnetic bearings spaced apart in the transport direction in a time sequence with carrier moved in the transport direction, FIGS. 7a to 7f show an alternative embodiment of individual magnetic bearings in a representation comparable to FIG. 8a to 8e, a further embodiment of individual magnetic bearing in a representation according to FIGS. 6 and 7,

9a to 9e show a further embodiment of a magnetic bearing and a modified carrier design in a sequence-like representation to illustrate the carrier movement in the transport direction, a schematic flow diagram of the method for moving and positioning the carrier along the base and a simplified schematic representation of a temporal function Control of a selected magnetic bearing.

Detailed description

The transport device 1 0 shown schematically in FIGS. 1 and 3 has a stationary base 1 2, at which a plurality of spaced along a transport direction 1 1 (z) and spaced magnetic bearing 24, 26, 28, 29 are arranged. The magnetic bearings 24, 26, 28, 29 each have an electromagnet 62 and a core 63, as shown in the enlarged schematic view of FIG. 2 using the example of the magnetic bearing 24. The electromagnets 62 are each arranged on the stationary base 1 2, so that the waste heat generated during operation of the individual magnetic bearings 24, 26, 28, 29 can be removed controlled under vacuum conditions.

At the base 1 2, a carrier 30 by means of the magnetic bearings 24, 26, 28, 29 mounted without contact. The carrier 30 serves to receive and fix an object 80, which, as shown in FIG. 1, can be designed as a substrate. The carrier 30 can be configured as a substrate carrier or can accommodate or support a substrate carrier, for example an electrostatic substrate carrier. In the embodiment according to FIG. 1, a substrate treatment from below is provided. However, it is equally conceivable to arrange objects 80 to be treated on the upper side of the carrier 30. The magnetic bearings 24, 26 would then be displaced into the edge regions of the carrier 30 lying on the left and right in the representation of FIG. 1, and the base 12 would provide a corresponding clearance between the magnetic bearings 24, 26.

For moving and transporting the carrier 30 in the transport direction 1 1, a drive 18 is arranged on the base. In particular, the drive 18 can be designed as a linear motor, the coils of the linear motor 18 also being arranged on the base 12 here. The linear motor 18 can also be provided with a spatial coding 19 in the transport direction 11, so that via the interaction of the linear motor 18 with a corresponding counterpart, for example in the form of a magnetic rail 20 arranged on the carrier 30, position information in the transport direction (z) by means of the drive 18 are determinable.

Associated with the respective magnetic bearings 24, 26, 28, 29 are on the carrier 30 corresponding, in the transport direction (z) extending ferromagnetic bearing sections see 34, 36, 38, 39. By means of the ferromagnetic bearing sections, which may be configured for example as a ferromagnetic rail can, the carrier 30 with the individual magnetic bearings 24, 26, 28, 29 in magnetic operative connection. Wei already mentioned are for the lateral mounting of the carrier 30 also conceivable to provide only on one side of a series bidirectional acting Lorenzaktoren, so that only on the left or right in Fig. 1 outside of the carrier 30, a series of spaced apart in the transport direction magnetic bearings 28 or 29 are provided.

Each of the magnetic bearings 24, 26, 28, 29 has a control loop 60 shown separately in FIG. 2 using the example of the magnetic bearing 24. The control loop 60 comprises an electromagnet 62 having an electrically actuatable coil 64 provided with a core 63. In particular for storage in the transverse direction (x) can also core-free coils, ie coils are provided without ferromagnetic core. By applying electric current to the coil 64, a magnetic field interacting with the ferromagnetic bearing portion 34 of the carrier 30 can be generated. The control loop 60 also has a distance sensor 61, which is designed for contactless measurement of a distance from the ferromagnetic bearing section 34.

In other words, by means of the distance sensor 61, the distance d between the base 12 and the carrier 30 in the effective direction of the relevant magnetic bearing 24 can be determined. The distance sensor 61 may, for example, be designed as a magnetic sensor and provide a precise and quantitative distance determination by utilizing the Hall effect. The detectable by the distance sensor 61 signal is fed to a setpoint generator 68 and a controller 67. The setpoint generator 68 can specify a distance setpoint. In the controller 67, each setpoint value can be compared with the actual value determined via the distance sensor 61.

The controller 67 determines from the comparison of setpoint and actual value, a control signal which can be fed via an amplifier 66 of the coil 64. The control loop 60, which is typically implemented in a digital or analog manner, thus enables a suspended holding or a floating and non-contact suspension of the carrier 30 on the base 12.

The opposite, approximately left and right, in x- or transversely spaced apart from each other magnetic bearings 28, 29 are equally as well as the arranged above the support 30 magnetic bearings 24, 26 selectively controlled in the context of the invention. For the sake of simplicity, for purposes of illustration, reference will now be made only to the magnetic bearing 24, 26 compensating for the weight of the carrier 30.

In the illustration according to FIG. 3, the base 12 is symbolically represented by two guide sections 14, 16, on which several, in the transport direction 1 1 Magnetic bearings 24a, 24b, 24c, 24d, 24e, 24f, 24g which are spaced apart from one another regularly or equidistant from one another and magnetic bearings 26a, 26b, 26c, 26d, 26e, 26f, 26g corresponding to the guide section 16 are arranged. A similar configuration and arrangement of a plurality of magnetic bearings is also provided for the lateral magnetic bearings 28, 29. These can be controlled in a corresponding manner, as well as the magnetic bearings 24, 26.

In the illustration according to FIG. 3, a detection device 42 is provided, by means of which the current position of the carrier 30 with respect to the transport direction 1 1 (z) and in relation to the individual magnetic bearings 24a, 24b, 24c, 24d, 24e , 24f, 24g and 26a, 26b, 26c, 26d, 26e, 26f, 26g can be determined. Furthermore, the transport device 110 shown in FIG. 3 has a central control 50, which is connected to all magnetic bearings 26a, 26b, 26c, 26d, 26e, 26f, 26g of the right-hand guide section 1 6 viewed in the transport direction 11 is coupled with all the magnetic bearings 24a, 24b, 24c, 24d, 24e, 24f, 24g of the viewed in the transport direction 1 1 left guide portion 14.

The central controller 50 can selectively control individual magnetic bearings, in the present case, for example, the magnetic bearings 24a, 24d and the magnetic bearings 26a, 26d in order to make a retracting or extending operation of the carrier 30 with respect to said magnetic bearings 24a, 24d, 26a, 26d as trouble-free as possible. All magnetic bearings 24, 26 can be networked with each other via a data transmission device 43, which may be designed, for example, as a communication bus or data bus. The data transmission device 43 can furthermore be coupled to the individual drive units 1 8a, 1 8b, 1 8c, 1 8d as well as to the respective spatial coding sections 19a, 19b, 19c, 19d provided there. In this way, via the data transmission device 43 and by the coupling with the drive units 1 8a, 1 8b, 1 8c, 1 8d or by coupling with the drive 1 8 formed by the individual drive units a position information of the carrier 30 in the transport direction 1 1 are determined. By coupling with the drive 18, a transport speed of the carrier 30 can also be determined, which can be used for selective activation, in particular for the selective activation and deactivation of individual magnetic bearings 24a, 24d, 26a, 26d.

Instead of or in addition to the central controller 50, which can arbitrarily control the control loop 60, for example by coupling with the setpoint generator 68, a plurality of decentralized controls 51 may be provided which cooperate either in the same manner with the setpoint generator 68 or the example in the controller Engage 67 or, as indicated in Fig. 1, the output signal of the controller 67 for completely activating or deactivating or for attenuating the emanating from the electromagnet force 62 are formed. In the same way, the central controller 50 can also influence the output signals of the controller 67.

In the embodiment according to FIG. 3, the provision of separate detection devices on the individual magnetic bearings 24, 26, 28, 29 is not fundamentally necessary. The information required for the selective activation or deactivation of individual magnetic bearings, in particular the position of the carrier 30 in the transport direction (z) and the speed of the carrier 30 in the transport direction (z), can all be achieved by data linkage to the data transfer device 43, typically one Data bus determined and either the central controller 50 or more decentralized controllers 51 are provided.

Various embodiments of the detection device 40, 44, 46, 48 are shown in FIGS. 6 to 8, wherein each of the magnetic bearings 24a, 24b, 24c, 24d, 24e, 24f is equipped with at least two sensors. 6a to 8e, the electromagnet 62, the previously described distance sensor 61 and a supplementary position sensor 71 are shown by way of example for all FIGS. 6a to 8e. When magnetic bearing 24a, which, like all other magnetic bearing 24b, 24c, 24d, 24e, 24f, 24g provided with its own control 51 which is coupled on the one hand with the control loop 60 and on the other hand with the additional position sensor 71. The detection device 40 for determining the position of the carrier 30 in the right-facing transport direction z is formed by a single or multiple position sensors 71 of the magnetic bearings 24a, 24b, 24c, 24d, 24e, 24f, 24g.

A component shown in black or completely filled, electromagnet 62, position sensor 71 and distance sensor 61 of the magnetic bearing 24b in Fig. 6a symbolizes that the relevant component is fully activated, while an unfilled components represents a deactivated magnetic bearing or a sensor, which in the current situation no signal generated. A hatched component is between the activated and deactivated states, thus in an intermediate state. It can be seen from the sequence of FIGS. 6a to 6f that the carrier 30 is moved continuously from left to right in the transport direction (z).

The position sensor 71, which in the present case is designed as an edge or geometric boundary detector of the carrier, can only detect in the simplest configuration whether a carrier 30 is currently located below the respective magnetic bearing 24a, 24b, 24c, 24d, 24e, 24f, 24g , In the embodiment of the detection device 40 according to FIGS. 6a to 6f, all the position sensors 71 are arranged at a distance from the respective distance sensor 61 of the relevant magnetic bearing 24a, 24b, 24c, 24d, 24e, 24f, 24g, counter to the transport direction (z).

In this way, as illustrated in FIG. 6a, the position sensor 71 of the magnetic bearing 24f can already detect a front boundary 31 of the carrier 30 before the carrier 30 is even within the effective range of the magnetic bearing 24f. If the carrier 30, as shown in Fig. 6c, now in the range of action of the magnetic bearing 24 f, this can be selectively activated by the controller 50 or 51. A partially activated state of the electrical Magnets 62 of the magnetic bearing 24f is illustrated in Fig. 6c by hatching.

The respective magnetic bearing 24f is connected comparatively slowly and continuously with regard to its magnetic effect and according to the dynamics and the movement of the carrier 30 in the transport direction (z). In this way, a sudden interaction between the carrier 30 and the upstream magnetic bearing 24f can be avoided or at least largely suppressed. A similar scenario results in the following in FIG. 6d, namely when the boundary 32 in the transporting direction (z) passes by the position sensor 71 of the magnetic bearing 24b.

Although this rear region of the carrier 30 is still in the full range of action of the magnetic bearing 24b, it proves to be advantageous to avoid the interference magnetic bearing 24b early from the activated state (A) in the deactivated state (B), as in Fig. 6e shown, to convict. In Fig. 6d, in turn, an intermediate state of the respective electromagnet 62 is shown. 6f corresponds to FIG. 6a, with the entire procedure repeated with the magnetic bearings 24g and 24c lying adjacent in the direction of movement (z).

In the embodiment shown in FIGS. 7a to f, two position sensors 71 are arranged on each of the magnetic bearings 24a, 24b, 24c, 24d, 24e, 24f, 24g, which are each spaced from the distance sensor 61 in two opposite directions of movement. In the present case, the distance sensor 61, with respect to the direction of movement (z), is located approximately centrally between the two position sensors 71 provided on the edge of the magnetic bearing 24 in the direction of movement. The mode of action here is virtually identical to the embodiment described with reference to FIGS. 6a to 6f. The respective forward position sensor 71 of the magnetic bearings 24a, 24b, 24c, 24d, 24e, 24f, 24g here is only of secondary importance for the selective driving of individual magnetic bearings 24. The two-sided arrangement of two position sensors 71, however, allows the implementation of a similar control in both directions of movement, from left to right and from right to left.

Furthermore, by using a plurality of position sensors 71 per magnetic bearing 24, the speed of the carrier 30 can also be determined separately at each magnetic bearing 24.

The embodiment of a detection device 46 according to FIGS. 8a to 8e provides that each of the magnetic bearings 24a, 24b, 24c, 24d, 24e, 24f has two distance sensors 61 which are each capable of the distance, with respect to the effective direction of the respective electromagnet 62 between carrier 30 and magnetic bearing 24 or base 1 2 to determine.

In the sequence shown in the sequence of FIGS. 8a to 8e, the distance sensor 61 arranged in the transport direction (z) at the rear or opposite to the transport direction (z) at the magnetic bearing 24f in FIG. 8a acts as a position sensor for the mere detection of the position of the sensor Carrier 30 with respect to the transport direction (z), while the other, that is, the upstream in the transport direction he ahead distance sensor 61, which is not yet active in Fig. 8a at the magnetic bearing 24f, acts as the actual distance sensor for the control loop 60. In terms of control engineering, the at least one distance sensor can be arranged in the active center or as close as possible to the center of action of the electromagnet 62 of the respective magnetic bearing 24, 26, 28, 29, whereby a high degree of co-location of the sensor with the respective electromagnet can be achieved , Similarly as already explained in connection with FIG. 6c, after a detection of the carrier 30 by means of the distance sensor 61 of the magnetic bearing 24f already active in FIG. 8b, the relevant electromagnet 62 of the magnetic bearing 24f following the predetermined temporal function, are activated before it is fully activated in Fig. 8c. With complete activation is then responsible for the distance control and in the transport direction 1 1 front further distance sensor 61, as shown in Fig. 8c, active, so that a distance control by means of the control loop 60 is feasible.

In this embodiment, for example, to change the direction of the transport of the carrier 30, the function of the two distance sensors 61 of each magnetic bearing 24a, 24b, 24c, 24d, 24e, 24f are reversed.

In the embodiment according to FIG. 9, only a single distance sensor 61 is provided, which however functions equally as detection device 48. The distance sensor 61 of the magnetic bearing 24 shown here is universally usable both for determining the position of the carrier 30 in the transport direction (z) and for distance determination and distance control by means of the control loop 60.

While for the embodiments shown in Figs. 6a to 8e shown in Fig. 4 schematically illustrated carrier 30 is provided with two ferromagnetic and / or permanent magnetic bearing portions 34, 36, based on the transport direction (z) over the entire geometric extent of the carrier 30 in the transport direction (z), a modified carrier 30 is provided for the implementation of the embodiment according to FIGS. 9a to 9e, which also has ferromagnetic or permanent magnetic bearing sections 34, 36. However, those bearing portions 34, 36 do not protrude to the front or rear boundary 31, 32 of the carrier 30. Adjacent to the front and / or rear boundary 31, 32 of the carrier 30, a paramagnetic or non-ferromagnetic and non-permanent magnetic section 37 is provided in each case. The boundaries 35 of the ferromagnetic or permanent-magnetic bearing sections 34, 36 which are opposite in the direction of transport (z) are about the extent of the non-ferromagnetic and non-permanent magnetic portions 37 offset from the geometric boundaries 31, 32 of the carrier.

However, the distance sensor 61 can be designed to detect the geometry, that is to say the detection of the front and rear boundaries 31, 32 of the carrier, as illustrated in the configuration according to FIG. 9b by means of the magnetic bearing 24f. The position of the carrier 30 determined via the distance sensor 61 can hereby be used instantaneously for complete activation of the relevant magnetic bearing 24f. However, the complete activation of the magnetic bearing 24f has no or only slight effect on the carrier 30 due to the ferromagnetic or permanent magnetically shortened bearing sections 34, 36 of the carrier 30.

Only with progressive movement of the carrier 30 in the transport direction (z) does the ferromagnetic bearing section 34 become successively operatively connected to the magnetic bearing 24f. Due to the only spatial overlap and the successive sliding in of the ferromagnetic bearing portion 34 in the range of action of the already activated magnetic bearing 24f and equally also the ferromagnetic bearing portion 36 in the sphere of the correspondingly active magnetic bearing 26f takes the acting on the carrier 30 and the magnetic bearing 24f, 26f Outgoing force, about comparable to the function of time F to.

A corresponding scenario also results during extension and disengagement of, for example, the rear boundary 35 of the ferromagnetic bearing section 34 from the area of action of the magnetic bearing 24b, as shown in FIGS. 9c and 9d. By providing a non-ferromagnetic or non-permanent magnetic material in the otherwise geometrically, but identically to the ferromagnetic bearing sections 34, 36 ausgestalte- th section 37 of the magnetic bearing 24b in Fig. 9d still suggests that the carrier 30 in the area of action of the respective magnetic bearing 24 is located. In fact, however, the magnetic bearing 24b in the configuration according to FIG. 9b only has little or no influence on the carrier 30. If the distance signal is lost, as shown in FIG. 9e, a correspondingly counteracting regulation of the electromagnet 62 of the magnetic bearing 24b has no disturbing influence on the movement of the carrier 30th

By means of an embodiment of the transport device shown in FIG. 9, a further embodiment of the detection device 49 can also be implemented. The detection device 49 is advantageously coupled to a data transmission device 43 indicated in FIG. 3, via which the speed of the carrier 30 in the direction of transport 1 1 can be determined, for example. is continuously available. From the detection of e.g. a distance sensor 61 at a certain time t and in the knowledge of the speed, the detection means 49 can always calculate the instantaneous position of the carrier 30 relative to the individual magnetic bearings 24a, 24b, 24c, 24d, 24e, 24f, 24g. The detector 49 may be e.g. be integrated into the central controller 50.

Basically, it should be noted that a position detection in the transport direction 1 1 and / or a distance measurement in a plane (x, y) perpendicular to the transport direction 1 1 exclusively or in addition to the distance sensors 61 or position sensors 71 by means of a power consumption, or from the Current and voltage signals of one or more electromagnets 62 of one or more magnetic bearings 24, 26, 28, 29 can be provided.

In Fig. 1 0, only schematically a block diagram for carrying out the method for moving and / or positioning of objects 80 by means of the transport device 1 0 is shown. In a first step 100, the carrier 30 is moved by means of the drive 18 along the predetermined transport direction (z). Meanwhile, the position of the carrier 30 in step 1 02 is permanently determined by means of one or more detection devices 40, 42, 44, 46, 48. The determined position of the carrier with respect to the transport direction (z), optionally paired with a likewise determined speed of the carrier 30 can then be used in a subsequent step 1 04 for selectively driving selected magnetic bearings. The control loop of steps 102 and 104 is then run again.

The selective activation, in particular activation or deactivation of a selected magnetic bearing 24, 26, 28, 29, can take place, for example, by means of a time function Ft, as shown schematically in FIG. 11. The diagram according to FIG. 1 1 shows a linear function F between an electrical power consumption P of the relevant electromagnet 62 of a magnetic bearing 24, 26, 28, 29 as a function of the time (t) or of the current position of the carrier 30 in the transport direction (z). The slope of the time function Ft may vary depending on the determined or provided speed of the carrier 30. It is especially provided, e.g. If the speed of the carrier is known, the magnetic bearing 24, 26, 28, 29 can be actuated in accordance with the time function Ft as soon as it has been determined by means of a position sensor 71 that the carrier 30 comes within the effective range of the relevant magnetic bearing 24, 26, 28, 29 or soon in the Effective area reaches.

As an alternative to the time function, it is conceivable that the respective magnetic bearings 24, 26, 28,

29 correspond to a local function Fz to control. The local function Fz provides an association between the control signal for the respective electromagnet 62 as a function of the determined actual position of the carrier 30 relative to the respective magnetic bearing 24, 26, 28, 29.

In a deactivated state (D), the power consumption of the electromagnet 62 may be close to zero. For example, the retraction of a carrier

30 in the magnetic bearing 24, 26, 28, 29 detected in advance, the electric magnet 62, the following in Fig. 1 1 approximately linearly increasing function following, slowly over time in the activated state (A) can be transferred. A corresponding opposite control of the electromagnet 62 is at the output drive the carrier 30 from the sphere of action of the respective magnetic bearing 24, 26, 28, 29 feasible. In this case, it is particularly advantageous if the deactivated state (D) is achieved before a loss of the distance signal provided by the distance sensor 61.

LIST OF REFERENCE NUMBERS

transport device

transport direction

Base

guide section

drive

a, b, c, d drive unit

encoding

a, b, c, d coding sections

magnetic rail

magnetic bearings

carrier

limit

bearing section

limit

bearing section

section

bearing section

detector

Data communications equipment

detector

detector 49 detection device

50 control

51 control

60 control loop

61 distance sensor

62 electromagnet

63 core

64 coil

66 amplifiers

67 controllers

68 setpoint generator

71 position sensor

80 object

Claims

P a n t a n s p r e c h e

Transport device for moving and / or positioning objects, comprising: a base (12) extending along a transport direction (z), at which a plurality of actively controlled magnetic bearings (24a, 24b, 26a, 26) separated from one another in the transport direction (z) 26b, 28, 29) are arranged, one at the base (12) by means of at least some magnetic bearings (24a, 24b, 26a, 26b, 28, 29) contactlessly mounted and by means of at least one drive (1 8) in the transport direction (z) relative to the base (12) movable support (30) on which at least one object (80) can be arranged, at least one detection device (40, 42, 44, 46, 48, 49) for determining a position of the support (30) in the transport direction ( z) relative to the magnetic bearings (24a, 24b, 26a, 26b, 28, 29) and to the detection means (40, 42, 44, 46, 48, 49) coupled to the controller (50, 51) for selectively driving at least one with the carrier (30) in magnetic operative connection or within a vor Given time interval with the carrier (30) in operative connection passing magnetic bearing (24a, 24b, 26a, 26b, 28, 29) in dependence of the determined position of the carrier (30).

Transport device according to claim 1, wherein the controller (50, 51) is designed to have at least one magnetic bearing (24a, 24b, 26a, 26b, 28, 29) of a predetermined time function (Ft) or position function (Fz). following between an activated state (A) and a deactivated state (D) selectively.

Transport device according to one of the preceding claims, wherein the controller (50, 51) is adapted to at least one magnetic bearing (24a, 24b, 26a, 26b, 28, 29) continuously over a predetermined time interval from a deactivated state (D) in an activated State (A) to convert and / or vice versa, continuously from an activated state (A) to a deactivated state (D) to transfer.

Transport device according to one of the preceding claims, wherein the detection device (42, 49) is fed by a data transmission device (43) which determines the position of the carrier (30) in the transport direction (z) and / or the speed of movement of the carrier (30) Transport direction (z) provides.

Transport device according to one of the preceding claims, wherein the detection device (40, 42, 44, 46, 48, 49) for determining the speed of the carrier (30) is formed and the controller (50, 51) is adapted to at least one magnetic bearing ( 24a, 24b, 26a, 26b, 28, 29) as a function of the carrier speed.

Transport device according to one of the preceding claims, wherein a number of magnetic bearings (24a, 24b, 26a, 26b, 28, 29) each comprise an electromagnet (62) and a control loop (60) comprising a distance sensor (40) for non-contact support of the carrier (30 ) at the base (12).

Transport device according to one of the preceding claims, wherein the detection device (49) has at least one position sensor (71) or distance sensor (61) arranged on one of the magnetic bearings (24, 26, 28, 29). Transport device according to one of the preceding claims, wherein the detection means (40, 44, 46, 49) comprises a plurality of non-contact position sensors (71) which are arranged on the magnetic bearings (24a, 24b, 26a, 26b, 28, 29), and which Determining a position of the carrier (30) in the transport direction (z) relative to a respective magnetic bearing (24a, 24b, 26a, 26b, 28, 29) are formed.

Transport device according to one of the preceding claims 6 to

8, wherein on at least one of the magnetic bearings (24a, 24b, 26a, 26b, 28,

29) a distance sensor (61) and at least one position sensor (71) is arranged.

10. Transport device according to one of claims 7 to 9, wherein at least one of the magnetic bearings (24a, 24b, 26a, 26b, 28, 29) two position sensors (71) in the transport direction (z) are arranged spaced from each other and wherein the distance sensor (61 ) with respect to the transport direction (z) between the two position sensors (71) is arranged.

1 1. Transport device according to one of the preceding claims 6 to 10, wherein the distance sensor (61) of a magnetic bearing (24a, 24b, 26a, 26b, 28, 29) acts as a detection unit (48) and both for detecting a transport direction (z) in the front and / or or rearward geometric boundary (31, 32) of the carrier (30) and for determining a distance (d) between the carrier (30) and base (12) in a plane (x, y) perpendicular to the transport direction (z) of the carrier (30) is formed.

Transport device according to claim 1 1, wherein the support (30) in a immediately adjacent to a front and / or rear boundary (31, 32) in the course of transport of the carrier (30) in the Has effective range of the magnetic bearing (24a, 24b, 26a, 26b, 28, 29) reaching non-magnetic portion (37).

Transport device according to one of the preceding claims 6 to 1 1, wherein at least one in the transport direction (z) spaced-apart distance sensors (61) are arranged on at least one of the magnetic bearings (24a, 24b, 26a, 26b, 28, 29), of which at least one acts as a detection unit (46).

Method for moving and / or positioning objects by means of a transport device (10) according to one of the preceding claims, comprising the steps:

Moving the carrier (30) in the transport direction (z) along the base (12) by means of the drive (18),

Determining a position of the carrier (30) in the transport direction (z) relative to the magnetic bearings (24a, 24b, 26a, 26b, 28, 29) by means of a detection device (40, 42, 44, 46, 48), selectively driving at least one with The magnetic bearing (24a, 24b, 26a, 26b, 28, 29) which is in magnetically active connection with the carrier (30) or which is in operative connection with the carrier (30) within a predetermined time interval as a function of the determined position of the carrier (30).

A method according to claim 14, wherein the magnetic bearing (24a, 24b, 26a, 26b, 28, 29) in operative connection with the carrier (30) or in operative connection with the carrier (30) within a predetermined time interval has a predetermined time function (F ) is subsequently driven between an activated and deactivated state. A method according to claim 14 or 15, wherein at least one of the magnetic bearings (24a, 24b, 26a, 26b, 28, 29) is selectively driven to compensate for spacing variations between the carrier and the base during movement of the carrier (30) in the transport direction (z) ,

Method according to one of the preceding claims 14 to 16, wherein during the movement of the carrier (30) along the base (12) in each case at least one of the magnetic bearings (24a, 24b, 26a, 26b, 28, 29) is selectively driven, which the transport direction (z) is in operative connection with a front boundary (31) and / or with a rear boundary (32) of the carrier (30) or comes into operative connection within a predetermined time interval. 18. Computer program for moving and / or positioning objects by means of a transport device (10) according to one of the preceding claims 1 to 13 with:

Program means for moving the carrier (30) in the transport direction (z) along the base (12),

Program means for determining a position of the carrier (30) in the transport direction (z) relative to the magnetic bearings (24a, 24b, 24c, 24d, 24e, 24f, 26a, 26b, 26c, 26d, 26e, 26f), and with

Program means for selectively activating at least one magnetic bearing (24a, 24b, 26a, 26b, 28, 29) in operative operative connection with the carrier (30) in operative connection with the carrier (30) within a predetermined time interval as a function of the determined position of the magnetic bearing Carrier (30).