DE10361904A1 - Position and movement determination for an object being displaced over a surface, which is located by electrical and or magnetic measurements at a defined number of locations which are then weighted to determine its position - Google Patents

Abstract

Method for determining the position and movement path of an object (2) over a support surface (1) has the following steps: measurement of physical, especially electrical or magnetic values at predefined measurement locations on the surface with the values being measured in a time-resolved manner as the object moves towards, over or away from a measurement point. The measurements from several locations are compared and the position of an object determined as the wieghted center of the measurements. This center is then monitored over time to determine the movement path of an object. The invention also relates to a corresponding arrangement for carrying out the inventive method.

Description

The The invention relates to a method for determining the position and the movement for at least one object that has an area that is also curved can, is moved, as well as on an arrangement, to carry out this Method and, alternatively, to the movement of the article suitable is.

From the prior art methods and arrangements are known which make it possible to move one or more objects independently of one another on a surface. Such an arrangement is for example in DE 197 12 893 A1 described. There, an object is moved relative to a flat or slightly curved surface. It is an asynchronous multi-coordinate drive, with which it is possible with appropriate control, to move due to Lorentz forces the object at different speeds and in different directions over the surface.

Another arrangement, which is preferably suitable for transporting wafers over an area, is known as a "transport apparatus" US 6,160,338 described. Capacitive electrical currents are fed into the wafers, and a magnetic field acts on the areas of each wafer through which current flows, so that Lorentz forces are generated which are used as feed forces and thus bring about changes in the position of the wafers relative to a support surface.

at Often, such positions are desirable of moving objects to capture and, where appropriate, to observe the movement.

The Knowledge of the current position of a movable on a surface Object is, for example, a prerequisite for the drive device to be able to control that the Object of an actual position in a predetermined target position arrives. It is not only important that the actual position is exact to determine, but also the achievement of the target position exactly capture.

Becomes a camera with downstream image processing system used, from the images taken with the camera, the current positions of the object, so is a relatively high technical effort especially when the object with high Speed moves and therefore in rapid succession a lot of image information processed and evaluated.

In addition, position sensing systems require which work according to the aforementioned principle and in which the observation of the entire range of motion of the object should take place, relatively much Room over the item that is often not available or to solve others Tasks needed becomes.

This is for example in the arrangement for moving objects after DE 102 61 659.0-22 the case. Here is at least one item on a support surface displaceable, wherein the support surface in an oscillating motion will, while the vibration by means of electromagnetic transducer one or more of the objects temporally limited to be coupled to the support surface and thereby Movement energy is transferred from the support surface to the objects. To the position changes to monitor the objects to be able to is a camera over the bearing surface arranged, but with the aforementioned disadvantages.

Furthermore, it is off DE 198 55 685 A1 an inductive position measuring device is known in which the position determination based on the coupling between a transmitter winding, is fed to the energy, and at least two receiver windings is made. In this case, the coupling change is evaluated by magnetically conductive modulators, which are arranged along a coordinate, or the change in the position of the turns to each other. The disadvantage here is that this arrangement is suitable for determining positions only along a coordinate.

With DE 198 23 059 C2 discloses a method and apparatus for detecting the spatial location of a body having asymmetric magnetic field distribution. In this case, the position of an object is determined from the signals emitted by a plurality of electromagnetic signals arranged in the form of a matrix, whereby an asymmetrical magnetic field distribution is assumed and the object must functionally cover several of these electromagnetic transducers. Thus, this arrangement is only suitable for objects that are large in relation to the electromagnetic transducers, or for a matrix that consists of many individual electromagnetic transducers, which disadvantageously requires a high material cost.

Another position detection system after DE 695 11 452 T2 based on the fact that magnetic fields are detected by means of magnetoresistive lines, for example, emanating from a moving permanent magnet. This resistance changes are evaluated and in information about the spatial field distribution or the Position of the permanent magnet implemented. Such a system is disadvantageously feasible only over a relatively small range of motion.

From Based on this prior art, the invention has the object based, a method or an arrangement of the aforementioned To develop the kind so that with relatively low technical Expenditure a sufficiently accurate recording of the positions of one or several over one area moving objects possible is and also qualitative statements about movements, in particular covered Trajectories, speeds and trajectories are gained can.

• – Messen der durch einen Gegenstand beeinflußten physikalischen, insbesondere elektrischen und/oder magnetischen Größen an vorgegebenen Meßorten einer Fläche, über die der Gegenstand bewegt wird, wobei die beim Annähern eines Gegenstandes an einen Meßort, beim Entfernen eines Gegenstandes von einem Meßort und bei relativ zu einem Meßort ruhendem Gegenstand erhaltenen Meßwerte zeitaufgelöst in Zuordnung zu den Meßorten erfaßt werden,
• – Vergleichen der von den einzelnen Meßorten erfaßten Meßwerte miteinander und
• – Bestimmen des Schwerpunktes der Meßwerte aus diesem Vergleich als Maß für eine aktuelle Position des Gegenstandes, oder
• – Bestimmen und Verfolgen des Schwerpunktes der Meßwerte anhand der Meßzeiten als Maß für die Positionsänderungen des Gegenstandes während seiner Bewegung.

The object of the invention is achieved by the following method steps:

• - Measuring the affected by an object physical, in particular electrical and / or magnetic magnitudes at predetermined measuring locations of a surface over which the object is moved, wherein when approaching an object to a measuring location, when removing an object from a measuring location and at relative to measured values obtained at a measuring location of a stationary object are recorded time-resolved in association with the measuring locations,
• Comparing the measured values recorded by the individual measuring locations with one another and
• Determining the center of gravity of the measured values from this comparison as a measure of a current position of the object, or
• - Determining and tracking the center of gravity of the measured values based on the measurement times as a measure of the changes in position of the object during its movement.

Of the Focus of the measured values defines the location where the measurements are more affected by an object than the rest Places. Consequently, the center of gravity of these measurements is equivalent to the position of this item on the surface.

With determining the center of gravity of the measured values associated with a measuring time are, the current position of the object in question is to this measuring time certainly. If the object moves, it is in pursuit of himself dependent on of which time-changing Location of the center of gravity based on the measuring times of the movement this subject comprehensible.

• – Bestimmen der Wegstrecken, die der Gegenstand zwischen jeweils zwei Positionen zurückgelegt hat,
• – Bestimmen der Bewegungsbahn des Gegenstandes anhand der über die Zeit ermittelten Positionen, und/oder
• – Bestimmen der Geschwindigkeit des Gegenstandes, indem die zurückgelegten Wegstrecken zu den Meßzeiten in Beziehung gesetzt werden.

In a corresponding development of the subject invention, additional process steps may follow as follows:

• Determining the distances covered by the object between each two positions,
• Determining the trajectory of the object on the basis of the positions determined over time, and / or
• Determining the speed of the object by relating the distances traveled to the measurement times.

The inventive method is for one or even for several items applicable, over the area to be moved. If several items are present, a corresponding number determined by priorities, and depending on the positions of all objects determined separately. Especially if the position change of an object is the time span between the individual measurements and the speed of movement of the object so matched to each other, that with the change of location the center of gravity with a measuring circuit can be tracked. With the focus of the measured values can be the position of an object even with high accuracy determine if it is not located directly at a measuring location, as further below explained becomes.

In a preferred embodiment of the method according to the invention Two modes of operation are provided, being in a first, hereinafter referred to as passively designated operating mode at the predetermined measuring locations the of one or more objects affected readings detected and in a second, active mode of operation at predetermined Place energy on the objects becomes. The latter is described for example in DE 102 61 659.0-22. The energy transfer takes place for the purpose of imparting motion impulses to the objects and to put them on the move and, if necessary, in the prescribed manner To keep directions in motion.

He follows switching between these two modes of operation alternately for a short time, so can things be moved, and during the Can move using the method steps according to the invention their determined or tracked respective positions.

Especially advantageous is the energy transfer on the objects in each case at the same places where the registration of the readings he follows.

It is possible, but not required, for the article to rest on the surface. The article may be slidably in direct contact, or for example by a sliding layer, such as a thin layer of air, to be separated from the surface.

• – eine Auflagefläche für den Gegenstand, die im wesentlichen in der von den Koordinaten X, Y aufgespannten Ebene liegt,
• – eine Vielzahl von elektromagnetischen Wandlern, die parallel zur Auflagefläche nebeneinander angeordnet sind und von denen jeder einen Meßort O_x,y auf der Auflagefläche definiert, und mit denen durch den Gegenstand beeinflußte physikalische, insbesondere elektrische und/oder magnetische Werte gemessen werden,
• – eine Meßschaltung, die mit den elektromagnetischen Wandlern in Verbindung steht und dabei in zeitlicher Folge die Meßwerte erfaßt, die jeweils beim Annähern eines Gegenstandes, beim Entfernen eines Gegenstandes und bei relativ zu den elektromagnetischen Wandlern ruhendem Gegenstand gemessen werden,
• – eine Auswerteschaltung, die mit der Meßschaltung verbunden ist und in der die Meßwerte zeitaufgelöst den Meßorten O_x,y zugeordnet sowie zur Ermittlung des Meßwertschwerpunktes miteinander verknüpft werden zwecks – Bestimmung der Positionen P_x,y für einen oder mehrere Gegenstände, – Bestimmung der Wegstrecke, die ein Gegenstand zwischen zwei Meßzeiten bzw. zwischen zwei Positionen P_x,y zurückgelegt hat, – Bestimmung der Geschwindigkeit eines Gegenstandes, indem die Positionen P_x,y zu den zurückgelegten Wegstrecken in Beziehung gesetzt werden, und/oder – Bestimmung der Bewegungsbahn eines Gegenstandes anhand der den verschiedenen Meßzeiten zugeordneten Positionen P_x,y während seiner Bewegung über die Auflagefläche sowie
• – eine Informationsausgabe zur Darstellung der Ergebnisse.

The object of the invention is further achieved with an arrangement for determining the positions and the sequence of movements for at least one object moved in the coordinates X, Y, comprising

• A support surface for the object, which lies substantially in the plane defined by the coordinates X, Y,
• A plurality of electromagnetic transducers arranged side by side parallel to the support surface and each of which defines a measuring location O _{x, y} on the support surface and with which physical, in particular electrical and / or magnetic values influenced by the object are measured,
• A measuring circuit which is in communication with the electromagnetic transducers and in chronological order detects the measured values which are respectively measured during the approach of an object, during the removal of an object and when the object is at rest relative to the electromagnetic transducers,
• An evaluation circuit which is connected to the measuring circuit and in which the measured values are assigned to the measuring locations O _{x, y in a} time-resolved manner and linked together to determine the measured value centroid for the purpose of determining the positions P _{x, y} for one or more objects, determining the distance measuring an object between two measuring times or between two positions P _{x, y} , determining the speed of an object by relating the positions P _{x, y} to the distances covered, and / or determining the trajectory of a path Object on the basis of the different measuring times associated positions P _{x, y} during its movement over the support surface and
• - an information release to present the results.

With Such an arrangement makes it possible for the further specified above method steps for position determination perform, as explained below becomes.

Advantageous is the bearing surface as the sum of the outer surfaces next to each other arranged and firmly interconnected electromagnetic Transducer formed. The distances between the electromagnetic transducers and the objects made small and thus kept energy losses low.

Preferably, the electromagnetic transducers are arranged in an array of rows i and columns j, wherein the rows i can be aligned parallel to the coordinate direction X and the columns j parallel to the coordinate direction Y. Thus, each of the electromagnetic transducers is located at a measuring location O _{x, y of} the support surface defined by the coordinates X and Y.

The objects can be formed magnetically conductive, wherein when approaching or removing of an object the change the inductance the electromagnetic transducer is measured or the objects are electrically conductive, so that when approaching or removing an object the induction of eddy currents measured in the electromagnetic transducers. Of course you can too both effects are used for evaluation.

Preferably consist the electromagnetic transducer essentially from a Coil and a cup-shaped Yoke made of magnetically conductive Material, for example, made of steel or ferrite, is made. there can the outer surfaces of the Yokes the bearing surface for the To form an object.

to Determination of the measured values voltage pulses are applied to the coils, and the measuring circuit is designed to detect the time for each by a voltage pulse current increase in a coil until a reference value is reached, or to detect the current amplitude due to a voltage pulse is reached within a predetermined period of time.

alternative this can be done in the measuring circuit bridge circuit intended for Induktivitätsbestimmung be or can be Circuit arrangements for determining the resonant frequency of the coils in cooperation with capacitors, for measuring the capacitance or for Measurement of voltage rise or voltage drop present be.

The evaluation circuit is equipped with a calculation algorithm which is able to determine the center of gravity of the measured values obtained from adjacent electromagnetic transducers and thus the current position P _{x, y of} an object. In special cases, the position P _{x, y of} an object can coincide with a measuring location O _{x, y} . As a rule, however, the position P _{x, y will} correspond to the center of gravity of the measured values between a plurality of measuring locations O _{x, y} .

An advantageous embodiment of the arrangement according to the invention is that the coils of the electromagnetic transducer arranged on a circuit board and the leads for the coils via vias connected to individual conductive levels of the circuit board are. The yokes can be advantageously formed in the form of plates of the magnetically conductive material and disposed directly under the coils or in an insulating layer of the circuit board carrying the coils.

The object of the invention is also achieved with an arrangement of the type described, in which at predetermined measuring locations O _{x, y of} the bearing surface electromagnetic transducers are positioned, which can be operated alternately passively for Meßwertaufnahme or active for energy transfer to one or more of the objects, said in the passive operating mode, the position determination for the objects on the support surface is made and in the active operating mode, motion impulses are transmitted from the support surface, which oscillates, for example, at an angular frequency, to the objects.

Of the ongoing Switching between two modes of operation is especially beneficial then possible if the electromagnetic transducer, as already mentioned, essentially of one Coil and a cup-shaped Yoke exist. On the one hand can with the passively operated and thereby acting as inductors electromagnetic Converters the measured values required for position determination are detected, on the other hand, in active operation, in which the coils of the electromagnetic Transducer can be charged with a current of predetermined strength, kinetic energy from the support surface transfer the objects, like this in detail in DE 102 61 659.0-22 is described.

The activated in the second mode of operation electromagnetic transducer in cooperation with an object located in its area of action produce a normal force F _N , through which the object is coupled to the support surface.

This normal force F _N can be so large that no relative movement takes place between the oscillating support surface and the object, so that the movement of the support surface is transferred to the object, until such time as the deactivation of the relevant electromagnetic transducer causes and as a result the effect of the normal force F _{N is} canceled or reduced.

Of the thereby transferred Movement impulse has a direction which is determined by the course of movement or the directions of movement of the support surface during the activation time the electromagnetic transducer is determined, and the object becomes accelerated in a corresponding direction.

This Process of coupling and transmission of motion impulses occurs cyclically by controlling the electromagnetic Transducers in whose sphere an object is located. In the breaks between two actuators for transmission of motion The electromagnetic transducers are not active, but they stand as a transducer for recording the measured values in connection with the position determination of the objects for Available.

It is also possible to use the switching on and off of the current connected to the control of the electromagnetic transducer for the purpose of detecting the measured values. If the arrangement is used in this way, it is particularly advantageous to detect the measured values as already stated on the basis of the time for the current increase in a coil caused in each case by a voltage pulse until a reference value is reached. Because to generate the normal forces F _N , it is necessary to periodically conduct currents through the coils of the electromagnetic transducer, so that they can be used simultaneously to determine the measured values. Alternatively, however, it is also possible, for example, to detect the measured values with the aid of a bridge circuit in the time periods in which no current is currently flowing to generate normal forces F or this current is constant.

Of the Change between the two operating modes is with a switching device achievable which the electromagnetic converter in the passive mode of operation with the measuring circuit and connects in the active operating mode with a drive device, as it is known from DE 102 61 659.0-22.

The Invention will be explained in more detail with reference to embodiments. In the corresponding Drawings show

1 a schematic diagram of the arrangement with in rows i and columns j matrix-shaped electromagnetic converters and two objects which are arranged to be freely movable over the electromagnetic transducers,

2 an enlarged detail A shown 1 showing the design of the electromagnetic transducer and its connection to a measuring circuit,

3 an example of a measuring circuit associated with each of the electromagnetic transducers,

4 the dependence of the measured values emitted by an electromagnetic transducer on a nearby object,

5 the schematic representation of a sensor consisting of a coil and a yoke, and an overlying article ( 5a ) and the representation of the measured values emitted by the electromagnetic transducer and influenced by the object ( 5b )

6 the top view of a section of the support surface with matrix-shaped arranged electromagnetic transducers and a resting on the electromagnetic transducers object ( 6a ) and examples of the stored in the memory of a measuring circuit, influenced by the subject measured values ( 6b )

7 a representation for determining the position P _{x, y of} an object which is in the vicinity of a plurality of adjacent electromagnetic transducer,

8th an advantageous embodiment of the support surface with special design of the electromagnetic transducer on a circuit board,

9 the schematic representation of an arrangement which is suitable both for transmitting movement impulses from the support surface to one or more objects and for determining the positions of these objects,

10 the possibility of determining the measured values at a bearing surface oscillating at an angular frequency in different phases of the oscillation.

1 shows a support surface 1 which extends in the coordinates X and Y and on this example, two objects 2 rest. Things 2 are on the support surface 1 freely movable and in principle variable in number. The number depends only on the purpose of the arrangement and the size of the objects 2 in relation to the extent of the support surface 1 ,

The bearing surface 1 is as the surface of a composite of a variety of electromagnetic transducers 3 formed by means of a potting compound 4 , For example, an oxide resin, held together.

The electromagnetic transducer 3 are arranged in an array of lines i = a, b, c ... and columns j = a, b, c .... This defines each of the electromagnetic transducers 3 a location O _{x, y} on the support surface 1 each given by the intersection of a row i and a column j.

In 2 is a detail A out 1 shown enlarged. It can be seen that the electromagnetic transducer 3 essentially from a coil 5 and a topffömigen, the coil 5 receiving yoke 6 consist. The yoke 6 is made of a magnetically conductive material, preferably made of steel or ferrite. From the windings of the coils 5 are connecting cables 7 led out.

It is expressly understood that the illustrated embodiment of the electromagnetic transducer 3 is merely exemplary. For positioning any other type of electromagnetic transducer can be used 3 used, which is suitable, by the objects 2 affected physical, in particular electrical and / or magnetic values and their temporal changes to detect.

The electromagnetic transducer 3 are over the leads 7 with a measuring circuit 8th connected in 2 also symbolically indicated.

In 3 is an example of the measured value acquisition with an electromagnetic transducer 3 shown. The circuit arrangement used and shown here consists essentially of a command generator 9 and a comparator 10 and is in the measuring circuit 8th (see. 2 ) integrated.

With the help of the commander 9 the time is determined at which a switch 11 closed briefly and thus the electromagnetic transducer 3 on the connection lines 7 is connected to the voltage source + U. As a switch 11 Advantageously, transistors are used. With the closing of the switch 11 begins the rise of a current i in the coil 5 ,

The current increase is with an in 3 symbolically indicated current measuring device 12 measured, which may be formed for example as a measuring resistor, as a Hall element or as a magnetoresistive resistor.

The comparator 10 determines the instant at which the current has reached a predetermined reference value I _ref and, upon reaching this reference value I _ref , issues a signal to the commander 9 which measures and registers the time span t _m from the start of switching on until reaching the reference value i _ref .

The time span t _m is of influencing the electromagnetic transducer 3 from the object 2 for which the position P _{x, y is} to be determined, and in turn of the spatial distance between the object 2 and the relevant electromagnetic transducer 3 , The time span t _m is therefore an equivalent for this distance or for the geometric distance of the object 2 from the electromagnetic transducer 3 at the time of measurement.

Is the object 2 magnetically conductive, so the inductance of the coil increases 5 the relevant electromagnetic transducer 3 with the approach of the object 2 , which results in a slower current increase or a larger time span t _m .

If the object is electrically conductive, become in the subject 2 electrical voltages are induced and electric currents flow, due to the energy flow between the electromagnetic transducer 3 and an approaching object 2 as well as a slower increase of the current in the coil 5 entails.

The both effects due to the magnetic as well as the electrical Conductivity, can both each for be used as well as together for evaluation.

The of an electromagnetic transducer 3 depending on a nearby object 2 recorded measured values are in 4 shown. To recognize the principal course of the current increase after closing the switch 11 , There is no object 2 Nearby, so does the current in this electromagnetic transducer 3 increase within a relatively small period of time t ₀ up to a reference value I _ref . Is the electromagnetic transducer 3 but from a nearby object 2 influenced, the current changes more slowly and only after a period of time t _{m reaches} the reference value I _ref . The current increases after an e-function. In 4 However, the increase is shown in a simplistic linear manner.

As an alternative to evaluating the times for the current increase, the times for the fall of the current after opening the switch can also 11 it can also be evaluated on the approach or removal of an object 2 with respect to the relevant electromagnetic transducer 3 be inferred.

The dependence of the time interval t _m on a current position P _{x, y of} the object 2 in the coordinate direction X will be explained below 5 explained. This shows 5a an electromagnetic transducer 3 with the coil 5 and the yoke 6 and an item above it 2 , The distance between the drawn here electromagnetic transducer 3 and the object 2 be equal to the distance Δx between the axis 13 and the axis 14 , where the axis 13 centric to an example circular shaped object 2 lies and with the bearing surface 1 includes at least about a right angle, and the axis 14 centric to the example circular running coil 5 is aligned and also with the support surface 1 at least about a right angle. The object 2 and the coil 5 can be seen here in cross-section.

In such an embodiment of the arrangement according to the invention results in a concentric distribution of the measured values with respect to the X, Y plane, in particular in the form of the difference of the time periods t _m and t ₀ . By way of illustration is in 5b the time interval t _m over the coordinates X, Y removed, in which case the coordinate X lies in the plane of the drawing.

6 shows a section of the support surface 1 with nine in rows i = a, b, c and columns j = a, b, c arranged in a matrix electromagnetic transducer 3 and one on the support surface 1 resting object 2 , The bearing surface 1 lies here in the drawing plane. Each of these electromagnetic transducers 3 defined with the intersection of its axis 14 with the support surface 1 a measuring location O _{x, y} on the support surface 1 (see. 5a ).

The ones of these electromagnetic transducers 3 at the marked position P _{x, y of} the object 2 obtained measured values are in 6b entered. These measurement values are assigned to the respective measuring location O _{x, y} , which is determined by the corresponding electromagnetic transducer 3 is defined. In this respect, the measured values can also be assigned to the lines i = a, b, c and the columns j = a, b, c and indicated in the form of the matrix shown, the measured values corresponding to the rise times of the currents measured in milliseconds, relative to the respective one electromagnetic transducer 3 ,

These measured values are taken from the measuring circuit 8th registered and saved. The measuring circuit 8th is connected to an evaluation device, whose operation is described below with reference to 7 is explained. For the sake of clarity, is in 7 the determination of the position P _{x, y of} the object 2 only shown in relation to the X direction.

First of all, such an evaluation device determines the highest measured value m ₁ = m _bb (x _G ) with x _G of the object 2 position to be determined in the direction of the coordinate X, the example of the electromagnetic transducer 3 has been recorded at the position i = b, j = b and (in the coordinate direction X shown here) should correspond to the measured value m ₁ = m _bb . From this, the evaluation device draws the logical conclusion that the object 2 near the measuring site with the coordinate x ₁ = x _bb is determined by this electromagnetic transducer 3 is defined, ie the distance Δx between the axis 13 of the object 2 and the axis 14 of the electromagnetic transducer 3 at this measuring location with i = b and j = b is less than the distance between the axis 13 of the object 2 and, for example, the axes through the measuring locations with the X-coordinates x _ba and x _bc passing through adjacent electromagnetic transducers 3 are defined.

Thus, the position P _{x, y of} the object 2 in the X-coordinates first roughly to X ₁ = x _bb determined. This rough position determination is sufficient for some conceivable applications of the arrangement according to the invention. In general, however, a greater accuracy is required, which can be achieved as follows.

For a more precise position determination, the second largest measured value in both coordinate directions X is determined 7 the value m ₂ = m _bc (x _G ).

In a next step of the evaluation, linear interpolation determines the exact position of the object 2 for the X-coordinate determined by:

Where s is the distance between the axes 13 two adjacent electromagnetic transducer and vz for the sign "plus" at x ₁ <x ₂ and "minus" at x ₁ > x ₂ .

The amount s is here the distance between two electromagnetic transducers 3 , where in turn each measuring location O _{x, y is} defined by the intersection of the axis 14 an electromagnetic transducer 3 with the support surface 1 ,

Thus, the position P _{x, y of} the object 2 on the support surface 1 intended for many other applications with sufficient accuracy.

An even more accurate position determination is possible by further interpolation by the dependence of the measured values m _x of the position P _{x, y of} the object 2 , as in 5 represented, determined and the interpolation is based. For each measured value m _x it is determined how large the distance of the object 2 from the nearest electromagnetic transducers 3 is. So can from the measured values m _x for the electromagnetic transducer 3 with the highest measurement results in connection with the measurement results of the adjacent electromagnetic transducer 3 by averaging the center of gravity of the measured values and thus the position P _{x, y of} the object 2 be determined with very high accuracy.

For example, more than three measured values m _x can be included in the interpolation, which is particularly useful when the object 2 in terms of its areal extent is greater than the electromagnetic transducer 3 ,

This also applies in a figurative sense to the determination of the distances in the coordinate Y or for the acquisition of the measured values m _y .

8th shows an advantageous embodiment of the support surface 1 with special training of electromagnetic converters 3 and the connection lines 7 , In this regard, in 8a the electromagnetic transducer 3 in a plan view and in 8b in an enlarged cross section through one of the electromagnetic transducer 3 shown.

It is provided, the electromagnetic transducer 3 on top 15 a multi-level circuit board 16 applied. For example, the top is 15 on one of two insulation layers 17 available, between which tracks 18 are enclosed in two separate levels. Here are the leads 7 which the coils 5 and the tracks 18 connect to each other, made by means of vias.

In this way, all electromagnetic transducers 3 be connected separately and evaluated individually with regard to their measurement results. A reduced amount of wiring is achievable when the electromagnetic transducer 3 be operated with a common ground line. The connections 7 For example, they can also lead out over several levels and with the measuring circuit 8th get connected.

The yokes 6 are advantageously designed so that immediately below the respectively associated coil 5 and one the coil 5 carrying insulating layer 17 one or more separate plates made of steel or ferrite are arranged (not shown in the drawing).

Furthermore, on the spool 7 a protective layer may be applied which separates the coil from an overlying object.

Be the electromagnetic transducers 3 formed in the manner described here by way of example, ie essentially of a coil 5 and a cup-shaped, the coil 5 receiving yoke 6 consisting, so they can be used not only for data acquisition, but also to kinetic energy of a example oscillating with an angular frequency bearing surface 1 to the subject 2 transferred to.

Thus, in a particular embodiment, the principle in 9 is shown, the invention both for determining the positions of an object 2 as well as for the transmission of kinetic energy to the objects 2 be used. By means of the switching device 19 by a clock 20 is controlled, it can be switched back and forth between the two modes of operation, so that the electromagnetic transducer 3 in temporal change with the measuring circuit 8th or with a drive circuit 21 are connected.

The operation of the drive circuit 21 and the transmission of kinetic energy takes place in the manner described in detail in DE 1 02 61 659.0-22. Therefore, the mode of action in the transmission of kinetic energy should be reproduced here only briefly summarized.

When controlling one or more of the actively operated electromagnetic transducer 3 , in whose sphere, for example, an object 2 is a normal force F _{N is} generated, through which the object 2 to the vibrating bearing surface 1 is coupled. The magnitude of the normal force F _N can be set so that no relative movement between the object 2 and the oscillating contact surface 1 takes place and thereby the object 2 non-positively to the support surface 1 is coupled.

In this case, the oscillating motion of the bearing surface 1 on the object 2 transferred, and that until the deactivation of the relevant electromagnetic transducer 3 takes place or the effect of the normal force F _{N is} canceled or reduced.

This process of coupling and transmitting motion pulses may occur with each period of vibration of the bearing surface 1 be repeated. The object 2 is thereby increasingly accelerated in the desired direction of movement.

Furthermore, it is like based on 10 indicated possible to make the measurement in different phases of motion during the circular motion, for example at a rotation angle of γ = 0 °, 90 °, 180 ° or 270 °, and to use the different measured values to be determined m _x and m _y for averaging.

When the support surface 1 circular with a radius e moves while the object 2 its position P _{x, y is} maintained by the measuring circuit 8th recorded in which phase the measurement takes place to detect the current position P _{x, y} , the relevant electromagnetic transducer 3 from which the measurement results have been taken on the circular path.

The differences of the measured values in directions of the coordinates X or Y Δm _x = m ₀ -m ₁₈₀ and Δm _y = m ₉₀ -m ₂₇₀ are a measure of the increase of the intensity curves m (x) and m (y). The indices correspond to the angle in degrees at which these values are determined.

In particular, it is possible with high accuracy to determine whether the subject in question 2 just above one of the electromagnetic transducers 3 located. In this case, the aforementioned differences Δm _x and Δm _{y must be} equal to zero.

Are the position P _{x, y} for several objects 2 to determine, the above-described procedure on several groups of adjacent electromagnetic transducer 3 be applied. For each of these groups and thus for each of these items 2 the position determinations must be made separately.

1

bearing surface

2

objects

3

electromagnetic converter

4

sealing compound

5

Kitchen sink

6

yoke

7

power requirements

8th

measuring circuit

9

commander

10

comparator

11

switch

12

current measurement

13 14

axes

15

top

16

Multi-level printed circuit board

17

insulation layers

18

conductor tracks

19

switchover

20

clock

21

drive circuit

Claims (15)

Method for determining the position and the course of motion for an object ( 2 ), which is moved over a surface, comprising the following method steps: measuring the by an object ( 2 ) influenced physical, in particular electrical and / or magnetic quantities at predetermined measuring locations of the surface, wherein the approaching of an object ( 2 ) to a measuring location when removing an object ( 2 ) from a measuring location and at an object resting relative to the measuring locations ( 2 ), the measured values obtained from the individual measuring locations are compared with one another, and the center of gravity of the measured values from this comparison is determined as a measure of an instantaneous position of the object. 2 ) on the surface or - determining and tracking the center of gravity of the measured values on the basis of the measuring times as a measure of the changes in position of the object ( 2 ) while moving across the surface. Method according to Claim 1, characterized by the further method steps: determining the distances which the object ( 2 ) has traveled between each two positions, - determining the trajectory of the object ( 2 ) over the surface by means of the positions, and / or - determining the speed of the object ( 2 ) by relating the positions to the measurement times. Method according to claim 1 or 2, characterized in that the movement of the object ( 2 ) by transmitting motion impulses from the surface to the object ( 2 ) and, after the transmission of one or more movement impulses, a determination of the position of the object ( 2 ) is made. A method according to claim 3, characterized in that the transmission of the movement impulses takes place by the surface on which the objects are moved being set in motion itself and temporary-acting normal forces F _{N are} generated, by which the object ( 2 ) is temporarily coupled to the surface. Arrangement for carrying out the method according to claims 1 to 4, in particular for determining the position and the course of movement for an object ( 2 ), which is movable in the coordinates X, Y, comprising - a bearing surface ( 1 ) for the object ( 2 ), which lies substantially in the plane spanned by the coordinates X, Y, - a plurality of parallel to the bearing surface ( 1 ) arranged side by side, each one measuring location O _{x, y} defining electromagnetic transducers ( 3 ), by which the object ( 2 ) are measured physical, in particular electrical and / or magnetic variables are measured, - a measuring circuit ( 8th ) connected to the electromagnetic transducers ( 3 ) and in a sequential order detects the quantities which, as the object approaches ( 2 ) to an electromagnetic transducer ( 3 ), when removing the object ( 2 ) of an electromagnetic transducer ( 3 ) and / or relative to an electromagnetic transducer ( 3 ) stationary object ( 2 ), - an evaluation circuit connected to the measuring circuit ( 8th ) and in linking the measured values with one another - the instantaneous position P _{x, y of} the object ( 2 ) relative to the locations O _{x, y} , - the distance covered by a position change, - the speed of the object ( 2 ) during a change between two positions P _{x, y} and / or - the trajectory of the object ( 2 ) over the bearing surface ( 1 ) and passed on to an informational publication. Arrangement according to claim 2, characterized in that the bearing surface ( 1 ) by the sum of outer surfaces of juxtaposed and firmly interconnected electromagnetic transducers ( 3 ) is formed. Arrangement according to Claim 5 or 6, characterized in that the electromagnetic transducers ( 3 ) are arranged in an array of rows i and columns j, the rows i being aligned parallel to the coordinate direction X and the columns j being aligned parallel to the coordinate direction Y. Arrangement according to one of claims 5 to 7, characterized in that the objects are formed magnetically conductive and when approaching or removing an object ( 2 ) the change of the inductance of an electromagnetic transducer ( 3 ) is measured. Arrangement according to one of claims 5 to 7, characterized in that the objects are electrically conductive and when approaching or removing an object ( 2 ) the induction of eddy currents in the electromagnetic transducers ( 3 ) is measured. Arrangement according to one of Claims 5 to 9, characterized in that the evaluation circuit has a computation algorithm which is suitable for those of a plurality of adjacent electromagnetic transducers ( 3 ) obtained the measured value centroid as the equivalent of the current position P _{x, y of} an object ( 2 ) certainly. Arrangement according to one of Claims 5 to 10, characterized in that the electromagnetic transducers ( 3 ) essentially from a coil ( 5 ) and a cup-shaped yoke ( 6 ), the yoke ( 6 ) is made of a magnetically conductive material, preferably steel or ferrite. Arrangement according to claim 11, characterized in that the application of voltage pulses to the coils ( 5 ) is provided and the measuring circuit ( 8th ) is designed to determine the time t _m required for a current increase until a reference value I _{ref of} the current is reached. Arrangement according to one of Claims 11 or 12, characterized in that the electromagnetic transducers ( 3 ) on the top ( 15 ) of a printed circuit board ( 16 ) are applied, wherein the top ( 15 ) on one of at least two insulating layers ( 17 ) is available between the insulating layers ( 17 ) Conductor tracks ( 18 ) are enclosed in separate planes and the connecting lines ( 7 ), which the coils ( 5 ) and the tracks ( 18 ) connect together, are designed as vias. Arrangement according to claim 13, characterized in that the yokes ( 6 ) in the form of one or more plates of the magnetically conductive material immediately under the respective associated coil ( 5 ) and / or one the coil ( 5 ) carrying insulating layer ( 17 ) are arranged. Arrangement according to claims 5 to 14, further comprising - one with the bearing surface ( 1 ) coupled drive means for generating a swinging movement of the support surface ( 1 ) with constantly changing, recurring directional components in the coordinates X, Y and / or φ, - a drive device ( 21 ) for the application of electromagnetic converters ( 3 ) with a current of predetermined intensity during an activation time t _A , whereby during the activation time t ₀ a normal force F _N on an object ( 2 ), this object ( 2 ) non-positively to the support surface ( 1 ) coupled while a motion impulse on the object ( 2 ), and - a switching device ( 19 ), which the electromagnetic converters ( 3 ) alternately with the measuring circuit ( 8th ) and with the drive circuit ( 21 ) connects.